Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352213
P. Wanichapichart, T. Wongluksanapan, L. Khooburat
This work proposes a method to estimate cell dielectric properties using a rotating electric field. Signals given to four platinum electrodes were from a phase shift unit, which splits an input signal into four of pi/2 phase difference. The unit performs well under frequency below 5 MHz. Rotation patterns of pretreated Tetraselmis sp. were utilized to reveal dielectric information of the cells. The rotation of boiled cells diminished at the lower frequency range, while that of the arsenic pretreated cells was smaller than that of the control when higher arsenic concentration was used. The specific membrane conductance was increased from 0.5 kS.m-1 for the control to 90 kS.m-1 boiled cells. Pretreated cells with arsenic solution at 10 to 100 ppm levels increased the membrane conductance to 8.8 kS.m-1, much less effect compared to the boiled cells. Moreover, 24 hrs pretreatment was long enough for arsenic to penetrate the membrane, and the cytoplasmic permittivity was reduced from 39epsivO to about 13e0, independent of the arsenic levels used. The study can distinguish the viability from the non-viability cells by carefully selected field, frequency, and solution conductivity.
{"title":"Electrorotation: Diagnostic Tool for Abnormality of Marine Phytoplankton Cells","authors":"P. Wanichapichart, T. Wongluksanapan, L. Khooburat","doi":"10.1109/NEMS.2007.352213","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352213","url":null,"abstract":"This work proposes a method to estimate cell dielectric properties using a rotating electric field. Signals given to four platinum electrodes were from a phase shift unit, which splits an input signal into four of pi/2 phase difference. The unit performs well under frequency below 5 MHz. Rotation patterns of pretreated Tetraselmis sp. were utilized to reveal dielectric information of the cells. The rotation of boiled cells diminished at the lower frequency range, while that of the arsenic pretreated cells was smaller than that of the control when higher arsenic concentration was used. The specific membrane conductance was increased from 0.5 kS.m-1 for the control to 90 kS.m-1 boiled cells. Pretreated cells with arsenic solution at 10 to 100 ppm levels increased the membrane conductance to 8.8 kS.m-1, much less effect compared to the boiled cells. Moreover, 24 hrs pretreatment was long enough for arsenic to penetrate the membrane, and the cytoplasmic permittivity was reduced from 39epsivO to about 13e0, independent of the arsenic levels used. The study can distinguish the viability from the non-viability cells by carefully selected field, frequency, and solution conductivity.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"32 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116357748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352026
Yuh-Chung Hu, C. Wei, C. Hsiao, D.T.W. Li
This paper presents a high-precision algorithm for extracting the Young's modulus and stress gradient of thin films from the pull-in voltage measurement of a micro curled cantilever beam made of thin film materials. The algorithm considers the important issues including the fringing fields, the electromechanical coupling, and the stress-induced initial curling of the micro structures. The deviation of the extracted Young's modulus and stress gradient from the reality are below 4%. The present algorithm is very applicable to the wafer-lever testing of MEMS devices since the driving and response signals are both electric, the present algorithm could be accomplished using existing semiconductor testing equipments through probing on the bonding pads of devices.
{"title":"Extracting the Young's Modulus and Stress Gradient of Thin Films from the Pull-in Voltage of a Micro Curled Cantilever Beam","authors":"Yuh-Chung Hu, C. Wei, C. Hsiao, D.T.W. Li","doi":"10.1109/NEMS.2007.352026","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352026","url":null,"abstract":"This paper presents a high-precision algorithm for extracting the Young's modulus and stress gradient of thin films from the pull-in voltage measurement of a micro curled cantilever beam made of thin film materials. The algorithm considers the important issues including the fringing fields, the electromechanical coupling, and the stress-induced initial curling of the micro structures. The deviation of the extracted Young's modulus and stress gradient from the reality are below 4%. The present algorithm is very applicable to the wafer-lever testing of MEMS devices since the driving and response signals are both electric, the present algorithm could be accomplished using existing semiconductor testing equipments through probing on the bonding pads of devices.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127062213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352134
K. Koombua, R. Pidaparti, G. Tepper
A generic drug delivery system based on polymer nanotubes was design. Polymer nanotube bundles were used as drug delivery channels within a device. Because this device is very small and biocompatible, it can be implanted at any specific infectious location. The drug diffusion within the device was analyzed using the finite element method and the diffusion rate was calculated using Fick's law. The results showed the possibility of using this polymer-nanotube device as a drug delivery system that can provide a constant delivery rate and target a specific location.
