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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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A Molecular Dynamics on the Thermally Developing Flow of Alanine in Nano-Channel 纳米通道中丙氨酸热发展流动的分子动力学研究
D.T.W. Lin
The flow of the body fluid in the bio-chip and local metabolism require general solutions for the thermally developing flow model in bio-tissue. An algorithm based on the molecular dynamics (MD) and the GROMACS protein data bank is developed to solve the thermally developing bio-flow problem. The flow of the Alanine in the nano-channel driven by a constant external force and applied the thermal boundary are studied. Both global effect (effective channel width) and local effect (thermal boundary) are examined to demonstrate the features of the distributions of velocity in the system. This algorithm can be applied in the design of bio-chip's channel and the building of fundamental phenomena of the burn or frostbite.
生物芯片中体液的流动和局部代谢需要生物组织中热发展流动模型的通用解决方案。提出了一种基于分子动力学(MD)和GROMACS蛋白质数据库的算法来解决热发展的生物流动问题。研究了恒定外力驱动下丙氨酸在纳米通道内的流动。考察了整体效应(有效通道宽度)和局部效应(热边界),以说明系统中速度分布的特征。该算法可用于生物芯片通道的设计和烧伤、冻伤基本现象的构建。
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引用次数: 1
A wearable humidity sensor with hydrophilic membrane by Soft-MEMS techniques 基于软mems技术的可穿戴式亲水膜湿度传感器
Y. Miyoshi, T. Tkeuchi, T. Saito, H. Saito, H. Kudo, K. Otsuka, K. Mitsubayashi
An electric conductimetric sensor (thickness: 80 mum) constructed in a sandwich configuration with a hydrophilic poly-tetrafluoroethylene membrane placed between two gold deposited layers was evaluated for use as a moisture sensor. The humidity level was measured by electrical conductivity of the device using the multifrequency LCR-meter at frequencies ranging from 100 Hz to 100 k Hz, the device was calibrated at 100 Hz against the moisture air over the range of 30 - 85 % RH, which includes normal humidity level in the atmosphere and physiologic air such as breath and sweating. The response sensitivity of the conductimetric device was extremely high (i.e. less than 1 sec. for conductivity shift between humid air of 80 % RH and dried air of -60 degC dew point) even for recovery to dried air. The sensor performance was reproducible over multiple measurements, showing the highly reproducibility with a coefficient of variation of 1.77 % (n = 5).
在两个金沉积层之间放置亲水聚四氟乙烯膜的夹层结构中构建了一种导电传感器(厚度:80微米),评估了其作为湿度传感器的用途。湿度水平使用多频LCR-meter在100 Hz至100 k Hz的频率范围内通过设备的电导率来测量,该设备在100 Hz下针对30 - 85% RH范围内的潮湿空气进行校准,其中包括大气中的正常湿度水平和生理空气(如呼吸和出汗)。电导装置的响应灵敏度非常高(即,在80% RH的潮湿空气和-60℃露点的干燥空气之间的电导率变化小于1秒),即使恢复到干燥空气。该传感器的性能可重复多次测量,重复性高,变异系数为1.77% (n = 5)。
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引用次数: 3
Nanostructured Silicon Carbide Molds for Glass Press Molding 玻璃压制成型用纳米碳化硅模具
Jihyum Shin, S. Tanaka, M. Esashi
This paper reports the first result of press molding of Pyrex glass using a silicon carbide (SiC) mold with nanopatterns. First, the nanopatterns were formed on a silicon substrate by electron beam lithography and fast atom beam (FAB) etching. To transfer these patterns to SiC, SiC was deposited on the patterned silicon substrate, and the SiC surface was polished to mirror finish. Subsequently, a SiC ceramic plate was bonded to the polished SiC surface using sputter deposited nickel as an interlayer. Finally, the silicon substrate was etched to release the SiC mold. Using the fabricated SiC molds without an anti-sticking layer, we succeeded in press-molding Pyrex glass (Corning 7740) at 800 degC. In this process, we found surface roughening problem, which occurs in SiC atmospheric vapor deposition on FAB-etched areas. This is due to damage in silicon by FAB, and enhanced under the existence of surface natural oxide.
