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A new wideband interference suppression method for GNSS system 一种新的GNSS系统宽带干扰抑制方法
Pub Date : 2015-03-06 DOI: 10.1117/12.2182632
Yan Bai, Xiaochun Lu, Tao Han, Jin Wang
GNSS navigation system has a shortage—the satellite navigation signal is vulnerable to various interferences and thus leads to losses in performance of received signal. Wideband interference is common oppressive which impact on the receiver performance badly. In this paper, aiming at the linear frequency modulation (LFM) wideband interference, a new interference suppression method based on NEW-MDCFT is presented, and the model and implementation method of the suppression algorithm have been introduced. By adding the LFM jamming to the COMPASS B1 signal, the interference suppression method is simulated, and time domain performance, frequency domain performance, acquisition performance and tracking performance of the signal before and after interference suppression have been given. The results indicate that, the suppression method based on NEW-MDCFT has good LFM interference suppression performance and is able to perform good interference suppression in seriously-interfered environment.
GNSS导航系统的缺点是卫星导航信号容易受到各种干扰,从而导致接收信号的性能损失。宽带干扰是常见的干扰,严重影响接收机的性能。本文针对线性调频(LFM)宽带干扰,提出了一种新的基于new - mdcft的干扰抑制方法,并介绍了抑制算法的模型和实现方法。通过在COMPASS B1信号中加入LFM干扰,对干扰抑制方法进行仿真,给出了干扰抑制前后信号的时域性能、频域性能、采集性能和跟踪性能。结果表明,基于NEW-MDCFT的抑制方法具有良好的LFM干扰抑制性能,能够在干扰严重的环境下进行良好的干扰抑制。
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引用次数: 0
A novel method for measuring transit tilt error in laser trackers 一种测量激光跟踪仪过境倾斜误差的新方法
Pub Date : 2015-03-06 DOI: 10.1117/12.2182383
Zili Zhang, Weihu Zhou, Han Zhu, Xinlong Lin
A novel method was proposed to measure the tilt error between the transit axis and standing axis of the laser tracker. A gradienter was first used to make the standing axis of the laser tracker perpendicular to the horizontal plane. The laser beam of the tracker was then projected onto a vertical plane set at a certain distance from the tracker with equal horizontal angles and diverse vertical angles in two-face mode. The contrail of the laser beam was recorded while the simulation was manipulated to estimate the beam trail under the same circumstance. The tilt error was thus obtained according to the comparison of the actual result against the simulated one. Experimental results showed that the accuracy of the tilt measuring method could meet the user’s demand.
提出了一种测量激光跟踪仪横轴与驻轴倾斜误差的新方法。首先用梯度仪使激光跟踪仪的站立轴垂直于水平面。然后将跟踪器的激光束以双面模式投射到距离跟踪器一定距离、水平角度相等、垂直角度不同的垂直平面上。在记录光束轨迹的同时,通过仿真来估计相同情况下的光束轨迹。根据实际结果与模拟结果的比较,得到了倾斜误差。实验结果表明,该倾斜测量方法的精度可以满足用户的要求。
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引用次数: 1
Communication design for multi-boards based on VME bus 基于VME总线的多板通信设计
Pub Date : 2015-03-06 DOI: 10.1117/12.2182254
Yang Liu, Fazhi Song, Kai Wei, Zhenxian Fu
As a widely used open-architecture computer bus ,VME bus is increasingly applied in military, aerospace, transportation and other large-scale control systems. Lithography, a very delicate and complicated integrated circuit manufacturing equipment, uses many circuit boards with VME interface in its control system, including one single-board computer, many movement control boards and one data acquisition board. This paper designs communication modules which include VME bus module and VME user-defined bus module for multi-boards in Lithography control system. VME bus module is designed for the communication between the single-board computer and movement control boards and VME user-defined bus is designed for the communication between movement control boards and data acquisition board. The experimental results demonstrate its effectiveness.