{"title":"A Drug Delivery System Based on Polymer Nanotubes","authors":"K. Koombua, R. Pidaparti, G. Tepper","doi":"10.1109/NEMS.2007.352134","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352134","url":null,"abstract":"A generic drug delivery system based on polymer nanotubes was design. Polymer nanotube bundles were used as drug delivery channels within a device. Because this device is very small and biocompatible, it can be implanted at any specific infectious location. The drug diffusion within the device was analyzed using the finite element method and the diffusion rate was calculated using Fick's law. The results showed the possibility of using this polymer-nanotube device as a drug delivery system that can provide a constant delivery rate and target a specific location.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127088798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352225
Yi Zhang, Hang Guo
In this paper, the acoustic wave propagation of single walled carbon nanotube (SWCNT) is investigated with a look into their applications in vacuum sensors at the microscale. First, the carbon nanotube in fixed-free is simulated by a continuum elastic shell modeling to analyze to the wave propagation of single walled carbon nanotubes. The sensing principle of the single-walled carbon nanotube-based vacuum sensor is based on the resonant frequency shift of a carbon nanotube acoustic bridge driven by resonant ultrasound spectroscopy (RUS) when it is subjected to sub-atmosphere force or gas pressure. The results indicate that the quality factor of the SWCNT bridge can be very high. The simulation analysis results show that the modeling approach is appropriated to describe the acoustic wave propagation of SWNT, which may be adopted as a theoretical reference for vacuum sensor design.
{"title":"Acoustic Analysis of Single-Walled Carbon Nanotube-based Vacuum Sensor","authors":"Yi Zhang, Hang Guo","doi":"10.1109/NEMS.2007.352225","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352225","url":null,"abstract":"In this paper, the acoustic wave propagation of single walled carbon nanotube (SWCNT) is investigated with a look into their applications in vacuum sensors at the microscale. First, the carbon nanotube in fixed-free is simulated by a continuum elastic shell modeling to analyze to the wave propagation of single walled carbon nanotubes. The sensing principle of the single-walled carbon nanotube-based vacuum sensor is based on the resonant frequency shift of a carbon nanotube acoustic bridge driven by resonant ultrasound spectroscopy (RUS) when it is subjected to sub-atmosphere force or gas pressure. The results indicate that the quality factor of the SWCNT bridge can be very high. The simulation analysis results show that the modeling approach is appropriated to describe the acoustic wave propagation of SWNT, which may be adopted as a theoretical reference for vacuum sensor design.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125487993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352255
D. Yao, Chun-Yi Lin, Fang-Gang Tseng
Superparamagnetic nanoparticles have been fabricated successfully, which are composed of Fe3O4 by using wet chemical co-precipitate method. The nanoparticles were functionalized on the surface by conjugated with the abti-Rabbit IgG. In the recently research, we try to use this system to approach the work which is to increase the reaction efficiency between antibodies and antigens by applying magnetic fields to alternate the binding samples in solution. The applied magnetic fields are produced by electro-magnets with AC or DC input. In the preliminary experiment, the antibodies were reacted with the carboxyl group Thiol SAMs that were modified on the glass chip with gold film. The surface plasma resonance (SPR) was used to detect the binding number of antibodies on the chip. The binding efficiency could be further calculated. The results showed the binding efficiency could be improved by using superparamagnetic nanoparticles with applying magnetic fields.
{"title":"The application of Iron Oxide magnetic nanoparticles to improve the binding efficiency of the IgG and Thiol SAMs","authors":"D. Yao, Chun-Yi Lin, Fang-Gang Tseng","doi":"10.1109/NEMS.2007.352255","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352255","url":null,"abstract":"Superparamagnetic nanoparticles have been fabricated successfully, which are composed of Fe3O4 by using wet chemical co-precipitate method. The nanoparticles were functionalized on the surface by conjugated with the abti-Rabbit IgG. In the recently research, we try to use this system to approach the work which is to increase the reaction efficiency between antibodies and antigens by applying magnetic fields to alternate the binding samples in solution. The applied magnetic fields are produced by electro-magnets with AC or DC input. In the preliminary experiment, the antibodies were reacted with the carboxyl group Thiol SAMs that were modified on the glass chip with gold film. The surface plasma resonance (SPR) was used to detect the binding number of antibodies on the chip. The binding efficiency could be further calculated. The results showed the binding efficiency could be improved by using superparamagnetic nanoparticles with applying magnetic fields.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133677580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352229
V. Sudha Rani, C.O. Kim, B. Parvatheeswara Rao, S. Yoon, Cheolgi Kim
Electrodeposited Co nanowires were grown on self assembled diblock copolymer nanoporous templates. While keeping the template pore size and electrolyte pH value constant at 13.7 nm and 3.82, respectively, the DC current density (5 mA/cm2 and 50 mA/cm2) and time of deposition (50s, 100s, 150s and 200s) were varied as an attempt to obtain nanowires of varied aspect ratios and morphologies. It was observed that height of the nanowire linearly enhances with the time of the electrodeposition. SEM images of the samples indicate that the template pores were completely filled during deposition when the current density was set 50 mA/cm2. Excess times of deposition produced a thin layer of the deposited material on top of the porous template. Magnetic hysteresis properties of the generated nanowires were examined by vibration sample magnetometry. The loops displayed are highly square with coercivities of few tens of oersteds. The magnetization of the Co nanowires enhances as the height of the wires increases. The results were analyzed to understand the influence of current density on the growth of nanowires.
