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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Nanomechanical Chemical Sensor Platform 纳米机械化学传感器平台
Si-Hyung Lim, J. Jaworski, S. Satyanarayana, F. Wang, D. Raorane, Seung-Wuk Lee, A. Majumdar
For gas phase chemical sensing, we have developed a selective, sensitive and portable sensing platform, which integrates bio receptors, chemo-mechanical sensor array, and electrical readout circuits. The biggest challenge in chemical sensors is selectivity of a receptor to its respective target molecule against a background of various interfering agents. For target specific receptors, sequence-specific recognition motifs have been identified through directed evolution methods, called phage display. We have demonstrated and updated a parylene micromembrane surface stress sensor array which uses capacitive signal readout. For a fully integrated sensor platform, a portable chemical sensing board has been built.
对于气相化学传感,我们开发了一种选择性,灵敏度和便携式传感平台,该平台集成了生物受体,化学机械传感器阵列和电子读出电路。化学传感器面临的最大挑战是在各种干扰剂的背景下,受体对其各自的靶分子的选择性。对于目标特异性受体,序列特异性识别基序已经通过定向进化方法确定,称为噬菌体展示。我们展示并更新了一种使用电容式信号读出的聚对二甲苯微膜表面应力传感器阵列。为了实现完全集成的传感器平台,构建了便携式化学传感板。
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引用次数: 5
Design and system-level simulation of a capacitive dual axis accelerometer 电容式双轴加速度计的设计与系统级仿真
Weiping Chen, J. Ding, Xiaowei Liu, Chao Wang
A system-level model of a bulk micromachined dual axis accelerometer is presented. The accelerometer has only one inertial mass, symmetrically suspended by four pairs of folded elastic beams. The size of the fabricated accelerometer is 5.4times5.4 mm2. The displacement change of the inertial mass is converted to the change of differential capacitance between active combs and fixed combs. Generally, the input acceleration is mixed with the x-axis and the y-axis. In order to separate and pick off the mixed signal, the frequency-division method is adopted in the interface circuit. The paper details the Simulink model, which is used to evaluate the feasibility of the detective method. The simulation results validate the feasibility that the interface circuit can detect dual-axis acceleration separately and synchronously.
提出了一种大型微加工双轴加速度计的系统级模型。加速度计只有一个惯性质量,对称地悬挂在四对折叠弹性梁上。制作的加速度计尺寸为5.4 × 5.4 mm2。惯性质量的位移变化转化为主动梳和固定梳之间的差分电容变化。通常,输入加速度与x轴和y轴混合。在接口电路中采用分频法对混合信号进行分离和剔除。本文详细介绍了Simulink模型,并用该模型来评估检测方法的可行性。仿真结果验证了该接口电路分别同步检测双轴加速度的可行性。
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引用次数: 6
Flip-Chip Micro-Thermal Stress Simulation in Underfill Process 下充填过程倒装芯片微热应力模拟
W. Lou, X. Yu
MEMS package technology is playing an increasingly important part today. As one of important part of MEMS package technology, flip-chip technology is widely used in the assembly of high-performance that requires good functionality on substrate space. It has many advantages such as smaller size, increased functionality and lower cost. So it has been widely used in MEMS package. The thermal stress of flip-chip is analyzed by using the finite element analysis software in this paper. It simulates the thermal stress distributing of the flip-chip structure, which is caused by the high temperature during the underfill process. And by modifying all kinds of geometry parameters and material attributes, it analyses that how underfill CTE, solidifying temperature and bump size affect the thermal stress of the micro-structure. The results from this work would be very useful to optimize the technological parameter and improve the package properties.
