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Six-Side Molded Panel-Level Chip Scale Package with Multiple Diced Wafers 六面模压面板级芯片规模封装与多片晶圆
Q4 Engineering Pub Date : 2020-09-01 DOI: 10.4071/2380-4505-2020.1.000057
J. Lau, C. Ko, Tzvy-Jang Tseng, C. Peng, Kai-Ming Yang, T. Xia, P. Lin, E. Lin, Leo Chang, H. Liu, Curry Lin, D. Cheng, Winnie Lu
In this study, the design, materials, process, assembly, and reliability of a 6-side molded panel-level chip scale package (PLCSP) are presented. Emphasis is placed on the fabrication of the RDLs (redistribution layers) of the PLCSP on a large temporary panel with multiple device wafers. Since all the printed circuited board (PCB) panels are in rectangular shape, some of the device wafers are diced into two or more pieces so the panel is fully utilized. Thus, it is very high throughput. Since all the processes/equipment are PCB process/equipment (not semiconductor process/equipment), it is a very low cost process. After the fabrication of RDLs, the wafers from the PCB panel are debonded. It is followed by solder ball mounting and fabricating the 6-side molded PLCSP from the original device wafers with RDLs. The drop test and the results including failure analysis of the PLCSP are presented. Thermal cycling of the 6-side molded PLCSP PCB assembly is performed by a nonlinear temperature- and time-dependent finite-element simulation.
在本研究中,介绍了六面模塑面板级芯片级封装(PLCSP)的设计、材料、工艺、组装和可靠性。重点是在具有多个器件晶片的大型临时面板上制造PLCSP的RDL(再分配层)。由于所有的印刷电路板(PCB)面板都是矩形的,一些器件晶片被切成两块或更多块,因此面板被充分利用。因此,它的吞吐量非常高。由于所有工艺/设备都是PCB工艺/设备(而不是半导体工艺/设备),因此这是一种成本非常低的工艺。在制造RDL之后,从PCB面板上剥离晶片。接下来是焊球安装,并用带有RDL的原始器件晶片制造6面成型的PLCSP。介绍了PLCSP的跌落试验和失效分析结果。通过非线性温度和时间相关有限元模拟,对6面成型PLCSP PCB组件进行了热循环。
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引用次数: 2
Electroless Plating with UV Modification for Thermosetting Dielectric and Decay Suppression of High Frequency Transmission Property 热固性介质紫外改性化学镀及高频传输性能衰减抑制
Q4 Engineering Pub Date : 2020-09-01 DOI: 10.4071/2380-4505-2020.1.000174
Masaya Toba, Kazuyuki Mitsukura, M. Yamaguchi
Semiconductor packages for high-performance devices with printed circuit boards having multi-wiring layers such as FC-BGA have been attracting attention to realize ultrareliable and low-latency communications in 5G networking. Cu wirings for the package are usually fabricated by the semi-additive process (SAP) with the de-smear process and/or the modified semi-additive process (MSAP) by using Cu film with large surface roughness. Although a de-smear process and Cu film can obtain enough adhesion between dielectric and Cu seed layer by the anchoring effect to secure reliabilities, the interface between dielectric and Cu seed layer should be smooth to achieve low attenuation of electric signals at high frequencies. Here, instead of those processes, we applied UV modification for the surface of our developed thermosetting dielectric to realize a smooth and high-adhesive seed layer against the dielectric. We obtained .5 kN/m of peel strength between dielectric and Cu seed layer despite surface roughness (Ra) of dielectric being 265 nm by the nano-level anchoring effect at UV modified layer. Because of the smooth interface by UV modification, the normalized S21 value of micro-strip line was about 29% improved compared with that assembled through Cu film with Ra of 2,400 nm at 50 GHz.
