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Degradation Physics of Silicone Under UV-A Irradiation UV-A辐照下有机硅的降解物理
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-10-13 DOI: 10.1109/TDMR.2023.3324348
Abdul Shabir;Cher Ming Tan;Preetpal Singh
Silicone possesses good thermal and chemical stability, hydrophobicity, and thus it has a wide range of application. It is also employed as encapsulant and housing for high power LEDs which are increasingly common for various kind of lighting applications. In outdoor applications of high-power LEDs, UV irradiation from sunlight is presence. There are also UV LEDs for other lighting applications, and these LEDs are using silicone as encapsulant to protect the semiconductor chips within. However, the effect of UV irradiation on the reliability of silicone is seldom studied. This work studied the reliability of silicone packaging in LEDs under UV irradiation, and through detailed failure analysis, we found that the silicone does degrade under the UV irradiation that affect the reliability of the LEDs. The degradation mechanisms of silicone and the degradation rate due to UV are found to depend on the type of high-power LEDs, with blue LED degrades faster than white counterpart. Ab-initio analysis using density functional theory is employed to have a deeper insight on the degradation mechanisms and the analysis results explain well our experimental observations. Basically, the silicone degradation mechanism in the presence of UV irradiation is a progression of moisture assisted hydrolysis, condensation and thermal oxidation.
有机硅具有良好的热稳定性和化学稳定性、疏水性,因而具有广泛的应用范围。它也被用作高功率led的密封剂和外壳,这在各种照明应用中越来越常见。在大功率led的户外应用中,来自阳光的紫外线照射是存在的。还有用于其他照明应用的UV led,这些led使用硅胶作为封装剂来保护内部的半导体芯片。然而,紫外辐照对有机硅可靠性的影响研究很少。本工作研究了led中硅酮封装在紫外线照射下的可靠性,通过详细的失效分析,我们发现硅酮在紫外线照射下确实会降解,影响led的可靠性。有机硅的降解机制和紫外线降解率取决于大功率LED的类型,蓝色LED的降解速度比白色LED快。利用密度泛函理论进行Ab-initio分析,对降解机理有更深入的了解,分析结果很好地解释了我们的实验观察结果。基本上,有机硅在紫外线照射下的降解机制是一个水分辅助水解、冷凝和热氧化的过程。
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引用次数: 0
A New SiC Quasi MOSFET for Ultra-Low Specific On-Resistance and Improved Reliability 一种新型超低比导通电阻SiC准MOSFET及提高可靠性
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-10-12 DOI: 10.1109/TDMR.2023.3323977
Moufu Kong;Zeyu Cheng;Zewei Hu;Ning Yu;Bo Yi;Hongqiang Yang
In this paper, a new ultra-low specific on-resistance quasi SiC MOSFET is proposed. Compared with the conventional SiC MOSFET, the proposed quasi SiC MOSFET has no problems caused by low channel mobility and gate oxide reliability. And compared with the conventional SiC JFET, the proposed quasi SiC MOSFET is a normally-off device without the controllability issue of the normally-on device. Through simulation, it is found that the specific on-resistance $(R_{mathrm{ on,sp}})$ of the proposed quasi SiC MOSFET is 2.46m $Omega cdot $ cm 2, while the $R_{mathrm{ on,sp}}$ of the conventional SiC MOSFET is 3.29 $text{m}Omega cdot $ cm 2, with a reduction of more than 25% at almost the same breakdown voltage. In the forward conduction state, the saturation current of the proposed quasi SiC MOSFET is smaller than that of the conventional SiC MOSFET at $V_{mathrm{ GS}},,=$ 15V and 20V, which shows that the proposed quasi SiC MOSFET has a better safe operating area (SOA) and better short-circuit capability. Compared with the conventional SiC MOSFET, the Figure-of-Merit (FOM) of the proposed device is improved by 38%. In addition, since the proposed structure is sustaining voltage by the high voltage JFET cell without a gate oxide layer, it is suggested that the proposed device does not have gate oxide reliability problems.