VME总线作为一种应用广泛的开放式计算机总线,在军事、航空航天、交通运输等大型控制系统中得到越来越多的应用。光刻机是一种非常精密和复杂的集成电路制造设备,其控制系统使用了许多带有VME接口的电路板,包括一个单板计算机,多个运动控制板和一个数据采集板。本文设计了光刻控制系统中多板通信模块,包括VME总线模块和VME自定义总线模块。VME总线模块用于单板计算机与运动控制板之间的通信,VME自定义总线用于运动控制板与数据采集板之间的通信。实验结果证明了该方法的有效性。
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引用次数: 1
Performance analysis and experiment validation of a pneumatic vibration isolator 气动隔振器的性能分析与实验验证
Pub Date : 2015-03-06 DOI: 10.1117/12.2181188
Yuanyuan Yang, Jiubin Tan, Lei Wang, Tong Zhou
A performance analysis and experiment validation of a pneumatic vibration isolator (PVI) that applied in the wafer stage of lithography is proposed in this work. The wafer stage of lithography is a dual-stage actuator system, including a long-stroke stage (LS) and a short-stroke stage (SS). In order to achieve the nanometer level positioning the isolator is designed to reduce the transmission of LS excitations to SS. In addition, considering the SS with six degrees of freedom and required to keep a strict constant temperature environment, the isolator need to have two functions, including the decoupling for vertical to horizontal and gravity compensation. In this isolator, a biaxial hinge was designed to decouple vertical rotation freedom, and a gas bearing was designed to decouple horizontal motion. The stiffness and damping of the pneumatic vibration isolator were analyzed. Besides, an analysis of the natural frequency and vibration transmissibility of the isolator is presented. In the end, the results show that vibration transmission is reduced significantly by the isolator and natural frequency can be lower than 0.6 Hz. This means that experimental results accord with the prediction model.
本文提出了一种用于光刻晶圆阶段的气动隔振器(PVI)的性能分析和实验验证。光刻晶圆工作台是一个双级执行器系统,包括一个长行程工作台和一个短行程工作台。为了实现纳米级的定位,设计了隔离器,以减少LS激励对SS的传输。此外,考虑到SS具有六自由度,并且需要保持严格的恒温环境,隔离器需要具有垂直到水平的解耦和重力补偿两种功能。在该隔离器中,设计了双轴铰链来解耦垂直旋转自由,设计了气体轴承来解耦水平运动。对气动隔振器的刚度和阻尼进行了分析。此外,还分析了隔振器的固有频率和振动传递率。结果表明:隔振器显著降低了振动传递,固有频率可低于0.6 Hz。这意味着实验结果与预测模型相符。
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引用次数: 0
Portable and modularized fluorometer based on optical fiber 基于光纤的便携式模块化荧光计
Pub Date : 2015-03-06 DOI: 10.1117/12.2182022
W. Yue, Lei Zhang, Zhenya Guo, Shouzhen Jiang, Chengjie Bai
A portable and modularized fluorometer based on optical fiber was proposed in this work. The fluorometer included a light emitter diode (LED) light source module (LSM), a sample cell module (SCM), an optical-electrical converter module (OCM) and a signal process module (SAM). The LEDs in LSM were driven by a constant current source to provide stable exciting light with different wavelength. The OCM included a modularized optical filter and used a photomultiplier tube (PMT) to detect fluorescence signal. The SCM was used to locate sample cuvette and could be connected by optical fibers with the LSM and OCM. Via modularized design, the LSM and OCM could both selected and replaced based on different fluorescence dyes. In order to improve the detecting dynamic range of the fluorometer, the SAM could control the light intensity of LED source in LSM, to control the gain of PMT in OCM, and particularly, four channel signal acquisition circuits with different gain were constructed to collect fluorescence signal simultaneously. Fluorescein isothiocyanate (FITC) was selected as sample to test the fluorometer. The fluorometer has shown a high sensitivity with FITC concentration of 10ng/mL and presented a good linearity from 10 ng/mL to 10 μg/mL.
