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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Nanoscale Cutting, Bending and Welding in a Nanoassembly 纳米组装中的纳米切割、弯曲和焊接
Toshio Fukudal, Pou Liu
Carbon nanotube (CNT) can be used as a building block of nanoelectronic mechanical systems (NEMS). The main problems involved in nanotube based applications are related to the fabrication and assembly of the CNT. In this paper, in situ nanofabrication methods, involving cutting, bending, and welding of multi-walled carbon nanotube (MWNT) inside a scanning electron microscope (SEM), are presented. These three nanofabrication techniques are further used in the assembly of a CNT based nanostructure. A three dimensional (3D) nanostructure, the letter N, was assembled from a single CNT and fixed to stand on a substrate. Based on the high performance of the proposed techniques, it is suggested that the cutting, bending, and welding techniques inside SEM will become widely utilized in the fabrication and assembly of nanodevices and in the characterization of nanomaterials.
碳纳米管(CNT)可以作为纳米电子机械系统(NEMS)的基石。基于纳米管的应用涉及的主要问题是碳纳米管的制造和组装。本文介绍了多壁碳纳米管(MWNT)的原位纳米加工方法,包括在扫描电子显微镜(SEM)下切割、弯曲和焊接。这三种纳米加工技术进一步应用于碳纳米管纳米结构的组装。一个三维(3D)纳米结构,字母N,由一个单一的碳纳米管组装而成,并固定在基板上。基于所提出的技术的高性能,认为扫描电镜内的切割、弯曲和焊接技术将在纳米器件的制造和组装以及纳米材料的表征中得到广泛应用。
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引用次数: 4
Factors Influencing the Properties of Rifampicin Liposome and Applications for Dry Powder Inhaler 影响利福平脂质体性能的因素及其在干粉吸入器中的应用
N. Changsan, T. Srichana
RIF encapsulated liposome vesicles were prepared by chloroform film method followed by freeze drying technique to obtain a dry powder for aerosol delivery. The freeze drying conditions were designed according to the DSC results of the liposome suspension. Three sugars (mannitol, lactose and trehalose) were used as a cryoprotectant of liposome dry powder. NR 8383 cell line was used to determine immunological activation and toxicity of liposome products when LPS from E.coli was used as a positive control. High cholesterol content in the formulation created higher rigid bilayer membrane of liposome vesicle than the lower cholesterol content formulation thus provided a better physical stability. The lipid content had influenced on degree of encapsulation, higher lipid content in formulation produced higher % encapsulation. Mannitol was a suitable sugar for this dry powder aerosol when it provided a free flowing powder with an MMAD less than 5 mum (3.35 mum). In addition, RIF in liposome dry powder form showed better chemical stability than in suspension form after they were kept for 6 weeks both at 4degC and room temperature. The reconstituted liposome powder in PBS pH 7.4 gave the encapsulation about 22%. The products did not cause toxicity to the cell line and did not activate immune responses since the cell produced very low level of toxic cytokines (IL-lbeta and TNF-alpha) when compared to LPS. This indicates that the particles are able to reach alveoli without stimulation of immunological response and safe to alveolar macrophage.
