Ting-Hsiang Wu, L. Gao, Yue Chen, Kenneth Wei, P. Chiou
We report a high speed microfluidic switch capable of achieving a switching time of 70 musec. The switching mechanism is realized by exciting dynamic vapor bubbles with focused laser pulses in a microfluidic PDMS channel. A time-resolved imaging system has been constructed to capture the nanosecond transient channel wall deformation and the particle flow pattern. A switching of polystyrene microspheres in a Y channel has also been demonstrated. This ultrafast laser triggered switching mechanism has the potential to advance the sorting speed of the state-of-the-art microscale fluorescent activated cell sorting devices for two orders of magnitude.
{"title":"Pulsed laser triggered high speed microfluidic switch","authors":"Ting-Hsiang Wu, L. Gao, Yue Chen, Kenneth Wei, P. Chiou","doi":"10.1063/1.2998395","DOIUrl":"https://doi.org/10.1063/1.2998395","url":null,"abstract":"We report a high speed microfluidic switch capable of achieving a switching time of 70 musec. The switching mechanism is realized by exciting dynamic vapor bubbles with focused laser pulses in a microfluidic PDMS channel. A time-resolved imaging system has been constructed to capture the nanosecond transient channel wall deformation and the particle flow pattern. A switching of polystyrene microspheres in a Y channel has also been demonstrated. This ultrafast laser triggered switching mechanism has the potential to advance the sorting speed of the state-of-the-art microscale fluorescent activated cell sorting devices for two orders of magnitude.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126474808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607871
Min-Ho Jun, Sungsik Yun, Man-Geun Kim, Sung-Kil Lee, Jong-Hyun Lee
We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.
{"title":"A micromirror scanner with vertical combs tilted by assembly process","authors":"Min-Ho Jun, Sungsik Yun, Man-Geun Kim, Sung-Kil Lee, Jong-Hyun Lee","doi":"10.1109/OMEMS.2008.4607871","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607871","url":null,"abstract":"We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121000624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607826
X. Chen, C. Li, H. Tsang
We compare experimentally the performance of a linearly chirped waveguide grating with a uniform grating for coupling light to a vertical fiber. The measurements show the chirped grating reduces reflection and coupling loss by 2 dB.
{"title":"Characterization of silicon-on-insulator waveguide chirped grating for coupling to a vertical optical fiber","authors":"X. Chen, C. Li, H. Tsang","doi":"10.1109/OMEMS.2008.4607826","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607826","url":null,"abstract":"We compare experimentally the performance of a linearly chirped waveguide grating with a uniform grating for coupling light to a vertical fiber. The measurements show the chirped grating reduces reflection and coupling loss by 2 dB.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132579358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607848
C. Chou, Jing‐Shun Huang, Chun-Yu Lee, Ching-Fuh Lin
The selection of electrodes in ZnO nanorod-based polymer solar cells was investigated. Increases in the work function of metal electrode result in the increases in open-circuit voltage up to 120 mV, leading to improved performance.
{"title":"ZnO nanorod-based polymer solar cells with optimized electrodes","authors":"C. Chou, Jing‐Shun Huang, Chun-Yu Lee, Ching-Fuh Lin","doi":"10.1109/OMEMS.2008.4607848","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607848","url":null,"abstract":"The selection of electrodes in ZnO nanorod-based polymer solar cells was investigated. Increases in the work function of metal electrode result in the increases in open-circuit voltage up to 120 mV, leading to improved performance.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131818124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607806
Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter
We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.
{"title":"High resolution integrated microfluidic Fabry-Perot refractometer in silicon","authors":"Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter","doi":"10.1109/OMEMS.2008.4607806","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607806","url":null,"abstract":"We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115421774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607831
J. Milne, J. Dell, A. Keating, L. Schuler, L. Faraone
Wide spectral tuning from 1620 nm to 2425 nm has been achieved in a MEMS-based tunable Fabry-Perot filter. Fixed-fixed beam actuators were used to extend the tuning beyond the inherent limit of a parallel plate actuator.
{"title":"Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators","authors":"J. Milne, J. Dell, A. Keating, L. Schuler, L. Faraone","doi":"10.1109/OMEMS.2008.4607831","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607831","url":null,"abstract":"Wide spectral tuning from 1620 nm to 2425 nm has been achieved in a MEMS-based tunable Fabry-Perot filter. Fixed-fixed beam actuators were used to extend the tuning beyond the inherent limit of a parallel plate actuator.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114265358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607876
H. Morii, F. Oohira, M. Sasaki, T. Ochi, A. Yuzuriha
A novel conductive pattern forming method on the vertical wall using a resist spray coating and an angled exposure technologies is proposed. This method makes it possible to decrease the chip package size. The spray coating and the angled exposure technologies enable the uniform resist coating and the patterning the resist on the vertical wall of 600 mum height. Then a conductive pattern layers are sputtered and electroless plated. As the result, the conductive patterns of 200 mum width and 300 mum spacing is successfully formed on the vertical walls.