FC-BGA等多布线层印刷电路板的高性能器件半导体封装为实现5G网络下的超可靠、低延迟通信备受关注。封装用铜导线通常采用带去污工艺的半添加工艺(SAP)和/或使用表面粗糙度较大的铜膜的改进半添加工艺(MSAP)制造。虽然去污工艺和Cu膜可以通过锚定效应在介电介质和Cu种子层之间获得足够的附着力以保证可靠性,但介电介质和Cu种子层之间的界面必须平滑,以实现高频电信号的低衰减。在这里,我们对我们开发的热固性电介质的表面进行紫外线改性,以实现在电介质上光滑和高粘性的种子层,而不是这些工艺。在UV修饰层的纳米级锚定效应下,电介质表面粗糙度(Ra)为265 nm,但电介质与Cu种子层之间的剥离强度为0.5 kN/m。由于紫外光修饰的界面光滑,微带线的归一化S21值比用2400 nm的Ra在50 GHz下通过Cu膜组装的微带线提高了29%左右。
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引用次数: 4
A novel method for characterization of Ultra Low Viscosity NCF layers using TCB for 3D Assembly 一种利用TCB三维组装表征超低粘度NCF层的新方法
Q4 Engineering Pub Date : 2020-09-01 DOI: 10.4071/2380-4505-2020.1.000185
G. Capuz, M. Lofrano, C. Gerets, F. Duval, P. Bex, J. Derakhshandeh, K. Vanstreels, A. Phommahaxay, E. Beyne, Andy Miller
For die to wafer bonding of high-density interconnects and fine pitch microbumps developing and characterizing suitable underfill materials are required. In general, underfill serve to fill the spaces in-between microbumps for protection and reliability. Among the different types of underfill, Non-Conductive Film (NCF) has the advantages of fillet and volume control, and a built-in flux to aid wetting. However, challenges arise for thin dies and microbumps with fine pitches on film lamination, voiding, transparency, filler percentage, dicing compatibility and most importantly, deformation behavior and possibility to improve solder joint wetting. In a Die-to-Wafer D2W stacking with a Sn solder bump interconnect to Cu UBM, concern is high on the Cu pad oxidation due to the repeated TCB cycles that accelerate oxidation on neighboring dies. Process mitigation is needed to help reducing the oxidation. But even so, an NCF must have good embedded flux activation. Another main factor for an NCF to have efficient TCB process with good solder joint wetting, is the NCF deformation quality in which is a function of its viscosity. This parameter has direct impact on the deformation of solder bumps. High viscosity NCF would be difficult to deform, thus preventing solder contact to pad during TCB reflow temperature. High bond force is required and could lead to reduced alignment accuracy. Filler entrapment is also a subsequent concern for high filler loading, high viscosity NCF. For a low viscous NCF, careful attention in process characterization is needed in TCB with low bond force. Solder joint wetting is a problem with excessive squeeze-out due to fast and instantaneous deformation. With low viscosity, not only the bond force applied should be low, but the deformation behavior should also be understood to enable an effective NCF. We seek to demonstrate in this paper a creative methodology for Non-Conductive Film (NCF) material characterization, considering the factors of NCF viscosity, deformation, and solder squeeze-out. Characterizing NCF viscosity at fast TCB profiles is challenging considering deformation behavior of both the NCF itself and the solder bumps that shaped the solder squeeze-out and wetting. Furthermore, in this paper we use TCB tool position tracking to define the deformation curve of NCF film as a function of temperature and time at very fast profile of TCB. We use material viscosity curve as reference in relation to the actual deformation, and predict dynamic deformation based on Reynold’s equation within TCB profile duration. The experiments were performed with different heating ramp rates at target above Sn reflow of ~250C interface temperature. The deformation analysis is not limited to thin film sandwiched between parallel plates. Deformation test was performed on chips with and without microbumps and with rigid flat glass surface and its combinations. Deformation of underfill is recorded in the readout of TCB tool. As valida