本文报道了用纳米图案碳化硅(SiC)模具压制成型耐热玻璃的第一个结果。首先,通过电子束光刻和快速原子束(FAB)蚀刻在硅衬底上形成纳米图案。为了将这些图案转移到SiC上,将SiC沉积在图案化的硅衬底上,并将SiC表面抛光至镜面光洁度。随后,用溅射沉积的镍作为中间层将SiC陶瓷板粘结在抛光后的SiC表面上。最后,蚀刻硅衬底以释放SiC模具。使用没有防粘层的SiC模具,我们成功地在800℃下压制成型Pyrex玻璃(康宁7740)。在此过程中,我们发现了在fab蚀刻区域的SiC大气气相沉积中出现的表面粗糙问题。这是由于在硅中被FAB破坏,并且在表面天然氧化物的存在下增强。
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引用次数: 8
Fabrication of Nanowire Arrays Using Diblock Copolymer 用双嵌段共聚物制备纳米线阵列
V. Sudha Rani, C.O. Kim, B. Parvatheeswara Rao, S. Yoon, Cheolgi Kim
Electrodeposited Co nanowires were grown on self assembled diblock copolymer nanoporous templates. While keeping the template pore size and electrolyte pH value constant at 13.7 nm and 3.82, respectively, the DC current density (5 mA/cm2 and 50 mA/cm2) and time of deposition (50s, 100s, 150s and 200s) were varied as an attempt to obtain nanowires of varied aspect ratios and morphologies. It was observed that height of the nanowire linearly enhances with the time of the electrodeposition. SEM images of the samples indicate that the template pores were completely filled during deposition when the current density was set 50 mA/cm2. Excess times of deposition produced a thin layer of the deposited material on top of the porous template. Magnetic hysteresis properties of the generated nanowires were examined by vibration sample magnetometry. The loops displayed are highly square with coercivities of few tens of oersteds. The magnetization of the Co nanowires enhances as the height of the wires increases. The results were analyzed to understand the influence of current density on the growth of nanowires.
在自组装的二嵌段共聚物纳米孔模板上生长电沉积钴纳米线。在保持模板孔径和电解液pH分别为13.7 nm和3.82 nm的情况下,改变直流电流密度(5 mA/cm2和50 mA/cm2)和沉积时间(50s, 1000s, 150s和200s),试图获得不同宽高比和形貌的纳米线。观察到纳米线的高度随电沉积时间的增加呈线性增加。样品的SEM图像表明,当电流密度为50 mA/cm2时,模板孔在沉积过程中被完全填充。过多的沉积次数会在多孔模板的顶部产生一层薄薄的沉积材料。用振动样品磁强计测试了制备的纳米线的磁滞特性。所显示的环路是高度方形的,矫顽力只有几十伏。钴纳米线的磁化强度随高度的增加而增强。对实验结果进行分析,了解电流密度对纳米线生长的影响。
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引用次数: 3
Carbon Nanotube-based Nanoprobe Electrode 碳纳米管基纳米探针电极
Takeshi Kawano, C. Y. Cho, Liwei Lin
This paper reports a 10-nm in diameter nanoprobe electrode made of carbon nanotube (CNT) for possible electrophysiological measurements for biomedical applications. The nanoprobe is based on an individual carbon nanotube fabricated by a controlled local growth process and subsequently encapsulated with an insulating layer of Parylene-C. It is integrated with a silicon microstructure with a total length of 5mum and its tip at the distal end is locally heated to expose about 100nm-long CNT as the sensing port. We believe this nano scale CNT probe, with its high strength and Young's modulus, may act as a low-invasive intracellular electrode for measurements inside cells or neurons.
本文报道了一种直径为10nm的碳纳米管(CNT)纳米探针电极,可用于生物医学领域的电生理测量。该纳米探针基于单个碳纳米管,通过可控的局部生长过程制备,随后包裹有聚苯乙烯- c绝缘层。它集成了一个总长度为5nm的硅微结构,其远端尖端局部加热,暴露出约100nm长的碳纳米管作为传感端口。我们相信,这种具有高强度和杨氏模量的纳米尺度碳纳米管探针可以作为一种低侵入性的细胞内电极,用于细胞或神经元内部的测量。
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引用次数: 9
Fluorescence Visualization of Carbon Nanotubes Using Quenching Effect for Nanomanipulation 纳米操作中碳纳米管猝灭效应的荧光显示
F. Arai, M. Nagai, A. Shimizu, A. Ishijima, T. Fukuda
The paper demonstrates visualization method of carbon nanotubes (CNTs) in water with fluorescent microscopy through quenching effect that cause a decrease of fluorescent intensity around CNTs. Reversal contrast in fluorescence imaging of the CNTs was observed in fluorescent dye solution. CNTs under a constant excitation light could be observed for more than ten minutes. Dielectrophoretic force was used for CNTs deposition onto electrodes that consist of transparent conductive film. Scanning electron microscope revealed that CNTs of 80 nm in diameter were observed with fluorescent microscopy. The positions of the CNTs tips were observed under optical microscope. It can be applied for biological sensing devices with nanomanipulation.