MEMS封装技术在当今扮演着越来越重要的角色。倒装芯片技术作为MEMS封装技术的重要组成部分之一,广泛应用于要求在基板空间上具有良好功能的高性能组装。它具有体积更小、功能更强、成本更低等优点。因此在MEMS封装中得到了广泛的应用。本文利用有限元分析软件对倒装芯片的热应力进行了分析。模拟了下充填过程中高温对倒装结构热应力的影响。通过修改各种几何参数和材料属性,分析了下填CTE、凝固温度和凹凸尺寸对微观组织热应力的影响。研究结果对优化工艺参数、提高包装性能具有重要的指导意义。
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引用次数: 1
Polymer-Enabled Carbon Nanotube Deposition for Cellular Interrogation Applications 聚合物使能碳纳米管沉积在细胞审讯中的应用
B. Chu, E. Pierstorff, D. Ho
We have utilized a block copolymeric thin film as a modality to template the deposition of single-walled carbon nanotubes towards applications in single cell interrogation. Transmembrane studies of cellular activity (e.g. neurons, cardiomyocytes, etc.) have often been limited by the invasiveness of probe-induced membrane rupture. This often precludes chronic activity analysis. We have developed a copolymer-carbon nanotube (P-CNT) hybrid material for potential applications in non-invasive cell probing with attenuated inflammation due to the biomimetic stiffness of the copolymer coupled with nanoscale dimensions of the P-CNT complex. We applied both a diblock copolymer comprised of poly(ethylene oxide-b-methyl methacrylate; PEO-PMMA) as well as an acrylate-terminated amphiphilic `ABA' triblock copolymer comprised of polymethyloxazoline-polydimethylsiloxane-polymethyloxazoline; PMOXA-PDMS-PMOXA) as the supporting matrix for carbon nanotube deposition via the Langmuir-Blodgett methodology. This enabled the suspension of the carbon nanotubes on the air-water interface for transfer to a gold substrate. Cyclic voltammetry measurements confirmed that the CNT's were interfaced directly with the gold substrates to enable electrical functionality. In addition, cellular adhesion to the polymeric substrate was demonstrated, confirming the biocompatibility of the P-CNT material. CNT-coated electrodes were also examined as biological electrodes for the monitoring of oxidation-reduction processes driven by the cytochrome c mediator, where CNT/polymer-coated surfaces were also capable of facilitating anti-protein adsorption, resulting in the observation of reversible electron transfer between the protein and electrode. This was demonstrated via acquisition of pronounced anodic and cathodic peaks with peak separations of 64mV, which confirmed a reversible transfer process.
我们利用嵌段共聚物薄膜作为模板沉积单壁碳纳米管的模式,以应用于单细胞审讯。细胞活动(如神经元、心肌细胞等)的跨膜研究常常受到探针诱导的膜破裂的侵袭性的限制。这通常排除了慢性活动分析。我们开发了一种共聚物-碳纳米管(P-CNT)混合材料,由于共聚物的仿生刚度加上P-CNT复合物的纳米尺寸,该材料有望应用于非侵入性细胞探测,具有减轻炎症的潜力。我们采用了由聚环氧乙烷-甲基丙烯酸甲酯组成的二嵌段共聚物;PEO-PMMA)以及由聚甲基氯恶唑-聚二甲基硅氧烷-聚甲基氯恶唑啉组成的丙烯酸酯端端两亲性“ABA”三嵌段共聚物;通过Langmuir-Blodgett方法,将PMOXA-PDMS-PMOXA)作为碳纳米管沉积的支撑基质。这使得碳纳米管悬浮在空气-水界面上,转移到金衬底上。循环伏安法测量证实碳纳米管与金衬底直接连接,以实现电气功能。此外,细胞粘附在聚合物底物上,证实了p -碳纳米管材料的生物相容性。碳纳米管涂层电极也被检测为生物电极,用于监测由细胞色素c介质驱动的氧化还原过程,其中碳纳米管/聚合物涂层表面也能够促进抗蛋白质吸附,从而观察到蛋白质和电极之间的可逆电子转移。这是通过采集明显的阳极和阴极峰来证明的,峰间距为64mV,这证实了一个可逆的转移过程。
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引用次数: 0
Study of Excimer Laser Electrochemical Etching Silicon 准分子激光电化学蚀刻硅的研究
Yuhong Long, Liangcai Xiong, T. Shi, Zirong Tang
To further understand the behavior of laser-induced electrochemical etching process, the experiments of micromachining silicon by laser-induced electrochemical etching were carried out. 248nm excimer laser as light source is adopted in this work with the power of 109W/cm2 for the first time and KOH solution is used as electrolyte. Based on the experiment results, the surface images and etching rate are analyzed in detail. It is verified that the compound technique is a combination of laser etching, electrochemical etching and coupling etching, and laser etching is dominating in the compound process. Besides, both liquid-enhanced pressure and jet shock pressure can preferably improve the etching rate. At the same time, the anisotropic etching stop of silicon in alkaline solution is solved in this study. As a result, this process can be applied to transfer pattern without mask, and it possesses the ability of machining large aspect ratio micro structures.
