Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607878
C. Hsu, N. D. Lai, J. Lin
We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.
{"title":"Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique","authors":"C. Hsu, N. D. Lai, J. Lin","doi":"10.1109/OMEMS.2008.4607878","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607878","url":null,"abstract":"We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130243425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ting-Hsiang Wu, L. Gao, Yue Chen, Kenneth Wei, P. Chiou
We report a high speed microfluidic switch capable of achieving a switching time of 70 musec. The switching mechanism is realized by exciting dynamic vapor bubbles with focused laser pulses in a microfluidic PDMS channel. A time-resolved imaging system has been constructed to capture the nanosecond transient channel wall deformation and the particle flow pattern. A switching of polystyrene microspheres in a Y channel has also been demonstrated. This ultrafast laser triggered switching mechanism has the potential to advance the sorting speed of the state-of-the-art microscale fluorescent activated cell sorting devices for two orders of magnitude.
{"title":"Pulsed laser triggered high speed microfluidic switch","authors":"Ting-Hsiang Wu, L. Gao, Yue Chen, Kenneth Wei, P. Chiou","doi":"10.1063/1.2998395","DOIUrl":"https://doi.org/10.1063/1.2998395","url":null,"abstract":"We report a high speed microfluidic switch capable of achieving a switching time of 70 musec. The switching mechanism is realized by exciting dynamic vapor bubbles with focused laser pulses in a microfluidic PDMS channel. A time-resolved imaging system has been constructed to capture the nanosecond transient channel wall deformation and the particle flow pattern. A switching of polystyrene microspheres in a Y channel has also been demonstrated. This ultrafast laser triggered switching mechanism has the potential to advance the sorting speed of the state-of-the-art microscale fluorescent activated cell sorting devices for two orders of magnitude.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126474808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607871
Min-Ho Jun, Sungsik Yun, Man-Geun Kim, Sung-Kil Lee, Jong-Hyun Lee
We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.
{"title":"A micromirror scanner with vertical combs tilted by assembly process","authors":"Min-Ho Jun, Sungsik Yun, Man-Geun Kim, Sung-Kil Lee, Jong-Hyun Lee","doi":"10.1109/OMEMS.2008.4607871","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607871","url":null,"abstract":"We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"AES-12 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121000624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607826
X. Chen, C. Li, H. Tsang
We compare experimentally the performance of a linearly chirped waveguide grating with a uniform grating for coupling light to a vertical fiber. The measurements show the chirped grating reduces reflection and coupling loss by 2 dB.
{"title":"Characterization of silicon-on-insulator waveguide chirped grating for coupling to a vertical optical fiber","authors":"X. Chen, C. Li, H. Tsang","doi":"10.1109/OMEMS.2008.4607826","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607826","url":null,"abstract":"We compare experimentally the performance of a linearly chirped waveguide grating with a uniform grating for coupling light to a vertical fiber. The measurements show the chirped grating reduces reflection and coupling loss by 2 dB.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132579358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607848
C. Chou, Jing‐Shun Huang, Chun-Yu Lee, Ching-Fuh Lin
The selection of electrodes in ZnO nanorod-based polymer solar cells was investigated. Increases in the work function of metal electrode result in the increases in open-circuit voltage up to 120 mV, leading to improved performance.
{"title":"ZnO nanorod-based polymer solar cells with optimized electrodes","authors":"C. Chou, Jing‐Shun Huang, Chun-Yu Lee, Ching-Fuh Lin","doi":"10.1109/OMEMS.2008.4607848","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607848","url":null,"abstract":"The selection of electrodes in ZnO nanorod-based polymer solar cells was investigated. Increases in the work function of metal electrode result in the increases in open-circuit voltage up to 120 mV, leading to improved performance.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131818124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607840
C. Chen, T. Yen
We demonstrate the electric and magnetic responses from split-ring resonators (SRR). Our quantitative spectroscopic measurements validate in both polarization dependence and multiple resonant characteristics, facilitating to design the desired responses of SRR for practical applications.
{"title":"Clarification of electromagnetic responses in split-ring resonators from electric excitation","authors":"C. Chen, T. Yen","doi":"10.1109/OMEMS.2008.4607840","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607840","url":null,"abstract":"We demonstrate the electric and magnetic responses from split-ring resonators (SRR). Our quantitative spectroscopic measurements validate in both polarization dependence and multiple resonant characteristics, facilitating to design the desired responses of SRR for practical applications.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132283122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607836
I. Jung, S.B. Mallick, O. Solgaard
In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.
{"title":"Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner","authors":"I. Jung, S.B. Mallick, O. Solgaard","doi":"10.1109/OMEMS.2008.4607836","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607836","url":null,"abstract":"In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133635138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607839
O. Martin, H. Fischer, G. Lévêque, A. Christy
We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities.
{"title":"Tunable plasmonic nanostructures","authors":"O. Martin, H. Fischer, G. Lévêque, A. Christy","doi":"10.1109/OMEMS.2008.4607839","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607839","url":null,"abstract":"We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"21 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133088355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607804
Y. Kimura, A. Onoe, E. Higurashi, R. Sawada
We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.
{"title":"Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens","authors":"Y. Kimura, A. Onoe, E. Higurashi, R. Sawada","doi":"10.1109/OMEMS.2008.4607804","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607804","url":null,"abstract":"We propose a new structure for the integrated laser Doppler blood flowmeter which consists of a Si cavity and a photodiode and a laser diode within the cavity. A silicon cover formed with a converging microlens also functions as the package. This structure has a reduced rate of optical power loss in the sensor, resulting in significantly low power consumption.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121268094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607861
B. Guldimann, L. Venancio, K. Wallace, J. Perdigues, Z. Sodnik, B. Furch
A summary of current activities of the European Space Agency (ESA) related to optical MEMS technologies with a strong emphasis on the instrument aspects is presented. Future space applications and planned activities where optical MEMS might be an interesting option conclude this paper.
{"title":"Space instruments based on MOEMS technology","authors":"B. Guldimann, L. Venancio, K. Wallace, J. Perdigues, Z. Sodnik, B. Furch","doi":"10.1109/OMEMS.2008.4607861","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607861","url":null,"abstract":"A summary of current activities of the European Space Agency (ESA) related to optical MEMS technologies with a strong emphasis on the instrument aspects is presented. Future space applications and planned activities where optical MEMS might be an interesting option conclude this paper.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116637608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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