Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352091
S. Kamoldilok, B. Tunhoo, S. Sumriddetchkajorn, J. Nukeaw
The influence of substrate temperature controls on copper (II) phthalocyanine (CuPc) organic thin films onto glass substrate by organic evaporation system has been examined by X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM) and UV-VIS spectrophotometer. The two control methods are an on-off switching temperature control and a phase temperature control. The various substrate temperatures were controlled at 27, 80, 100, 120 and 150 degC, respectively. The thickness of all thin films is 30 nm. The XRD results from both methods show strongly peaks in orientation of [200] plane as alpha-phase monoclinic structure. By an on-off switching controlled temperature, the intensity of XRD peaks is increased with increasing substrate temperature. While intensity of XRD results from a phase controlled temperature shows increasing from 27 to 100 degC but decreasing from 120 to 150 degC. The CuPc grown at 150 degC exhibits nanorod-like structure obtained from an on-off switching temperature control and fiber-like structures obtained from a phase temperature controls. The optical absorptions of CuPc thin films of both methods determined from UV-VIS spectrophotometer show two strong peaks at 330 nm and 620 nm, denoted the B-band and Q-band, respectively.
{"title":"The Effect of Substrate Temperature on Structure and Optical Properties of Copper (II) Phthalocyanine (CuPc) Thin Films Prepared by Organic Evaporation","authors":"S. Kamoldilok, B. Tunhoo, S. Sumriddetchkajorn, J. Nukeaw","doi":"10.1109/NEMS.2007.352091","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352091","url":null,"abstract":"The influence of substrate temperature controls on copper (II) phthalocyanine (CuPc) organic thin films onto glass substrate by organic evaporation system has been examined by X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM) and UV-VIS spectrophotometer. The two control methods are an on-off switching temperature control and a phase temperature control. The various substrate temperatures were controlled at 27, 80, 100, 120 and 150 degC, respectively. The thickness of all thin films is 30 nm. The XRD results from both methods show strongly peaks in orientation of [200] plane as alpha-phase monoclinic structure. By an on-off switching controlled temperature, the intensity of XRD peaks is increased with increasing substrate temperature. While intensity of XRD results from a phase controlled temperature shows increasing from 27 to 100 degC but decreasing from 120 to 150 degC. The CuPc grown at 150 degC exhibits nanorod-like structure obtained from an on-off switching temperature control and fiber-like structures obtained from a phase temperature controls. The optical absorptions of CuPc thin films of both methods determined from UV-VIS spectrophotometer show two strong peaks at 330 nm and 620 nm, denoted the B-band and Q-band, respectively.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"315 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123328413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352140
Min-Hsien Wu, Junbo Wang, Jr-Lung Lin, Z. Cui, Z. Cui
The development of non-invasive optical fibre sensor array for on-line monitoring of pH in microbioreactors is described. The working principle is based on the optical absorption of phenol red contained in culture medium. Different from other devices of the similar working principle, the proposed device requires less liquid volume (less than 0.8 mul), is non-invasive, and particularly can be configured as an array. The computer simulation and experimental results revealed that the design of oval detection chamber can substantially reduce the response time. Also, the system was proved to be able to detect pH change (pH 6.8-7.8) experienced in normal cell culture.
