Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352266
S. D. Hutagalung, B.Y. Lee
Tin oxide (SnO2) and antimony-doped tin oxide (SnO2:Sb) thin films were deposited on the microscope slide glass substrates by sol-gel dip coating technique. Precursor solution was prepared using tin(IV) chloride pentahydrate, antimony chloride, urea, and hydrochloric acid. The Sb dopant concentration was varied from 1 to 4 mol% to investigate the effect of doping on the optical and surface roughness of the films. AFM image showed that undoped films having a very smooth surface morphology with nanostructure grain size in the range of 37.6 to 56.3 nm. Meanwhile, Sb-doped SnO2 was more roughness if compared to undoped one. The optical properties of the films have been studied from transmission spectra in the ultraviolet-visible wavelength range. Energy gap of Sb-doped SnO2 thin films are in the range of 4.07-4.11 eV, shifted to the lower value with increased doping concentration.
{"title":"Surface Profile and Optical Properties of Sb-doped SnO2 Thin Films","authors":"S. D. Hutagalung, B.Y. Lee","doi":"10.1109/NEMS.2007.352266","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352266","url":null,"abstract":"Tin oxide (SnO2) and antimony-doped tin oxide (SnO2:Sb) thin films were deposited on the microscope slide glass substrates by sol-gel dip coating technique. Precursor solution was prepared using tin(IV) chloride pentahydrate, antimony chloride, urea, and hydrochloric acid. The Sb dopant concentration was varied from 1 to 4 mol% to investigate the effect of doping on the optical and surface roughness of the films. AFM image showed that undoped films having a very smooth surface morphology with nanostructure grain size in the range of 37.6 to 56.3 nm. Meanwhile, Sb-doped SnO2 was more roughness if compared to undoped one. The optical properties of the films have been studied from transmission spectra in the ultraviolet-visible wavelength range. Energy gap of Sb-doped SnO2 thin films are in the range of 4.07-4.11 eV, shifted to the lower value with increased doping concentration.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127265038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352152
Y. Matsushita, M. Iwasawa, N. Ohba, S. Kumada, T. Suzuki, T. Ichimura
A microflow reaction system with immobilized a photocatalytic TiO2 layer was developed and the processes of oxidation of aromatic compounds and amine N-alkylation in microspace were examined. The photocatalytic microreactor has a remarkably large surface-to-volume ratio in comparison to conventional batch reactors and these model reactions proceeded very rapidly with considerably large efficiencies. The results suggest the feasibility of a photocatalytic microreaction system on organic reactions.
{"title":"Photocatalytic Oxidation and Alkylation Processes in Microreactors","authors":"Y. Matsushita, M. Iwasawa, N. Ohba, S. Kumada, T. Suzuki, T. Ichimura","doi":"10.1109/NEMS.2007.352152","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352152","url":null,"abstract":"A microflow reaction system with immobilized a photocatalytic TiO2 layer was developed and the processes of oxidation of aromatic compounds and amine N-alkylation in microspace were examined. The photocatalytic microreactor has a remarkably large surface-to-volume ratio in comparison to conventional batch reactors and these model reactions proceeded very rapidly with considerably large efficiencies. The results suggest the feasibility of a photocatalytic microreaction system on organic reactions.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127255304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352040
Yi Liu, A. Erdman, T. Cui
We present an inexpensive way to fabricate high-performance nanoparticle based ion-sensitive field-effect transistors (ISFETs) for the acetylcholine biosensing application. The fabrication is implemented with a low-cost layer-by-layer nano self-assembly and microfabrication techniques. Self-assembled silica nanoparticle thin film and indium oxide nanoparticle thin film work as the gate dielectric and semiconducting channel respectively. The ISFETs operate at a low-voltage range of less than 2 V, and has a high mobility of 43.10 cm2/Vs. Acetylcholine in a concentration as low as 100 nM could be detected with this sensor. The results presented herein suggest a route to inexpensive, high mobility ion-sensitive field-effect transistors for biosensing applications.
{"title":"Nano Self-Assembled Nanoparticle Ion-Sensitive Field-Effect Transistors for Acetylcholine Biosensing","authors":"Yi Liu, A. Erdman, T. Cui","doi":"10.1109/NEMS.2007.352040","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352040","url":null,"abstract":"We present an inexpensive way to fabricate high-performance nanoparticle based ion-sensitive field-effect transistors (ISFETs) for the acetylcholine biosensing application. The fabrication is implemented with a low-cost layer-by-layer nano self-assembly and microfabrication techniques. Self-assembled silica nanoparticle thin film and indium oxide nanoparticle thin film work as the gate dielectric and semiconducting channel respectively. The ISFETs operate at a low-voltage range of less than 2 V, and has a high mobility of 43.10 cm2/Vs. Acetylcholine in a concentration as low as 100 nM could be detected with this sensor. The results presented herein suggest a route to inexpensive, high mobility ion-sensitive field-effect transistors for biosensing applications.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130947006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352047
N. Islam, Kazi F. Ahmed, Abhilash Sugunan, Joydeep Dutta
Detection of latent fingerprints using lipophilic and polycationic polymer chitosan has been explored. The gold nanoparticle deposition on chitosan treated latent fingerprints enhances contrast, making the fingerprint identification possible. Chitosan being the second most abundant natural polymer, this technique can be an inexpensive and efficient method for fingerprint enhancement and its subsequent detection. This simple technique has a potential of immediate application in forensic science.
