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Aging-Induced Mg Cluster Observation in GaN-Based Lasers by Atom Probe Tomography 原子探针层析成像观察氮化镓基激光器中老化诱导的Mg团簇
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-13 DOI: 10.1109/TDMR.2025.3569588
Pengyan Wen;Huixin Xiu;Shuming Zhang;Jianping Liu;Yimeng Chen;Hui Yang
Gallium nitride (GaN)-based lasers, spanning emission wavelengths from ultraviolet to green, are widely used as light sources in many application domains. Despite their widespread usage, the comprehensive analysis of atomic-level degradation remains challenging primarily due to limitations in metrology techniques. In this study, we investigated the aging-induced magnesium (Mg) clusters in GaN-based lasers utilizing atom probe tomography. Notably, we have identified Mg clusters of several nanometers in size within the p-type aluminum gallium nitride (p-AlGaN) cladding layer of aged lasers, marking the first observation of such clusters in this context. The presence of Mg clusters induces light scattering and absorption within the cladding layer, contributing to an increase in internal loss and a decrease in slope efficiency. Furthermore, our findings underscore the efficacy of atom probe tomography as a potent technique for conducting atomic-level device failure analysis of semiconductor devices.
氮化镓(GaN)基激光器的发射波长从紫外到绿光,被广泛用于许多应用领域。尽管它们被广泛使用,但由于计量技术的限制,原子水平降解的综合分析仍然具有挑战性。在这项研究中,我们利用原子探针断层扫描研究了氮化镓基激光器中老化诱导的镁团簇。值得注意的是,我们在老化激光器的p型氮化铝镓(p-AlGaN)包层中发现了几纳米大小的Mg团簇,这标志着在这种情况下首次观察到这种团簇。镁团簇的存在引起包层内部的光散射和吸收,导致内部损耗增加和斜率效率降低。此外,我们的研究结果强调了原子探针断层扫描作为半导体器件进行原子级器件故障分析的有效技术的有效性。
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引用次数: 0
Ion Radiation Effects on the Stability of Hafnium Oxide-Based Ferroelectric Thin Films: Mechanisms and Regulation 离子辐射对氧化铪基铁电薄膜稳定性的影响:机理与调控
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-13 DOI: 10.1109/TDMR.2025.3550950
Yujie Fan;Jiawei Liu;Jie Jiang;Li-Mei Jiang
With the advancement of information technology, ferroelectric memories have garnered significant attention due to their non-volatility, high theoretical storage density, low power consumption, and excellent radiation resistance. Hafnium oxide-based ferroelectric materials have a high dielectric constant, a relatively wide bandgap, and good compatibility with CMOS processes, making them suitable for developing the next generation of ferroelectric memories. However, the stability issues hafnium oxide-based ferroelectric thin films face during service, including the wake-up effect and poor polarization retention, hinder the commercialization process of hafnium oxide-based ferroelectric memories developed from these thin films. This paper explores the possibility of optimizing the stability issues of HfO2-based ferroelectric thin films through ion irradiation based on a phase-field model of hafnium oxide-based ferroelectric thin films. The research results show that ion irradiation can effectively weaken the wake-up effect and improve the retention of the thin films. After irradiation with H, He, Fe, and Ar ions, the increase in remanent polarization values of HfO2-based ferroelectric thin films after wake-up was significantly reduced compared to the increase observed in non-irradiated films. Among them, the thin films irradiated with Ar ions showed the smallest increase in remanent polarization after wake-up, at only 9%, while the non-irradiated films exhibited a much higher increase of 260%. Additionally, the ten-year polarization retention efficiencies of the films post-irradiation were also excellent, reaching 95.2%, 93.3%, 92.7%, and 94.5% for H, He, Fe, and Ar ions, respectively. Since Ar ions most effectively reduce the wake-up effect and enhance polarization retention, this study recommends using Ar ions to optimize the stability of hafnium oxide-based ferroelectric thin films. This study provides new insights into optimizing HfO2-based ferroelectric thin films and explores their potential applications in ferroelectric memories.