{"title":"Development of Optical Fibre Sensors for Online pH Monitoring in Microbioreactors","authors":"Min-Hsien Wu, Junbo Wang, Jr-Lung Lin, Z. Cui, Z. Cui","doi":"10.1109/NEMS.2007.352140","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352140","url":null,"abstract":"The development of non-invasive optical fibre sensor array for on-line monitoring of pH in microbioreactors is described. The working principle is based on the optical absorption of phenol red contained in culture medium. Different from other devices of the similar working principle, the proposed device requires less liquid volume (less than 0.8 mul), is non-invasive, and particularly can be configured as an array. The computer simulation and experimental results revealed that the design of oval detection chamber can substantially reduce the response time. Also, the system was proved to be able to detect pH change (pH 6.8-7.8) experienced in normal cell culture.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132258083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352167
Ding Zhong, Hui Yang, Xueheng Yang, Yan Xu, Xianwu Han, Xiaoping Su, Anping Liu, Taiguo Tang, Changshui Chen
In this paper, the molecular structures of tungsten trioxide (WO3) crystal film surfaces are studied by AFM.IPC-208B, and their XRD spectrums are also analyzed. Two types of crystal film are: WO3 sol-gel film adulterated with platinum and WO3 magnetron ion sputtering film adulterated with platinum. The studies on WO3 sol-gel film adulterated with platinum show that it has been cubic crystal after annealing at 460degC, its crystal cell includes a WO6 octahedron in which six oxygen ions locate in the center of six planes of cube and one tungsten ion locates in the center of cube, its lattice parameter is about 0.75 plusmn 0.05 nm, its natural growth surface is (002) plane on which its one cell includes five ions, four oxygen ions locate in the culminations of quadrangle and one tungsten ion locates in the center of quadrangle, and the distance between two adjacent oxygen ions is about 0.55 plusmn 0.05 nm. Meanwhile the studies on WO3 magnetron ion sputtering film adulterated with platinum find that it has also been plate crystal after annealing at 400degC , its crystal cell includes four tetrahedrons, its natural growth surface is (106) plane on which its one cell includes three tungsten ions and seven oxygen ions or two tungsten ions and eight oxygen ions, these ions locate in the culminations of four coterminous quadrangles, and its lattice parameters are about 1.35 plusmn 0.05 nm and 0.35 plusmn 0.05 nm, respectively. The above results on molecular structures of WO3 crystal film surfaces have never been seen in overseas or home reports.
{"title":"Study on Space Morphology of Molecular Structure of Tungsten Trioxide Compound Film Surface by AFM","authors":"Ding Zhong, Hui Yang, Xueheng Yang, Yan Xu, Xianwu Han, Xiaoping Su, Anping Liu, Taiguo Tang, Changshui Chen","doi":"10.1109/NEMS.2007.352167","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352167","url":null,"abstract":"In this paper, the molecular structures of tungsten trioxide (WO3) crystal film surfaces are studied by AFM.IPC-208B, and their XRD spectrums are also analyzed. Two types of crystal film are: WO3 sol-gel film adulterated with platinum and WO3 magnetron ion sputtering film adulterated with platinum. The studies on WO3 sol-gel film adulterated with platinum show that it has been cubic crystal after annealing at 460degC, its crystal cell includes a WO6 octahedron in which six oxygen ions locate in the center of six planes of cube and one tungsten ion locates in the center of cube, its lattice parameter is about 0.75 plusmn 0.05 nm, its natural growth surface is (002) plane on which its one cell includes five ions, four oxygen ions locate in the culminations of quadrangle and one tungsten ion locates in the center of quadrangle, and the distance between two adjacent oxygen ions is about 0.55 plusmn 0.05 nm. Meanwhile the studies on WO3 magnetron ion sputtering film adulterated with platinum find that it has also been plate crystal after annealing at 400degC , its crystal cell includes four tetrahedrons, its natural growth surface is (106) plane on which its one cell includes three tungsten ions and seven oxygen ions or two tungsten ions and eight oxygen ions, these ions locate in the culminations of four coterminous quadrangles, and its lattice parameters are about 1.35 plusmn 0.05 nm and 0.35 plusmn 0.05 nm, respectively. The above results on molecular structures of WO3 crystal film surfaces have never been seen in overseas or home reports.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"177 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132299498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352205
K. Lai, N. Xi
Carbon nanotubes (CNTs) are found to be promising material for nanoelectronics due to its ultra small size and unique properties. It provides the possibility of miniaturizing conventional electronic devices, and therefore, people have focused on exploring its applications in nanoelectronics, such as replacing the conventional transistors, resisters and sensors, etc. In order to study its properties and use them as novel devices, methods to manipulate such nano sized particles on micro electrodes have to be developed. Since the size of CNTs is in nano scale, traditional robotic manipulation and assembly cannot be applied. A novel and effective CNT manipulation method is developed and presented in this paper. An automatic and robotic CNT deposition system is used to manipulate CNT across micro electrodes precisely by dielectrophertic (DEP) force. It is also integrated with micromanipulator, micro pump and micro pipette to deposit CNT dilution in desired positions of micro electrodes. This system can potentially be used to fabricate and manufacture an array of CNT based sensors, resulting in a fast, automatic and feasible method for batch making and assembling nano devices.