{"title":"Fabrication of Nanowire Arrays Using Diblock Copolymer","authors":"V. Sudha Rani, C.O. Kim, B. Parvatheeswara Rao, S. Yoon, Cheolgi Kim","doi":"10.1109/NEMS.2007.352229","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352229","url":null,"abstract":"Electrodeposited Co nanowires were grown on self assembled diblock copolymer nanoporous templates. While keeping the template pore size and electrolyte pH value constant at 13.7 nm and 3.82, respectively, the DC current density (5 mA/cm2 and 50 mA/cm2) and time of deposition (50s, 100s, 150s and 200s) were varied as an attempt to obtain nanowires of varied aspect ratios and morphologies. It was observed that height of the nanowire linearly enhances with the time of the electrodeposition. SEM images of the samples indicate that the template pores were completely filled during deposition when the current density was set 50 mA/cm2. Excess times of deposition produced a thin layer of the deposited material on top of the porous template. Magnetic hysteresis properties of the generated nanowires were examined by vibration sample magnetometry. The loops displayed are highly square with coercivities of few tens of oersteds. The magnetization of the Co nanowires enhances as the height of the wires increases. The results were analyzed to understand the influence of current density on the growth of nanowires.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127015465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352100
N. Kayunkid, A. Keawprajak, A. Jaruwanawat, J. Nukeaw
The electrical and optical properties of organic-inorganic hybrid light emitting diodes (HLED) have been investigated. The HLED is consisted of organic material N,N'-di(naphthalene-l-yl)-N,N'- diphenyl-benzidine (NPB) as a hole transport layer and inorganic material zinc selenide (ZnSe) as an electron transport layer and emitting layer as well. The electrical and optical properties have been characterized by current-voltage measurement and electroluminescence (EL) spectroscopy, respectively. The current of HLED decreases with increasing ZnSe thickness, while the threshold voltage increases. The EL spectrum exhibits two peaks at 457 nm and 500 nm, due to electron-hole recombination from energy gap of ZnSe and recombination from defect states in ZnSe layer, respectively. The emission mechanism is described by electric field in organic and inorganic layers.
{"title":"Blue Emission Mechanism of NPB/ZnSe Hybrid Structure","authors":"N. Kayunkid, A. Keawprajak, A. Jaruwanawat, J. Nukeaw","doi":"10.1109/NEMS.2007.352100","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352100","url":null,"abstract":"The electrical and optical properties of organic-inorganic hybrid light emitting diodes (HLED) have been investigated. The HLED is consisted of organic material N,N'-di(naphthalene-l-yl)-N,N'- diphenyl-benzidine (NPB) as a hole transport layer and inorganic material zinc selenide (ZnSe) as an electron transport layer and emitting layer as well. The electrical and optical properties have been characterized by current-voltage measurement and electroluminescence (EL) spectroscopy, respectively. The current of HLED decreases with increasing ZnSe thickness, while the threshold voltage increases. The EL spectrum exhibits two peaks at 457 nm and 500 nm, due to electron-hole recombination from energy gap of ZnSe and recombination from defect states in ZnSe layer, respectively. The emission mechanism is described by electric field in organic and inorganic layers.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130333410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352171
Nan Li, Daniel T. Kamei, Chih-Ming Ho
This paper presents a microfluidic device for continuous human blood cell subtype separation using the deterministic lateral displacement principle. Based on their significant size and shape differences, three major cell types of human whole blood - platelets, red blood cells and white blood cells -were demonstrated to be directly separated using a two-stage separation strategy. Even though all white blood cells are spherical and have diameters within a narrow range (8-20mum), the initial limitation for using this principle to separate white blood cell subtypes was conquered by attaching larger polystyrene microbeads to one of the subtypes to amplify the size differences. Specifically, continuous separation of human CD4+ T helper lymphocytes from other white blood cell subtypes was achieved with high purity and recovery due to the underlying high affinity and high specificity of the antigen-antibody interaction used to attach the microbeads to the lymphocytes. With our novel approach, the pure population of one blood cell subtype can be effectively isolated by exploring the deterministic lateral displacement principle, which has the advantages of the simplicity, high speed and high resolution. Because many cells express unique surface markers, this method can theoretically be applied to separate any target cell type from a heterogeneous mixture for downstream analysis.
