Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352019
Jihyum Shin, S. Tanaka, M. Esashi
This paper reports the first result of press molding of Pyrex glass using a silicon carbide (SiC) mold with nanopatterns. First, the nanopatterns were formed on a silicon substrate by electron beam lithography and fast atom beam (FAB) etching. To transfer these patterns to SiC, SiC was deposited on the patterned silicon substrate, and the SiC surface was polished to mirror finish. Subsequently, a SiC ceramic plate was bonded to the polished SiC surface using sputter deposited nickel as an interlayer. Finally, the silicon substrate was etched to release the SiC mold. Using the fabricated SiC molds without an anti-sticking layer, we succeeded in press-molding Pyrex glass (Corning 7740) at 800 degC. In this process, we found surface roughening problem, which occurs in SiC atmospheric vapor deposition on FAB-etched areas. This is due to damage in silicon by FAB, and enhanced under the existence of surface natural oxide.
{"title":"Nanostructured Silicon Carbide Molds for Glass Press Molding","authors":"Jihyum Shin, S. Tanaka, M. Esashi","doi":"10.1109/NEMS.2007.352019","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352019","url":null,"abstract":"This paper reports the first result of press molding of Pyrex glass using a silicon carbide (SiC) mold with nanopatterns. First, the nanopatterns were formed on a silicon substrate by electron beam lithography and fast atom beam (FAB) etching. To transfer these patterns to SiC, SiC was deposited on the patterned silicon substrate, and the SiC surface was polished to mirror finish. Subsequently, a SiC ceramic plate was bonded to the polished SiC surface using sputter deposited nickel as an interlayer. Finally, the silicon substrate was etched to release the SiC mold. Using the fabricated SiC molds without an anti-sticking layer, we succeeded in press-molding Pyrex glass (Corning 7740) at 800 degC. In this process, we found surface roughening problem, which occurs in SiC atmospheric vapor deposition on FAB-etched areas. This is due to damage in silicon by FAB, and enhanced under the existence of surface natural oxide.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123031202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352007
M. Esashi
MEMS (Micro Electro Mechanical Systems) have been fabricated using advanced micromachining based on an extended semiconductor microfabrication. Sophisticated MEMS device used as a high performance rotating gyroscope for navigation control systems was developed. A 1.5 mm diameter silicon ring rotor is electrostatically levitated and rotated at 75,000rpm using high speed digital signal control. Two-axes rotation and three-axes acceleration are detected simultaneously with high precision. Small size packaged MEMS devices such as integrated capacitive pressure sensor, diaphragm vacuum sensor and MEMS relay for LSI tester have been fabricated using a wafer level packaging using a glass with electrical feedthroughs. The MEMS relay performs high frequency response up to 20 GHz and high reliability owing to the hermetic sealing. Active catheters, fine blood pressure sensors used in a blood vessel and endoscope with laser therapy function have been developed for minimal invasive medicine using MEMS based assembly. As NEMS (Nano Electro Mechanical Systems) which include nano structure, arrayed systems as multiprobe data storage and massively parallel electron beam lithography system have been developed using a glass with high density electrical feedthroughs. Monolithic XYZ-stage has been also developed for the arrayed systems. Highly sensitive cantilever resonator and micro probes have been also developed as the NEMS.