本文通过猝灭效应证明了荧光显微镜在水中观察碳纳米管(CNTs)的方法,猝灭效应导致碳纳米管周围的荧光强度降低。在荧光染料溶液中观察到碳纳米管荧光成像的反转对比。在恒定的激发光下,可以观察到碳纳米管在十分钟以上。介质电泳力用于将碳纳米管沉积到由透明导电膜组成的电极上。扫描电镜显示,荧光显微镜观察到直径为80 nm的碳纳米管。在光学显微镜下观察CNTs尖端的位置。该方法可应用于纳米操作的生物传感装置。
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引用次数: 3
Morphology of Silicon Nanowires Grown on Si(100) Substrate 在Si(100)衬底上生长的硅纳米线的形貌
S. D. Hutagalung, K. A. Yaacob, R. Tan
The silicon nanowires (SiNWs) were growth on Si(100) surface by electroless metal deposition in ionic metal hydro fluoric solution. The growth mechanisms of SiNWs were analyzed on the basis of a self-assembled localized microscopic electrochemical model through selective etching on the silicon substrate. From AFM and FESEM images were found that orientation of SiNWs is perpendicular to the surface of silicon. SiNWs have been grown significant in vertical and one dimensional (ID) direction. The diameter of the wire is less than 100 nm which is dependent of the surrounding pores size due to etching process. The average roughness of 132.1 nm was obtained from AFM image, as well as the peak-to-valley roughness takes value of up to 911.7 nm. On the other sample was found that the peak-to-valley roughness of a selected area of surface up to 3.183 mum obtained by NC-AFM image analysis.
在离子金属氢氟酸溶液中,采用化学沉积方法在Si(100)表面生长出硅纳米线。基于自组装局部微观电化学模型,通过选择性蚀刻在硅衬底上分析了SiNWs的生长机理。原子力显微镜(AFM)和衍射电镜(FESEM)图像显示SiNWs的取向与硅表面垂直。SiNWs在垂直方向和一维方向上都有显著的增长。金属丝的直径小于100nm,这取决于蚀刻工艺造成的周围孔的大小。AFM图像的平均粗糙度为132.1 nm,峰谷粗糙度高达911.7 nm。在另一个样品上发现,通过NC-AFM图像分析获得的选定区域表面的峰谷粗糙度可达3.183 mum。
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引用次数: 0
New Design of a Compact Parallel Micro-Nano Two-Fingered Manipulator Hand 小型并联微纳双指机械手的新设计
A. Ramadan, K. Inoue, T. Arai, T. Takubo, T. Tanikawa
This paper presents the analysis and design optimization of a new compact and yet economical micro-nano two-fingered manipulator hand. The proposed manipulator hand consists of two series modules; upper and lower module. Each module consists of a parallel kinematics chain with a glass pipette of 3 to 10 cm length as an end effector. It is driven by three piezoelectric actuated prismatic joints in each of the three legs of the kinematics chain. Each leg of the kinematics chain has the structure of prismatic-revolute-socket ball (PRS) joints structure. As the length of the glass pipette end effector is decreased, the resolution and accuracy of the micro-nano manipulator hand is increased. A new solution for the problem of inverse kinematics is obtained. Based on this solution, a simulation program has been developed to optimally choose the design parameters of each module so that the manipulator have a maximum workspace volume. Also the manipulator hand is small in size due to the proposed architecture.
本文对一种结构紧凑、经济实用的新型微纳双指机械手进行了分析和优化设计。所提出的机械手手由两个串联模块组成;上下模块。每个模块由一个平行的运动链与3至10厘米长的玻璃移液器作为末端执行器。它是由三个压电驱动的移动关节在运动链的三个腿的每一个驱动。运动链的每条腿都采用棱镜-转动-窝球(PRS)关节结构。随着玻璃移液器末端执行器长度的减小,微纳机械手手部的分辨率和精度得到提高。得到了一种新的逆运动学解。在此基础上,开发了仿真程序,对各模块的设计参数进行优化选择,使机械手具有最大的工作空间。此外,由于所提出的架构,机械手手的尺寸很小。
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引用次数: 9
NEMS Devices for Accelerometers Compatible with Thin SOI Technology 与薄SOI技术兼容的加速度计NEMS器件
E. Oiller, L. Duraffourg, M. Delaye, H. Grange, S. Deneuville, J. Bernos, R. Dianoux, F. Marchi, D. Renaud, T. Baron, P. Andreucci, P. Robert
The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM characterizations have allowed to fabricate NEMS devices and to provide AFM characterizations.
