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Synthesis and Characterization of Physical Properties of MgO Thin Films by Various Concentrations 不同浓度MgO薄膜的合成及物理性能表征
Q4 Engineering Pub Date : 2020-01-01 DOI: 10.4071/imaps.963453
N. Chaouch, S. Benramache, S. Lakel
In this work, magnesium oxide was elaborated on a glass substrate at 450°C by a pneumatic spray technique. The structural, optical, and electrical properties were studied at different MgO concentrations (.05, .10, .15, and .2 mol L−1). Poly-crystalline MgO films with a cubic structure with a strong (002) preferred orientation were observed at all sprayed films, with a maximum crystallite size of 21.4 nm attained by the sprayed film at .2 mol L−1. Good transmission was found in the deposited MgO thin films with lowest molarity. The transmission of MgO thin films decreases rapidly as the wavelength increases in the range of 300–400 nm and then increases slowly at higher wavelengths. The bandgap of MgO thin films decreases as the molarity increases, and the band gap values range between 4.8 and 4.3 eV. The Urbach energy values range between 375 and 519 meV. The electrical resistance of our films is on the order of 2 × 107Ω. The prepared MgO thin films were suitable for electronic packaging; they are capable to provide very stable and high secondary electron emission combined with low bandgap energy and low electrical resistance.
在这项工作中,通过气动喷涂技术在450°C的玻璃基板上制备氧化镁。研究了不同MgO浓度下材料的结构、光学和电学性能。0.05、0.10、0.15和0.2 mol L−1)。结果表明,在0.2 mol L−1的温度下,喷涂膜的晶粒尺寸最大可达21.4 nm。在最低摩尔浓度的MgO薄膜中发现了良好的透射率。在300 ~ 400 nm波长范围内,MgO薄膜的透射率随波长的增加而迅速下降,在更高波长处则缓慢增加。MgO薄膜的带隙随摩尔浓度的增加而减小,带隙值在4.8 ~ 4.3 eV之间。厄巴赫能量值在375和519 meV之间。我们薄膜的电阻约为2 × 107Ω。制备的MgO薄膜适用于电子封装;它们能够提供非常稳定和高的二次电子发射,同时具有低带隙能量和低电阻。
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引用次数: 1
A Technique for Detecting Moisture Absorption in Printed Circuit Boards 印刷电路板吸湿性检测技术
Q4 Engineering Pub Date : 2020-01-01 DOI: 10.4071/imaps.1014123
J. Craven, Ariel Oldag, R. Dean
Abstract Most circuit boards operate in environments that have the potential to be exposed to moisture, either in vapor or liquid form. Because low-cost circuit boards can readily absorb moisture, ...
大多数电路板在有可能暴露于水汽或液体形式的环境中工作。因为低成本的电路板很容易吸收水分,…
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引用次数: 0
Sporadic Early Life Solder Ball Detachment Effects on Subsequent Microstructure Evolution and Fatigue of Solder Joints in Wafer-Level Chip-Scale Packages 零星早期寿命锡球脱落对晶圆级芯片封装中焊点后续组织演变和疲劳的影响
Q4 Engineering Pub Date : 2020-01-01 DOI: 10.4071/imaps.966816
Simon Schambeck, M. Hutter, J. Jaeschke, A. Deutinger, M. Schneider-Ramelow
Abstract The combination of continuous miniaturization of electronics and the demanding reliability requirements for industrial and automotive electronics is one big challenge for emerging packagin...
