Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607821
H.I. Ocakli, A. Ozturk, N. Ozber, H. Kavakli, E. Alaca, H. Urey
Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
{"title":"Resonant cantilever bio sensor with integrated grating readout","authors":"H.I. Ocakli, A. Ozturk, N. Ozber, H. Kavakli, E. Alaca, H. Urey","doi":"10.1109/OMEMS.2008.4607821","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607821","url":null,"abstract":"Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"92 8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132447101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607816
Sun-ki Chae, Hyukjin Jung, K. Jeong
A direct-type LED based back-light-unit (BLU) in LCD displays requires wide angle illumination with high uniformity. As a single lens surface, a micropatterned complex optical surface can provide wide angle LED illumination angle over 150deg by designing the micropattern arrays on the hemispherical surface.
{"title":"Micropatterned complex optical surface for wide angle illumination","authors":"Sun-ki Chae, Hyukjin Jung, K. Jeong","doi":"10.1109/OMEMS.2008.4607816","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607816","url":null,"abstract":"A direct-type LED based back-light-unit (BLU) in LCD displays requires wide angle illumination with high uniformity. As a single lens surface, a micropatterned complex optical surface can provide wide angle LED illumination angle over 150deg by designing the micropattern arrays on the hemispherical surface.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"15 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132733590","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607806
Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter
We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.
{"title":"High resolution integrated microfluidic Fabry-Perot refractometer in silicon","authors":"Raphael St-Gelais, Jonathan Masson, Yves-Alain Peter","doi":"10.1109/OMEMS.2008.4607806","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607806","url":null,"abstract":"We present a high resolution, robust and low cost integrated refractometer for microfluidic systems. The device is made of two Bragg reflectors vertically etched in silicon to form an in-plane Fabry-Perot filter. Liquids are injected in the cavity through a microfluidic channel and the variation of the refractive index induces a shift of the resonance wavelength. A sensitivity of 920 nm/RIU (refractive index units) and a resolution of less than 10-3 are obtained and are in good agreement with optical simulations. This resolution is, to our knowledge, the lowest ever reported for an integrated microfluidic Fabry-Perot refractometer.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115421774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607799
W. Stumpf, T. Asano, T. Kojima, M. Fujita, Y. Tanaka, S. Noda
The resonant wavelength spectra of photonic crystal nanocavities containing quantum dots measured by reflectivity are consistent with photoluminescence. The reflectance method provides Q-value estimation of both active and passive nanocavities in good agreement with theory.
{"title":"Spectral reflectance measurement of two-dimensional photonic nanocavities with embedded quantum dots","authors":"W. Stumpf, T. Asano, T. Kojima, M. Fujita, Y. Tanaka, S. Noda","doi":"10.1109/OMEMS.2008.4607799","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607799","url":null,"abstract":"The resonant wavelength spectra of photonic crystal nanocavities containing quantum dots measured by reflectivity are consistent with photoluminescence. The reflectance method provides Q-value estimation of both active and passive nanocavities in good agreement with theory.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116017489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607846
T. Sasaki, K. Hane
An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The deformation at the mirror center is 3 nm at 100 V.
{"title":"Optical scanner with deformable mirror fabricated from SOI wafer","authors":"T. Sasaki, K. Hane","doi":"10.1109/OMEMS.2008.4607846","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607846","url":null,"abstract":"An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The deformation at the mirror center is 3 nm at 100 V.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116445468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607835
J. Valley, H. Hsu, A. Ohta, S. Neale, A. Jamshidi, M. Wu
Optoelectronic tweezers are used to achieve light-induced, in-situ electroporation of HeLa cells. By controlling electrical bias, patterned light induces either single cell movement or electroporation. Fluorescent dye and dielectrophoretic response are used to monitor electroporation.
