Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607868
A. Arslan, Ç. Ataman, S. Holmstrom, K. Hedsten, H. Rahmi Seren, H. Urey, P. Enoksson
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications 9 mum resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
{"title":"Mechanically coupled comb drive MEMS stages","authors":"A. Arslan, Ç. Ataman, S. Holmstrom, K. Hedsten, H. Rahmi Seren, H. Urey, P. Enoksson","doi":"10.1109/OMEMS.2008.4607868","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607868","url":null,"abstract":"An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications 9 mum resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129712457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607804
Y. Kimura, A. Onoe, E. Higurashi, R. Sawada
We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.
{"title":"Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens","authors":"Y. Kimura, A. Onoe, E. Higurashi, R. Sawada","doi":"10.1109/OMEMS.2008.4607804","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607804","url":null,"abstract":"We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121268094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607860
S. Hung, S. Shiu, C. Chao, Ching-Fuh Lin
In this paper, a novel technique using the homogenized KrF excimer laser reformation is presented as an alternative method for fabricating Si spheres.
本文提出了一种利用均匀化KrF准分子激光重组制备硅球的新方法。
{"title":"Fabrication of sub-micrometer Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system","authors":"S. Hung, S. Shiu, C. Chao, Ching-Fuh Lin","doi":"10.1109/OMEMS.2008.4607860","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607860","url":null,"abstract":"In this paper, a novel technique using the homogenized KrF excimer laser reformation is presented as an alternative method for fabricating Si spheres.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125686917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607840
C. Chen, T. Yen
We demonstrate the electric and magnetic responses from split-ring resonators (SRR). Our quantitative spectroscopic measurements validate in both polarization dependence and multiple resonant characteristics, facilitating to design the desired responses of SRR for practical applications.
{"title":"Clarification of electromagnetic responses in split-ring resonators from electric excitation","authors":"C. Chen, T. Yen","doi":"10.1109/OMEMS.2008.4607840","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607840","url":null,"abstract":"We demonstrate the electric and magnetic responses from split-ring resonators (SRR). Our quantitative spectroscopic measurements validate in both polarization dependence and multiple resonant characteristics, facilitating to design the desired responses of SRR for practical applications.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132283122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607836
I. Jung, S.B. Mallick, O. Solgaard
In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.
{"title":"Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner","authors":"I. Jung, S.B. Mallick, O. Solgaard","doi":"10.1109/OMEMS.2008.4607836","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607836","url":null,"abstract":"In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133635138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607861
B. Guldimann, L. Venancio, K. Wallace, J. Perdigues, Z. Sodnik, B. Furch
A summary of current activities of the European Space Agency (ESA) related to optical MEMS technologies with a strong emphasis on the instrument aspects is presented. Future space applications and planned activities where optical MEMS might be an interesting option conclude this paper.
{"title":"Space instruments based on MOEMS technology","authors":"B. Guldimann, L. Venancio, K. Wallace, J. Perdigues, Z. Sodnik, B. Furch","doi":"10.1109/OMEMS.2008.4607861","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607861","url":null,"abstract":"A summary of current activities of the European Space Agency (ESA) related to optical MEMS technologies with a strong emphasis on the instrument aspects is presented. Future space applications and planned activities where optical MEMS might be an interesting option conclude this paper.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116637608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607839
O. Martin, H. Fischer, G. Lévêque, A. Christy
We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities.
{"title":"Tunable plasmonic nanostructures","authors":"O. Martin, H. Fischer, G. Lévêque, A. Christy","doi":"10.1109/OMEMS.2008.4607839","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607839","url":null,"abstract":"We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133088355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607863
E. H. Khoo, S. Ho, I. Ahmed, E. Li, Y. Huang
This paper reports on the modeling of the semiconductor photonic devices using 3D DTEQM-FDTD. The model includes the physics of Pauli Exclusion principle, Fermi-Dirac thermalization and state filling to describe the complex electron dynamics in semiconductor media to realize the full potential of FDTD. The carrier intraband and interband transition dynamics, energy band filling and thermal equilibrium are demonstrated in the model. The DTEQM-FDTD model includes the essential physics of complex dynamical media and yet computational efficient. It is applicable to a wide range of atomic and molecular media by applying the appropriate rate equations and energy level structure.
{"title":"3D modeling of photonic devices using dynamic thermal electron quantum medium finite-different time-domain (DTEQM-FDTD) method","authors":"E. H. Khoo, S. Ho, I. Ahmed, E. Li, Y. Huang","doi":"10.1109/OMEMS.2008.4607863","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607863","url":null,"abstract":"This paper reports on the modeling of the semiconductor photonic devices using 3D DTEQM-FDTD. The model includes the physics of Pauli Exclusion principle, Fermi-Dirac thermalization and state filling to describe the complex electron dynamics in semiconductor media to realize the full potential of FDTD. The carrier intraband and interband transition dynamics, energy band filling and thermal equilibrium are demonstrated in the model. The DTEQM-FDTD model includes the essential physics of complex dynamical media and yet computational efficient. It is applicable to a wide range of atomic and molecular media by applying the appropriate rate equations and energy level structure.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123050253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607888
John X.J. Zhang, Kazunori Hoshino, A. Gopal
We fabricated nanoscale light emitting diodes (NANO-LED) at the tip of silicon probes. Simultaneous optical and topographical images were acquired using the probes with the nano-LED in a standard near-field scanning optical microscope.
{"title":"Near-field scanning nanophotonic microscopy","authors":"John X.J. Zhang, Kazunori Hoshino, A. Gopal","doi":"10.1109/OMEMS.2008.4607888","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607888","url":null,"abstract":"We fabricated nanoscale light emitting diodes (NANO-LED) at the tip of silicon probes. Simultaneous optical and topographical images were acquired using the probes with the nano-LED in a standard near-field scanning optical microscope.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121219103","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607850
I. Mitsuishi, Y. Ezoe, M. Koshiishi, M. Mita, Y. Maeda, N. Yamasaki, K. Mitsuda, T. Shirata, T. Hayashi, T. Takano, R. Maeda
X-ray reflectivity of an ultra light-weight X-ray optic using MEMS technologies was measured in two different energies (0.28 keV and 1.49 keV). The obtained reflectivities can be understood by considering the mirror surface structures.
{"title":"Evaluation of X-ray reflectivity of a MEMS X-ray optic","authors":"I. Mitsuishi, Y. Ezoe, M. Koshiishi, M. Mita, Y. Maeda, N. Yamasaki, K. Mitsuda, T. Shirata, T. Hayashi, T. Takano, R. Maeda","doi":"10.1109/OMEMS.2008.4607850","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607850","url":null,"abstract":"X-ray reflectivity of an ultra light-weight X-ray optic using MEMS technologies was measured in two different energies (0.28 keV and 1.49 keV). The obtained reflectivities can be understood by considering the mirror surface structures.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128855754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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