Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607889
J. Provine, Christopher S. Roper, Jon A. Schuller, M. L. Brongersma, Roya Maboudian, R. T. Howe
We report on experimental measurements of the optical properties of thin films of poly-crystalline silicon carbide (poly-SiC) deposited by means of low pressure chemical vapor deposition (LPCVD). Measurements in the mid-IR region of the EM spectrum show strong dependence of both far field transmission and surface modes upon the deposition conditions including doping levels, ratio of dichlorosilane (DCS) to 1,3 disilabutane (DSB), and anneals performed on the film. We observe the link between the relative strength of near field phonon polariton resonances, the appearance of a polariton gap, and the achievement of extraordinary optical transmission (EOT).
{"title":"The dependence of poly-crystalline SiC mid-infrared optical properties on deposition conditions","authors":"J. Provine, Christopher S. Roper, Jon A. Schuller, M. L. Brongersma, Roya Maboudian, R. T. Howe","doi":"10.1109/OMEMS.2008.4607889","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607889","url":null,"abstract":"We report on experimental measurements of the optical properties of thin films of poly-crystalline silicon carbide (poly-SiC) deposited by means of low pressure chemical vapor deposition (LPCVD). Measurements in the mid-IR region of the EM spectrum show strong dependence of both far field transmission and surface modes upon the deposition conditions including doping levels, ratio of dichlorosilane (DCS) to 1,3 disilabutane (DSB), and anneals performed on the film. We observe the link between the relative strength of near field phonon polariton resonances, the appearance of a polariton gap, and the achievement of extraordinary optical transmission (EOT).","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124910594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607857
Chun-Yu Lee, Jing‐Shun Huang, Sheng-Hao Hui, W. Su, Ching-Fuh Lin
The characteristics of a nanocomposite consisting of the blue-emitting polymer polyfluorene and ZnO nanowires are reported. The electroluminescence spectrum of the white light emission is from about 400 nm to 750 nm.
{"title":"White-light electroluminescence from ZnO nanowires/polyfluorene heterojunction diodes","authors":"Chun-Yu Lee, Jing‐Shun Huang, Sheng-Hao Hui, W. Su, Ching-Fuh Lin","doi":"10.1109/OMEMS.2008.4607857","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607857","url":null,"abstract":"The characteristics of a nanocomposite consisting of the blue-emitting polymer polyfluorene and ZnO nanowires are reported. The electroluminescence spectrum of the white light emission is from about 400 nm to 750 nm.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129868099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607854
Y. Nazirizadeh, U. Geyer, U. Lemmer, M. Gerken
Transmission measurements with crossed polarization filters are performed in a confocal microscope setup for spatially resolved evaluation of photonic crystal modes. The homogeneity of samples fabricated with electron-beam lithography and laser interference lithography is investigated.
{"title":"Spatially resolved optical characterization of photonic crystal slabs using direct evaluation of photonic modes","authors":"Y. Nazirizadeh, U. Geyer, U. Lemmer, M. Gerken","doi":"10.1109/OMEMS.2008.4607854","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607854","url":null,"abstract":"Transmission measurements with crossed polarization filters are performed in a confocal microscope setup for spatially resolved evaluation of photonic crystal modes. The homogeneity of samples fabricated with electron-beam lithography and laser interference lithography is investigated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130879733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607853
Y. Chiu, Wei-Zhi Huang, Jhong-Wei Wu, J. Chiou, H. Shieh
Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.
{"title":"Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation","authors":"Y. Chiu, Wei-Zhi Huang, Jhong-Wei Wu, J. Chiou, H. Shieh","doi":"10.1109/OMEMS.2008.4607853","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607853","url":null,"abstract":"Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132974544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607886
J. Roels, W. van der Tempel, D. Van Nieuwenhove, R. Grootjans, M. Kuijk, D. van Thourhout, R. Baets
Since continuous Time-Of-Flight ranging systems based on electrical mixing run into fundamental limits we designed an optical MEMS (de)modulator/mixer. With our dynamic (MHz range) subwavelength pitch diffraction grating we demonstrated TOF ranging with optical mixing.