{"title":"Conductive pattern forming method on vertical wall using spray coating and angled exposure technologies","authors":"H. Morii, F. Oohira, M. Sasaki, T. Ochi, A. Yuzuriha","doi":"10.1109/OMEMS.2008.4607876","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607876","url":null,"abstract":"A novel conductive pattern forming method on the vertical wall using a resist spray coating and an angled exposure technologies is proposed. This method makes it possible to decrease the chip package size. The spray coating and the angled exposure technologies enable the uniform resist coating and the patterning the resist on the vertical wall of 600 mum height. Then a conductive pattern layers are sputtered and electroless plated. As the result, the conductive patterns of 200 mum width and 300 mum spacing is successfully formed on the vertical walls.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114730055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607892
H. Sameshima, M. Wakui, R. Ito, F. Hu, K. Hane
We study the growth of GaN crystal on Si substrate by molecular beam epitaxy (MBE), in order to integrate GaN light source and MEMS monolithically Since the lattice constant of HfN is close to that of GaN (only 0.35% mismatch), the crystal growth of GaN on HfN film is superior. On the other hand, HfO2 film is a good candidate for waveguide, dielectric and sacrificial layer. In this study, HfO2 film is surface-nitrified by a rf nitrogen plasma source of MBE to generate HfN layer. The morphology of the grown GaN crystal was better on the nitrified HfO2 layer. The photoluminescence (PL) efficiency of GaN quantum well grown on the nitrified HfO2 layer was better than that on Si substrate. As a simple hybrid lighting device structure, GaN grating on Si substrate was fabricated and the PL intensity from GaN diffraction grating was measured.
{"title":"Formation of a nitrified hafnium oxide buffer layer on silicon substrate and GaN quantum well crystal growth for GaN-Si hybrid optical MEMS","authors":"H. Sameshima, M. Wakui, R. Ito, F. Hu, K. Hane","doi":"10.1109/OMEMS.2008.4607892","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607892","url":null,"abstract":"We study the growth of GaN crystal on Si substrate by molecular beam epitaxy (MBE), in order to integrate GaN light source and MEMS monolithically Since the lattice constant of HfN is close to that of GaN (only 0.35% mismatch), the crystal growth of GaN on HfN film is superior. On the other hand, HfO2 film is a good candidate for waveguide, dielectric and sacrificial layer. In this study, HfO2 film is surface-nitrified by a rf nitrogen plasma source of MBE to generate HfN layer. The morphology of the grown GaN crystal was better on the nitrified HfO2 layer. The photoluminescence (PL) efficiency of GaN quantum well grown on the nitrified HfO2 layer was better than that on Si substrate. As a simple hybrid lighting device structure, GaN grating on Si substrate was fabricated and the PL intensity from GaN diffraction grating was measured.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124645711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607834
V. Milanovic, W. K. Lo
We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5 m distance with 16-bit precision, or < = 20 mum precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mum to 1.5 mm, depending on distance.
{"title":"Fast and high-precision 3D tracking and position measurement with MEMS micromirrors","authors":"V. Milanovic, W. K. Lo","doi":"10.1109/OMEMS.2008.4607834","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607834","url":null,"abstract":"We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5 m distance with 16-bit precision, or < = 20 mum precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mum to 1.5 mm, depending on distance.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122115902","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607891
W. Monch, P. Waibel, H. Zappe
Polymer swelling is studied as a novel method for bandgap tuning of photonic crystals (PCs). Crosslinked polymers swell in the presence of solvents, thereby increasing their volume and changing their refractive index. Consequently, the lattice constant and the refractive index of a polymer PC is modified by swelling and leads to a shift of the optical bandgap.We present experimental studies of swelling of one-dimensional PCs and theoretical calculations of swelling of three-dimensional PCs. It is shown that the frequencies of the optical bandgap of a polymer PC is shifted by about 10% when exposed to a solvent-nitrogen gas mixture at 80% of the solvent saturation pressure.
{"title":"Bandgap tuning of photonic crystals by polymer swelling","authors":"W. Monch, P. Waibel, H. Zappe","doi":"10.1109/OMEMS.2008.4607891","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607891","url":null,"abstract":"Polymer swelling is studied as a novel method for bandgap tuning of photonic crystals (PCs). Crosslinked polymers swell in the presence of solvents, thereby increasing their volume and changing their refractive index. Consequently, the lattice constant and the refractive index of a polymer PC is modified by swelling and leads to a shift of the optical bandgap.We present experimental studies of swelling of one-dimensional PCs and theoretical calculations of swelling of three-dimensional PCs. It is shown that the frequencies of the optical bandgap of a polymer PC is shifted by about 10% when exposed to a solvent-nitrogen gas mixture at 80% of the solvent saturation pressure.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114948913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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