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The Achievement of Pulse Laser Deposited Amorphous P-Type N-Doped Ga₂O₃ for Applying in Thin Film Transistor and Homojunction Diode 脉冲激光沉积非晶p型n掺杂Ga₂O₃在薄膜晶体管和同结二极管中的应用
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-04-09 DOI: 10.1109/TDMR.2025.3559225
Teng-Min Fan;Chen Wang;Cong Yi;Chen-Hao Zhou;Yu-Li Su;Yun-Shao Cho;Dong-Sing Wuu;Shui-Yang Lien
In this study, an amorphous p-type N-doped Ga2O3 thin film has been achieved using pulsed laser deposition and Ga2O3:GaN=1:1 (at%) mixed ceramic target. The bonding states of the films after nitrogen incorporation were investigated using X-ray photoelectron spectroscopy, which revealed the lattice oxygen sites substituted by nitrogen. Ultraviolet photoelectron spectroscopy analysis shows a p-type feature of N-doped Ga2O3 film and a weak n-type unintentional doped pure Ga2O3 film. The thin film transistors have been fabricated using pure and N-doped Ga2O3 films to further confirm their n-type and p-type conductive properties, respectively. The N-doped Ga2O3-based TFTs displays p-type characteristics with a field effect mobility of $2.13times 10{^{text {-3}}}$ cm2/V $cdot $ s, an on/off ratio of $2.78times 10{^{{4}}}$ and a sub-threshold swing of 0.15 V/dec. Finally, a full amorphous Ga2O3 films-based pn homojunction diode has been fulfilled and explored in detail, which displays a good rectifying characteristic with a rectification ratio of $1.46times 10{^{{2}}}$ and an ideality factor of 5.19.
本研究采用脉冲激光沉积技术,制备了Ga2O3:GaN=1:1 (at%)的非晶p型掺n Ga2O3薄膜。利用x射线光电子能谱分析了氮掺入后膜的成键状态,发现晶格氧位被氮取代。紫外光电子能谱分析表明,n掺杂Ga2O3薄膜具有p型特征,纯Ga2O3薄膜具有弱n型特征。采用纯Ga2O3薄膜和掺n的Ga2O3薄膜分别制备了薄膜晶体管,进一步证实了其n型和p型导电性能。n掺杂ga2o3基tft具有p型特性,场效应迁移率为$2.13 × 10{^{text {-3}}}$ cm2/V $cdot $ s,通断比为$2.78 × 10{^{{4}}}$,亚阈值摆幅为0.15 V/dec。最后,制备了基于Ga2O3薄膜的全非晶pn同质结二极管,具有良好的整流特性,整流比为$1.46 × 10{^{{2}}}$,理想系数为5.19。
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引用次数: 0
Magnetically Coupled Resonant Wireless Power Transmission System: A Review of Fault Diagnosis Methods 磁耦合谐振无线输电系统:故障诊断方法综述
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-04-07 DOI: 10.1109/TDMR.2025.3558283
Fengchuan Wang;Cheng Chen;Zhihao Ye;Qikai Fang;Gang Yang
Wireless power transmission (WPT) technology is rapidly evolving and promising. However, its system is prone to fault due to aging and failure of power electronic devices, so the study of effective fault diagnosis and prediction methods is crucial for stable operation of the system. In this paper, the external aging output characteristics of typical devices in WPT system are firstly introduced. Secondly, the existing fault diagnosis methods of WPT system and the typical power electronics fault diagnosis and prediction methods that can be learned from are reviewed, while the application of these methods in WPT system is evaluated. Finally, the future development trend of WPT fault diagnosis and prediction technology is outlooked.