{"title":"Novel Carbon Nanotube Deposition System for Fabricating Nano Devices","authors":"K. Lai, N. Xi","doi":"10.1109/NEMS.2007.352205","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352205","url":null,"abstract":"Carbon nanotubes (CNTs) are found to be promising material for nanoelectronics due to its ultra small size and unique properties. It provides the possibility of miniaturizing conventional electronic devices, and therefore, people have focused on exploring its applications in nanoelectronics, such as replacing the conventional transistors, resisters and sensors, etc. In order to study its properties and use them as novel devices, methods to manipulate such nano sized particles on micro electrodes have to be developed. Since the size of CNTs is in nano scale, traditional robotic manipulation and assembly cannot be applied. A novel and effective CNT manipulation method is developed and presented in this paper. An automatic and robotic CNT deposition system is used to manipulate CNT across micro electrodes precisely by dielectrophertic (DEP) force. It is also integrated with micromanipulator, micro pump and micro pipette to deposit CNT dilution in desired positions of micro electrodes. This system can potentially be used to fabricate and manufacture an array of CNT based sensors, resulting in a fast, automatic and feasible method for batch making and assembling nano devices.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133746847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352228
Hsien-Chang Chang, Chao-Hung Chen, I. Cheng, Chi-Chang Lin
An electrodeless dielectrophoretic (EDEP) chip was designed and applied to separate the micro-particles in different sizes, and the ability of bio-separation of real samples also be examined. The dielectrophoretic (DEP) force can be principally created and controlled by provide a non-uniform electric field that is geometrically constricted by the insulator-patterned chip in combination with an alternative current (AC) electric field at frequency 10 kHz and 500 Vp-p set on the two sides of channel inlet. The EDEP chip was used to separate the E. coli and red blood cells (RBC), which from human whole blood sample, via well control of DEP force. Our results showed the bacteria and RBC can be separated into the higher and lower electric field regions of the EDEP chip in few seconds, respectively. A rapid, useful diagnosis tool, based on the EDEP method could be applied and used in the various fields of the bio-industry technology, the detection and the identification of clinical infections.
{"title":"Manipulation of Bioparticles on Electrodeless Dielectrophoretic Chip Based on AC Electrokinetic Control","authors":"Hsien-Chang Chang, Chao-Hung Chen, I. Cheng, Chi-Chang Lin","doi":"10.1109/NEMS.2007.352228","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352228","url":null,"abstract":"An electrodeless dielectrophoretic (EDEP) chip was designed and applied to separate the micro-particles in different sizes, and the ability of bio-separation of real samples also be examined. The dielectrophoretic (DEP) force can be principally created and controlled by provide a non-uniform electric field that is geometrically constricted by the insulator-patterned chip in combination with an alternative current (AC) electric field at frequency 10 kHz and 500 Vp-p set on the two sides of channel inlet. The EDEP chip was used to separate the E. coli and red blood cells (RBC), which from human whole blood sample, via well control of DEP force. Our results showed the bacteria and RBC can be separated into the higher and lower electric field regions of the EDEP chip in few seconds, respectively. A rapid, useful diagnosis tool, based on the EDEP method could be applied and used in the various fields of the bio-industry technology, the detection and the identification of clinical infections.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133126749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352035
Ming Kang, Ruifeng Yue, Jiangang Wu, Fan Ouyang, Litian Liu
A novel configuration of variable-focus liquid lens based on electrowetting-on-dielectric technique is presented, which consists of a glass slide growing a conductive indium tin oxide (ITO) film and a hydrophobic dielectric film, a hollow conical metal ring suspended right above, a gap between the slide and the ring, and the lens liquid (water). By changing the voltage applied to grounded metal ring and the ITO control electrode, both the position and curvature of the liquid meniscus can be reversibly adjusted, thus tuning the focal length of the lens. The experimental results show that at a 40 V power supply, the liquid lens is able to focus on objects from 2.5 centimeters up to infinity away with a good imaging quality.