{"title":"A dynamic subwavelength pitch grating modulator for continuous Time-Of-Flight ranging with optical mixing","authors":"J. Roels, W. van der Tempel, D. Van Nieuwenhove, R. Grootjans, M. Kuijk, D. van Thourhout, R. Baets","doi":"10.1109/OMEMS.2008.4607886","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607886","url":null,"abstract":"Since continuous Time-Of-Flight ranging systems based on electrical mixing run into fundamental limits we designed an optical MEMS (de)modulator/mixer. With our dynamic (MHz range) subwavelength pitch diffraction grating we demonstrated TOF ranging with optical mixing.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131205276","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607801
Aaron T. Ohta, Steven L. Neale, H. Hsu, J. Valley, Ming C. Wu
We report on the parallel manipulation and assembly of nanowires using paired virtual optical tips projected on lateral-field optoelectronic tweezers. Precise position and angular control has been demonstrated on four 80-nm-diameter silver nanowires.
{"title":"Parallel assembly of nanowires using lateral-field optoelectronic tweezers","authors":"Aaron T. Ohta, Steven L. Neale, H. Hsu, J. Valley, Ming C. Wu","doi":"10.1109/OMEMS.2008.4607801","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607801","url":null,"abstract":"We report on the parallel manipulation and assembly of nanowires using paired virtual optical tips projected on lateral-field optoelectronic tweezers. Precise position and angular control has been demonstrated on four 80-nm-diameter silver nanowires.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126648891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607818
K. Vahala
Summary form only given. In this paper, we review recent demonstrations of both mechanical amplification and cooling by radiation pressure forces in micron-scale toroidal resonators and also in silicon cantilever-based resonators. These devices contain high-Q optical modes in coexistence with high-Q mechanical modes.
{"title":"Cooling and amplifying micro-mechanical motion with light","authors":"K. Vahala","doi":"10.1109/OMEMS.2008.4607818","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607818","url":null,"abstract":"Summary form only given. In this paper, we review recent demonstrations of both mechanical amplification and cooling by radiation pressure forces in micron-scale toroidal resonators and also in silicon cantilever-based resonators. These devices contain high-Q optical modes in coexistence with high-Q mechanical modes.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128192838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607849
S. Hsiao, Chih-Chun Lee, Y. Chiu, Hsi-Fu Shih, J. Chiou, H. Shieh, W. Fang
A MEMS batch assembly process for fabricating small form factor optical pickup head is proposed to minimize the complexity of assembly. Electrical and optical components are sealed in a chamber. A silicon optical bench with a packaged laser diode and crystalline-plane mirrors is demonstrated.
{"title":"Wafer level batch fabrication and assembly of small form factor optical pickup head","authors":"S. Hsiao, Chih-Chun Lee, Y. Chiu, Hsi-Fu Shih, J. Chiou, H. Shieh, W. Fang","doi":"10.1109/OMEMS.2008.4607849","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607849","url":null,"abstract":"A MEMS batch assembly process for fabricating small form factor optical pickup head is proposed to minimize the complexity of assembly. Electrical and optical components are sealed in a chamber. A silicon optical bench with a packaged laser diode and crystalline-plane mirrors is demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116702057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607877
Chih-Chun Lee, S. Hsiao, W. Fang
This study presents a novel lens formation technology to implement a 3D polymer lens in buffer liquid. The integration of such 3D polymer lens on SiOB and the application for barcode scanner are also demonstrated.
{"title":"A novel lens formation technology to implement a 3D spherical polymer lens","authors":"Chih-Chun Lee, S. Hsiao, W. Fang","doi":"10.1109/OMEMS.2008.4607877","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607877","url":null,"abstract":"This study presents a novel lens formation technology to implement a 3D polymer lens in buffer liquid. The integration of such 3D polymer lens on SiOB and the application for barcode scanner are also demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115026751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607866
J. Wheeldon, H. Schriemer
We show that the local state of polarization of a two-dimensional photonic crystal exhibits distinct polarization singularities that map to the stabilizer groups of field symmetry image points for a particular eigenmode.
{"title":"Polarization singularities and local field symmetries in photonic crystals","authors":"J. Wheeldon, H. Schriemer","doi":"10.1109/OMEMS.2008.4607866","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607866","url":null,"abstract":"We show that the local state of polarization of a two-dimensional photonic crystal exhibits distinct polarization singularities that map to the stabilizer groups of field symmetry image points for a particular eigenmode.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128667131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：