{"title":"On-Chip Continuous Blood Cell Subtype Separation by Deterministic Lateral Displacement","authors":"Nan Li, Daniel T. Kamei, Chih-Ming Ho","doi":"10.1109/NEMS.2007.352171","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352171","url":null,"abstract":"This paper presents a microfluidic device for continuous human blood cell subtype separation using the deterministic lateral displacement principle. Based on their significant size and shape differences, three major cell types of human whole blood - platelets, red blood cells and white blood cells -were demonstrated to be directly separated using a two-stage separation strategy. Even though all white blood cells are spherical and have diameters within a narrow range (8-20mum), the initial limitation for using this principle to separate white blood cell subtypes was conquered by attaching larger polystyrene microbeads to one of the subtypes to amplify the size differences. Specifically, continuous separation of human CD4+ T helper lymphocytes from other white blood cell subtypes was achieved with high purity and recovery due to the underlying high affinity and high specificity of the antigen-antibody interaction used to attach the microbeads to the lymphocytes. With our novel approach, the pure population of one blood cell subtype can be effectively isolated by exploring the deterministic lateral displacement principle, which has the advantages of the simplicity, high speed and high resolution. Because many cells express unique surface markers, this method can theoretically be applied to separate any target cell type from a heterogeneous mixture for downstream analysis.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116866401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352240
U. Lee, Hyukjin Oh, S. You
Fundamental natural frequencies of armchair single-walled carbon nanotubes (SWCNTs) are evaluated in this paper. As there is no universal agreement on the exact wall thickness of a SWCNT, some different wall thicknesses have been assumed by most of researchers to report a wide range of different elastic constants for a SWCNT. Thus, to compute the effective structural properties of SWCNTs needed for the evaluation of their fundamental natural frequencies, without needing to assume the controversial wall thickness, we adopt a new continuum modeling method developed in our previous study based on the energy equivalence principle.
{"title":"Natural Frequencies of Single-Walled Carbon Nanotubes","authors":"U. Lee, Hyukjin Oh, S. You","doi":"10.1109/NEMS.2007.352240","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352240","url":null,"abstract":"Fundamental natural frequencies of armchair single-walled carbon nanotubes (SWCNTs) are evaluated in this paper. As there is no universal agreement on the exact wall thickness of a SWCNT, some different wall thicknesses have been assumed by most of researchers to report a wide range of different elastic constants for a SWCNT. Thus, to compute the effective structural properties of SWCNTs needed for the evaluation of their fundamental natural frequencies, without needing to assume the controversial wall thickness, we adopt a new continuum modeling method developed in our previous study based on the energy equivalence principle.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131542458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352104
H.T. Chen, C.W. Liu, S.G. Liu, C.S. Yang, C. Gau
Fabrication of a temperature sensor array and a heater in a complicated heat transfer microchannel system, on a glass substrate, is presented. In addition to the glass substrate, low thermal conductivity materials such as SU-8, PMMA plate are selected to form the micro channel wall to provide good thermal insulation. Both the titanium and the platinum are deposited sequentially on a glass plate and made into heater and sensors, respectively. Lift-off method is used to obtain the desired pattern for heater and sensors. The fabrication process is much simpler than those reported in literature. Design consideration and fabrication techniques involved in this processes is discussed. Finally, validation of the heaters and sensors fabricated and a measurement of the heat transfer coefficient distributions inside the micro channel is presented.
{"title":"Fabrication of a Complicated Heat Transfer Microchannel System for CPU Cooling Study","authors":"H.T. Chen, C.W. Liu, S.G. Liu, C.S. Yang, C. Gau","doi":"10.1109/NEMS.2007.352104","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352104","url":null,"abstract":"Fabrication of a temperature sensor array and a heater in a complicated heat transfer microchannel system, on a glass substrate, is presented. In addition to the glass substrate, low thermal conductivity materials such as SU-8, PMMA plate are selected to form the micro channel wall to provide good thermal insulation. Both the titanium and the platinum are deposited sequentially on a glass plate and made into heater and sensors, respectively. Lift-off method is used to obtain the desired pattern for heater and sensors. The fabrication process is much simpler than those reported in literature. Design consideration and fabrication techniques involved in this processes is discussed. Finally, validation of the heaters and sensors fabricated and a measurement of the heat transfer coefficient distributions inside the micro channel is presented.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131741647","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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