无线电力传输(WPT)技术发展迅速,前景广阔。然而,由于电力电子设备的老化和失效,其系统容易发生故障,因此研究有效的故障诊断和预测方法对系统的稳定运行至关重要。本文首先介绍了WPT系统中典型器件的外老化输出特性。其次,综述了WPT系统现有的故障诊断方法和可借鉴的典型电力电子故障诊断与预测方法,并对这些方法在WPT系统中的应用进行了评价。最后,展望了WPT故障诊断与预测技术的未来发展趋势。
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引用次数: 0
Die-Attach Influence on Thermal/Electrical Parameters of GaN RF Device 贴片对GaN射频器件热/电参数的影响
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-04-01 DOI: 10.1109/TDMR.2025.3556383
Giacomo Cappellini;Giuseppe D’Arrigo;Viviana Cerantonio;Marcello Cioni;Alessandro Chini;Sonia Zappala;Simone Strano;Leonardo Gervasi;Marcello Giuffrida;Cristina Miccoli;Cristina Tringali;Maria Eloisa Castagna;Ferdinando Iucolano
This paper presents a comprehensive study on the relation between die-attach and thermal/electrical parameters of GaN RF devices. This correlation is investigated through Multiphysics simulations and experimental data. Particularly, thermal analysis is performed by means of Quantum Focus Instrument (QFI) Infrascope able to detect the surface temperature of the device. Then, 3-D finite element method thermal simulations are performed to support the observed heat distribution. A strong association between drain current drift and temperature escalation is demonstrated by comparing two devices with significantly different die-attaches. Particularly, we observe an increase in the drain current with increasing self-heating effects, conversely to what generally expected for thermal derating. However, this correlation is then explained thanks to the analysis of threshold voltage shift with temperature that supports the experimental evidence.
本文对GaN射频器件的热/电参数与贴片之间的关系进行了全面研究。通过多物理场模拟和实验数据研究了这种相关性。特别是,通过能够检测器件表面温度的量子聚焦仪器(QFI) Infrascope进行热分析。然后,进行了三维有限元热模拟,以支持观测到的热分布。漏极电流漂移和温度升高之间的强烈关联是通过比较两个器件具有显著不同的芯片附件来证明的。特别是,我们观察到漏极电流随着自热效应的增加而增加,这与通常预期的热降额相反。然而,由于阈值电压随温度变化的分析支持实验证据,这种相关性得到了解释。
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引用次数: 0
A Novel Dual-Mode Dual Trench MOSFET With Self-Adjustable Field Plate for Low EMI Noise and High Dynamic Avalanche Robustness 一种具有自调场极板的新型双模双沟槽MOSFET,具有低电磁干扰噪声和高动态雪崩鲁棒性
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-04-01 DOI: 10.1109/TDMR.2025.3556015
Tongyang Wang;Zehong Li;Yishang Zhao;Ziming Xia;Yige Zheng;Jun Ye;Xuan Xiao
A novel dual-mode dual trench MOSFET (DDT-MOSFET) featuring shorted P-doping field plate (PFP) and N-doping field plate (NFP) is proposed. A parasitic depletion region capacitor and a parasitic MOSFET are introduced in the self-adjustable field plate (SFP). During turn-on, the DDT-MOSFET is in the split gate trench (SGT) mode with an electron inversion layer in the PFP, achieving low $C_{mathrm { gd}}$ . During turn-off, the DDT-MOSFET is in the insulator pillar superjunction (I-SJ) mode with depleted PFP, achieving low electromagnetic interference (EMI) noise and high breakdown voltage (BV). Mode conversion is realized by the introduction of the SFP. By TCAD simulation, during turn-off, the proposed structure exhibits 33.9% improvement in BV, 42.8% reduction in maximum $dI_{mathrm { D}}$ /dt and 44.1% reduction in overshoot voltage $(V_{mathrm { O}})$ with same $E_{mathrm { off}}$ , reducing EMI noise and improving dynamic avalanche robustness without deterioration of other electrical characteristics.