本文提出了一种新型的超低比导通电阻准SiC MOSFET。与传统的碳化硅MOSFET相比,所提出的准碳化硅MOSFET没有沟道迁移率低和栅极氧化物可靠性低的问题。与传统的碳化硅JFET相比,本文提出的准碳化硅MOSFET是一种常关器件,没有常开器件的可控性问题。通过仿真发现,在几乎相同击穿电压下,拟SiC MOSFET的比导通电阻$(R_{mathrm{on,sp}})$为246 $Omega cdot $ cm2,而传统SiC MOSFET的比导通电阻$R_{mathrm{on,sp}}$为3.29 $text{m}Omega cdot $ cm2,降低了25%以上。在正向导通状态下,拟SiC MOSFET在$V_{mathrm{GS}},,=$ 15V和20V时的饱和电流小于传统SiC MOSFET,表明拟SiC MOSFET具有更好的安全工作面积(SOA)和更好的短路能力。与传统的SiC MOSFET相比,该器件的性能因数(FOM)提高了38%。此外,由于所提出的结构是由高压JFET电池维持电压而没有栅极氧化层,因此建议所提出的器件不存在栅极氧化可靠性问题。
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引用次数: 0
Negative Bias Temperature Instability in Top-Gated Carbon Nanotube Thin Film Transistors With Y2O3 Gate Dielectric Y2O3栅极介质顶门控碳纳米管薄膜晶体管的负偏置温度不稳定性
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-10-05 DOI: 10.1109/TDMR.2023.3322157
Yuwei Wang;Sha Wang;Huaidong Ye;Wenhao Zhang;Li Xiang
The negative bias temperature instability (NBTI) of the top-gated p-type carbon nanotube (CNT) thin film transistors (TFTs) with yttrium oxide (Y2O3) dielectric is investigated under different gate bias, stress and relaxation time for the first time. Positive and fast reversible threshold voltage shift along with significant degradation of subthreshold and trans-conductance are observed. The effects of ambient condition are basically excluded by experimental results, and the NBTI in these CNT devices is believed to be primarily due to the generation of considerable interface traps and border traps near dielectric/CNT interface, highlighting the importance of the interface optimization for CNT TFTs in the future. The hysteresis characteristics during stress and recovery are discussed as well, to further explore the stress-induced-traps properties. All these results may provide a reference for the future study on the gate oxide reliability of CNT TFTs with Y2O3 dielectric.
首次研究了以氧化钇(Y2O3)为介质的顶门控p型碳纳米管薄膜晶体管(TFTs)在不同栅极偏压、应力和弛豫时间下的负偏置温度不稳定性(NBTI)。观察到正的和快速的可逆阈值电压漂移以及亚阈值和跨电导的显著退化。实验结果基本排除了环境条件的影响,认为这些碳纳米管器件中的NBTI主要是由于介电/碳纳米管界面附近产生了大量的界面陷阱和边界陷阱,突出了界面优化对未来碳纳米管tft的重要性。讨论了应力和恢复过程中的滞后特性,进一步探讨了应力诱导圈闭的性质。这些结果可为进一步研究Y2O3电介质碳纳米管tft栅氧化可靠性提供参考。
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引用次数: 0
Effect of Vapor Phase Infiltration on Metal-Polymer Adhesion for Ultra-Low-k Dielectric Materials 气相渗透对超低k介电材料金属-聚合物粘附性能的影响
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-29 DOI: 10.1109/TDMR.2023.3320976
Pragna Bhaskar;Ethan Shackelford;Emily K. McGuinness;Mohan Kathaperumal;Mark D. Losego;Madhavan Swaminathan
This paper explores the effect of vapor phase infiltration (VPI) on ultra-low-k (ULK) dielectric materials. Adhesion of metals to these ultra-low-k polymers is an important factor in the fabrication of multilayer redistribution layer (RDL) structures and also the reliability of RDLs. ULK polymers have lower adhesion to metal films than the current industry standard, Ajinomoto Buildup Film (ABF). Earlier studies have shown an improvement in adhesion strength between metal films and benzocyclobutene-based polymers when a VPI treatment is used. In this study we evaluate the effect of VPI on other ULK polymers, having dielectric constants less than 2.5.