为了进一步了解激光诱导电化学蚀刻过程的行为,进行了激光诱导电化学蚀刻微加工硅的实验。本研究首次采用248nm准分子激光作为光源,功率为109W/cm2,采用KOH溶液作为电解液。根据实验结果,对表面图像和刻蚀速率进行了详细分析。验证了复合工艺是激光刻蚀、电化学刻蚀和耦合刻蚀的结合,激光刻蚀在复合工艺中占主导地位。此外,液体增强压力和射流冲击压力都能较好地提高刻蚀速率。同时,解决了硅在碱性溶液中的各向异性刻蚀停止问题。结果表明,该工艺可用于无掩模转移图案,并具有加工大纵横比微结构的能力。
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引用次数: 5
Workshop Speech: Role of University Research for Open Innovations in MNT 研讨会演讲:大学研究对MNT开放式创新的作用
O. Tabata
The role of University in MNT has been becoming more and more essential since the Micro Nano Technology (MNT) requires not only innovative seeds to open up a new application fields but also both well-qualified persons in MNT who lead this field. To meet these requirements, interdisciplinary and international collaboration and cooperation in education and research is crucially important. Firstly, part of related activities related to MNT in Kyoto University are introduced, such as the education program in MNT, the organization of newly established Micro Engineering Department, and research organization of Research Institute of Nano Science & Technology which is the lateral organization of several departments and colleges on nanotechnology. Secondly, two research topics in MNT, nano-scale material mechanical property characterization and nano-components assembly on MEMS which are pursued at Micro Nano System Laboratory are introduced as the tentative themes for further international collaboration and cooperation.
大学在微纳米技术中的作用越来越重要,因为微纳米技术不仅需要创新的种子来开辟新的应用领域,而且需要高素质的微纳米技术人才来领导这一领域。为了满足这些要求,教育和研究领域的跨学科和国际合作至关重要。首先介绍了京都大学与纳米技术相关的部分活动,如纳米技术的教育计划、新成立的微工程系的组织和纳米科学与技术研究所的研究机构,该研究所是多个系和学院的纳米技术横向组织。其次,介绍了微纳系统实验室正在进行的纳米纳米材料力学性能表征和纳米元件在MEMS上的组装这两个MNT研究课题,作为进一步国际合作的试验性主题。
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引用次数: 0
Numerical Simulation of Roughness Effect on Gaseous Flow and Heat Transfer in Microchannels 微通道内粗糙度对气体流动和传热影响的数值模拟
Tiantian Zhang, L. Jia
A three-dimensional compressible model of microchannel was established. Flow and heat transfer characteristics of nitrogen flows in microchannels (hydraulic diameter is 100 mum) with designed roughness in form of obstructions placed along channels walls have been investigated numerically through a finite element CFD code consideration of the effect of compressibility and viscosity heating. The model was verified through comparing with experiment data. Then the effects of the Reynolds number, obstruction height, obstruction pitch, obstruction geometry and width to height Ratio of obstruction on the flow and heat transfer characteristics were investigated.
建立了微通道的三维可压缩模型。考虑可压缩性和黏性加热的影响,通过有限元CFD程序对设计粗糙度为沿通道壁面放置障碍物形式的微通道(水力直径为100 μ m)内氮气流动的流动和传热特性进行了数值研究。通过与实验数据的对比,验证了模型的正确性。然后研究了雷诺数、障碍物高度、障碍物间距、障碍物几何形状和障碍物宽高比对流动和换热特性的影响。
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引用次数: 3
Fabrication and Characterization of Nanostructured Ta-Si-N Films 纳米结构Ta-Si-N薄膜的制备与表征
C. Chung, T.S. Chen, C. Peng, B.H. Wu
In this paper, the morphology and properties of nanostructured Ta-Si-N thin films fabricated by reactively cosputtering have been studied. The Ta-Si-N film is a mixed composite consisting of the Ta-Si, Ta-N and Si-N compounds. The TaN phase is polycrystalline while SiNx is amorphous. As Si is added to the Ta-N compound to form Ta-Si-N, the micro structure becomes nanocrystalline grains embedded in an amorphous matrix i.e. amorphous-like micro structure, which is also affected by the nitrogen flow ratio i.e. FN2%= FN2/( FN2+FAr) times 100% during sputtering. Amorphous-like Ta-Si-N films obtained at small FN2% of 2-10% had smaller roughness, lower resistivity and larger nanohardness compared to polycrystalline films at high FN2% of 20- 30%. The variation of Ta-Si-N micro structure leads to the different electrical and mechanical properties of films. The electric resistivity of Ta-Si-N increases with increasing FN2% while the nanohardness first increases to a maximum of 15.19 GPa from FN2% of 2% to 3%, then decreases with increasing FN2%. The higher hardness in amorphous-like Ta-Si-N exhibits a larger stiffness and resilience than polycrystalline one.
