Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352053
Chi-Yuan Lee, Shuo-Jen Lee, C. Hsieh
The fuel cell has the potential to become an indispensable source of electric power. However, some problems have not yet been resolved. Measuring the temperature and humidity inside the fuel cells is currently difficult. Accordingly, in this study, array micro sensors are fabricated within the fuel cell, in which the temperature and humidity distributions are measured. The substrate of the bipolar plate of the fuel cell was made of stainless steel (SS-304) and the wet etching was employed to fabricate the channel on the stainless steel substrate. Then microelectromechanical systems (MEMS) technology was used to fabricate the array micro temperature sensors and the micro humidity sensors on the rib of channel of stainless steel. The advantages of array micro temperature sensors are their small volume, their high accuracy, their short response time, the simplicity of their fabrication, their mass production and their ability to measure the temperature at a precise location more effectively than the traditional thermocouple. The micro humidity sensors are made from gold and titanium as down and up electrodes in the channel. The performance curves of the single cell operating at 41.54 degC and gas flow rates of H2/O2 at 200/200ml/min. The max power density of the bipolar without micro sensor is 142 mW/cm2 and the current density is 463 mA/cm2. The max power density of the bipolar with micro sensor is 56 mW/cm2.
{"title":"Application of Micro Sensors on Diagnosis of Micro Fuel Cells","authors":"Chi-Yuan Lee, Shuo-Jen Lee, C. Hsieh","doi":"10.1109/NEMS.2007.352053","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352053","url":null,"abstract":"The fuel cell has the potential to become an indispensable source of electric power. However, some problems have not yet been resolved. Measuring the temperature and humidity inside the fuel cells is currently difficult. Accordingly, in this study, array micro sensors are fabricated within the fuel cell, in which the temperature and humidity distributions are measured. The substrate of the bipolar plate of the fuel cell was made of stainless steel (SS-304) and the wet etching was employed to fabricate the channel on the stainless steel substrate. Then microelectromechanical systems (MEMS) technology was used to fabricate the array micro temperature sensors and the micro humidity sensors on the rib of channel of stainless steel. The advantages of array micro temperature sensors are their small volume, their high accuracy, their short response time, the simplicity of their fabrication, their mass production and their ability to measure the temperature at a precise location more effectively than the traditional thermocouple. The micro humidity sensors are made from gold and titanium as down and up electrodes in the channel. The performance curves of the single cell operating at 41.54 degC and gas flow rates of H2/O2 at 200/200ml/min. The max power density of the bipolar without micro sensor is 142 mW/cm2 and the current density is 463 mA/cm2. The max power density of the bipolar with micro sensor is 56 mW/cm2.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134183245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352081
H. Ko, C.W. Liu, C. Gau
In the current fabrication of pressure sensor, both the sensor cavity and the sensor diaphragm were made of SU-8 which can be readily spun coat on the substrate at desired thickness and patterned by lithography. The thickness of the diaphragm, and the height of the sensor cavities, allowing deformation of diaphragm, can be readily varied from few to hundreds of microns by spin coat different thickness of SU-8 layer. This allows fabrication of cavity with much greater heights and measurement of pressure with much wider range. However, the sensor material used for the pressure sensor is the polysilicon doped with a high concentration of boron, which can readily sense the deformation of a diaphragm. This has precluded the possibility of fabricating the cavities and diaphragm first - which is a low temperature process, and then depositing the polysilicon sensor on the above - which is a high temperature process. Fabrication strategy has to be reversed, i.e., starts with the high temperature process of depositing the doped polysilicon layer and then the low temperature process.