{"title":"In-situ single cell electroporation using optoelectronic tweezers","authors":"J. Valley, H. Hsu, A. Ohta, S. Neale, A. Jamshidi, M. Wu","doi":"10.1109/OMEMS.2008.4607835","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607835","url":null,"abstract":"Optoelectronic tweezers are used to achieve light-induced, in-situ electroporation of HeLa cells. By controlling electrical bias, patterned light induces either single cell movement or electroporation. Fluorescent dye and dielectrophoretic response are used to monitor electroporation.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122117614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607810
D. MacFarlane, M. Peshave, W. Zhou, N. Sultana, M. Christensen, N. Huntoon, G. Evans
Four port (4times4) couplers will be useful components for dense, planar photonic integration. A compact, high efficiency implementation based on evanescent coupling across a nanoscale gap is discussed.
{"title":"Four port nanophotonic couplers for dense, planar integrated optics","authors":"D. MacFarlane, M. Peshave, W. Zhou, N. Sultana, M. Christensen, N. Huntoon, G. Evans","doi":"10.1109/OMEMS.2008.4607810","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607810","url":null,"abstract":"Four port (4times4) couplers will be useful components for dense, planar photonic integration. A compact, high efficiency implementation based on evanescent coupling across a nanoscale gap is discussed.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123925257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607809
K. Takahashi, Y. Kanamori, K. Hane
A 500 nm wide 260 nm thick 63.4 mum long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750 nm to 50% maximum value (about 30 dB) at the voltages from 0 V to 28 V. Under the drop condition, the bandwidth of the drop signal was 0.5 nm, corresponding to the Q-value of 3100.
{"title":"Silicon microring resonator connected with submicorn comb actuator","authors":"K. Takahashi, Y. Kanamori, K. Hane","doi":"10.1109/OMEMS.2008.4607809","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607809","url":null,"abstract":"A 500 nm wide 260 nm thick 63.4 mum long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750 nm to 50% maximum value (about 30 dB) at the voltages from 0 V to 28 V. Under the drop condition, the bandwidth of the drop signal was 0.5 nm, corresponding to the Q-value of 3100.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128462407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607862
H. Hosseinkhannazer, J. McMullin, L. Kostiuk
We present the design, fabrication and experimental testing of polydimethylsiloxane (PDMS) biochips with integrated waveguides that have liquid or UV-curedpolyepoxyacrylate (PEA) cores. The use of inexpensive micro/nanofabrication methods and materials results in biochips suitable for laser-induced fluorescence detection applications.
{"title":"Polymer biochips with micro-optics for LIF detection","authors":"H. Hosseinkhannazer, J. McMullin, L. Kostiuk","doi":"10.1109/OMEMS.2008.4607862","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607862","url":null,"abstract":"We present the design, fabrication and experimental testing of polydimethylsiloxane (PDMS) biochips with integrated waveguides that have liquid or UV-curedpolyepoxyacrylate (PEA) cores. The use of inexpensive micro/nanofabrication methods and materials results in biochips suitable for laser-induced fluorescence detection applications.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128652734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607800
Jing‐Shun Huang, C. Chou, Chun-Yu Lee, Ching-Fuh Lin
ZnO nanorod arrays (ZNAs), grown from aqueous solutions, were integrated into polymer solar cells. Morphological, crystalline and optical properties of ZNAs were studied. Infiltration-improved polymer/ZNAs solar cells by adding fullerene were assembled and characterized.
{"title":"Synthesis and characterization of ZnO nanorod arrays and their integration into polymer solar cells","authors":"Jing‐Shun Huang, C. Chou, Chun-Yu Lee, Ching-Fuh Lin","doi":"10.1109/OMEMS.2008.4607800","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607800","url":null,"abstract":"ZnO nanorod arrays (ZNAs), grown from aqueous solutions, were integrated into polymer solar cells. Morphological, crystalline and optical properties of ZNAs were studied. Infiltration-improved polymer/ZNAs solar cells by adding fullerene were assembled and characterized.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130655384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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