采用氯仿膜法制备RIF包封脂质体囊泡,然后采用冷冻干燥技术制备干燥粉末,用于气溶胶输送。根据脂质体悬浮液的DSC结果设计冷冻干燥条件。采用甘露醇、乳糖和海藻糖三种糖作为脂质体干粉的冷冻保护剂。以nr8383细胞株为阳性对照,测定脂质体产物的免疫活性和毒性。高胆固醇含量的制剂比低胆固醇含量的制剂产生了更高的刚性脂质体囊泡双层膜,从而提供了更好的物理稳定性。脂质含量对包封度有影响,配方中脂质含量越高,包封率越高。甘露醇是一种合适的干粉气溶胶糖,当它提供一个自由流动的粉末,MMAD小于5妈妈(3.35妈妈)。此外,脂质体干粉形式的RIF在4℃和室温下保存6周后,其化学稳定性优于悬浮液形式。在pH 7.4的PBS中,重组脂质体粉末的包封率约为22%。该产品不会对细胞系造成毒性,也不会激活免疫反应,因为与LPS相比,细胞产生的毒性细胞因子(il - β和tnf - α)水平非常低。这表明颗粒能够在不刺激免疫反应的情况下到达肺泡,对肺泡巨噬细胞是安全的。
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引用次数: 1
Polymer-Enabled Carbon Nanotube Deposition for Cellular Interrogation Applications 聚合物使能碳纳米管沉积在细胞审讯中的应用
B. Chu, E. Pierstorff, D. Ho
We have utilized a block copolymeric thin film as a modality to template the deposition of single-walled carbon nanotubes towards applications in single cell interrogation. Transmembrane studies of cellular activity (e.g. neurons, cardiomyocytes, etc.) have often been limited by the invasiveness of probe-induced membrane rupture. This often precludes chronic activity analysis. We have developed a copolymer-carbon nanotube (P-CNT) hybrid material for potential applications in non-invasive cell probing with attenuated inflammation due to the biomimetic stiffness of the copolymer coupled with nanoscale dimensions of the P-CNT complex. We applied both a diblock copolymer comprised of poly(ethylene oxide-b-methyl methacrylate; PEO-PMMA) as well as an acrylate-terminated amphiphilic `ABA' triblock copolymer comprised of polymethyloxazoline-polydimethylsiloxane-polymethyloxazoline; PMOXA-PDMS-PMOXA) as the supporting matrix for carbon nanotube deposition via the Langmuir-Blodgett methodology. This enabled the suspension of the carbon nanotubes on the air-water interface for transfer to a gold substrate. Cyclic voltammetry measurements confirmed that the CNT's were interfaced directly with the gold substrates to enable electrical functionality. In addition, cellular adhesion to the polymeric substrate was demonstrated, confirming the biocompatibility of the P-CNT material. CNT-coated electrodes were also examined as biological electrodes for the monitoring of oxidation-reduction processes driven by the cytochrome c mediator, where CNT/polymer-coated surfaces were also capable of facilitating anti-protein adsorption, resulting in the observation of reversible electron transfer between the protein and electrode. This was demonstrated via acquisition of pronounced anodic and cathodic peaks with peak separations of 64mV, which confirmed a reversible transfer process.
我们利用嵌段共聚物薄膜作为模板沉积单壁碳纳米管的模式,以应用于单细胞审讯。细胞活动(如神经元、心肌细胞等)的跨膜研究常常受到探针诱导的膜破裂的侵袭性的限制。这通常排除了慢性活动分析。我们开发了一种共聚物-碳纳米管(P-CNT)混合材料,由于共聚物的仿生刚度加上P-CNT复合物的纳米尺寸,该材料有望应用于非侵入性细胞探测,具有减轻炎症的潜力。我们采用了由聚环氧乙烷-甲基丙烯酸甲酯组成的二嵌段共聚物;PEO-PMMA)以及由聚甲基氯恶唑-聚二甲基硅氧烷-聚甲基氯恶唑啉组成的丙烯酸酯端端两亲性“ABA”三嵌段共聚物;通过Langmuir-Blodgett方法,将PMOXA-PDMS-PMOXA)作为碳纳米管沉积的支撑基质。这使得碳纳米管悬浮在空气-水界面上,转移到金衬底上。循环伏安法测量证实碳纳米管与金衬底直接连接,以实现电气功能。此外,细胞粘附在聚合物底物上,证实了p -碳纳米管材料的生物相容性。碳纳米管涂层电极也被检测为生物电极,用于监测由细胞色素c介质驱动的氧化还原过程,其中碳纳米管/聚合物涂层表面也能够促进抗蛋白质吸附,从而观察到蛋白质和电极之间的可逆电子转移。这是通过采集明显的阳极和阴极峰来证明的,峰间距为64mV,这证实了一个可逆的转移过程。
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引用次数: 0
Workshop Speech: Commercialization of MEMS/NEMS in Tohoku University Open Collaboration 研讨会演讲:东北大学开放合作中MEMS/NEMS的商业化
M. Esashi
MEMS (Micro Electro Mechanical Systems) have been fabricated using advanced micromachining based on an extended semiconductor microfabrication. Sophisticated MEMS device used as a high performance rotating gyroscope for navigation control systems was developed. A 1.5 mm diameter silicon ring rotor is electrostatically levitated and rotated at 75,000rpm using high speed digital signal control. Two-axes rotation and three-axes acceleration are detected simultaneously with high precision. Small size packaged MEMS devices such as integrated capacitive pressure sensor, diaphragm vacuum sensor and MEMS relay for LSI tester have been fabricated using a wafer level packaging using a glass with electrical feedthroughs. The MEMS relay performs high frequency response up to 20 GHz and high reliability owing to the hermetic sealing. Active catheters, fine blood pressure sensors used in a blood vessel and endoscope with laser therapy function have been developed for minimal invasive medicine using MEMS based assembly. As NEMS (Nano Electro Mechanical Systems) which include nano structure, arrayed systems as multiprobe data storage and massively parallel electron beam lithography system have been developed using a glass with high density electrical feedthroughs. Monolithic XYZ-stage has been also developed for the arrayed systems. Highly sensitive cantilever resonator and micro probes have been also developed as the NEMS.