{"title":"A Novel Fabrication for Pressure Sensor with Polymer Material and Its Characteristic Testing","authors":"H. Ko, C.W. Liu, C. Gau","doi":"10.1109/NEMS.2007.352081","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352081","url":null,"abstract":"In the current fabrication of pressure sensor, both the sensor cavity and the sensor diaphragm were made of SU-8 which can be readily spun coat on the substrate at desired thickness and patterned by lithography. The thickness of the diaphragm, and the height of the sensor cavities, allowing deformation of diaphragm, can be readily varied from few to hundreds of microns by spin coat different thickness of SU-8 layer. This allows fabrication of cavity with much greater heights and measurement of pressure with much wider range. However, the sensor material used for the pressure sensor is the polysilicon doped with a high concentration of boron, which can readily sense the deformation of a diaphragm. This has precluded the possibility of fabricating the cavities and diaphragm first - which is a low temperature process, and then depositing the polysilicon sensor on the above - which is a high temperature process. Fabrication strategy has to be reversed, i.e., starts with the high temperature process of depositing the doped polysilicon layer and then the low temperature process.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134330728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352211
N. Changsan, T. Srichana
RIF encapsulated liposome vesicles were prepared by chloroform film method followed by freeze drying technique to obtain a dry powder for aerosol delivery. The freeze drying conditions were designed according to the DSC results of the liposome suspension. Three sugars (mannitol, lactose and trehalose) were used as a cryoprotectant of liposome dry powder. NR 8383 cell line was used to determine immunological activation and toxicity of liposome products when LPS from E.coli was used as a positive control. High cholesterol content in the formulation created higher rigid bilayer membrane of liposome vesicle than the lower cholesterol content formulation thus provided a better physical stability. The lipid content had influenced on degree of encapsulation, higher lipid content in formulation produced higher % encapsulation. Mannitol was a suitable sugar for this dry powder aerosol when it provided a free flowing powder with an MMAD less than 5 mum (3.35 mum). In addition, RIF in liposome dry powder form showed better chemical stability than in suspension form after they were kept for 6 weeks both at 4degC and room temperature. The reconstituted liposome powder in PBS pH 7.4 gave the encapsulation about 22%. The products did not cause toxicity to the cell line and did not activate immune responses since the cell produced very low level of toxic cytokines (IL-lbeta and TNF-alpha) when compared to LPS. This indicates that the particles are able to reach alveoli without stimulation of immunological response and safe to alveolar macrophage.
{"title":"Factors Influencing the Properties of Rifampicin Liposome and Applications for Dry Powder Inhaler","authors":"N. Changsan, T. Srichana","doi":"10.1109/NEMS.2007.352211","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352211","url":null,"abstract":"RIF encapsulated liposome vesicles were prepared by chloroform film method followed by freeze drying technique to obtain a dry powder for aerosol delivery. The freeze drying conditions were designed according to the DSC results of the liposome suspension. Three sugars (mannitol, lactose and trehalose) were used as a cryoprotectant of liposome dry powder. NR 8383 cell line was used to determine immunological activation and toxicity of liposome products when LPS from E.coli was used as a positive control. High cholesterol content in the formulation created higher rigid bilayer membrane of liposome vesicle than the lower cholesterol content formulation thus provided a better physical stability. The lipid content had influenced on degree of encapsulation, higher lipid content in formulation produced higher % encapsulation. Mannitol was a suitable sugar for this dry powder aerosol when it provided a free flowing powder with an MMAD less than 5 mum (3.35 mum). In addition, RIF in liposome dry powder form showed better chemical stability than in suspension form after they were kept for 6 weeks both at 4degC and room temperature. The reconstituted liposome powder in PBS pH 7.4 gave the encapsulation about 22%. The products did not cause toxicity to the cell line and did not activate immune responses since the cell produced very low level of toxic cytokines (IL-lbeta and TNF-alpha) when compared to LPS. This indicates that the particles are able to reach alveoli without stimulation of immunological response and safe to alveolar macrophage.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133059398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352078
Toshio Fukudal, Pou Liu
Carbon nanotube (CNT) can be used as a building block of nanoelectronic mechanical systems (NEMS). The main problems involved in nanotube based applications are related to the fabrication and assembly of the CNT. In this paper, in situ nanofabrication methods, involving cutting, bending, and welding of multi-walled carbon nanotube (MWNT) inside a scanning electron microscope (SEM), are presented. These three nanofabrication techniques are further used in the assembly of a CNT based nanostructure. A three dimensional (3D) nanostructure, the letter N, was assembled from a single CNT and fixed to stand on a substrate. Based on the high performance of the proposed techniques, it is suggested that the cutting, bending, and welding techniques inside SEM will become widely utilized in the fabrication and assembly of nanodevices and in the characterization of nanomaterials.