{"title":"Meniscus Pinned Variable-focus Liquid Lens Based on Electrowetting-on-dielectric","authors":"Ming Kang, Ruifeng Yue, Jiangang Wu, Fan Ouyang, Litian Liu","doi":"10.1109/NEMS.2007.352035","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352035","url":null,"abstract":"A novel configuration of variable-focus liquid lens based on electrowetting-on-dielectric technique is presented, which consists of a glass slide growing a conductive indium tin oxide (ITO) film and a hydrophobic dielectric film, a hollow conical metal ring suspended right above, a gap between the slide and the ring, and the lens liquid (water). By changing the voltage applied to grounded metal ring and the ITO control electrode, both the position and curvature of the liquid meniscus can be reversibly adjusted, thus tuning the focal length of the lens. The experimental results show that at a 40 V power supply, the liquid lens is able to focus on objects from 2.5 centimeters up to infinity away with a good imaging quality.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130030140","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352025
Qinggang Liu, Yiping Li, Wenbing Zhao, Xiaotang Hu
An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular sensor to the micro target and then is reflected back into the sensor. The angular sensor is designed based on optical differential method which adopts two orthogonal optical inner-reflection critical angle prisms. A microprocessor control unit (MCU) is used to carry out the signals' collection, processing, display, communication and control signal's output via upper computer. The measurement resolution is better than 0.05arcsec when the measurement range is set to be plusmn 600arcsec. Moreover, the sensor has the merits of adjustable resolution/range and can measure two dimensional angular displacements synchronously.
{"title":"Two Dimensions Angular Sensor for Micro/Nano Measurement","authors":"Qinggang Liu, Yiping Li, Wenbing Zhao, Xiaotang Hu","doi":"10.1109/NEMS.2007.352025","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352025","url":null,"abstract":"An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular sensor to the micro target and then is reflected back into the sensor. The angular sensor is designed based on optical differential method which adopts two orthogonal optical inner-reflection critical angle prisms. A microprocessor control unit (MCU) is used to carry out the signals' collection, processing, display, communication and control signal's output via upper computer. The measurement resolution is better than 0.05arcsec when the measurement range is set to be plusmn 600arcsec. Moreover, the sensor has the merits of adjustable resolution/range and can measure two dimensional angular displacements synchronously.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130163854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352154
J. Núñez, J. Quintana, M. Avedillo
Multiple-valued logic (MVL) circuits are one of the most attractive applications of the monostable-to-multistable transition logic (MML), and they are on the basis of advanced circuits for communications. However, a proper design is not inherent to the usual MML circuit topologies. This paper analyses the case of an MML ternary inverter, and determines the relations that circuit representative parameters must verify to obtain a correct behaviour.