本文研究了反应溅射法制备的纳米结构Ta-Si-N薄膜的形貌和性能。Ta-Si- n薄膜是由Ta-Si、Ta-N和Si-N化合物组成的混合复合材料。TaN相为多晶相,而SiNx相为非晶相。当在Ta-N化合物中加入Si形成Ta-Si-N时,微观结构变成嵌套在非晶基体中的纳米晶颗粒即非晶状微观结构,这也受溅射过程中氮气流量比FN2 = FN2/(FN2+FAr)乘以100%的影响。与20- 30%高fn_2时的多晶膜相比,在2-10%的fn_2下得到的非晶Ta-Si-N膜具有更小的粗糙度、更低的电阻率和更大的纳米硬度。Ta-Si-N微观结构的变化导致薄膜的电学和力学性能的不同。Ta-Si-N的电阻率随fn_2的增加而增加,而纳米硬度在fn_2为2% ~ 3%时先增加到最大值15.19 GPa,然后随fn_2的增加而降低。高硬度的非晶Ta-Si-N比多晶Ta-Si-N具有更大的刚度和回弹性。
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引用次数: 1
Enzymatic Biosensors towards a Multiplexed Electronic Detection System for Early Cancer Diagnostics 面向早期癌症诊断的多路电子检测系统的酶生物传感器
D. Grieshaber, E. Reimhult, J. Voros
Enzymatic biosensors are expected to play a key-role in bio techno logical and biochemical analysis as shown by the success of glucose sensors in diabetes treatment. The aim of this work is to develop a multiplexed electronic detection system for early cancer diagnostics. Therefore, various enzymes were adsorbed to differently modified surfaces. Electrochemical optical waveguide lightmode spectroscopy (EC-OWLS) and electrochemical quartz crystal microbalance with dissipation (EC-QCM-D) were used to measure the mass and the activity of the adsorbed enzymes. The enzymes were specifically immobilized on a protein resistant PLL-g-PEG surface in order to reduce the loss of activity due to denaturation. In addition, enzymes were also incorporated into DNA-tagged vesicles to increase the signal and therefore the sensor sensitivity. The enzymatic activity of the different systems was compared. To further increase the sensitivity, ferrocyanide was used as an electron mediator.
随着葡萄糖传感器在糖尿病治疗中的成功应用,酶促生物传感器有望在生物技术和生化分析中发挥关键作用。本研究的目的是开发一种用于早期癌症诊断的多路电子检测系统。因此,不同的酶被吸附在不同修饰的表面上。利用电化学光波导光模光谱(ec - owl)和电化学耗散石英晶体微天平(EC-QCM-D)测定吸附酶的质量和活性。这些酶被特异性地固定在蛋白质抗性的PLL-g-PEG表面上,以减少因变性而导致的活性损失。此外,酶也被加入到dna标记的囊泡中,以增加信号,从而提高传感器的灵敏度。比较了不同体系的酶活性。为了进一步提高灵敏度,亚铁氰化物被用作电子介质。
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引用次数: 6
Immunogold Nanoparticle Combing Surface-Enhanced Raman Scattering Method for Protein A Detection 免疫金纳米粒子结合表面增强拉曼散射法检测蛋白A
Chi-Chang Lin, Jr-Tzai Chen, Yan-Fu Chen, T. Chang, Hsien-Chang Chang
An unique, sensitive, and highly specific immunoassay system using gold nanoparticles and surface-enhanced Raman spectroscopy (SERS) is described. To demonstrate the analytical capabilities of the new technique, Raman reporter (mercaptobenzoic, MBA) that is coimmobilized with biospeciflc anti-protein A on gold nanoparticles (AuNP). Anti-protein A-AuNP-MBA, which combing both electromagnetic field and chemical enhancement, was used to exploits the SERS-derived signal. A dynamic range of 2-3 orders of magnitude and 1-10 pg/mL of detection limitation of protein A were achieved. The results indicated this new technique could be used in clinical diagnostic applications with fast, high sensitivity and high-throughput screening of antibodies.
一个独特的,敏感的,高度特异性免疫分析系统使用金纳米粒子和表面增强拉曼光谱(SERS)被描述。为了证明新技术的分析能力,将拉曼报告基因(巯基苯甲酸,MBA)与生物特异性抗蛋白A共同固定在金纳米颗粒(AuNP)上。利用结合电磁场和化学增强的抗蛋白A-AuNP-MBA来利用sers衍生的信号。A蛋白的动态范围为2-3个数量级,检测限为1-10 pg/mL。结果表明,该方法具有快速、高灵敏度、高通量的抗体筛选方法,可用于临床诊断。
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引用次数: 0
期刊
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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