提出了一种新型的双模双沟槽MOSFET (DDT-MOSFET),其特点是短接p掺杂场板(PFP)和n掺杂场板(NFP)。在自调场极板(SFP)中引入了寄生耗尽区电容和寄生MOSFET。在导通过程中,DDT-MOSFET处于分栅沟槽(SGT)模式,在PFP中有一个电子反转层,实现低$C_{ mathm {gd}}$。在关断过程中,DDT-MOSFET处于绝缘子柱超结(I-SJ)模式,PFP耗尽,实现低电磁干扰(EMI)噪声和高击穿电压(BV)。模式转换是通过引入SFP实现的。通过TCAD仿真,该结构在关断过程中BV提高33.9%,最大dI_{mathrm {D}}$ /dt降低42.8%,超调电压$(V_{mathrm {O}})$降低44.1%,降低了电磁干扰噪声,提高了动态雪崩鲁棒性,同时不影响其他电气特性。
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引用次数: 0
Statistical Model and Transistor Size Effect of Hot Carrier Injection for Stability Reinforced SRAM Physically Unclonable Function 稳定性增强SRAM物理不可克隆功能的热载流子注入统计模型和晶体管尺寸效应
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-29 DOI: 10.1109/TDMR.2025.3574796
Shufan Xu;Kunyang Liu;Kiichi Niitsu;Hirofumi Shinohara
Hot carrier injection (HCI) has been strategically leveraged to enhance the stability of SRAM physically unclonable functions (PUFs). Since the effects of HCI are not constant, exhibiting cell-to-cell variability, a comprehensive distribution model is essential to harness HCI effectively. This article presents a statistical distribution model of mismatch after HCI burn-in and examines the impact of transistor size of PUF on the distribution shape, yielding enhanced stability and shorter HCI burn-in time. The proposed mismatch model after HCI burn-in integrates the native distribution with a Poisson distribution for number of captured electrons and a Gamma distribution for the effect of captured electrons. Model calculations based on size effects reveal that over three times reduction in HCI burn-in duration by enhancing the size to quadruple times: a 15-min for quadruple-size transistor SRAM PUF compared to 46-min for single-size PUF. The model is confirmed by the real chip measurement. The PUFs with several sized transistors are fabricated in a 130-nm standard CMOS process. Experimental results show that quadruple-size transistor SRAM PUF reaches 1.82E−09 unstable cell ratio after 18-min HCI burn-in, which align with the model based expectation. Furthermore, robust stability is exhibited even the worst VT corner (0.6V / $-40^{circ }mathrm {C}$ ), demonstrating zero bit error (BER<7.81E−08).
热载流子注入(HCI)已被战略性地用于提高SRAM物理不可克隆功能(puf)的稳定性。由于HCI的影响不是恒定的,表现出细胞间的可变性,因此一个全面的分布模型对于有效利用HCI至关重要。本文提出了HCI老化后失配的统计分布模型,并研究了PUF晶体管尺寸对分布形状的影响,从而提高了稳定性和缩短了HCI老化时间。提出的HCI老化后失配模型将捕获电子数的泊松分布和捕获电子效应的伽玛分布与自然分布相结合。基于尺寸效应的模型计算表明,通过将尺寸增加到四倍,HCI烧蚀时间减少了三倍以上:四尺寸晶体管SRAM PUF为15分钟,而单尺寸PUF为46分钟。该模型通过实际芯片测量得到了验证。puf具有多个尺寸的晶体管,采用130纳米标准CMOS工艺制造。实验结果表明,经过18 min HCI老化后,四倍尺寸晶体管SRAM PUF达到1.82 2e−09的不稳定电池比,符合基于模型的预期。此外,即使在最坏的VT角(0.6V / $-40^{circ} maththrm {C}$),也表现出鲁棒的稳定性,显示零比特误差(BER<7.81E−08)。
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引用次数: 0
Post-Breakdown IV Characteristics and Instabilities in Dense OTP Anti-Fuse Memories 密集OTP抗熔丝记忆的击穿后特性与不稳定性
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-29 DOI: 10.1109/TDMR.2025.3574776
Mattia Rossetti;Laura Atzeni;Rita Zappa
Instability phenomena in dense one-time-programmable memories based on the breakdown of ultra-thin silicon dioxide layers are discussed. During stress at programming condition, cell IV characteristics are found to evolve between quasi-linear and highly non-linear characteristics. Extensive characterization of this instability is carried on as a function of stress duration and programming conditions to maximize post-breakdown current and guarantee values above the program-verify threshold. Read current instability is also observed during reading cycles and associated to a switching behavior between two or more states of the breakdown path that has been minimized by a proper cell design. Post-breakdown IV characteristics of the OTP cell are modeled based on the quantum-point contact model. Peculiar temperature dependence of the IV characteristics of programmed cells is nicely described by the proposed model.