对于高密度互连和细间距微凸块的芯片到晶片接合,需要开发和表征合适的底部填充材料。通常,底部填充物用于填充微凸块之间的空间,以实现保护和可靠性。在不同类型的底部填充物中,非导电膜(NCF)具有圆角和体积控制的优点,并内置助熔剂以帮助润湿。然而,对于在薄膜层压、空隙、透明度、填充物百分比、划片兼容性以及最重要的变形行为和改善焊点润湿的可能性上具有精细节距的薄管芯和微凸块来说,存在挑战。在具有Sn焊料凸块互连到Cu UBM的晶片到晶片D2W堆叠中,由于重复的TCB循环加速了相邻晶片上的氧化,因此对Cu焊盘氧化的关注度很高。需要过程缓解来帮助减少氧化。但即便如此,NCF也必须具有良好的嵌入通量激活。NCF具有具有良好焊点润湿性的有效TCB工艺的另一个主要因素是NCF变形质量,其中该变形质量是其粘度的函数。该参数对焊点的变形有直接影响。高粘度的NCF将难以变形,从而在TCB回流温度期间防止焊料接触到焊盘。需要高的结合力,并且可能导致对准精度降低。填料截留也是高填料负载、高粘度NCF的后续问题。对于低粘性NCF,在具有低结合力的TCB中,需要在工艺表征中仔细注意。焊点润湿是由于快速和瞬时变形而导致过度挤出的问题。在低粘度的情况下,不仅施加的结合力应该低,而且变形行为也应该被理解为能够实现有效的NCF。在本文中,我们试图证明一种创造性的非导电膜(NCF)材料表征方法,考虑了NCF粘度、变形和焊料挤出等因素。考虑到NCF本身和形成焊料挤出和润湿的焊料凸点的变形行为,在快速TCB轮廓下表征NCF粘度是具有挑战性的。此外,在本文中,我们使用TCB工具位置跟踪来定义NCF膜的变形曲线,该曲线是在TCB的非常快的轮廓下温度和时间的函数。我们使用材料粘度曲线作为与实际变形相关的参考,并基于雷诺方程预测TCB剖面持续时间内的动态变形。实验是在~250C界面温度的Sn回流靶上用不同的加热斜坡速率进行的。变形分析不限于夹在平行板之间的薄膜。在具有和不具有微凸块以及具有刚性平板玻璃表面及其组合的芯片上进行变形测试。底部填充物的变形记录在TCB工具的读数中。作为验证,我们在具有20和40um节距菊花链的测试车辆上应用了优化的TCB过程(力、温度和斜坡速率),并在良好的接头和IMC形成下获得了接近95%的电屈服。横截面SEM图像显示出良好的润湿性,显示出当使用优化的TCB轮廓时内置助熔剂的良好活化。
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引用次数: 0
Optimization of High-Speed Electrolytic Plating of Copper Pillar to Achieve a Flat Top Morphology and Height Uniformity 高速电解镀铜柱的优化,以实现平顶形貌和高度均匀性
Q4 Engineering Pub Date : 2020-09-01 DOI: 10.4071/2380-4505-2020.1.000150
Ikumoto Raihei, Itakura Yuki, S. Tachibana, Hisamitsu Yamamoto
Cu plating bath for high-speed electrodeposition of Cu pillar was designed in consideration of a flat top morphology of pillar and a pillar height uniformity. An ideal polarization curve was assumed for the flat top morphology. To obtain the ideal polarization curve, an effect of organic additive concentration and solution agitation on the polarization curve were investigated. The basic bath components were optimized considering a Wagner number to improve the pillar height uniformity. To confirm the pillar top morphology and the pillar height uniformity, a 300-mm diameter wafer was plated with Cu at 20 A/dm2. As a result, improved pillar top morphology and pillar height uniformity were obtained. The optimized plating bath was applied to the plating of a large-size panel of 415 × 510 mm.
设计了高速电沉积铜柱的镀铜浴,考虑了铜柱的平顶形貌和高度均匀性。对平顶形貌假定了理想的极化曲线。为了得到理想的极化曲线,研究了有机添加剂浓度和溶液搅拌对极化曲线的影响。考虑瓦格纳数,优化了基本浴组件,提高了柱高均匀性。为了确定柱顶形貌和柱高均匀性,在直径为300 mm的晶圆上镀上20 a /dm2的Cu。改善了矿柱顶部形貌和矿柱高度均匀性。将优化后的镀液应用于415 × 510 mm大尺寸面板的电镀。
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引用次数: 0
High-Density Interconnect Technology Assessment of Printed Circuit Boards for Space Applications 空间应用印刷电路板高密度互连技术评价
Q4 Engineering Pub Date : 2020-07-01 DOI: 10.4071/imaps.1212898
M. Cauwe, B. Vandevelde, Chinmay Nawghane, Marnix Van De Slyeke, E. Bosman, J. Verhegge, Alexia Coulon, S. Heltzel
High-density interconnect (HDI) printed circuit boards (PCBs) and associated assemblies are essential to allow space projects to benefit from the ever increasing complexity and functionality of modern integrated circuits such as field-programmable gate arrays, digital signal processors and application processors. Increasing demands for functionality translate into higher signal speeds combined with an increasing number of input/outputs (I/Os). To limit the overall package size, the contact pad pitch of the components is reduced. The combination of a high number of I/Os with a reduced pitch places additional demands onto the PCB, requiring the use of laser-drilled microvias, high-aspect ratio core vias, and small track width and spacing. Although the associated advanced manufacturing processes have been widely used in commercial, automotive, medical, and military applications, reconciling these advancements in capability with the reliability requirements for space remains a challenge. Two categories of the HDI technology are considered: two levels of staggered microvias (basic HDI) and (up to) three levels of stacked microvias (complex HDI). In this article, the qualification of the basic HDI technology in accordance with ECSS-Q-ST-70-60C is described. At 1.0-mm pitch, the technology passes all testing successfully. At .8-mm pitch, failures are encountered during interconnection stress testing and conductive anodic filament testing. These failures provide the basis for updating the design rules for HDI PCBs.