本文探讨了气相渗透(VPI)对超低k介电材料性能的影响。金属与这些超低钾聚合物的粘附性是制备多层再分布层(RDL)结构的重要因素,也是RDL结构可靠性的重要因素。ULK聚合物对金属薄膜的附着力比目前的工业标准Ajinomoto积聚膜(ABF)低。早期的研究表明,当使用VPI处理时,金属薄膜与苯并环丁烯基聚合物之间的粘附强度有所改善。在本研究中,我们评估了VPI对其他介电常数小于2.5的ULK聚合物的影响。
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引用次数: 0
Reliability and Process Scalability of TiO2/Porous Silicon-Based Broadband Photodetectors TiO2/多孔硅基宽带光电探测器的可靠性和工艺可扩展性
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-20 DOI: 10.1109/TDMR.2023.3317539
Sharmila B;Priyanka Dwivedi
This paper presents the reliability and process scalability aspects to fabricate efficient broadband photodetectors based on titanium dioxide (TiO2)/porous silicon (P-Si). Here we have compared the performance and photoresponse of the TiO2/P-Si photodetectors with the P-Si photodetectors. The photosensing performance of the fabricated photodetectors were tested in the broadband spectrum (ultraviolet (UV) to near infrared (NIR)) at room temperature (RT). The TiO2/P-Si photodetectors showed more reliable, repeatable and reproducible results at room temperature (RT). The TiO2/P-Si photodetectors showed a photoresponsivity of ~820 mA/W and detectivity of $5.2times 10,,^{mathrm{ 10}}$ Jones. The photoresponsivity value for TiO2/P-Si is ~8 times higher than the P-Si based photodetectors. Moreover, the TiO2/P-Si photodetector offers rise/fall times of 11/14 ms with excellent repeatability and reproducibility. Further, the TiO2/P-Si photodetector’s reliability test was conducted from 293 K to 400 K. The TiO2/P-Si photodetector offered improved, reliable, repeatable, and stable results at 400 K. The aforementioned results proved that the highly efficient TiO2/P-Si photodetector could be useful for real time optical sensing applications.
本文介绍了基于二氧化钛(TiO2)/多孔硅(P-Si)制备高效宽带光电探测器的可靠性和工艺可扩展性。在这里,我们比较了TiO2/P-Si光电探测器与P-Si光电探测器的性能和光响应。在室温(RT)下测试了所制备的光电探测器在紫外(UV)至近红外(NIR)宽带光谱上的光敏性能。在室温(RT)下,TiO2/P-Si光电探测器显示出更可靠、可重复和可重现的结果。TiO2/P-Si光电探测器的光响应率为~820 mA/W,探测率为$5.2 × 10,,^{ mathm {10}}$ Jones。TiO2/P-Si的光响应度值是P-Si光电探测器的8倍。此外,TiO2/P-Si光电探测器的上升/下降时间为11/14 ms,具有良好的重复性和再现性。在293 ~ 400 K范围内进行了TiO2/P-Si光电探测器的可靠性测试。TiO2/P-Si光电探测器在400 K下提供了改进的、可靠的、可重复的和稳定的结果。上述结果证明了高效的TiO2/P-Si光电探测器可用于实时光学传感应用。
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引用次数: 0
Measurements and Review of Failure Mechanisms and Reliability Constraints of 4H-SiC Power MOSFETs Under Short Circuit Events 短路事件下4H-SiC功率mosfet失效机制及可靠性约束的测量与评述
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-18 DOI: 10.1109/TDMR.2023.3316928
Renze Yu;Saeed Jahdi;Olayiwola Alatise;Jose Ortiz-Gonzalez;Sai Priya Munagala;Nick Simpson;Phil Mellor
The reliability of the SiC MOSFET has always been a factor hindering the device application, especially under high voltage and high current conditions, such as in the short circuit events. This paper experimentally reviews the failure mechanisms caused by destructive short circuit impulses, and investigates the degradation patterns of key electrical parameters under repetitive short circuit events. The impact of test parameters on the short circuit reliability of SiC MOSFET has been analyzed. Approaches to characterize the electrical-thermal-mechanical stress during the short circuit period and advanced test methods are highlighted. Finally, the constraints from the standpoint of both manufacturers and users have been presented, including comparison of current SiC MOSFET devices, reliability evaluation of parallel SiC MOSFET devices, reliability improvement of the chip, performance improvement of protection circuits, and reliability assessment of SiC MOSFET devices under application-representative stress.