讨论了基于超薄二氧化硅层击穿的致密一次性可编程存储器中的不稳定现象。在编程条件下的应力过程中,细胞IV的特性在准线性和高度非线性之间演化。这种不稳定性的广泛表征是作为应力持续时间和编程条件的函数进行的,以最大化击穿后电流和高于程序验证阈值的保证值。在读取周期中也观察到读电流不稳定,这与击穿路径的两个或多个状态之间的切换行为有关,而适当的电池设计已将其最小化。基于量子点接触模型对OTP电池击穿后的IV特性进行了建模。所提出的模型很好地描述了程序化细胞IV特性的特殊温度依赖性。
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引用次数: 0
Board Level-Component Solder Joints Normalized Crack Severity Index of Solid-State Drive With Different Reliability Temperature Cycle Test Profiles 不同可靠性温度循环试验模式下固态硬盘板级元件焊点归一化裂纹严重指数
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-28 DOI: 10.1109/TDMR.2025.3574447
Erwan Basiron;Adlil Aizat Ismail;Azman Jalar;Maria Abu Bakar;Azman Ahmad
In the realm of electronic device manufacturing, one persistent challenge is the lack of a universal TCT (Temperature Cycle Test) solder joints crack assessment that is suitable for all types of electronic components. This gap becomes particularly complex when multiple components are assembled into a single board. Therefore, this paper proposed an approach by normalizing the solder joints cracks, index $eta $ value as benchmarking value for solder joint cracks in components following TCT. This work used four types of components include controller, NAND, double data rate random-access memory (DDR-RAM) and power management integrated circuit (PMIC). All of these components subjected to three different TCT conditions (A) −40 to $85~{^{^{circ }} }$ C, 10 mins soak, 12.5 mins ramp, 500 cycles, (B) 0 to $100~{^{^{circ }} }$ C, 15 mins soak, 15 mins ramp, 750 cycles and (C) 0 to $100~{^{^{circ }} }$ C, 15 mins soak, 15 mins ramp, 900 cycles to determine relative severity of the SSD design, and its critical components solder joint performance. Solder joints crack percentage is calculated from inspection post DnP and analysed to compare the severity. The normalize solder joints, index $mathrm {{eta } }$ were calculated and used to analyse all the components post TCT. It was found that TCT profile C is more stringent with solder joint cracks $4.1x$ higher than TCT profile A and $2.5mathrm { x}$ higher than TCT profile B. The highest index $eta $ value of 5.2 from TCT profile C indicates that it is the most stringent of all tested TCT profiles, compared to TCT profile B at 2.67 and TCT profile A at 1.13. The findings from this study provide valuable insights into selecting effective TCT profiles, allowing for optimized testing procedures that save time and resources. This approach is particularly beneficial for specific components, including controller, NAND, DDR-RAM and PMIC packages. Furthermore, normalizing solder joint cracks using the index $eta $ value as a benchmarking metric can be applied to other types of electronic components.