随着信息技术的进步,铁电存储器因其非易失性、高理论存储密度、低功耗和优异的耐辐射性而备受关注。氧化铪基铁电材料具有较高的介电常数、相对较宽的带隙以及与CMOS工艺的良好兼容性,适合开发下一代铁电存储器。然而,氧化铪基铁电薄膜在使用过程中面临的稳定性问题,包括唤醒效应和差的极化保留,阻碍了由这些薄膜开发的氧化铪基铁电存储器的商业化进程。本文基于氧化铪基铁电薄膜的相场模型,探讨了离子辐照优化hfo2基铁电薄膜稳定性问题的可能性。研究结果表明,离子辐照可以有效地减弱唤醒效应,提高薄膜的保留率。经H、He、Fe和Ar离子辐照后,唤醒后hfo2基铁电薄膜的剩余极化值的增加比未辐照薄膜的增加明显减少。其中,经Ar离子辐照的薄膜唤醒后的剩余极化增加幅度最小,仅为9%,而未辐照的薄膜唤醒后的剩余极化增加幅度更大,达到260%。此外,辐照后膜的十年极化保持效率也很好,H、He、Fe和Ar离子的十年极化保持效率分别达到95.2%、93.3%、92.7%和94.5%。由于Ar离子最有效地降低了唤醒效应,增强了极化保留,因此本研究建议使用Ar离子来优化氧化铪基铁电薄膜的稳定性。该研究为优化hfo2基铁电薄膜提供了新的见解,并探索了其在铁电存储器中的潜在应用。
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引用次数: 0
Study of Trap Influence on Threshold Voltage of SiC MOSFET Based on Transient Current Method 基于瞬态电流法的陷阱对SiC MOSFET阈值电压影响的研究
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-12 DOI: 10.1109/TDMR.2025.3569318
Zhuoming Liu;Qian Wen;Xianwei Meng;Shijie Pan;Chunsheng Guo;Shiwei Feng;Yamin Zhang;Meng Zhang
The threshold voltage shift issue caused by traps in silicon carbide metal-oxide-semiconductor field-effect transistors (SiC MOSFETs) is studied based on transient current method. Experiment results show gate stress, drain stress, and temperature all contribute to threshold voltage shift, with the underlying cause of traps. To obtain physical characteristics of the traps, we test the drain current of the device after filling the traps and utilize a Bayesian iterative deconvolution algorithm to extract the time constants. To accurately explore the impact of traps on the current, we further process the time constant spectrum into a differential amplitude spectrum (DAS), which provides greater precision in addressing the issue of trap amplitudes. We also analyze the variation of trap time constants at different environmental temperatures, and extract the activation energies of the traps in conjunction with the Arrhenius equation. Ultimately, experiments discover two types of electron traps and hole traps.
基于瞬态电流法研究了碳化硅金属氧化物半导体场效应晶体管(SiC mosfet)中陷阱引起的阈值电压偏移问题。实验结果表明,栅极应力、漏极应力和温度都是导致阈值电压漂移的原因,其根本原因是陷阱。为了获得陷阱的物理特性,我们在填充陷阱后测试器件的漏极电流,并利用贝叶斯迭代反卷积算法提取时间常数。为了准确地探索陷阱对电流的影响,我们进一步将时间常数谱处理成差分振幅谱(DAS),这在解决陷阱振幅问题时提供了更高的精度。我们还分析了不同环境温度下陷阱时间常数的变化,并结合Arrhenius方程提取了陷阱的活化能。最后,实验发现了两种类型的电子陷阱和空穴陷阱。
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引用次数: 0
Lifetime Prediction of IGBT by BPNN Based on Improved Dung Beetle Optimization Algorithm 基于改进屎壳虫优化算法的BPNN IGBT寿命预测
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-07 DOI: 10.1109/TDMR.2025.3567650
Peng Dai;Junyi Bao;Zheng Gong;Mingchang Gao;Qing Xu
The insulated gate bipolar transistor (IGBT) has widespread application in energy storage systems, motor drives, smart grids, household appliances and other various fields. These applications demand accurate evaluation of reliability through lifespan prediction to ensure optimal performance and longevity. This study proposes an innovative IGBT lifespan prediction model using an improved dung beetle optimized back propagation neural network (IDBO-BP). The model integrates chebyshev chaotic mapping and golden sine strategy to address critical limitations of existing methods, including low accuracy, poor computational efficiency and weak dynamic adaptability. Chaotic initialization is applied to enhance population diversity and adaptive golden ratio-modulated step sizes are utilized to refine local search precision. This innovative approach delivers breakthroughs in enhancing prediction accuracy and accelerating computation speed without compromising the system’s global exploration capabilities. Besides, a constant case temperature-controlled AC power cycling test protocol was designed to verify the effectiveness of the improved algorithm. This test features suppression of thermal fluctuation interference and the consideration of both conduction losses and switching losses which better simulate real operating conditions. Experimental results demonstrate higher prediction accuracy of the IDBO-BP model compared to DBO-BP, PSO-BP, and GWO-BP. The ${mathrm { R}}^{2}$ values of IDBO-BP model surpass the other methods by an average of 4–27 percentage points respectively. Improved stability of IDBO-BP model is confirmed by lower RMSE values with average error reductions of 9.13–32.1 percentage points, which indicate enhanced robustness in handling nonlinear and fluctuating data for IGBT lifetime prediction.