SiC MOSFET的可靠性一直是阻碍器件应用的一个因素,特别是在高电压和大电流条件下,例如在短路事件中。本文通过实验综述了破坏性短路脉冲的失效机制,并研究了重复短路事件下关键电气参数的退化规律。分析了测试参数对SiC MOSFET短路可靠性的影响。重点介绍了表征短路时电-热-机械应力的方法和先进的测试方法。最后,从制造商和用户的角度提出了限制条件,包括现有SiC MOSFET器件的比较,并行SiC MOSFET器件的可靠性评估,芯片的可靠性改进,保护电路的性能改进以及SiC MOSFET器件在应用代表性应力下的可靠性评估。
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引用次数: 0
Failure Mechanisms of Fluorine-Doped Tin Oxide Thin Films in Glass and Reliability Tests 含氟氧化锡薄膜在玻璃中的失效机理及可靠性试验
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-18 DOI: 10.1109/TDMR.2023.3316774
Jihee Bae;Hyoungseuk Choi
Fluorine-doped tin oxide (FTO) is a transparent conductive oxide that is used in solar cells and energy devices. In this study, environmental tests and corresponding failure analyses were conducted to identify the failure mechanisms of FTO. An FTO thin film was prepared via spray pyrolysis deposition (SPD). Environmental tests were conducted in high-temperature and high-humidity environments, similar to field conditions. The degradation behavior and failure mechanisms were investigated using Hall-coefficient measurements, X-ray powder diffraction (XRD) analysis, and field-emission scanning electron microscopy (FE-SEM), before and after exposure to the test environments. A decrease in the carrier concentrations and electron mobilities of the FTO samples was observed after the tests. The analysis of the results revealed a decrease in the F concentration after the tests, resulting in a decrease in the carrier concentration. Moreover, the electron mobility decreased owing to the reduction in periodicity of the crystal attributed to F vacancies. Therefore, high-temperature and high-humidity conditions significantly decreased the durability of FTO. Future studies should consider the degradation of F in such environments and determine ways to prevent it.
氟掺杂氧化锡(FTO)是一种用于太阳能电池和能源装置的透明导电氧化物。在本研究中,通过环境试验和相应的失效分析来确定FTO的失效机制。采用喷雾热解沉积(SPD)法制备了FTO薄膜。环境试验是在高温高湿环境下进行的,类似于现场条件。通过霍尔系数测量、x射线粉末衍射(XRD)分析和场发射扫描电镜(FE-SEM)研究了暴露于测试环境前后的降解行为和破坏机制。测试后观察到FTO样品的载流子浓度和电子迁移率下降。分析结果显示,试验后F浓度降低,导致载流子浓度降低。此外,由于F空位导致晶体的周期性降低,电子迁移率降低。因此,高温和高湿条件显著降低了FTO的耐久性。未来的研究应该考虑F在这种环境中的降解,并确定防止它的方法。
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引用次数: 0
Characterization of LDO Induced Increment of SEE Sensitivity for 22-nm FDSOI SRAM LDO诱导22 nm FDSOI SRAM SEE灵敏度增加的特性
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-18 DOI: 10.1109/TDMR.2023.3316625
Chang Cai;Yuzhu Liu;Minchi Hu;Gengshen Chen;Jun Yu
The radiation sensitivity of the Static Random-Access Memory (SRAM) device depends on the basic memory cell and peripheral circuits, and the influence of peripheral circuits is difficult to measure and classify, especially for the internal low dropout regulator (LDO) modules. In this paper, the LDO with radiation-tolerant bipolar bandgap was designed and fabricated to provide power supply for Fully Depleted Silicon on Insulator (FDSOI) SRAM test chips. The LDO induced Single Event Effects (SEE) for SRAM devices were investigated by pulsed laser and heavy ion irradiation tests. The simulation and irradiation results show that the hardened LDO has high SEE tolerance, while a few upset errors for memory units were induced by the transient turbulence of the internal LDO in test chips. The characterization results of LDOs provide specific insights into radiation sensitivity and impacts on the whole chips, and contribute to the full evaluation of high-reliable circuits and systems for space applications.
静态随机存取存储器(SRAM)器件的辐射灵敏度取决于基本存储单元和外围电路,外围电路的影响难以测量和分类,特别是对于内部低差调节器(LDO)模块。本文设计并制作了具有耐辐射双极带隙的LDO,为全耗尽绝缘体上硅(FDSOI) SRAM测试芯片提供电源。采用脉冲激光和重离子辐照实验研究了LDO对SRAM器件的单事件效应。仿真和辐照结果表明,硬化后的LDO具有较高的SEE耐受性,但测试芯片中LDO内部的瞬态湍流会对存储单元产生一定的扰动误差。ldo的表征结果提供了对整个芯片的辐射灵敏度和影响的具体见解,并有助于对空间应用的高可靠性电路和系统进行全面评估。
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引用次数: 0
Single Pulse Charge Pumping Technique Improvement for Interface-States Profiling in the Channel of MOSFET Devices 单脉冲电荷泵送技术在MOSFET器件通道中接口状态分析中的改进
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-15 DOI: 10.1109/TDMR.2023.3315931
DhiaElhak Messaoud;Boualem Djezzar;Mohamed Boubaaya;Abdelmadjid Benabdelmoumene;Boumediene Zatout;Amel Chenouf;Abdelkader Zitouni
This paper presents the separated single pulse charge pumping (SSPCP) technique, an improvement over conventional single pulse charge pumping (CSPCP) for analyzing metal oxide semiconductor field-effect transistor (MOSFET) degradation. SSPCP separates the measurement of source and drain currents $({I}_{ {s}}$ and ${I}_{ {d}}$ ), enabling the localization of interface traps $({N}_{ {it}})$ near these regions. Experimental validation shows that SSPCP achieves comparable results to CSPCP with a maximum measurement error of 5%. The technique is particularly useful for studying stress-induced localized degradation profiling, allowing for the exploration of non-uniform stress (e.g., hot-carrier injection) and uniform stress (e.g., negative bias temperature instability) in transistors with short channels. SSPCP effectively analyzes localized degradation and identifies differences in stress-induced degradation between the source and drain regions, making it a valuable tool in semiconductor device characterization.