{"title":"Nanoscale Cutting, Bending and Welding in a Nanoassembly","authors":"Toshio Fukudal, Pou Liu","doi":"10.1109/NEMS.2007.352078","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352078","url":null,"abstract":"Carbon nanotube (CNT) can be used as a building block of nanoelectronic mechanical systems (NEMS). The main problems involved in nanotube based applications are related to the fabrication and assembly of the CNT. In this paper, in situ nanofabrication methods, involving cutting, bending, and welding of multi-walled carbon nanotube (MWNT) inside a scanning electron microscope (SEM), are presented. These three nanofabrication techniques are further used in the assembly of a CNT based nanostructure. A three dimensional (3D) nanostructure, the letter N, was assembled from a single CNT and fixed to stand on a substrate. Based on the high performance of the proposed techniques, it is suggested that the cutting, bending, and welding techniques inside SEM will become widely utilized in the fabrication and assembly of nanodevices and in the characterization of nanomaterials.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133282709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352057
M. Tsai, T. Leu
This paper investigates on micro pumping system, flow field generated by an traveling wave boundary layer, which model is developed for flexural plate wave (FPW) device numerically. In the study, the steady state solution of a FPW pump is most concerned. The velocity profiles and net flow rate for different parameters including frequency, channel height, and wave length are investigated. In this device, it is found that flow field remains periodic. The time averaged velocity profiles over one period become a parabolic velocity profile when the channel height is less than 100 mum. When a channel height is higher than 200jim, the time averaged velocity profiles deviate from parabolic velocity profile to a wall-jet type velocity profile. This finding is different from previous study. The acoustic pressure can influence as high as 100 Jim channel height. The pressure wave confinement effect in a microchannel with height less than 100 Jim is noticed. This research also finds that the flow rate of FPW pump can be controlled by the frequency.
{"title":"The Study of Flexible Plate Wave Device for Micro Pumping System","authors":"M. Tsai, T. Leu","doi":"10.1109/NEMS.2007.352057","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352057","url":null,"abstract":"This paper investigates on micro pumping system, flow field generated by an traveling wave boundary layer, which model is developed for flexural plate wave (FPW) device numerically. In the study, the steady state solution of a FPW pump is most concerned. The velocity profiles and net flow rate for different parameters including frequency, channel height, and wave length are investigated. In this device, it is found that flow field remains periodic. The time averaged velocity profiles over one period become a parabolic velocity profile when the channel height is less than 100 mum. When a channel height is higher than 200jim, the time averaged velocity profiles deviate from parabolic velocity profile to a wall-jet type velocity profile. This finding is different from previous study. The acoustic pressure can influence as high as 100 Jim channel height. The pressure wave confinement effect in a microchannel with height less than 100 Jim is noticed. This research also finds that the flow rate of FPW pump can be controlled by the frequency.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133459049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.351970
F. Arai, M. Nagai, A. Shimizu, A. Ishijima, T. Fukuda
The paper demonstrates visualization method of carbon nanotubes (CNTs) in water with fluorescent microscopy through quenching effect that cause a decrease of fluorescent intensity around CNTs. Reversal contrast in fluorescence imaging of the CNTs was observed in fluorescent dye solution. CNTs under a constant excitation light could be observed for more than ten minutes. Dielectrophoretic force was used for CNTs deposition onto electrodes that consist of transparent conductive film. Scanning electron microscope revealed that CNTs of 80 nm in diameter were observed with fluorescent microscopy. The positions of the CNTs tips were observed under optical microscope. It can be applied for biological sensing devices with nanomanipulation.