{"title":"Forensic Fingerprint Enhancement using Bioadhesive Chitosan and Gold Nanoparticles","authors":"N. Islam, Kazi F. Ahmed, Abhilash Sugunan, Joydeep Dutta","doi":"10.1109/NEMS.2007.352047","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352047","url":null,"abstract":"Detection of latent fingerprints using lipophilic and polycationic polymer chitosan has been explored. The gold nanoparticle deposition on chitosan treated latent fingerprints enhances contrast, making the fingerprint identification possible. Chitosan being the second most abundant natural polymer, this technique can be an inexpensive and efficient method for fingerprint enhancement and its subsequent detection. This simple technique has a potential of immediate application in forensic science.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128807047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352056
H. Mekaru, T. Takano, K. Awazu, M. Takahashi, R. Maeda
The authors fabricated silicon microstructures with inclined sidewalls on the SOI wafer by using tapered-RIE technique. Then, this wafer was processed to an X-ray mask that made the silicon structure an X-ray absorber. The inclined angle of the sidewall of silicon X-ray absorbers has been changed from 60 to 71 degrees by adjusting the pressure of the mixed gas in the process chamber of the ICP-RIE system. The thickness distribution of the X-ray absorber is different according to the difference of the inclined angle of the X-ray absorber. As a result, the transmission intensity of X-rays is locally changed, and the energy distribution of X-rays irradiated on a resist can be controlled. The authors experimented on the X-ray lithography using this X-ray gray mask and the beamline BL-4 in the synchrotron radiation facility TERAS of AIST. As a result, we succeeded in fabrication of three-dimensional PMMA microstructures by only one X-ray exposure without scanning and rotating the X-ray exposure stage.
{"title":"Fabrication of Three Dimensional X-ray Mask using MEMS Technology","authors":"H. Mekaru, T. Takano, K. Awazu, M. Takahashi, R. Maeda","doi":"10.1109/NEMS.2007.352056","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352056","url":null,"abstract":"The authors fabricated silicon microstructures with inclined sidewalls on the SOI wafer by using tapered-RIE technique. Then, this wafer was processed to an X-ray mask that made the silicon structure an X-ray absorber. The inclined angle of the sidewall of silicon X-ray absorbers has been changed from 60 to 71 degrees by adjusting the pressure of the mixed gas in the process chamber of the ICP-RIE system. The thickness distribution of the X-ray absorber is different according to the difference of the inclined angle of the X-ray absorber. As a result, the transmission intensity of X-rays is locally changed, and the energy distribution of X-rays irradiated on a resist can be controlled. The authors experimented on the X-ray lithography using this X-ray gray mask and the beamline BL-4 in the synchrotron radiation facility TERAS of AIST. As a result, we succeeded in fabrication of three-dimensional PMMA microstructures by only one X-ray exposure without scanning and rotating the X-ray exposure stage.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128824213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352159
M. Pandey, R. Reichenbach, A. Zehnder, A. Lal, H. Craighead
The quality factor of an oscillator is inversely proportional to the damping and is a measure of the width of its amplitude vs. forcing frequency response. For sensing and signal processing applications of microelectromechanical systems (MEMS) oscillators, the quality factor (henceforth called Q) affects the sensitivity and performance of such devices. As MEMS vibrates (resonates) some of its vibrational energy is transmitted to the substrate upon which the MEMS is fabricated. A large component of this energy is carried away as surface acoustic waves (SAW). We demonstrate a design that improves the Q of resonant MEMS oscillators by up to 4times by reflecting surface wave energy back to the MEMS. Wave reflection occurs at trenches fabricated in a circle around the MEMS. The trench creates a "mesa" that provides partial mechanical isolation to the MEMS. The loss of energy due to SAW increases almost exponentially with frequency, with a corresponding decrease in Q. Hence the demonstrated design would become even more useful with the increasing need for higher frequency resonators. The mesa structure presented here is a simple idea which can be easily integrated into existing fabrication procedures and can be used for commercial purposes.