电子产品的不断小型化与工业和汽车电子产品对可靠性的苛刻要求相结合,是新兴封装行业面临的一大挑战。
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引用次数: 0
Cu Pillar Bump Development for 7-nm Chip Package Interaction (CPI) Technology 用于7-nm芯片封装相互作用(CPI)技术的Cu柱凸块开发
Q4 Engineering Pub Date : 2020-01-01 DOI: 10.4071/imaps.968260
Lei Fu, M. Bhagavat, C. Selvanayagam, Ken Leong, Ivor Barber
Power, performance, and area gains are important metrics driving the complementary metal–oxide–semiconductor (CMOS) technology from older nodes to newer ones. Over past several decades, a steady downscaling of feature sizes of CMOS technology has been a leading force enabling continual improvement in circuit speeds and cost per functionality. Increase in functionality drives larger number of inputs/outputs (I/Os), and the scaling-driven small intellectual property (IP) block sizes force these larger number of I/Os to be accommodated by reduction of I/O pitches. The result is an unrelenting pressure to reduce bump pitches from one generation of CMOS to another. In contrast to 14-nm/16-nm nodes which used 150-um bump pitch coming out of a die, for 7-nm node, the industry is targeting 130-um bump pitch for high performance devices. With this pitch reduction, conventional tin/silver (SnAg) solder bumps face limitations in terms of bridging. Cu pillar bumps are the best candidate for smaller bump pitches. However, for large die sizes prevalent in high-performance computing (HPC), the Cu pillar bumps will induce higher stress on the silicon resulting in higher risks of extremely low K (ELK) cracking. If copper pillar bumps are not properly developed, then there is a risk of marginal reliability in terms of chip package interaction. The situation becomes even more dire in large die sizes, where coefficient of thermal expansion mismatch between silicon and laminate substrate magnifies the stress. The present article discusses successful development of Cu pillar bumps for 7-nm technology. The development program included a 2-step development path. In the first step, extensive thermomechanical modeling was carried out to find optimal design of copper pillar bump for robustness of interactions with 7-nm back end of line ELK layers. In the second step, a 460-mm2 7-nm Silicon test vehicle was fabricated, and its assembly process was optimized to characterize the copper pillar bumps and prove their extended reliability on 7-nm silicon. As a result of this development, copper pillar technology has been qualified on Advanced Micro Devices (AMD) products. Today, copper pillar is a fully integral part of AMD's ever-growing 7-nm product offering in HPC.
功率、性能和面积增益是推动互补金属氧化物半导体(CMOS)技术从旧节点向新节点发展的重要指标。在过去的几十年里,CMOS技术特征尺寸的稳步缩小一直是推动电路速度和每功能成本不断提高的主要力量。功能的增加驱动了更多的输入/输出(I/O),而扩展驱动的小知识产权(IP)块大小迫使通过减少I/O间距来容纳这些更大数量的I/O。其结果是不断减小从一代CMOS到另一代CMOS的凹凸间距。相较于14nm / 16nm节点采用150um凸距的芯片,对于7nm节点,业界的目标是130um凸距用于高性能器件。随着间距的减小,传统锡/银(SnAg)焊料凸起在桥接方面面临限制。铜柱凸点是较小凸点的最佳候选。然而,对于高性能计算(HPC)中普遍存在的大尺寸模具,铜柱凸起将在硅上引起更高的应力,从而导致极低K (ELK)开裂的风险更高。如果铜柱凸起没有得到适当的开发,那么就芯片封装相互作用而言,存在边际可靠性的风险。在大尺寸的模具中,硅与层压衬底之间的热膨胀系数不匹配放大了应力,这种情况变得更加严重。本文讨论了用于7纳米技术的铜柱凸点的成功开发。该发展计划包括两步发展路径。在第一步中,进行了广泛的热力学建模,以找到铜柱凸起的最佳设计,以确保与7 nm线ELK层后端相互作用的鲁棒性。第二步,制作了一个460-mm2的7纳米硅测试车,并对其组装工艺进行了优化,以表征铜柱凸起,并证明其在7纳米硅上的扩展可靠性。由于这一发展,铜柱技术已经在高级微设备(AMD)产品上获得了资格。今天,铜柱是AMD在高性能计算领域不断增长的7nm产品中不可或缺的一部分。
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引用次数: 1
Ferrites in Transfer-Molded Power SiPs: Challenges in Packaging 转移模塑功率硅中的铁氧体:封装中的挑战
Q4 Engineering Pub Date : 2019-12-16 DOI: 10.4071/IMAPS.1064487
T. Thomas, M. Dijk, M. Dreissigacker, S. Hoffmann, H. Walter, K. Becker, M. Schneider-Ramelow
Abstract Transfer-molding process is enjoying growing interest when aiming for novel high-power density system-in-packages (power SiPs), where not only transistors and diodes but also drivers, pass...
摘要:当瞄准新型高功率密度系统级封装(功率sip)时,传递成型工艺正受到越来越多的关注,其中不仅晶体管和二极管,而且驱动器,通过…
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引用次数: 2
Stackable SiC-Embedded Ceramic Packages for High-Voltage and High-Temperature Power Electronic Applications 用于高压和高温电力电子应用的可堆叠SiC嵌入式陶瓷封装
Q4 Engineering Pub Date : 2019-10-01 DOI: 10.4071/imaps.952440
Hoang Linh Bach, Daniel Dirksen, Christoph Blechinger, T. Endres, C. F. Bayer, A. Schletz, M. März
This study encompasses the development of a high-voltage and high-temperature–capable package for power electronic applications based on the embedding of silicon carbide (SiC) semiconductor devices in the ceramic circuit carrier such as the direct bonded copper (DBC) substrate. By sealing semiconductor devices into DBC substrates, high temperature, high voltage, and high current capability as well as high corrosion resistance can be achieved compared with the state-of-the-art printed circuit board (PCB) embedding technology. The power devices are attached with high-temperature stable solder and sinter material and are surrounded by thermal conductive ceramic and high-temperature–capable potting materials that enable the complete package to operate at 250°C or above. Furthermore, the single embedded packages can be stacked together to multilevel DBC topologies with increased voltage blocking characteristics. Thus, current limits of the PCB and low-temperature cofired ceramic–based multilayer solutions are exceeded and will be confirmed in the course of this study. This package is designed to carry out the maximal performance of SiC and future wide bandgap devices. It is a promising solution not only for applications in harsh ambient environments such as aerospace and turbine, geothermal well logging, and downhole oil and gas wells but also for hybrid electric/electric vehicle and energy conversion.