高密度互连(HDI)印刷电路板和相关组件对于使太空项目受益于现代集成电路(如现场可编程门阵列、数字信号处理器和应用处理器)不断增加的复杂性和功能至关重要。对功能的不断增长的需求转化为更高的信号速度以及越来越多的输入/输出(I/O)。为了限制整体封装尺寸,减小了元件的接触焊盘间距。大量I/O与减小间距的组合对PCB提出了额外的要求,需要使用激光钻孔的微孔、高纵横比的核心过孔以及小的磁道宽度和间距。尽管相关的先进制造工艺已广泛应用于商业、汽车、医疗和军事应用,但协调这些能力进步与太空可靠性要求仍然是一个挑战。考虑了两类HDI技术:两级交错微孔(基本HDI)和(最多)三级堆叠微孔(复杂HDI)。本文介绍了根据ECSS-Q-ST-70-60C对HDI基本技术的鉴定。在1.0毫米的螺距下,该技术成功通过了所有测试。在间距为.8mm的情况下,在互连应力测试和导电阳极丝测试过程中会遇到故障。这些故障为更新HDI PCB的设计规则提供了基础。
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引用次数: 2
High-Temperature Double-Layer Ceramic Packaging Substrates 高温双层陶瓷封装基板
Q4 Engineering Pub Date : 2020-07-01 DOI: 10.4071/imaps.1123535
Ardalan Nasiri, S. Ang
A double-layer ceramic electronic packaging technology that survives the Venusian surface temperature of 465°C was developed using a ceramic interlayer dielectric with gold conductors. A 60-μm ceramic interlayer dielectric served as the insulator between the top and bottom gold conductors on high-purity ceramic substrates. Test devices with AuPtPd metallization were attached to the top gold pads using a thick-film gold paste. Thermal aging for 115 h at 500°C and thermal cycling from room temperature to 450°C were performed. Dielectric leakage tests of the interlayer ceramic layer between the top and bottom gold conductors revealed a leakage current density of less than 50 × 10−7 A/cm2 at 600 V after thermal cycling. Gold conductor resistance increased slightly after thermal cycling. The die shear test showed a 33% decrease in die shear strength after thermal tests and its 6.16 kg-F die shear strength satisfies the Military Standard Product Testing Services (MIL-STD) method.
使用带有金导体的陶瓷层间电介质开发了一种能够在金星465°C的表面温度下幸存的双层陶瓷电子封装技术。在高纯度陶瓷衬底上,60μm的陶瓷层间电介质充当顶部和底部金导体之间的绝缘体。使用厚膜金膏将具有AuPtPd金属化的测试器件连接到顶部金焊盘。在500°C下进行115小时的热老化和从室温到450°C的热循环。顶部和底部金导体之间的层间陶瓷层的介电泄漏测试显示,热循环后,在600 V下的泄漏电流密度小于50×10−7 a/cm2。热循环后,金导体电阻略有增加。模具剪切试验表明,热试验后模具剪切强度降低了33%,其6.16kg-F模具剪切强度满足军用标准产品测试服务(MIL-STD)方法。
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引用次数: 0
A New Halogen-Free Parylene for High Performance and Reliability of Microelectronics in Harsh Environments 一种在恶劣环境下实现微电子高性能和高可靠性的新型无卤聚对二甲苯
Q4 Engineering Pub Date : 2020-07-01 DOI: 10.4071/imaps.1120416
Rakesh Kumar, F. Ke, Dustin England, Angie Summers, L. Young
The rapid growth and adoption of microelectronics around the world has resulted in an increased awareness of potential environmental issues related to their use and disposal. Halogens, which have had various uses in microelectronics over the years, are known to emit toxic and corrosive gases during the disposal of electronic waste. Many organizations have applied pressure to the electronics industry to eliminate halogens completely (e.g., fluorine, chlorine, and bromine) from their products. Among the various efforts toward environmentally friendly products, making electronics completely halogen-free has gained significant attention, particularly in Asia and Europe. This initiative even impacts conformal coatings worldwide, on which most electronics rely for their long-term protection, reliability, and high performance against water and other corrosive harsh environments. Among the various coating options, the parylene family of conformal coatings offers beneficial properties to the microelectronics, improved over many properties offered by common epoxies, acrylics, urethanes, and silicones. Although parylene N is the only commercially available parylene that does not contain any halogens, its barrier performance against moisture and other corrosive chemicals is not quite as robust as the other parylenes. To meet the industry’s current and future requirements, a new halogen-free parylene, ParyFree®, has been developed. This study introduces a new parylene type to the microelectronics industry and shares the characterization and qualification results of ParyFree® parylene conformal coating for the protection, reliability, and robust performance of microelectronics. Testing on the new coating includes IPX water resistance, corrosion resistance, and qualification per IPC-CC-830B.