{"title":"Workshop Speech: Commercialization of MEMS/NEMS in Tohoku University Open Collaboration","authors":"M. Esashi","doi":"10.1109/NEMS.2007.352007","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352007","url":null,"abstract":"MEMS (Micro Electro Mechanical Systems) have been fabricated using advanced micromachining based on an extended semiconductor microfabrication. Sophisticated MEMS device used as a high performance rotating gyroscope for navigation control systems was developed. A 1.5 mm diameter silicon ring rotor is electrostatically levitated and rotated at 75,000rpm using high speed digital signal control. Two-axes rotation and three-axes acceleration are detected simultaneously with high precision. Small size packaged MEMS devices such as integrated capacitive pressure sensor, diaphragm vacuum sensor and MEMS relay for LSI tester have been fabricated using a wafer level packaging using a glass with electrical feedthroughs. The MEMS relay performs high frequency response up to 20 GHz and high reliability owing to the hermetic sealing. Active catheters, fine blood pressure sensors used in a blood vessel and endoscope with laser therapy function have been developed for minimal invasive medicine using MEMS based assembly. As NEMS (Nano Electro Mechanical Systems) which include nano structure, arrayed systems as multiprobe data storage and massively parallel electron beam lithography system have been developed using a glass with high density electrical feedthroughs. Monolithic XYZ-stage has been also developed for the arrayed systems. Highly sensitive cantilever resonator and micro probes have been also developed as the NEMS.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121750691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352264
Y. Miyoshi, T. Tkeuchi, T. Saito, H. Saito, H. Kudo, K. Otsuka, K. Mitsubayashi
An electric conductimetric sensor (thickness: 80 mum) constructed in a sandwich configuration with a hydrophilic poly-tetrafluoroethylene membrane placed between two gold deposited layers was evaluated for use as a moisture sensor. The humidity level was measured by electrical conductivity of the device using the multifrequency LCR-meter at frequencies ranging from 100 Hz to 100 k Hz, the device was calibrated at 100 Hz against the moisture air over the range of 30 - 85 % RH, which includes normal humidity level in the atmosphere and physiologic air such as breath and sweating. The response sensitivity of the conductimetric device was extremely high (i.e. less than 1 sec. for conductivity shift between humid air of 80 % RH and dried air of -60 degC dew point) even for recovery to dried air. The sensor performance was reproducible over multiple measurements, showing the highly reproducibility with a coefficient of variation of 1.77 % (n = 5).
{"title":"A wearable humidity sensor with hydrophilic membrane by Soft-MEMS techniques","authors":"Y. Miyoshi, T. Tkeuchi, T. Saito, H. Saito, H. Kudo, K. Otsuka, K. Mitsubayashi","doi":"10.1109/NEMS.2007.352264","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352264","url":null,"abstract":"An electric conductimetric sensor (thickness: 80 mum) constructed in a sandwich configuration with a hydrophilic poly-tetrafluoroethylene membrane placed between two gold deposited layers was evaluated for use as a moisture sensor. The humidity level was measured by electrical conductivity of the device using the multifrequency LCR-meter at frequencies ranging from 100 Hz to 100 k Hz, the device was calibrated at 100 Hz against the moisture air over the range of 30 - 85 % RH, which includes normal humidity level in the atmosphere and physiologic air such as breath and sweating. The response sensitivity of the conductimetric device was extremely high (i.e. less than 1 sec. for conductivity shift between humid air of 80 % RH and dried air of -60 degC dew point) even for recovery to dried air. The sensor performance was reproducible over multiple measurements, showing the highly reproducibility with a coefficient of variation of 1.77 % (n = 5).","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"457 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122893406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352246
D.T.W. Lin
The flow of the body fluid in the bio-chip and local metabolism require general solutions for the thermally developing flow model in bio-tissue. An algorithm based on the molecular dynamics (MD) and the GROMACS protein data bank is developed to solve the thermally developing bio-flow problem. The flow of the Alanine in the nano-channel driven by a constant external force and applied the thermal boundary are studied. Both global effect (effective channel width) and local effect (thermal boundary) are examined to demonstrate the features of the distributions of velocity in the system. This algorithm can be applied in the design of bio-chip's channel and the building of fundamental phenomena of the burn or frostbite.
{"title":"A Molecular Dynamics on the Thermally Developing Flow of Alanine in Nano-Channel","authors":"D.T.W. Lin","doi":"10.1109/NEMS.2007.352246","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352246","url":null,"abstract":"The flow of the body fluid in the bio-chip and local metabolism require general solutions for the thermally developing flow model in bio-tissue. An algorithm based on the molecular dynamics (MD) and the GROMACS protein data bank is developed to solve the thermally developing bio-flow problem. The flow of the Alanine in the nano-channel driven by a constant external force and applied the thermal boundary are studied. Both global effect (effective channel width) and local effect (thermal boundary) are examined to demonstrate the features of the distributions of velocity in the system. This algorithm can be applied in the design of bio-chip's channel and the building of fundamental phenomena of the burn or frostbite.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126241504","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352039
Zumin Wang, Z. Ren, Jinghong Han, C. Bian, S. Xia
A monolithic pH sensor system has been studied and developed, based on standard CMOS technology. The micro system includes an on-chip integration of differential ISFET/REFET sensing devices, metal constructed pseudo reference electrode (PRE) and their relative signal processing circuits. We mainly present the development of PPy(polypyrrole) membrane by the way of electrochemical polymerization, which was grown on the gate of ISFET, as pH sensitive material. With a series of experiments, a high sensitivity of 56mV/pH was achieved within the pH range from 1 to 12. In the end, we discussed the influence of reagents and polymerization parameters on the pH sensor system.