本研究包括基于碳化硅(SiC)半导体器件在陶瓷电路载体(如直接键合铜(DBC)衬底)中的嵌入,开发用于电力电子应用的高电压和高温封装。通过将半导体器件密封到DBC衬底中,与最先进的印刷电路板(PCB)嵌入技术相比,可以实现高温、高电压和高电流能力以及高耐腐蚀性。功率器件由高温稳定的焊料和烧结材料连接,并由导热陶瓷和高温封装材料包围,使整个封装能够在250°C或以上的温度下运行。此外,单个嵌入式封装可以堆叠在一起以形成具有增加的电压阻断特性的多级DBC拓扑。因此,PCB和低温共烧陶瓷基多层解决方案的电流极限已经超过,并将在本研究过程中得到证实。该封装旨在实现SiC和未来宽带隙器件的最大性能。它不仅是一种很有前途的解决方案,适用于航空航天和涡轮机、地热测井、井下油气井等恶劣环境中的应用,也适用于混合电动/电动汽车和能源转换。
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引用次数: 1
Rapid and Localized Soldering Using Reactive Films for Electronic Applications 电子应用中使用反应膜的快速和局部焊接
Q4 Engineering Pub Date : 2019-10-01 DOI: 10.4071/imaps.955217
R. Khazaka, D. Martineau, T. Youssef, Thanh-Long Le, S. Azzopardi
The rapid and localized heating techniques allow the joining of temperature-sensitive materials and components without thermal induced damage commonly encountered when high-temperature solder reflow processes are used. This is also advantageous for making assemblies with materials having a large difference in the coefficient of thermal expansion without induced bowing or cracking. The use of exothermic reactive foil sandwiched between solder preforms is a promising local and rapid soldering process because it does not require any external heat source. The reactive foil is formed from alternatively stacked nanolayers of Ni and Al until it reaches the total film thickness. Once the film is activated by using an external power source, a reaction takes place and releases such an amount of energy that is transferred to the solder preforms. If this amount of energy is high enough, solder preforms melt and insure the adhesion between the materials of the assembly. The influences of the applied pressure, the reactive film (RF) thickness as well as the solder, and the attached materials chemical composition and thickness were investigated. It was shown that the applied pressure during the process has a strong effect on the joint initial quality with voids ratio decreases from 64% to 26% for pressure values between .5 and 100 kPa, respectively. This can be explained by the improvement of the solder flow under higher pressure leading to a better surface wettability and voids elimination. Otherwise, the joint quality was found to be improved once the solder melting duration is increased. This relationship was observed when the thickness of the reactive foil is increased (additional induced energy) or the thickness of solders, Cu, and/or Si is decreased (less energy consumption). The microstructure of the AuSn joint achieved using the RFs shows very fine phase distribution compared with the one obtained using conventional solder reflow process in the oven because of high cooling rate. The mechanical properties of the joint were evaluated using shear tests performed on 350-μm-thick silicon diodes assembled on active metal brazed substrates under a pressure of 100 kPa. The RFs were 60 μm thick and sandwiched between two 25-μm-thick 96.5Sn3Ag.5Cu (SAC) preforms. The voids ratio was about 37% for the tested samples and shear strength values above 9.5 MPa were achieved which remains largely higher than MIL-STD-883H requirements. Finally, the process impact on the electrical properties of the assembled diodes was compared with a commonly used solder reflow assembly and the results show a negligible variation.