提出了一种基于光纤的便携式模块化荧光仪。该荧光计包括一个发光二极管(LED)光源模块(LSM)、一个样品单元模块(SCM)、一个光电转换模块(OCM)和一个信号处理模块(SAM)。LSM中的led由恒流源驱动,以提供不同波长的稳定激励光。OCM包括一个模块化的光学滤光片,并使用光电倍增管(PMT)来检测荧光信号。该单片机用于定位样品比色皿,并可通过光纤与LSM和OCM连接。通过模块化设计,LSM和OCM可以根据不同的荧光染料进行选择和替换。为了提高荧光仪的检测动态范围,在LSM中可以控制LED光源的光强,在OCM中可以控制PMT的增益,特别是构建了4路不同增益的信号采集电路来同时采集荧光信号。以异硫氰酸荧光素(FITC)为样品,对荧光仪进行检测。该荧光仪在FITC浓度为10ng/mL时具有较高的灵敏度,在10ng/mL ~ 10 μg/mL范围内呈良好的线性关系。
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引用次数: 1
A new suspension structure of micro/nano probe 一种新型微纳探针悬浮结构
Pub Date : 2015-03-06 DOI: 10.1117/12.2176017
Yong Li, Shuai Wang, Z. Chu, Jie Tang, Yang Xu, Zhujun Ai, Hongtao Wang
The measuring force of a micro/nano probe is an important factor affecting the probe measurement accuracy. The strength of the force largely depends on the nature of the suspension structure. How to improve the flexibility of the suspension structure is a difficult issue. To tackle the problem, this paper will put forwards an integrated suspension structure, which composed of three evenly spaced elastic hinges. Each elastic hinge has two beams, one of which is used to as the support. In measurement, the maximum displacement is occurred at the intersection of the two beams. In this paper, the flexibility of the suspension structure and probe measuring capability related to the elastic hinge's size and material are investigated based on theoretical modeling and simulation. The research result is significant to reduce the probe measuring force and improve its sensitivity.
微纳探针的测量力是影响探针测量精度的重要因素。力的强弱在很大程度上取决于悬架结构的性质。如何提高悬架结构的柔性是一个难题。为了解决这一问题,本文将提出一种由三个均匀间隔的弹性铰链组成的整体悬架结构。每个弹性铰有两根梁,其中一根用作支撑。在测量中,最大位移发生在两梁的交点处。本文在理论建模和仿真的基础上,研究了悬架结构的柔性以及与弹性铰链尺寸和材料相关的测头测量能力。研究结果对减小探头测量力,提高探头灵敏度具有重要意义。
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引用次数: 0
Improving signal-to-noise ratio and reducing noise equivalent radiance of electro-optical systems sensor by binning image pixels 采用图像像素分束的方法提高光电系统传感器的信噪比,降低噪声等效辐射
Pub Date : 2015-03-06 DOI: 10.1117/12.2181195
Xian-sheng Li, Jianwei Ren, Z. Wan, Hong-xing Liu, Changxi Xue
The signal-to-noise ratio (SNR) and noise equivalent radiance (NER) are important characteristics of an electro-optical systems sensor. A new method to improve the system’s SNR and reduce the NER was studied by analyzing the radiometric calibration data of the system. An image was obtained, when the system was illuminated by the uniform light source outputting from integrating sphere. The adjourn pixels were binned by n×n pixels (n=2, 3, 4, 5) in this image. And the digital numbers of binning pixels were added together. The new images were achieved. With 5×5 pixels binned, the SNR increased from 165.7 up to 842.3, which is improved almost 5 times. At the same time, the NER decreased from 0.077(W/m2/sr) to 0.015(W/m2/sr), which is declined by nearly 5 times. With the binning pixels up to n×n, the SNR and NER were enhanced and decreased almost by n times, respectively.
信噪比(SNR)和噪声等效辐射(NER)是光电系统传感器的重要特性。通过分析系统的辐射标定数据,研究了一种提高系统信噪比和降低内频的新方法。当系统被积分球输出的均匀光源照射时,得到图像。该图像中的休会像素通过n×n像素(n=2, 3, 4, 5)进行分类。并将起始像素的数字加在一起。获得了新的图像。通过5×5像素的分类,信噪比从165.7提高到842.3,提高了近5倍。与此同时,NER从0.077(W/m2/sr)下降到0.015(W/m2/sr),下降了近5倍。当分帧像素达到n×n时,信噪比和NER分别提高和降低了近n倍。
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引用次数: 2
Distributed compressive sensing of light field 分布式光场压缩感知
Pub Date : 2015-03-06 DOI: 10.1117/12.2181356
Rui Lei, Wei Shen, Zhijiang Zhang, Ying Zhou
The light field camera array can be regarded as distributed source. The image sequence captured by a camera array contains the inter-correlation and intra-correlation. In order to utilize the correlation, a joint sparsity model was established to combine the light field with distributed compressive sensing, and a recovery algorithm was proposed for the model -- simultaneous regularized orthogonal matching pursuit algorithm (SROMP), which uses the correlation to reconstruct the light field image sequences. Several light field images could be approximate at once using different linear combinations of elementary signals. Experimental results show that SROMP algorithm could be used to achieve high accuracy reported in the literatures.
