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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics最新文献

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Mechanically coupled comb drive MEMS stages 机械耦合梳状驱动MEMS级
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607868
A. Arslan, Ç. Ataman, S. Holmstrom, K. Hedsten, H. Rahmi Seren, H. Urey, P. Enoksson
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications 9 mum resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
提出了一种具有新颖驱动原理的静电大孔径平面内扫描仪,用于快速和大行程扫描。在11.51 KHz下,在100 Vpp激励下,观察到共振偏转。
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引用次数: 10
Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens 内置硅微透镜的低功耗集成激光多普勒血流仪
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607804
Y. Kimura, A. Onoe, E. Higurashi, R. Sawada
We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.
提出了一种集成式激光多普勒血流计的结构,该结构由硅腔和光电二极管组成,腔内有激光二极管。由会聚微透镜形成的硅盖也起到封装的作用。这种结构降低了传感器的光功率损耗率,从而显著降低了功耗。
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引用次数: 13
Fabrication of sub-micrometer Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system 利用均匀化KrF准分子激光重整系统制备亚微米级表面光滑的硅球
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607860
S. Hung, S. Shiu, C. Chao, Ching-Fuh Lin
In this paper, a novel technique using the homogenized KrF excimer laser reformation is presented as an alternative method for fabricating Si spheres.
本文提出了一种利用均匀化KrF准分子激光重组制备硅球的新方法。
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引用次数: 0
Clarification of electromagnetic responses in split-ring resonators from electric excitation 电激励下劈裂环谐振器电磁响应的澄清
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607840
C. Chen, T. Yen
We demonstrate the electric and magnetic responses from split-ring resonators (SRR). Our quantitative spectroscopic measurements validate in both polarization dependence and multiple resonant characteristics, facilitating to design the desired responses of SRR for practical applications.
我们演示了劈裂环谐振器(SRR)的电和磁响应。我们的定量光谱测量验证了偏振依赖性和多共振特性,有助于设计实际应用所需的SRR响应。
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引用次数: 0
Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner 大面积高反射率宽带单片硅光子晶体镜MEMS扫描仪
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607836
I. Jung, S.B. Mallick, O. Solgaard
In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.
本文介绍了一种在1550nm波段具有宽带高反射率(>90%)的单片硅二维光子晶体(PC)反射镜的MEMS扫描仪。该光子晶体作为MEMS扫描仪制造过程的一个组成部分产生,从而产生具有镜面的单片结构,在500 μ m × 500 μ m面积上具有~ λ /100的平面度。反射光谱表明,PC镜在1520 ~ 1620 nm范围内具有较高的反射率(> ~ 90%)。扫描器的扫描范围为22度,输入方波为67 V,共振频率为2.13 kHz。
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引用次数: 1
Space instruments based on MOEMS technology 基于MOEMS技术的空间仪器
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607861
B. Guldimann, L. Venancio, K. Wallace, J. Perdigues, Z. Sodnik, B. Furch
A summary of current activities of the European Space Agency (ESA) related to optical MEMS technologies with a strong emphasis on the instrument aspects is presented. Future space applications and planned activities where optical MEMS might be an interesting option conclude this paper.
摘要介绍了欧洲航天局(ESA)目前与光学MEMS技术有关的活动,重点是仪器方面。在未来的空间应用和计划活动中,光学MEMS可能是一个有趣的选择。
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引用次数: 2
Tunable plasmonic nanostructures 可调谐等离子体纳米结构
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607839
O. Martin, H. Fischer, G. Lévêque, A. Christy
We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities.
我们讨论了不同的复合等离子体纳米结构,其光学性质可以通过在纳米尺度上取代它们的某些部分来调谐。用MEMs驱动这些结构将定义新的光学功能。
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引用次数: 0
3D modeling of photonic devices using dynamic thermal electron quantum medium finite-different time-domain (DTEQM-FDTD) method 利用动态热电子量子介质有限不同时域(DTEQM-FDTD)方法对光子器件进行三维建模
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607863
E. H. Khoo, S. Ho, I. Ahmed, E. Li, Y. Huang
This paper reports on the modeling of the semiconductor photonic devices using 3D DTEQM-FDTD. The model includes the physics of Pauli Exclusion principle, Fermi-Dirac thermalization and state filling to describe the complex electron dynamics in semiconductor media to realize the full potential of FDTD. The carrier intraband and interband transition dynamics, energy band filling and thermal equilibrium are demonstrated in the model. The DTEQM-FDTD model includes the essential physics of complex dynamical media and yet computational efficient. It is applicable to a wide range of atomic and molecular media by applying the appropriate rate equations and energy level structure.
本文报道了利用三维DTEQM-FDTD对半导体光子器件进行建模的方法。该模型包括泡利不相容原理、费米-狄拉克热化和状态填充等物理特性,描述了半导体介质中复杂的电子动力学,充分发挥了时域有限差分的潜力。该模型演示了载流子带内和带间跃迁动力学、能带填充和热平衡。DTEQM-FDTD模型既包含了复杂动态介质的基本物理特性,又具有计算效率。通过采用适当的速率方程和能级结构,它适用于广泛的原子和分子介质。
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引用次数: 2
Near-field scanning nanophotonic microscopy 近场扫描纳米光子显微镜
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607888
John X.J. Zhang, Kazunori Hoshino, A. Gopal
We fabricated nanoscale light emitting diodes (NANO-LED) at the tip of silicon probes. Simultaneous optical and topographical images were acquired using the probes with the nano-LED in a standard near-field scanning optical microscope.
我们在硅探针的尖端制造了纳米级发光二极管。探针与纳米led在标准近场扫描光学显微镜下同时获得光学和地形图像。
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引用次数: 0
Evaluation of X-ray reflectivity of a MEMS X-ray optic MEMS x射线光学系统的x射线反射率评估
Pub Date : 2008-08-26 DOI: 10.1109/OMEMS.2008.4607850
I. Mitsuishi, Y. Ezoe, M. Koshiishi, M. Mita, Y. Maeda, N. Yamasaki, K. Mitsuda, T. Shirata, T. Hayashi, T. Takano, R. Maeda
X-ray reflectivity of an ultra light-weight X-ray optic using MEMS technologies was measured in two different energies (0.28 keV and 1.49 keV). The obtained reflectivities can be understood by considering the mirror surface structures.
在0.28 keV和1.49 keV两种不同能量下,测量了采用MEMS技术的超轻型x射线光学器件的x射线反射率。得到的反射率可以通过考虑镜面结构来理解。
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引用次数: 2
期刊
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics
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