{"title":"Characteristics of the PPy Material as pH Sensitive Membrane","authors":"Zumin Wang, Z. Ren, Jinghong Han, C. Bian, S. Xia","doi":"10.1109/NEMS.2007.352039","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352039","url":null,"abstract":"A monolithic pH sensor system has been studied and developed, based on standard CMOS technology. The micro system includes an on-chip integration of differential ISFET/REFET sensing devices, metal constructed pseudo reference electrode (PRE) and their relative signal processing circuits. We mainly present the development of PPy(polypyrrole) membrane by the way of electrochemical polymerization, which was grown on the gate of ISFET, as pH sensitive material. With a series of experiments, a high sensitivity of 56mV/pH was achieved within the pH range from 1 to 12. In the end, we discussed the influence of reagents and polymerization parameters on the pH sensor system.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126445373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352256
V. Wiwanitkit
Hemoglobin (Hb) constant spring (CS) disorder is an important hemoglobinopathy with the highest endemicity in Southeast Asia. The role of Hb CS instability in altered red cell morphology relative to the thalassemia-like deficit of alpha globin mRNA has not been entirely resolved and needs additional structural study for clarification. Here, amino acid sequence of human alpha globin was extracted using ExPASY and used for further mutated to Hb CS disorder. The derived sequences, alpha globin chains in both normal and Hb CS disorder, were used for further investigation for secondary structures. Modeling of these proteins for secondary structure was done using the NNPREDICT server. Of interest, the secondary structure of human alpha globin chains of normal and Hb CS disorder are calculated and presented. Based on this information, the main difference between the globin chains of normal and Hb CS disorder is the elongation in the structure. Alpha globin chain of hemoglobin disorder contains more helical residues in elongated part than normal. In addition, the tertiary structure of Hb CS was also modeled using Pepstr server.
{"title":"Prediction of secondary and tertiary structures of hemoglobin Constant Spring","authors":"V. Wiwanitkit","doi":"10.1109/NEMS.2007.352256","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352256","url":null,"abstract":"Hemoglobin (Hb) constant spring (CS) disorder is an important hemoglobinopathy with the highest endemicity in Southeast Asia. The role of Hb CS instability in altered red cell morphology relative to the thalassemia-like deficit of alpha globin mRNA has not been entirely resolved and needs additional structural study for clarification. Here, amino acid sequence of human alpha globin was extracted using ExPASY and used for further mutated to Hb CS disorder. The derived sequences, alpha globin chains in both normal and Hb CS disorder, were used for further investigation for secondary structures. Modeling of these proteins for secondary structure was done using the NNPREDICT server. Of interest, the secondary structure of human alpha globin chains of normal and Hb CS disorder are calculated and presented. Based on this information, the main difference between the globin chains of normal and Hb CS disorder is the elongation in the structure. Alpha globin chain of hemoglobin disorder contains more helical residues in elongated part than normal. In addition, the tertiary structure of Hb CS was also modeled using Pepstr server.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130961732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352162
Takeshi Kawano, C. Y. Cho, Liwei Lin
This paper reports a 10-nm in diameter nanoprobe electrode made of carbon nanotube (CNT) for possible electrophysiological measurements for biomedical applications. The nanoprobe is based on an individual carbon nanotube fabricated by a controlled local growth process and subsequently encapsulated with an insulating layer of Parylene-C. It is integrated with a silicon microstructure with a total length of 5mum and its tip at the distal end is locally heated to expose about 100nm-long CNT as the sensing port. We believe this nano scale CNT probe, with its high strength and Young's modulus, may act as a low-invasive intracellular electrode for measurements inside cells or neurons.