MEMS(微电子机械系统)是基于半导体微加工技术的先进微加工技术。研制了一种用于导航控制系统的高性能旋转陀螺仪的精密MEMS器件。一个1.5毫米直径的硅环转子是静电悬浮和旋转75000 rpm使用高速数字信号控制。两轴旋转和三轴加速度同时检测,精度高。小型封装MEMS器件,如集成电容压力传感器、膜片真空传感器和用于LSI测试仪的MEMS继电器,已经使用带电馈线的玻璃晶圆级封装制造。MEMS继电器具有高达20 GHz的高频响应和高可靠性,因为它是密封的。主动导管、用于血管的精细血压传感器和具有激光治疗功能的内窥镜已被开发用于基于MEMS的微创医学。随着纳米机电系统(NEMS)的发展,包括纳米结构,阵列系统作为多探头数据存储和大规模并行电子束光刻系统已被开发利用高密度电馈线的玻璃。单片xyz级也为阵列系统开发。高灵敏度的悬臂谐振器和微探针也被发展为NEMS。
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引用次数: 0
Study of Excimer Laser Electrochemical Etching Silicon 准分子激光电化学蚀刻硅的研究
Yuhong Long, Liangcai Xiong, T. Shi, Zirong Tang
To further understand the behavior of laser-induced electrochemical etching process, the experiments of micromachining silicon by laser-induced electrochemical etching were carried out. 248nm excimer laser as light source is adopted in this work with the power of 109W/cm2 for the first time and KOH solution is used as electrolyte. Based on the experiment results, the surface images and etching rate are analyzed in detail. It is verified that the compound technique is a combination of laser etching, electrochemical etching and coupling etching, and laser etching is dominating in the compound process. Besides, both liquid-enhanced pressure and jet shock pressure can preferably improve the etching rate. At the same time, the anisotropic etching stop of silicon in alkaline solution is solved in this study. As a result, this process can be applied to transfer pattern without mask, and it possesses the ability of machining large aspect ratio micro structures.
为了进一步了解激光诱导电化学蚀刻过程的行为,进行了激光诱导电化学蚀刻微加工硅的实验。本研究首次采用248nm准分子激光作为光源,功率为109W/cm2,采用KOH溶液作为电解液。根据实验结果,对表面图像和刻蚀速率进行了详细分析。验证了复合工艺是激光刻蚀、电化学刻蚀和耦合刻蚀的结合,激光刻蚀在复合工艺中占主导地位。此外,液体增强压力和射流冲击压力都能较好地提高刻蚀速率。同时,解决了硅在碱性溶液中的各向异性刻蚀停止问题。结果表明,该工艺可用于无掩模转移图案,并具有加工大纵横比微结构的能力。
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引用次数: 5
Enzymatic Biosensors towards a Multiplexed Electronic Detection System for Early Cancer Diagnostics 面向早期癌症诊断的多路电子检测系统的酶生物传感器
D. Grieshaber, E. Reimhult, J. Voros
Enzymatic biosensors are expected to play a key-role in bio techno logical and biochemical analysis as shown by the success of glucose sensors in diabetes treatment. The aim of this work is to develop a multiplexed electronic detection system for early cancer diagnostics. Therefore, various enzymes were adsorbed to differently modified surfaces. Electrochemical optical waveguide lightmode spectroscopy (EC-OWLS) and electrochemical quartz crystal microbalance with dissipation (EC-QCM-D) were used to measure the mass and the activity of the adsorbed enzymes. The enzymes were specifically immobilized on a protein resistant PLL-g-PEG surface in order to reduce the loss of activity due to denaturation. In addition, enzymes were also incorporated into DNA-tagged vesicles to increase the signal and therefore the sensor sensitivity. The enzymatic activity of the different systems was compared. To further increase the sensitivity, ferrocyanide was used as an electron mediator.