{"title":"Correct DC Operation in RTD-based Ternary Inverters","authors":"J. Núñez, J. Quintana, M. Avedillo","doi":"10.1109/NEMS.2007.352154","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352154","url":null,"abstract":"Multiple-valued logic (MVL) circuits are one of the most attractive applications of the monostable-to-multistable transition logic (MML), and they are on the basis of advanced circuits for communications. However, a proper design is not inherent to the usual MML circuit topologies. This paper analyses the case of an MML ternary inverter, and determines the relations that circuit representative parameters must verify to obtain a correct behaviour.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132677405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352014
C. Wei, C. Hsiao, Yuh-Chung Hu
The ZnO pyroelectric sensors with configuration of partially covered electrode were used to discuss the correlation between its voltage responsivity, morphology and mechanical properties of the thin film. The sensor based on pyroelectric thin film deposited by sputtering with RF power of 120 W was revealed higher voltage responsivity than those of 150 W and 90 W for 10-400 times. Meanwhile, the surface morphology reveals less defects and uniform grain size for the RF power of 120 W as characterized by SEM, which can be a symptom of the high voltage responsivity. On the other hand, the effective elastic modulus and hardness of ZnO film sputtered with RF power of 120 W were significantly (P Lt 0.05) larger than that of 90 W (21%) and (32%), and 150 W about 23% and 37%, respectively. Therefore, the effects of sputtering power on the voltage responsivity of the pyroelectric sensor can be analyzed and interpreted by the SEM morphology and its mechanical properties.
{"title":"The Effects of Mechanical Thin-film Properties on the Pyroelectric Signals","authors":"C. Wei, C. Hsiao, Yuh-Chung Hu","doi":"10.1109/NEMS.2007.352014","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352014","url":null,"abstract":"The ZnO pyroelectric sensors with configuration of partially covered electrode were used to discuss the correlation between its voltage responsivity, morphology and mechanical properties of the thin film. The sensor based on pyroelectric thin film deposited by sputtering with RF power of 120 W was revealed higher voltage responsivity than those of 150 W and 90 W for 10-400 times. Meanwhile, the surface morphology reveals less defects and uniform grain size for the RF power of 120 W as characterized by SEM, which can be a symptom of the high voltage responsivity. On the other hand, the effective elastic modulus and hardness of ZnO film sputtered with RF power of 120 W were significantly (P Lt 0.05) larger than that of 90 W (21%) and (32%), and 150 W about 23% and 37%, respectively. Therefore, the effects of sputtering power on the voltage responsivity of the pyroelectric sensor can be analyzed and interpreted by the SEM morphology and its mechanical properties.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114911095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352123
T. Phetchakul, N. Chomnawang, S. Cheirsirikul, N. Nakachai, E. Ratanaudomphisut, P. Songsiriritthigul
This paper presents a method for selective growth of CNT films. Specific areas for CNT growing were defined by patterning Ni electrodes on a Cu substrate using lithography process. CNT films were grown on the substrate by HFCVD method at atmospheric pressure using ethanol and hydrogen as sources. The films were examined and confirmed with SEM, Raman and EDX analysis. The authors observed that CNT only grow in selective areas of Ni. None can be grown on Cu background. This finding suggests a novel method of selective growth of CNT using Cu as a masking layer. Preliminary results also show possibility of growing CNT across the gaps between 3D interdigital Ni electrodes fabricated by LIGA technique.
{"title":"Selective Growth of CNT on Ni/Cu Substrate","authors":"T. Phetchakul, N. Chomnawang, S. Cheirsirikul, N. Nakachai, E. Ratanaudomphisut, P. Songsiriritthigul","doi":"10.1109/NEMS.2007.352123","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352123","url":null,"abstract":"This paper presents a method for selective growth of CNT films. Specific areas for CNT growing were defined by patterning Ni electrodes on a Cu substrate using lithography process. CNT films were grown on the substrate by HFCVD method at atmospheric pressure using ethanol and hydrogen as sources. The films were examined and confirmed with SEM, Raman and EDX analysis. The authors observed that CNT only grow in selective areas of Ni. None can be grown on Cu background. This finding suggests a novel method of selective growth of CNT using Cu as a masking layer. Preliminary results also show possibility of growing CNT across the gaps between 3D interdigital Ni electrodes fabricated by LIGA technique.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114998294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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