{"title":"Carbon Nanotube-based Nanoprobe Electrode","authors":"Takeshi Kawano, C. Y. Cho, Liwei Lin","doi":"10.1109/NEMS.2007.352162","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352162","url":null,"abstract":"This paper reports a 10-nm in diameter nanoprobe electrode made of carbon nanotube (CNT) for possible electrophysiological measurements for biomedical applications. The nanoprobe is based on an individual carbon nanotube fabricated by a controlled local growth process and subsequently encapsulated with an insulating layer of Parylene-C. It is integrated with a silicon microstructure with a total length of 5mum and its tip at the distal end is locally heated to expose about 100nm-long CNT as the sensing port. We believe this nano scale CNT probe, with its high strength and Young's modulus, may act as a low-invasive intracellular electrode for measurements inside cells or neurons.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130208945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352248
H. Shodja, L. Pahlevani, E. Hamed
In this paper, we develop a theory to study the nano defects of various geometries within thin films. The considered thin films have faced centered cubic (fcc) structure. The eigenstrain method is combined with the long-range Sutton-Chen (SC) inter-atomic potential function which is appropriate for fcc crystals. The disturbance caused by a defect in a thin film is determined from the equilibrium equation using the discrete Fourier transformation. The disturbed field is also determined using three dimensional (3D) molecular dynamics (MD) simulations in which the constant NVT ensemble is applied to the atomic system. For illustration, the problem of nano disk shape defect in thin film is studied by both the proposed theory and MD simulation. To compare the result of the present theory with that of continuum theory of elasticity, the problem of prismatic dislocation loop in an infinite domain is also considered.
{"title":"Elastic Field of a Nano Disk Shape Defect in an fcc Thin Film","authors":"H. Shodja, L. Pahlevani, E. Hamed","doi":"10.1109/NEMS.2007.352248","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352248","url":null,"abstract":"In this paper, we develop a theory to study the nano defects of various geometries within thin films. The considered thin films have faced centered cubic (fcc) structure. The eigenstrain method is combined with the long-range Sutton-Chen (SC) inter-atomic potential function which is appropriate for fcc crystals. The disturbance caused by a defect in a thin film is determined from the equilibrium equation using the discrete Fourier transformation. The disturbed field is also determined using three dimensional (3D) molecular dynamics (MD) simulations in which the constant NVT ensemble is applied to the atomic system. For illustration, the problem of nano disk shape defect in thin film is studied by both the proposed theory and MD simulation. To compare the result of the present theory with that of continuum theory of elasticity, the problem of prismatic dislocation loop in an infinite domain is also considered.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128834622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352196
Jin-Woo Kim, N. Kotagiri, R. Deaton, S. Tung
Molecular wire construction using DNA-directed self-assembly of multi-walled carbon nanotubes (MWNTs) has been attempted. MWNTs were selected owing to their exceptional electrical and structural properties. DNA, which possesses specific molecular recognition properties, served as the engine for the assembly. Non-crosshybridizing (NCH) sequences were designed to impart specificity and high throughput reaction. Stepwise manufacturing of the wire was accomplished by first functionalizing the NCH 20 base pair single-stranded sequences to the tips of MWNT using amide linkage. The adducts were then utilized to self-assemble 1D nanotube wire through DNA hybridization reactions between two complementary ssDNAs functionalized to the MWNT tips. TEM, epi-fluorescent microscopy and AFM analyses showed successful assemblies of micrometer-scale 1D MWNT-DNA wires, ranging from 2.7-20 mum. The results demonstrate great potentials of the DNA-guided self-assembly process, which would provide an uncomplicated, versatile and inexpensive way to manufacture micrometer-scale molecular wires.
{"title":"DNA-Directed Self-Assembly of Microscopic 1-D Carbon Nanotube Wire","authors":"Jin-Woo Kim, N. Kotagiri, R. Deaton, S. Tung","doi":"10.1109/NEMS.2007.352196","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352196","url":null,"abstract":"Molecular wire construction using DNA-directed self-assembly of multi-walled carbon nanotubes (MWNTs) has been attempted. MWNTs were selected owing to their exceptional electrical and structural properties. DNA, which possesses specific molecular recognition properties, served as the engine for the assembly. Non-crosshybridizing (NCH) sequences were designed to impart specificity and high throughput reaction. Stepwise manufacturing of the wire was accomplished by first functionalizing the NCH 20 base pair single-stranded sequences to the tips of MWNT using amide linkage. The adducts were then utilized to self-assemble 1D nanotube wire through DNA hybridization reactions between two complementary ssDNAs functionalized to the MWNT tips. TEM, epi-fluorescent microscopy and AFM analyses showed successful assemblies of micrometer-scale 1D MWNT-DNA wires, ranging from 2.7-20 mum. The results demonstrate great potentials of the DNA-guided self-assembly process, which would provide an uncomplicated, versatile and inexpensive way to manufacture micrometer-scale molecular wires.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128875841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352087
Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang
This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.
{"title":"Electrohydrodynamic (EHD) Micro-Boat","authors":"Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang","doi":"10.1109/NEMS.2007.352087","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352087","url":null,"abstract":"This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"688 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116169179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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