绝缘栅双极晶体管(IGBT)在储能系统、电机驱动、智能电网、家用电器等各个领域有着广泛的应用。这些应用需要通过寿命预测来准确评估可靠性,以确保最佳性能和寿命。本文提出了一种基于改进的屎壳虫优化反向传播神经网络(IDBO-BP)的IGBT寿命预测模型。该模型集成了切比雪夫混沌映射和金正弦策略,解决了现有方法精度低、计算效率差和动态适应性弱的关键局限性。采用混沌初始化增强种群多样性,采用自适应黄金比例调制步长优化局部搜索精度。这种创新的方法在提高预测精度和加快计算速度方面取得了突破,同时又不影响系统的全球勘探能力。设计了恒箱温控交流电源循环测试协议,验证了改进算法的有效性。该试验具有抑制热波动干扰、兼顾导通损耗和开关损耗的特点,能较好地模拟实际工况。实验结果表明,与DBO-BP、PSO-BP和GWO-BP相比,IDBO-BP模型的预测精度更高。IDBO-BP模型的${ mathm {R}}^{2}$值分别平均优于其他方法4-27个百分点。IDBO-BP模型的稳定性得到了改善,RMSE值降低,平均误差降低了9.13-32.1个百分点,这表明在处理非线性和波动数据时,IGBT寿命预测的鲁棒性增强。
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引用次数: 0
The Influence of Bond Wire Aging on DM EMI Noise in IGBT Converters Considering High-Frequency Ringing 考虑高频振铃的IGBT变换器中键合线老化对DM EMI噪声的影响
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-07 DOI: 10.1109/TDMR.2025.3548979
Sai Gao;Shaoxiang Wang;Jianxiong Yang;Mingxing Du
This paper investigates the impact of bond wire aging on differential mode (DM) electromagnetic interference (EMI) noise emissions in IGBTs under the influence of high-frequency ringing. Using a DC-DC buck converter composed of an IGBT half-bridge module as an example, the study analyzes the changes in the EMI spectrum caused by bond wire lift-off in both the time and frequency domains. The paper explains the generation mechanism of high-frequency oscillations induced by the interaction between the stray inductance of the DC link and the freewheeling diode. The study reveals that bond wire lift-off alters DM EMI noise emissions by affecting the switching characteristics of the IGBT. Additionally, an increase in the number of lift-off bond wires during ringing significantly enhances DM EMI noise emissions at and above the resonance frequency. The findings of this study provide a new perspective on the aging effects of power electronic devices and their impact on EMI.