{"title":"Anchor Loss Reduction in Resonant MEMS using MESA Structures","authors":"M. Pandey, R. Reichenbach, A. Zehnder, A. Lal, H. Craighead","doi":"10.1109/NEMS.2007.352159","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352159","url":null,"abstract":"The quality factor of an oscillator is inversely proportional to the damping and is a measure of the width of its amplitude vs. forcing frequency response. For sensing and signal processing applications of microelectromechanical systems (MEMS) oscillators, the quality factor (henceforth called Q) affects the sensitivity and performance of such devices. As MEMS vibrates (resonates) some of its vibrational energy is transmitted to the substrate upon which the MEMS is fabricated. A large component of this energy is carried away as surface acoustic waves (SAW). We demonstrate a design that improves the Q of resonant MEMS oscillators by up to 4times by reflecting surface wave energy back to the MEMS. Wave reflection occurs at trenches fabricated in a circle around the MEMS. The trench creates a \"mesa\" that provides partial mechanical isolation to the MEMS. The loss of energy due to SAW increases almost exponentially with frequency, with a corresponding decrease in Q. Hence the demonstrated design would become even more useful with the increasing need for higher frequency resonators. The mesa structure presented here is a simple idea which can be easily integrated into existing fabrication procedures and can be used for commercial purposes.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125419046","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352023
N. Jiao, Yuechao Wang, N. Xi, Z. Dong
A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM.
{"title":"Development of AFM Based on Nano Positioning Stage","authors":"N. Jiao, Yuechao Wang, N. Xi, Z. Dong","doi":"10.1109/NEMS.2007.352023","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352023","url":null,"abstract":"A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123082879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352117
Min-Haw Wang, Min-Feng Kao, Haw-Juin Liu, Wai-Hong Kan, Y. Hsu, L. Jang
A microfluidic device for capture of single cells and impedance measurement is presented. The device consists of a PDMS channel with three micro pillars and a glass substrate with electrodes. The experiments demonstrated that the HeLa cell (human cervical epithelioid carcinoma) was successfully captured by the micro pillars and its impedance was measured by impedance spectroscopy. The range of operation voltage is from 0.1 V to 1.5 V and the scan frequency is from 1 kHz to 100 kHz. According to experimental results, the HeLa cell is capacitive and its electrical model can be simplified to the parallel connection with one resistor and one capacitor. This developed technique for cell impedance analysis possesses advantages of physical capture, low cost, and easy of fabrication and measurement.
介绍了一种用于单细胞捕获和阻抗测量的微流控装置。该装置由带有三个微柱的PDMS通道和带有电极的玻璃基板组成。实验表明，微柱成功捕获了人宫颈上皮样癌HeLa细胞，并通过阻抗谱测量了HeLa细胞的阻抗。工作电压范围为0.1 V ~ 1.5 V，扫描频率范围为1khz ~ 100khz。实验结果表明，HeLa电池具有电容性，其电学模型可简化为一个电阻和一个电容并联。该方法具有物理捕获、成本低、易于制作和测量等优点。
{"title":"A Microfluidic Device for Capture of Single Cells and Impedance Measurement","authors":"Min-Haw Wang, Min-Feng Kao, Haw-Juin Liu, Wai-Hong Kan, Y. Hsu, L. Jang","doi":"10.1109/NEMS.2007.352117","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352117","url":null,"abstract":"A microfluidic device for capture of single cells and impedance measurement is presented. The device consists of a PDMS channel with three micro pillars and a glass substrate with electrodes. The experiments demonstrated that the HeLa cell (human cervical epithelioid carcinoma) was successfully captured by the micro pillars and its impedance was measured by impedance spectroscopy. The range of operation voltage is from 0.1 V to 1.5 V and the scan frequency is from 1 kHz to 100 kHz. According to experimental results, the HeLa cell is capacitive and its electrical model can be simplified to the parallel connection with one resistor and one capacitor. This developed technique for cell impedance analysis possesses advantages of physical capture, low cost, and easy of fabrication and measurement.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"381 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116224348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352108
C. Liewhiran, A. Camenzind, A. Teleki, S. Pratsinis, S. Phanichphant
ZnO nanoparticles were produced by FSP using zinc naphthenate as a precursor dissolved in toluene/acetonitrile (80/20 vol%). The phase and crystallite size were analyzed by X-ray diffraction (XRD), and the specific surface area (SSA) of the nanoparticles was measured by nitrogen adsorption (BET analysis). The ZnO particle size and morphologies was further investigated by transmission electron microscopy (TEM) revealing spheroidal, hexagonal, and rod-like morphologies. The crystallite sizes of ZnO spheroidal and hexagonal particles were in the range of 10-20 nm. ZnO nanorods were found to be ranging from 10-20 nm in width and 20-50 nm in length. Sensing films were produced by mixing the particles into an organic paste composed of terpineol and ethyl cellulose as a vehicle binder. The paste was doctor-bladed onto Al2O3 substrates interdigitated with Au electrodes. The morphology of the sensing films was analyzed by scanning electron microscopy (SEM). The gas sensing of ethanol (25-250 ppm) was studied at 400 degC in dry air. The oxidation of ethanol on the surface of the semiconductor was confirmed by mass spectroscopy (MS). Thick (5 mum) ZnO films showed high sensitivity and fast response times (within seconds). The sensitivity increased and the response time decreased with increasing ethanol concentration. These concentrations (25-250 ppm) were corresponded to be almost in the same range with detection limit of concentration for human breath analyzer. These sensor can be performed an ethanol sensing device that could be employed for control of drunken driving.