随着葡萄糖传感器在糖尿病治疗中的成功应用,酶促生物传感器有望在生物技术和生化分析中发挥关键作用。本研究的目的是开发一种用于早期癌症诊断的多路电子检测系统。因此,不同的酶被吸附在不同修饰的表面上。利用电化学光波导光模光谱(ec - owl)和电化学耗散石英晶体微天平(EC-QCM-D)测定吸附酶的质量和活性。这些酶被特异性地固定在蛋白质抗性的PLL-g-PEG表面上,以减少因变性而导致的活性损失。此外,酶也被加入到dna标记的囊泡中,以增加信号,从而提高传感器的灵敏度。比较了不同体系的酶活性。为了进一步提高灵敏度,亚铁氰化物被用作电子介质。
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引用次数: 6
Electrohydrodynamic (EHD) Micro-Boat 电流体动力(EHD)微型船
Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang
This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.
本文介绍了利用聚对二甲苯微机电系统技术制造一种新型电流体动力(EHD)微船并进行了测试。微船的驱动力利用EHD的反作用力,采用平面电极泵送非极性液体。因此,通过施加30-40 V的直流电压,EHD微型船的瞬时移动速度约为6.5 mm/min。
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引用次数: 7
On-Chip Continuous Blood Cell Subtype Separation by Deterministic Lateral Displacement 用确定性横向位移法在芯片上连续分离血细胞亚型
Nan Li, Daniel T. Kamei, Chih-Ming Ho
This paper presents a microfluidic device for continuous human blood cell subtype separation using the deterministic lateral displacement principle. Based on their significant size and shape differences, three major cell types of human whole blood - platelets, red blood cells and white blood cells -were demonstrated to be directly separated using a two-stage separation strategy. Even though all white blood cells are spherical and have diameters within a narrow range (8-20mum), the initial limitation for using this principle to separate white blood cell subtypes was conquered by attaching larger polystyrene microbeads to one of the subtypes to amplify the size differences. Specifically, continuous separation of human CD4+ T helper lymphocytes from other white blood cell subtypes was achieved with high purity and recovery due to the underlying high affinity and high specificity of the antigen-antibody interaction used to attach the microbeads to the lymphocytes. With our novel approach, the pure population of one blood cell subtype can be effectively isolated by exploring the deterministic lateral displacement principle, which has the advantages of the simplicity, high speed and high resolution. Because many cells express unique surface markers, this method can theoretically be applied to separate any target cell type from a heterogeneous mixture for downstream analysis.