本文提出了一种基于薄SOI技术并兼容“内嵌”集成的加速度计用薄SOI NEMS结构。卡西米力的建模、加速度计的设计、混合电子束/DUV光刻和fh蒸气释放的改进、特定AFM表征的开发,使得制造NEMS设备和提供AFM表征成为可能。
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引用次数: 15
Investigations on Actuation Critical Response Voltage for IPMC Based on Modified EVOH lonomer 基于改进EVOH单体的IPMC驱动临界响应电压研究
Yujun Zhang, Fengfu Li, Lei Li, Li-jun Dai
A novel ionic polymer-metal composite (IPMC), based on EVOH-SPEG ionomer synthesized by sulfonilication of poly (ethylene-co-vinyl alcohol) (EVOH) grafted 2-(2-chloroethoxy) ethanol (C4H9O2Cl) or 2-[2-(2-chloroethxy) ethoxyl ethanol (C6H13O3Cl) with 1, 3-propane sultone, has been prepared through electroless deposition of platinum on the bare polymer film. Based upon linear irreversible thermodynamics and cantilever beam model, the theoretical formula of IPMC actuation critical response voltage (UC) was set up. And the UC of IPMC based on different side chain length EVOH-SPEG were calculated with the intercept method and the theoretical formula, with the help of the IPMC tip force (FT) experiment. The calculated UC value was accordance with the influence of polymer structure and ionic conductivity on IPMC actuation critical response voltage, and there is a deviation between the UCobtained with intercept method and calculated by theoretical formula. As the theoretical principle, the UC theoretical formula could be used for analyzing the influence of polymer intrinsic characteristic on the actuation of IPMC material.
以聚乙烯-乙烯醇(EVOH)接枝2-(2-氯乙氧基)乙醇(C4H9O2Cl)或2-[2-(2-氯乙氧基)乙氧基乙醇(C6H13O3Cl)与1,3 -丙烷磺酮磺化合成的EVOH- speg离子聚合物为基础,在裸膜上化学沉积铂,制备了新型离子聚合物-金属复合材料(IPMC)。基于线性不可逆热力学和悬臂梁模型,建立了IPMC驱动临界响应电压(UC)的理论公式。利用截距法和理论公式,结合IPMC尖端力(FT)实验,计算了不同侧链长度EVOH-SPEG下IPMC的UC。计算得到的UC值与聚合物结构和离子电导率对IPMC驱动临界响应电压的影响一致,但截距法得到的UC值与理论公式计算的UC值存在一定偏差。作为理论原理,UC理论公式可用于分析聚合物本征特性对IPMC材料致动的影响。
{"title":"Investigations on Actuation Critical Response Voltage for IPMC Based on Modified EVOH lonomer","authors":"Yujun Zhang, Fengfu Li, Lei Li, Li-jun Dai","doi":"10.1109/NEMS.2007.352073","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352073","url":null,"abstract":"A novel ionic polymer-metal composite (IPMC), based on EVOH-SPEG ionomer synthesized by sulfonilication of poly (ethylene-co-vinyl alcohol) (EVOH) grafted 2-(2-chloroethoxy) ethanol (C<sub>4</sub>H<sub>9</sub>O<sub>2</sub>Cl) or 2-[2-(2-chloroethxy) ethoxyl ethanol (C<sub>6</sub>H<sub>13</sub>O<sub>3</sub>Cl) with 1, 3-propane sultone, has been prepared through electroless deposition of platinum on the bare polymer film. Based upon linear irreversible thermodynamics and cantilever beam model, the theoretical formula of IPMC actuation critical response voltage (U<sub>C</sub>) was set up. And the U<sub>C</sub> of IPMC based on different side chain length EVOH-SPEG were calculated with the intercept method and the theoretical formula, with the help of the IPMC tip force (F<sub>T</sub>) experiment. The calculated U<sub>C</sub> value was accordance with the influence of polymer structure and ionic conductivity on IPMC actuation critical response voltage, and there is a deviation between the U<sub>C</sub>obtained with intercept method and calculated by theoretical formula. As the theoretical principle, the U<sub>C</sub> theoretical formula could be used for analyzing the influence of polymer intrinsic characteristic on the actuation of IPMC material.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117022967","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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