微电子在世界各地的迅速发展和采用,使人们越来越意识到与微电子的使用和处置有关的潜在环境问题。卤素多年来在微电子领域有各种用途,在处理电子废物过程中会释放出有毒和腐蚀性气体。许多组织已经向电子工业施加压力,要求其产品中完全消除卤素(例如氟、氯和溴)。在各种环保产品的努力中,使电子产品完全无卤已经引起了极大的关注,特别是在亚洲和欧洲。这一举措甚至影响了全球范围内的保形涂层,大多数电子产品都依赖于保形涂层来获得长期保护、可靠性和抗水和其他腐蚀性恶劣环境的高性能。在各种涂层选择中,聚对二甲苯家族的保形涂层为微电子器件提供了有益的性能,比普通环氧树脂、丙烯酸树脂、聚氨酯和硅树脂提供的许多性能都得到了改进。虽然聚对二甲苯N是唯一一种商用的不含任何卤素的聚对二甲苯,但它对湿气和其他腐蚀性化学物质的阻隔性能不如其他聚对二甲苯那么坚固。为了满足行业当前和未来的要求,一种新的无卤聚对二甲苯,ParyFree®,已经开发出来。本研究向微电子行业介绍了一种新型的聚对二甲苯,并分享了ParyFree®聚对二甲苯保形涂层的特性和鉴定结果,用于微电子的保护,可靠性和坚固性。新涂层的测试包括IPX耐水性,耐腐蚀性和IPC-CC-830B的合格性。
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引用次数: 0
Assembly of Cu Wirings with Ultrasmooth and High-Adhesive Electroless Cu Seed Layer by Using UV Modification and Low Attenuation of High-Frequency Transmission Property 利用UV改性和高频传输特性的低衰减组装具有超光滑高粘附性的化学镀铜籽晶层的铜布线
Q4 Engineering Pub Date : 2020-04-01 DOI: 10.4071/imaps.1100914
Masaya Toba, S. Nomoto, Nobuhito Komuro, Kazuyuki Mitsukura, S. Abe, T. Masuko, Kazuhiko Kurafuchi
Abstract Semiconductor packages for high-performance devices with printed circuit boards having multiwiring layers such as flip-chip ball grid array have been attracting the attention to realize ul...
采用倒装球栅阵列等多层印刷电路板的高性能器件半导体封装技术已成为实现高性能器件封装的热点。
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引用次数: 0
High-Temperature Electronics Packaging for Simulated Venus Condition 模拟金星条件下的高温电子封装
Q4 Engineering Pub Date : 2020-04-01 DOI: 10.4071/imaps.1115241
Ardalan Nasiri, S. Ang, T. Cannon, E. Porter, Kaoru Porter, C. Chapin, Ruiqi Chen, D. Senesky
Abstract An electronic packaging technology that survives the simulated Venusian surface temperature of 465°C and 96 bar pressure in carbon dioxide (CO2) and nitrogen environments, without the corr...
一种电子封装技术可以在模拟金星表面温度465°C和压力96 bar的二氧化碳和氮气环境中存活下来,而不需要加热或加热。
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引用次数: 4
Fabrication of Ceramic Interposers for Module Packaging 模块封装用陶瓷插入器的研制
Q4 Engineering Pub Date : 2020-04-01 DOI: 10.4071/imaps.1114553
R. Alizadeh, Kaoru Porter, T. Cannon, S. Ang
Abstract In this study, low-temperature cofired ceramic (LTCC) and 3D-printed ceramic interposers are designed and fabricated for a double-sided power electronic module. The interposer acts as elec...
摘要在本研究中,设计并制造了用于双面功率电子模块的低温共烧陶瓷(LTCC)和3D打印陶瓷中介层。插入器充当电子。。。
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引用次数: 2
期刊
Journal of Microelectronics and Electronic Packaging
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