本文介绍了一种利用确定性横向位移原理连续分离人血细胞亚型的微流控装置。基于它们显著的大小和形状差异,人类全血的三种主要细胞类型——血小板、红细胞和白细胞——被证明可以使用两阶段分离策略直接分离。尽管所有的白细胞都是球形的,直径范围也很窄(8- 20mm),但通过将更大的聚苯乙烯微珠附着在其中一种亚型上,扩大白细胞的大小差异,克服了利用这一原理分离白细胞亚型的最初限制。具体来说,由于用于将微珠附着在淋巴细胞上的抗原-抗体相互作用具有潜在的高亲和力和高特异性,因此可以实现人类CD4+ T辅助淋巴细胞与其他白细胞亚型的连续分离,并且具有高纯度和高回收率。该方法通过探索确定性横向位移原理,可以有效地分离单一血细胞亚型的纯群体,具有简单、快速和高分辨率的优点。由于许多细胞表达独特的表面标记,理论上这种方法可以应用于从异质混合物中分离任何靶细胞类型进行下游分析。
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引用次数: 40
Electrorotation: Diagnostic Tool for Abnormality of Marine Phytoplankton Cells 电旋:海洋浮游植物细胞异常的诊断工具
P. Wanichapichart, T. Wongluksanapan, L. Khooburat
This work proposes a method to estimate cell dielectric properties using a rotating electric field. Signals given to four platinum electrodes were from a phase shift unit, which splits an input signal into four of pi/2 phase difference. The unit performs well under frequency below 5 MHz. Rotation patterns of pretreated Tetraselmis sp. were utilized to reveal dielectric information of the cells. The rotation of boiled cells diminished at the lower frequency range, while that of the arsenic pretreated cells was smaller than that of the control when higher arsenic concentration was used. The specific membrane conductance was increased from 0.5 kS.m-1 for the control to 90 kS.m-1 boiled cells. Pretreated cells with arsenic solution at 10 to 100 ppm levels increased the membrane conductance to 8.8 kS.m-1, much less effect compared to the boiled cells. Moreover, 24 hrs pretreatment was long enough for arsenic to penetrate the membrane, and the cytoplasmic permittivity was reduced from 39epsivO to about 13e0, independent of the arsenic levels used. The study can distinguish the viability from the non-viability cells by carefully selected field, frequency, and solution conductivity.
本文提出了一种利用旋转电场估计电池介电特性的方法。给四个铂电极的信号来自相移装置,它将输入信号分成四个相位差为pi/2的相位差。在5兆赫以下的频率下性能良好。利用预处理过的Tetraselmis sp.的旋转模式来揭示细胞的介电信息。在较低的频率范围内,水煮细胞的旋转减弱,而在较高的砷浓度下,砷预处理细胞的旋转小于对照。比膜电导从0.5 k增加。m-1为控制至90 k。M-1煮沸细胞。用10至100 ppm浓度的砷溶液预处理细胞,使膜电导率提高到8.8 k。M-1,与煮沸的细胞相比效果要小得多。此外,24小时的预处理时间足以使砷穿透膜,并且细胞质介电常数从39epsivO降至13e0左右,与使用的砷水平无关。该研究可以通过精心选择的电场、频率和溶液电导率来区分有活力和无活力的细胞。
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引用次数: 5
Workshop Speech: Role of University Research for Open Innovations in MNT 研讨会演讲:大学研究对MNT开放式创新的作用
O. Tabata
The role of University in MNT has been becoming more and more essential since the Micro Nano Technology (MNT) requires not only innovative seeds to open up a new application fields but also both well-qualified persons in MNT who lead this field. To meet these requirements, interdisciplinary and international collaboration and cooperation in education and research is crucially important. Firstly, part of related activities related to MNT in Kyoto University are introduced, such as the education program in MNT, the organization of newly established Micro Engineering Department, and research organization of Research Institute of Nano Science & Technology which is the lateral organization of several departments and colleges on nanotechnology. Secondly, two research topics in MNT, nano-scale material mechanical property characterization and nano-components assembly on MEMS which are pursued at Micro Nano System Laboratory are introduced as the tentative themes for further international collaboration and cooperation.
大学在微纳米技术中的作用越来越重要,因为微纳米技术不仅需要创新的种子来开辟新的应用领域,而且需要高素质的微纳米技术人才来领导这一领域。为了满足这些要求,教育和研究领域的跨学科和国际合作至关重要。首先介绍了京都大学与纳米技术相关的部分活动,如纳米技术的教育计划、新成立的微工程系的组织和纳米科学与技术研究所的研究机构,该研究所是多个系和学院的纳米技术横向组织。其次,介绍了微纳系统实验室正在进行的纳米纳米材料力学性能表征和纳米元件在MEMS上的组装这两个MNT研究课题,作为进一步国际合作的试验性主题。
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引用次数: 0
期刊
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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