快速和局部加热技术允许温度敏感材料和部件的连接,而不会在使用高温回流焊工艺时常见的热致损伤。这对于用热膨胀系数差异较大的材料制造组件而不引起弯曲或破裂也是有利的。夹在焊料预制件之间的放热反应箔的使用是一种很有前途的局部快速焊接工艺,因为它不需要任何外部热源。反应箔由交替堆叠的Ni和Al的纳米层形成,直到达到总膜厚度。一旦通过使用外部电源激活薄膜,就会发生反应,并释放出转移到焊料预成型件的能量。如果这个能量足够高,焊料预制件就会熔化,并确保组件材料之间的粘附性。研究了所施加的压力、反应膜(RF)厚度、焊料以及所附材料的化学成分和厚度的影响。研究表明,在该过程中施加的压力对接头的初始质量有很大影响,当压力值在.5和100kPa之间时,空隙率分别从64%下降到26%。这可以通过在更高压力下改善焊料流动来解释,从而导致更好的表面润湿性和空隙消除。否则,一旦焊料熔化持续时间增加,接头质量就会得到改善。当反应箔的厚度增加(额外的感应能量)或焊料、Cu和/或Si的厚度减少(较少的能量消耗)时,观察到了这种关系。使用RF获得的AuSn接头的微观结构与在烘箱中使用传统回流焊工艺获得的微观结构相比显示出非常精细的相分布,这是因为高冷却速率。在100kPa的压力下,对组装在活性金属钎焊基底上的350μm厚硅二极管进行剪切试验,评估了接头的机械性能。RFs厚度为60μm,夹在两个25μm厚的96.5Sn3Ag.5Cu(SAC)预成型件之间。测试样品的空隙率约为37%,剪切强度值达到9.5MPa以上,仍大大高于MIL-STD-883H的要求。最后,将工艺对组装二极管电性能的影响与常用的回流焊组件进行了比较,结果显示变化可以忽略不计。
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引用次数: 0
Fabrication of Highly Reliable Joint Based on Cu/Ni/Sn Double-Layer Powder for High Temperature Application 高温用Cu/Ni/Sn双层粉末高可靠接头的制备
Q4 Engineering Pub Date : 2019-10-01 DOI: 10.4071/imaps.960671
Hongyan Xu, Yaochun Shen, Yihua Hu, Jianqiang Li, Ju Xu
A highly reliable three-dimensional network structure joint was fabricated based on Cu/Ni/Sn powder with double-layer coatings and transient liquid phase bonding (TLPB) technology for high temperature application. The Cu/Ni/Sn joint is characterized by Cu metal particles embedded in the matrix of (Cu,Ni)6Sn5/Ni3Sn4 intermetallic compounds (IMCs), with a low void ratio, and can be reflowed at low temperatures (<260°C), but it can reliably work at a high temperature up to 415°C. Cu/Ni/Sn double-layer powders with different Sn layer and Ni layer thickness were was fabricated and compressed as preform used for TLPB joint bonding. The microstructure and phase composition evolution for Cu/Sn and Cu/Ni/Sn systems during reflow and aging were comparatively studied. Two kinds of interfacial structure designs were made, and corresponding interfacial microscopic morphology was analyzed and compared under once and twice reflow soldering processes. The results indicated that the Sn-coating layer was completely consumed to form (Cu,Ni)6Sn5/Ni3Sn4 IMCs, and the Cu/Ni/Sn joint had a lower void ratio and a higher shear strength than those of Cu/Sn. The mechanism of the Ni-coating layer inhibiting phase transformation was studied. The high reliable three-dimensional network structure joint based on Cu/Ni/Sn double-layer powder was fabricated for high temperature application.
以Cu/Ni/Sn粉末为材料,采用双层涂层和瞬态液相键合(TLPB)技术制备了高可靠性的三维网络结构高温焊接头。Cu/Ni/Sn接头的特点是Cu金属颗粒嵌套在(Cu,Ni)6Sn5/Ni3Sn4金属间化合物(IMCs)基体中,具有低空穴比,可在低温(<260℃)下回流,但可在高达415℃的高温下可靠工作。制备了不同Sn层厚度和Ni层厚度的Cu/Ni/Sn双层粉末,并将其压缩成用于TLPB连接的预制体。比较研究了Cu/Sn和Cu/Ni/Sn体系在回流和时效过程中的组织和相组成演变。进行了两种界面结构设计,并对一次回流焊和两次回流焊的界面微观形貌进行了分析和比较。结果表明:镀锡层被完全消耗形成(Cu,Ni)6Sn5/Ni3Sn4 IMCs, Cu/Ni/Sn接头具有比Cu/Sn接头更低的空洞率和更高的剪切强度;研究了ni涂层抑制相变的机理。制备了基于Cu/Ni/Sn双层粉末的高可靠性三维网状结构高温接头。
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引用次数: 2
Process Optimization and Implementation of Online Monitoring Process in the Transfer Molding for Electronic Packaging 电子封装传递成型工艺优化及在线监控过程的实现
Q4 Engineering Pub Date : 2019-10-01 DOI: 10.4071/imaps.954402
B. Kaya, J. Kaiser, K. Becker, T. Braun, K. Lang
The quality of molded packages heavily depends on the process parameters of the molding process and on the material characteristics of epoxy molding compounds (EMCs). When defects are introduced into the electronic packages in one of the last steps in the manufacturing process, namely, during encapsulation, it may cause high failure costs. To decrease the number of defects due to the molding process, a comprehensive understanding of the impact of process parameters and variations in the characteristics of the EMC on package quality is necessary. This study aimed at supporting a deeper understanding of the influence of process parameters and variations in the material characteristics of the EMC on package quality. A systematic approach was introduced to generate a process model describing the correlation between process parameters and package quality to obtain optimum process parameters for the transfer molding process. The influence of the alterations in material characteristics of the EMC due to prolonged storage duration and humidity on void formation and wire sweep was investigated. An online monitoring method, dielectric analysis (DEA), was implemented into the transfer molding process to monitor the variations in the cure behavior of the EMC. A second molding compound was used to analyze the similarities in the alteration behavior of the molding compounds when subjected to the same preconditioning and to generalize the characteristic information obtained from DEA.