本文研究了高频振铃作用下,键合线老化对igbt中差分模式电磁干扰(EMI)噪声发射的影响。本文以IGBT半桥模块组成的DC-DC降压变换器为例,从时域和频域分析了键合线升空对电磁干扰频谱的影响。本文解释了直流环节杂散电感与自由转二极管相互作用引起高频振荡的产生机理。研究表明,键合线升空通过影响IGBT的开关特性来改变DM EMI噪声发射。此外,在振铃过程中,抬升键合线数量的增加显著增强了共振频率及以上的DM EMI噪声发射。本研究结果为研究电力电子器件的老化效应及其对电磁干扰的影响提供了新的视角。
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引用次数: 0
Impact of Pulse Voltage Stress on the Reliability of Ferroelectric Thin-Film Transistor 脉冲电压应力对铁电薄膜晶体管可靠性的影响
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-05 DOI: 10.1109/TDMR.2025.3548038
William Cheng-Yu Ma;Chun-Jung Su;Kuo-Hsing Kao;Yu-Chieh Yen;Ji-Min Yang;Yi-Han Li;Yen-Chen Chen;Jhe-Yu Lin;Hui-Wen Chang
Ferroelectric transistors can function as non-volatile memory devices with single-bit, multi-bit, and analog capabilities. State modulation is achieved by programming and erasing with bipolar pulse voltages, while a series of unipolar pulses enable synaptic potentiation and depression. This study examines the effect of pulse voltage stress on the reliability of ferroelectric thin-film transistors (FeTFT) with polycrystalline-silicon (poly-Si) ultra-thin body (UTB) channels. By applying various pulse stresses—bipolar, positive, and negative unipolar—with different pulse widths, we observed distinct degradation behaviors in UTB-FeTFT characteristics. Long bipolar pulse stress caused significant degradation due to the combined effects of the internal electric field from the ferroelectric layer and the external field. In contrast, short bipolar stress led to milder degradation, as lower remnant polarization reduced the total stress field. Rapid changes in electric field direction also limited charge accumulation in the channel, decreasing interface trap generation. Although short bipolar stress had minimal impact on subthreshold swing, it notably degraded maximum transconductance, primarily due to strain in the poly-Si channel’s atomic bonds. Enhancing device reliability is essential for improving FeTFT endurance.
铁电晶体管可以作为具有单比特、多比特和模拟能力的非易失性存储器件。状态调制是通过编程和双极脉冲电压擦除来实现的,而一系列单极脉冲则可以实现突触增强和抑制。本文研究了脉冲电压应力对具有多晶硅(polysi)超薄体(UTB)通道的铁电薄膜晶体管可靠性的影响。通过施加不同脉冲宽度的脉冲应力(双极、正、负单极),我们观察到utb - fet特性的不同退化行为。由于铁电层内部电场和外部电场的共同作用,长双极脉冲应力引起了明显的退化。相比之下,较短的双极应力导致较轻的退化,因为较低的残余极化减小了总应力场。电场方向的快速变化也限制了通道中的电荷积累,减少了界面陷阱的产生。虽然短双极应力对亚阈值摆动的影响很小,但它明显降低了最大跨导,这主要是由于多晶硅通道原子键的应变。提高器件可靠性是提高场效应晶体管寿命的关键。
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引用次数: 0
Unit-Cell-Based Approach for Electromigration Compliance Checks in VLSI Power Delivery Networks 基于单元的VLSI输电网络电迁移符合性检测方法
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-02 DOI: 10.1109/TDMR.2025.3566054
Simone Esposto;Ivan Ciofi;Giuliano Sisto;Kristof Croes;Dragomir Milojevic;Houman Zahedmanesh
As the electromigration (EM) reliability margin reduces rapidly with scaling, novel approaches for EM-compliance checks are being intensively sought to enable more accurate and less conservative analyses. Currently, chip-level EM reliability is assessed based on the failure probability of individual lines and vias in the BEOL stack, overlooking potential redundant connections that could still ensure circuit operation despite isolated failures. This is particularly relevant for the power delivery network (PDN), which is redundant by definition due to its regular mesh structure. In this work, we leverage a new approach to perform EM-compliance checks that relies on considering the PDN as a matrix of identical network units-cells, henceforth referred to as tiles, and using them to compute the overall failure risk. As opposed to conventional methods, our approach captures the impact of redundancy within each individual PDN tile, thereby providing less conservative reliability estimations. After reviewing standard methods for EM-compliance checks, namely limit-based and statistical EM budgeting (SEB), we quantify the additional reliability margin provided by our PDN-tile approach. For our analysis, we considered a PDN featuring three different metallization schemes for Dual Damascene (DD) Cu/Low-k interconnects utilizing SiCN capping, Cobalt (Co) capping with and without Ruthenium (Ru) via prefill. Using the standard SEB method indicated that Co capping and Co capping + Ru Via Prefill lead to reductions in EM failure risk by 5 and 7 orders of magnitude, respectively, compared to SiCN capping. The new approach was implemented for the first metallization with SiCN capping. At 10 years lifetime, our PDN-tile approach foresees a failure probability which is 3 orders of magnitude smaller than the SEB approach. At an equivalent failure probability of 100ppm and the same target lifetime of 10 years, the current of standard cells can be increased by 2.8-fold, giving designers more margin to improve chip performances.