光场相机阵列可以看作是分布式光源。由相机阵列捕获的图像序列包含相互关联和内部相关。为了利用相关性,建立了光场与分布式压缩感知相结合的联合稀疏度模型,并针对该模型提出了一种恢复算法——同步正则化正交匹配追踪算法(SROMP),该算法利用相关性重建光场图像序列。几个光场图像可以用不同的基本信号的线性组合一次近似。实验结果表明,采用SROMP算法可以达到文献报道的较高准确率。
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引用次数: 1
Grating encoder for wide range three-axis displacement measurement 光栅编码器宽范围三轴位移测量
Pub Date : 2015-03-06 DOI: 10.1117/12.2082475
Jie Lin, Jian Guan, Feng Wen, Jun Luo, Peng Jin
A grating encoder, which is composed of two equal periodic planar gratings, is proposed for measuring wide range three-axis displacements with nanometric resolution. In the optical reading system, one grating works as a reference planar grating, while another one is a scale planar grating. The grating encoder records the x- and y-axis displacement information in terms of the grating period, while it records the z-axis displacement information in terms of both the wavelength of the laser and the grating period. In this scheme, the gratings and other optical elements satisfy the Littrow configuration. The positions and the size of the detected interference zones are almost constant when the scale grating moves along the z-axis with respect to the optical reading system. Therefore, the measurement range is greatly enhanced in the z-axis direction. When the wavelength of the laser is 632.8 nm and the scale grating with period 8 μm is 100×100 mm2, the measured maximal z-axis displacement of the proposed encoder is 1263 mm theoretically.
提出了一种由两个等周期平面光栅组成的光栅编码器,用于纳米分辨率的宽范围三轴位移测量。在光学读数系统中,一个光栅作为参考平面光栅,另一个作为比例平面光栅。光栅编码器以光栅周期记录x轴和y轴位移信息,同时以激光波长和光栅周期记录z轴位移信息。在该方案中,光栅和其他光学元件满足利特罗结构。相对于光学读数系统,当比例光栅沿z轴移动时,检测到的干涉区的位置和大小几乎是恒定的。因此,在z轴方向上的测量范围大大增加。当激光波长为632.8 nm,周期为8 μm的尺度光栅为100×100 mm2时,编码器的z轴最大位移理论测量值为1263 mm。
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引用次数: 3
Comparison between angle interferometer and angle encoder during calibration of autocollimator 角干涉仪与角编码器在自准直仪标定中的比较
Pub Date : 2015-03-06 DOI: 10.1117/12.2180902
Yao Huang, Z. Xue, Heyan Wang
An angle interferometer was set up using concept ‘ratio of two lengths’ and an angle encoder was set up using concept ‘subdivision of full circle (2π rad=360°)’ at the National Institute of Metrology, China (NIM). For the analysis of the systematic errors of each device, two autocollimator calibration systems were separately set up based on the angle interferometer and the angle encoder with a similar measuring uncertainty (around 0.1″). An autocollimator was calibrated using two systems in the same measurement range (±1000″) and the same measurement step (10″). The systematic errors of each system were found through comparison between their original calibration results. The compensation curves were calculated using the analysis results, and two systems’ original calibration results were compensated according to two systems’ compensation curves. The maximum difference between the compensated calibration results of two systems was 0.05″ which is lower than measuring uncertainty of each system.
在中国计量科学研究院,用“两长比”的概念设计了角度干涉仪,用“圆细分(2π rad=360°)”的概念设计了角度编码器。为了分析各装置的系统误差,分别基于测量不确定度相近(0.1″左右)的角度干涉仪和角度编码器建立了两个自准直仪标定系统。在相同的测量范围(±1000″)和相同的测量步长(10″)下,使用两个系统校准自准直仪。通过对各系统原始标定结果的比较,得出各系统的系统误差。根据分析结果计算补偿曲线,并根据两个系统的补偿曲线对两个系统的原始标定结果进行补偿。两系统的补偿校准结果最大差值为0.05″,小于各系统的测量不确定度。
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引用次数: 9
期刊
Precision Engineering Measurements and Instrumentation
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