成型包装的质量在很大程度上取决于成型过程的工艺参数和环氧成型化合物(EMCs)的材料特性。当缺陷在制造过程的最后一个步骤,即封装过程中引入电子封装时,可能会导致很高的失效成本。为了减少由于成型过程造成的缺陷数量,有必要全面了解工艺参数和电磁兼容特性变化对封装质量的影响。本研究旨在更深入地了解工艺参数和EMC材料特性变化对封装质量的影响。介绍了一种系统的方法,建立了描述工艺参数与包装质量之间关系的工艺模型,以获得传递成型工艺的最佳工艺参数。研究了贮存时间延长和湿度对电磁兼容性材料特性变化对空隙形成和导线扫描的影响。将介电分析(DEA)作为一种在线监测方法应用于传递成型过程中,以监测其固化行为的变化。利用第二种模塑化合物分析了在相同预处理条件下模塑化合物蚀变行为的相似性,并对DEA得到的特征信息进行了推广。
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引用次数: 0
High Temperature and High Reliability Performance of Electrically Conductive Film Adhesives for RF Grounding Applications 射频接地用导电膜胶粘剂的高温高可靠性性能
Q4 Engineering Pub Date : 2019-10-01 DOI: 10.4071/2380-4505-2019.1.000360
Yuan Zhao, D. Katze, John Wood, B. Tolla, H. Yun
Over the past decade, electronic parts have become smaller, more complex, and highly functional. This is well understood for many products within the consumer and handheld markets. Miniaturization, however, is also impacting sectors such as aerospace and automotive, pushing the limits of already harsh environments. As more power is driven through active devices, the integrity of materials used to provide the electrically conductive interfaces is becoming increasingly critical. For many applications, adhesive films have been the preferred material because they offer a variety of performance and operational advantages such high electrical and thermal conductivity, uniform bondlines, superior adhesion, and low processing temperatures. Today, as miniaturization pushes power-density limits and although devices are also being exposed to high operating temperatures, even for traditionally robust adhesive films, it is challenging to cope with these conditions. In sectors such as aerospace where high reliability is essential, material capability must evolve to deliver on fail-safe performance expectations. This study compares the performance of an established and widely used electrically conductive film adhesive with that of a newly developed film designed to provide improved mechanical performance over a higher elevated temperature range.
在过去的十年里,电子零件变得更小、更复杂、功能更强大。这对于消费者和手持设备市场中的许多产品来说是众所周知的。然而,小型化也在影响航空航天和汽车等行业,突破了本已恶劣的环境的极限。随着更多的功率通过有源器件驱动,用于提供导电界面的材料的完整性变得越来越重要。对于许多应用,粘合膜一直是优选的材料,因为它们提供了各种性能和操作优势,如高电导率和热导率、均匀的粘合线、优异的粘合性和低的加工温度。如今,随着小型化突破了功率密度的极限,尽管器件也暴露在高工作温度下,即使是传统上坚固的粘合膜,应对这些条件也很有挑战性。在航空航天等高可靠性至关重要的行业,材料能力必须不断发展,以实现故障安全性能预期。本研究将一种已建立并广泛使用的导电薄膜粘合剂的性能与一种新开发的薄膜的性能进行了比较,该薄膜旨在在更高的高温范围内提供改进的机械性能。
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引用次数: 2
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Journal of Microelectronics and Electronic Packaging
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