本文提出了分离单脉冲电荷泵送(SSPCP)技术,这是对传统单脉冲电荷泵送(CSPCP)技术的改进,用于分析金属氧化物半导体场效应晶体管(MOSFET)的退化。SSPCP将源极和漏极电流的测量$({I}_{{s}}$和${I}_{{d}}$)分开,使接口陷阱$({N}_{{it}})$在这些区域附近定位。实验验证表明,SSPCP的测量结果与CSPCP相当,最大测量误差为5%。该技术对于研究应力诱导的局部退化剖面特别有用,允许探索短通道晶体管中的非均匀应力(例如,热载流子注入)和均匀应力(例如,负偏置温度不稳定性)。SSPCP有效地分析了局部退化,并识别了源极和漏极区域之间应力诱导退化的差异,使其成为半导体器件表征的重要工具。
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引用次数: 1
Analysis of the Extraction Method and Mechanism of Hot Carrier Degradation in Al2O3/Si3N4 Bilayer Gate Dielectric AlGaN/GaN MIS-HEMTs Al2O3/Si3N4双层栅介质AlGaN/GaN miss - hemts中热载子降解的提取方法及机理分析
IF 2 3区 工程技术 Q2 Engineering Pub Date : 2023-09-14 DOI: 10.1109/TDMR.2023.3312667
Jen-Wei Huang;Po-Hsun Chen;Tsung-Han Yeh;Xin-Ying Tsai;Pei-Yu Wu
High-electron-mobility transistor (HEMT) based on Gallium Nitride (GaN) material is often designed for high-voltage operating conditions because of the high electric critical field of GaN material. However, such devices are often prone to the hot carrier stress (HCS) effect under high drain voltage and on-state conditions. Therefore, the HCS effect is an important consideration for reliable GaN HEMT devices. The Al2O3/Si3N4 bilayer gate dielectric AlGaN/GaN metal–insulator–semiconductor (MIS) HEMT has many advantages such as low gate leakage current and interface defects. However, the degradation phenomena observed in this device under HCS is very different from those of Si3N4 MIS HEMTs discussed in several reported studies. In this work, the HCS degradation results of Si3N4 MIS HEMTs and Al2O3/Si3N4 bilayer MIS HEMTs are both investigated and compared. The HCS degradations in Al2O3/Si3N4 bilayer MIS HEMTs are also examined and illustrated in depth. Finally, different stress voltage conditions of HCS are applied and the C-V measurements are carried out in order to confirm the degradation behaviors of MIS HEMT device.
基于氮化镓(GaN)材料的高电子迁移率晶体管(HEMT)通常被设计用于高压工作条件,因为氮化镓(GaN)材料具有高电临界场。然而,这种器件在高漏极电压和导通状态下往往容易产生热载流子应力(HCS)效应。因此,HCS效应是可靠GaN HEMT器件的重要考虑因素。Al2O3/Si3N4双层栅介质AlGaN/GaN金属绝缘体半导体HEMT具有栅漏电流小、界面缺陷少等优点。然而,该装置在HCS下观察到的降解现象与一些报道中讨论的Si3N4 MIS hemt有很大不同。本文对Si3N4 MIS hemt和Al2O3/Si3N4双层MIS hemt的HCS降解结果进行了研究和比较。HCS在Al2O3/Si3N4双层MIS hemt中的降解也进行了深入的研究和说明。最后,采用不同的HCS应力电压条件,进行了C-V测量,以确定MIS HEMT器件的退化行为。
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引用次数: 0
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IEEE Transactions on Device and Materials Reliability
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