{"title":"Fluorescence Visualization of Carbon Nanotubes Using Quenching Effect for Nanomanipulation","authors":"F. Arai, M. Nagai, A. Shimizu, A. Ishijima, T. Fukuda","doi":"10.1109/NEMS.2007.351970","DOIUrl":"https://doi.org/10.1109/NEMS.2007.351970","url":null,"abstract":"The paper demonstrates visualization method of carbon nanotubes (CNTs) in water with fluorescent microscopy through quenching effect that cause a decrease of fluorescent intensity around CNTs. Reversal contrast in fluorescence imaging of the CNTs was observed in fluorescent dye solution. CNTs under a constant excitation light could be observed for more than ten minutes. Dielectrophoretic force was used for CNTs deposition onto electrodes that consist of transparent conductive film. Scanning electron microscope revealed that CNTs of 80 nm in diameter were observed with fluorescent microscopy. The positions of the CNTs tips were observed under optical microscope. It can be applied for biological sensing devices with nanomanipulation.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"35 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114022653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352265
S. D. Hutagalung, K. A. Yaacob, R. Tan
The silicon nanowires (SiNWs) were growth on Si(100) surface by electroless metal deposition in ionic metal hydro fluoric solution. The growth mechanisms of SiNWs were analyzed on the basis of a self-assembled localized microscopic electrochemical model through selective etching on the silicon substrate. From AFM and FESEM images were found that orientation of SiNWs is perpendicular to the surface of silicon. SiNWs have been grown significant in vertical and one dimensional (ID) direction. The diameter of the wire is less than 100 nm which is dependent of the surrounding pores size due to etching process. The average roughness of 132.1 nm was obtained from AFM image, as well as the peak-to-valley roughness takes value of up to 911.7 nm. On the other sample was found that the peak-to-valley roughness of a selected area of surface up to 3.183 mum obtained by NC-AFM image analysis.
{"title":"Morphology of Silicon Nanowires Grown on Si(100) Substrate","authors":"S. D. Hutagalung, K. A. Yaacob, R. Tan","doi":"10.1109/NEMS.2007.352265","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352265","url":null,"abstract":"The silicon nanowires (SiNWs) were growth on Si(100) surface by electroless metal deposition in ionic metal hydro fluoric solution. The growth mechanisms of SiNWs were analyzed on the basis of a self-assembled localized microscopic electrochemical model through selective etching on the silicon substrate. From AFM and FESEM images were found that orientation of SiNWs is perpendicular to the surface of silicon. SiNWs have been grown significant in vertical and one dimensional (ID) direction. The diameter of the wire is less than 100 nm which is dependent of the surrounding pores size due to etching process. The average roughness of 132.1 nm was obtained from AFM image, as well as the peak-to-valley roughness takes value of up to 911.7 nm. On the other sample was found that the peak-to-valley roughness of a selected area of surface up to 3.183 mum obtained by NC-AFM image analysis.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129344319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352070
A. Ramadan, K. Inoue, T. Arai, T. Takubo, T. Tanikawa
This paper presents the analysis and design optimization of a new compact and yet economical micro-nano two-fingered manipulator hand. The proposed manipulator hand consists of two series modules; upper and lower module. Each module consists of a parallel kinematics chain with a glass pipette of 3 to 10 cm length as an end effector. It is driven by three piezoelectric actuated prismatic joints in each of the three legs of the kinematics chain. Each leg of the kinematics chain has the structure of prismatic-revolute-socket ball (PRS) joints structure. As the length of the glass pipette end effector is decreased, the resolution and accuracy of the micro-nano manipulator hand is increased. A new solution for the problem of inverse kinematics is obtained. Based on this solution, a simulation program has been developed to optimally choose the design parameters of each module so that the manipulator have a maximum workspace volume. Also the manipulator hand is small in size due to the proposed architecture.
{"title":"New Design of a Compact Parallel Micro-Nano Two-Fingered Manipulator Hand","authors":"A. Ramadan, K. Inoue, T. Arai, T. Takubo, T. Tanikawa","doi":"10.1109/NEMS.2007.352070","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352070","url":null,"abstract":"This paper presents the analysis and design optimization of a new compact and yet economical micro-nano two-fingered manipulator hand. The proposed manipulator hand consists of two series modules; upper and lower module. Each module consists of a parallel kinematics chain with a glass pipette of 3 to 10 cm length as an end effector. It is driven by three piezoelectric actuated prismatic joints in each of the three legs of the kinematics chain. Each leg of the kinematics chain has the structure of prismatic-revolute-socket ball (PRS) joints structure. As the length of the glass pipette end effector is decreased, the resolution and accuracy of the micro-nano manipulator hand is increased. A new solution for the problem of inverse kinematics is obtained. Based on this solution, a simulation program has been developed to optimally choose the design parameters of each module so that the manipulator have a maximum workspace volume. Also the manipulator hand is small in size due to the proposed architecture.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"91 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128758102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352257
E. Oiller, L. Duraffourg, M. Delaye, H. Grange, S. Deneuville, J. Bernos, R. Dianoux, F. Marchi, D. Renaud, T. Baron, P. Andreucci, P. Robert
The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM characterizations have allowed to fabricate NEMS devices and to provide AFM characterizations.