由于电迁移(EM)的可靠性裕度随着规模的扩大而迅速降低,人们正在积极寻求新的EM符合性检查方法,以实现更准确、更保守的分析。目前,芯片级电磁可靠性的评估是基于BEOL堆栈中单个线路和过孔的故障概率,忽略了潜在的冗余连接,这些连接在孤立故障的情况下仍然可以确保电路运行。这与电力输送网络(PDN)特别相关,由于其规则的网格结构,PDN在定义上是冗余的。在这项工作中,我们利用一种新的方法来执行em合规性检查,该方法依赖于将PDN视为相同网络单元-单元的矩阵,因此称为单元,并使用它们来计算整体故障风险。与传统方法相反,我们的方法捕获了每个PDN块中冗余的影响,从而提供了更保守的可靠性估计。在回顾了电磁符合性检查的标准方法,即基于限制和统计电磁预算(SEB)之后,我们量化了PDN-tile方法提供的额外可靠性裕度。在我们的分析中,我们考虑了一种具有三种不同金属化方案的PDN,用于双Damascene (DD) Cu/Low-k互连,利用SiCN封盖、钴(Co)封盖和不通过预填充的钌(Ru)。使用标准的SEB方法表明,与SiCN封盖相比,Co封盖和Co封盖+ Ru Via Prefill分别降低了5个和7个数量级的EM失效风险。新方法用于第一次SiCN封盖的金属化。在10年的寿命中,我们的PDN-tile方法预测的失效概率比SEB方法小3个数量级。在100ppm的等效失效概率和相同的目标寿命为10年的情况下,标准电池的电流可以增加2.8倍,为设计人员提供了更大的空间来提高芯片性能。
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引用次数: 0
FPGA Assessment Methodology of Adverse X-Ray Effects on Secure Digital Circuits 安全数字电路x射线不良影响的FPGA评估方法
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-02-21 DOI: 10.1109/TDMR.2025.3538484
Nasr-Eddine Ouldei Tebina;Luc Salvo;Nacer-Eddine Zergainoh;Guillaume Hubert;Paolo Maistri
Recent research demonstrates the feasibility of X-ray attacks. Unlike traditional fault injection methods, X-rays offer precise spatial targeting because of their short wavelength and high penetration power. This allows attackers to selectively target specific regions within a device, from individual transistors to larger blocks. This necessitates a new perspective on hardening techniques, requiring designers to consider the impact of X-ray irradiation on both fault injection and power consumption. To address this challenge, the paper proposes a characterization flow that analyzes the differences in side-channel leakages of FPGA components and their susceptibility to increased leakage due to X-ray effects. Despite the fundamental differences between ASIC and FPGA layouts, they both share the characteristic of being MOS technology-based, which makes them both susceptible to TID effects. The simulation results strongly support the theory that X-rays can induce leakage currents, thereby amplifying the side-channel information leakage observed in our experiments on FPGAs. Furthermore, these results provide concrete evidence that different FPGA components exhibit varying susceptibility to X-ray-induced leakage. Our findings reveal a clear hierarchy of vulnerability, with interconnects being the most susceptible elements, followed by registers, and lastly, logic components (LUTs and MUXes). This differential vulnerability offers valuable information for designers of secure cryptographic circuits. By understanding how X-rays impact different components, hardening techniques can be strategically targeted to provide the most effective protection against both fault injection and side-channel leakage.