{"title":"High Performance Ethanol Sensor for Control Drunken Driving Based on Flame-made ZnO Nanoparticles","authors":"C. Liewhiran, A. Camenzind, A. Teleki, S. Pratsinis, S. Phanichphant","doi":"10.1109/NEMS.2007.352108","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352108","url":null,"abstract":"ZnO nanoparticles were produced by FSP using zinc naphthenate as a precursor dissolved in toluene/acetonitrile (80/20 vol%). The phase and crystallite size were analyzed by X-ray diffraction (XRD), and the specific surface area (SSA) of the nanoparticles was measured by nitrogen adsorption (BET analysis). The ZnO particle size and morphologies was further investigated by transmission electron microscopy (TEM) revealing spheroidal, hexagonal, and rod-like morphologies. The crystallite sizes of ZnO spheroidal and hexagonal particles were in the range of 10-20 nm. ZnO nanorods were found to be ranging from 10-20 nm in width and 20-50 nm in length. Sensing films were produced by mixing the particles into an organic paste composed of terpineol and ethyl cellulose as a vehicle binder. The paste was doctor-bladed onto Al2O3 substrates interdigitated with Au electrodes. The morphology of the sensing films was analyzed by scanning electron microscopy (SEM). The gas sensing of ethanol (25-250 ppm) was studied at 400 degC in dry air. The oxidation of ethanol on the surface of the semiconductor was confirmed by mass spectroscopy (MS). Thick (5 mum) ZnO films showed high sensitivity and fast response times (within seconds). The sensitivity increased and the response time decreased with increasing ethanol concentration. These concentrations (25-250 ppm) were corresponded to be almost in the same range with detection limit of concentration for human breath analyzer. These sensor can be performed an ethanol sensing device that could be employed for control of drunken driving.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124953306","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352170
S.S. Kim, E. Saeedi, D. Meldrum, B. Parviz
We present the current progress towards a fully integrated fluorescence detection system constructed via self-assembly of independently microfabricated excitation sources and photosensors onto a common template. The system template contains specifically shaped binding sites for micron-scale components and electrical interconnects. The self-assembly process allows for using materials such as plastic or glass for constructing the template that are incompatible with conventional microfabrication processes. The excitation sources are AlGaAs light emitting diodes and the photosensors are silicon pn junctions. These microcomponents are independently microfabricated and released from their respective substrates to yield a powder-like collection. The microcomponents are introduced over the template in a heated fluidic slurry and allowed to self-assemble onto the complementary-shaped binding sites. The self-assembly process is driven by capillary forces resultant from low melting point alloy coated on the electrical contact pads, fluidic forces, shape matching, and gravity. The final system offers a 3 times 3 array of individually addressable complete fluorescence detection units.
{"title":"Self-Assembled Heterogeneous Integrated Fluorescence Detection System","authors":"S.S. Kim, E. Saeedi, D. Meldrum, B. Parviz","doi":"10.1109/NEMS.2007.352170","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352170","url":null,"abstract":"We present the current progress towards a fully integrated fluorescence detection system constructed via self-assembly of independently microfabricated excitation sources and photosensors onto a common template. The system template contains specifically shaped binding sites for micron-scale components and electrical interconnects. The self-assembly process allows for using materials such as plastic or glass for constructing the template that are incompatible with conventional microfabrication processes. The excitation sources are AlGaAs light emitting diodes and the photosensors are silicon pn junctions. These microcomponents are independently microfabricated and released from their respective substrates to yield a powder-like collection. The microcomponents are introduced over the template in a heated fluidic slurry and allowed to self-assemble onto the complementary-shaped binding sites. The self-assembly process is driven by capillary forces resultant from low melting point alloy coated on the electrical contact pads, fluidic forces, shape matching, and gravity. The final system offers a 3 times 3 array of individually addressable complete fluorescence detection units.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125604823","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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