{"title":"NEMS Devices for Accelerometers Compatible with Thin SOI Technology","authors":"E. Oiller, L. Duraffourg, M. Delaye, H. Grange, S. Deneuville, J. Bernos, R. Dianoux, F. Marchi, D. Renaud, T. Baron, P. Andreucci, P. Robert","doi":"10.1109/NEMS.2007.352257","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352257","url":null,"abstract":"The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with \"in-IC\" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM characterizations have allowed to fabricate NEMS devices and to provide AFM characterizations.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129133115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-04-23DOI: 10.1109/NEMS.2007.352073
Yujun Zhang, Fengfu Li, Lei Li, Li-jun Dai
A novel ionic polymer-metal composite (IPMC), based on EVOH-SPEG ionomer synthesized by sulfonilication of poly (ethylene-co-vinyl alcohol) (EVOH) grafted 2-(2-chloroethoxy) ethanol (C4H9O2Cl) or 2-[2-(2-chloroethxy) ethoxyl ethanol (C6H13O3Cl) with 1, 3-propane sultone, has been prepared through electroless deposition of platinum on the bare polymer film. Based upon linear irreversible thermodynamics and cantilever beam model, the theoretical formula of IPMC actuation critical response voltage (UC) was set up. And the UC of IPMC based on different side chain length EVOH-SPEG were calculated with the intercept method and the theoretical formula, with the help of the IPMC tip force (FT) experiment. The calculated UC value was accordance with the influence of polymer structure and ionic conductivity on IPMC actuation critical response voltage, and there is a deviation between the UCobtained with intercept method and calculated by theoretical formula. As the theoretical principle, the UC theoretical formula could be used for analyzing the influence of polymer intrinsic characteristic on the actuation of IPMC material.
{"title":"Investigations on Actuation Critical Response Voltage for IPMC Based on Modified EVOH lonomer","authors":"Yujun Zhang, Fengfu Li, Lei Li, Li-jun Dai","doi":"10.1109/NEMS.2007.352073","DOIUrl":"https://doi.org/10.1109/NEMS.2007.352073","url":null,"abstract":"A novel ionic polymer-metal composite (IPMC), based on EVOH-SPEG ionomer synthesized by sulfonilication of poly (ethylene-co-vinyl alcohol) (EVOH) grafted 2-(2-chloroethoxy) ethanol (C<sub>4</sub>H<sub>9</sub>O<sub>2</sub>Cl) or 2-[2-(2-chloroethxy) ethoxyl ethanol (C<sub>6</sub>H<sub>13</sub>O<sub>3</sub>Cl) with 1, 3-propane sultone, has been prepared through electroless deposition of platinum on the bare polymer film. Based upon linear irreversible thermodynamics and cantilever beam model, the theoretical formula of IPMC actuation critical response voltage (U<sub>C</sub>) was set up. And the U<sub>C</sub> of IPMC based on different side chain length EVOH-SPEG were calculated with the intercept method and the theoretical formula, with the help of the IPMC tip force (F<sub>T</sub>) experiment. The calculated U<sub>C</sub> value was accordance with the influence of polymer structure and ionic conductivity on IPMC actuation critical response voltage, and there is a deviation between the U<sub>C</sub>obtained with intercept method and calculated by theoretical formula. As the theoretical principle, the U<sub>C</sub> theoretical formula could be used for analyzing the influence of polymer intrinsic characteristic on the actuation of IPMC material.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117022967","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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