最近的研究证明了x射线攻击的可行性。与传统的断层注入方法不同,x射线由于波长短、穿透能力强,可以提供精确的空间定位。这使得攻击者可以选择性地瞄准设备内的特定区域,从单个晶体管到更大的块。这就需要从新的角度来看待硬化技术,要求设计人员考虑x射线照射对断层注入和功耗的影响。为了解决这一挑战,本文提出了一个表征流程,分析了FPGA组件侧通道泄漏的差异以及它们对x射线效应导致的泄漏增加的易感性。尽管ASIC和FPGA布局之间存在根本差异,但它们都具有基于MOS技术的特征,这使得它们都容易受到TID效应的影响。仿真结果有力地支持了x射线可以诱导泄漏电流的理论,从而放大了我们在fpga实验中观察到的侧通道信息泄漏。此外,这些结果提供了具体的证据,表明不同的FPGA组件对x射线诱发泄漏的敏感性不同。我们的研究结果揭示了一个清晰的漏洞层次结构,互连是最易受影响的元素,其次是寄存器,最后是逻辑组件(lut和mux)。这种差异漏洞为安全加密电路的设计者提供了有价值的信息。通过了解x射线如何影响不同的组件,硬化技术可以有针对性地提供最有效的保护,防止断层注入和侧通道泄漏。
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引用次数: 0
An Equivalent Circuit Model of 12 nm P-FinFET for NBTI Effect NBTI效应的12nm p - finet等效电路模型
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-02-20 DOI: 10.1109/TDMR.2025.3543863
Jun-An Zhang;Hao Chen;Bo Liu;Chao Li;Dan Li;Tiehu Li;Yunhua Lu;Qingwei Zhang
A negative bias temperature instability (NBTI) equivalent circuit model based on P-FinFET of a 12nm CMOS PDK and electrical components and arithmetic units of EDA software is presented. The P-FinFET circuit model consists of electrical components such as voltage sources, controlled sources, adders and multipliers, and other arithmetic units. The model is set up with five tunable input parameters, including stress time, gate width, gate length, process corner (slow/ fast/ typical), and temperature. The equivalent circuit model also takes into account bias conditions of transistor, such as gate-source voltage, drain source voltage, and drain gate voltage, which will affect NBTI. Simulation result shows that the degradation curves of the equivalent circuit model for P-FinFET are in concordance with experimental data presented in previously published literatures.
提出了一种基于12nm CMOS PDK的P-FinFET和EDA软件的电子元件和运算单元的负偏置温度不稳定性等效电路模型。P-FinFET电路模型由电压源、控制源、加法器和乘法器以及其他算术单元等电子元件组成。该模型设置了五个可调的输入参数,包括应力时间、栅极宽度、栅极长度、工艺角(慢/快/典型)和温度。等效电路模型还考虑了影响NBTI的晶体管偏置条件,如栅极源电压、漏极源电压和漏极栅极电压。仿真结果表明,P-FinFET等效电路模型的退化曲线与已有文献的实验数据一致。
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引用次数: 0
Microstructural Evolution of Gate Oxide in SiC Power MOSFETs Under Heavy-Ion Irradiation 重离子辐照下SiC功率mosfet栅极氧化物的微观结构演变
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-02-20 DOI: 10.1109/TDMR.2025.3544208
Yiping Xiao;Chaoming Liu;Jiaming Zhou;Mingzheng Wang;Chunhua Qi;Tianqi Wang;Mingxue Huo
Maintaining the robustness of the gate oxide is a prerequisite for the on-orbit application of SiC MOSFETs. Recent research has demonstrated that the oxide undergoes premature breakdown within the operating voltage range after heavy ion irradiation, which is attributed to the activation of ion-induced gate latent damages (LDs) under gate post-irradiation gate stress (PIGS). However, the specific activation processes of LDs and oxide failure mechanism are not well understood. This study indicates that the dielectric breakdown induced epitaxy (DBIE) and thermal runaway effects are the dominant mechanisms when oxide rupture occurs, characterized by a step-like increase in gate leakage current during PIGS test. The failure analysis further confirmed the formation of DBIE hillock and percolation path. The results suggest that more attention should be paid to the gate oxide reliability before SiC MOSFETs could replace their Si-based counterparts in aerospace applications.
保持栅极氧化物的稳健性是SiC mosfet在轨应用的先决条件。最近的研究表明,在重离子辐照后的工作电压范围内,氧化物发生了过早击穿,这是由于离子诱导的栅极潜在损伤(LDs)在栅极辐照后栅极应力(pig)下被激活。然而,目前对ld的具体活化过程和氧化失效机制尚不清楚。本研究表明,介质击穿诱导外延(DBIE)和热失控效应是氧化物破裂的主要机制,其特征是在pig测试期间栅极泄漏电流呈阶梯状增加。破坏分析进一步证实了DBIE丘的形成和渗流路径。结果表明,在SiC mosfet取代硅基mosfet在航空航天领域的应用之前,应该更多地关注栅极氧化物的可靠性。
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引用次数: 0
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