在电子器件制造领域,一个持续存在的挑战是缺乏适用于所有类型电子元件的通用TCT(温度循环测试)焊点裂纹评估。当多个组件组装在一块电路板上时,这种差距变得特别复杂。因此,本文提出了一种通过对焊点裂纹进行正火处理,以指数$eta $值作为TCT后元件焊点裂纹的基准值的方法。这项工作使用了四种类型的组件,包括控制器,NAND,双数据速率随机存取存储器(DDR-RAM)和电源管理集成电路(PMIC)。所有这些组件都经过三种不同的TCT条件(A) - 40至85美元~{^{circ}}}$ C, 10分钟浸泡,12.5分钟斜坡,500次循环,(B) 0至100美元~{^{circ}} $ C, 15分钟浸泡,15分钟斜坡,750次循环和(C) 0至100美元~{^{^{circ}} $ C, 15分钟浸泡,15分钟斜坡,900次循环,以确定SSD设计的相对严重程度及其关键组件的焊点性能。根据检验岗位DnP计算焊点裂纹百分率,并对其进行分析,比较其严重程度。计算了正火焊点的指数$ mathm {{eta}}$,并对TCT后的所有元件进行了分析。结果表明,TCT型C对焊点裂纹的要求比TCT型A高4.1倍,比TCT型B高2.5倍。TCT型C的最高指数$eta $值为5.2,与TCT型B的2.67和TCT型A的1.13相比,它是所有测试的TCT型中最严格的。这项研究的结果为选择有效的TCT剖面提供了有价值的见解,从而优化了测试程序,节省了时间和资源。这种方法对特定组件特别有利,包括控制器、NAND、DDR-RAM和PMIC封装。此外,使用指数$eta $值作为基准度量标准正火焊点裂纹可以应用于其他类型的电子元件。
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引用次数: 0
Influence of Phase Coarsening on Inhomogeneous Deformation and Fracture Behavior in Sn–Bi Solder Interconnects 相粗化对锡铋焊料互连不均匀变形和断裂行为的影响
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-28 DOI: 10.1109/TDMR.2025.3574560
Shuibao Liang;Han Jiang;Zhihong Zhong;Yaohua Xu;Saranarayanan Ramachandran
With the increasing demand for emerging technologies like artificial intelligence and big data, the significance of advanced chip integration and packaging has grown considerably. Sn-Bi based solders have gained significant attention and have been explored for multi-layer stacked packaging, but they are prone to significant coarsening during service, and the effects of grain and phase anisotropy become more pronounced. These factors impact the performance and reliability of Sn-Bi solder interconnects. This study develops a numerical model to investigate microstructure coarsening in Sn-Bi solder bump interconnects, focusing on its effect on mechanical behavior and crack propagation. The simulated coarsening behavior aligns with experimental observations. Results show that, under shear loading, the Sn-rich phase experiences higher stress initially, while the Bi-rich phase bears greater stress later, leading to stress concentrations mainly in the Bi-rich phase or at the phase interfaces. Thermal aging exacerbates the uneven distribution of stress. Plastic strain is greater in the Sn-rich phase, and cracks primarily initiate and propagate in the Bi-rich phase. Coarsening accelerates crack growth, affecting the stress-strain response. This study provides insights into the effects of phase coarsening and inhomogeneous deformation in Sn-Bi solder interconnects, which may contribute to interconnect design and reliability analysis in three-dimensional packaging.
随着对人工智能、大数据等新兴技术的需求不断增加,先进的芯片集成和封装的重要性大大增加。锡铋基钎料在多层堆叠封装中得到了广泛的关注和探索,但其在使用过程中容易出现明显的粗化,晶粒和相各向异性的影响变得更加明显。这些因素都会影响锡铋焊料互连的性能和可靠性。本研究建立了一个数值模型来研究锡铋凸点互连的微观组织粗化,重点研究其对力学行为和裂纹扩展的影响。模拟的粗化行为与实验观察相符。结果表明:剪切载荷作用下,富sn相初始应力较大,富bi相后期应力较大,应力主要集中在富bi相或相界面处;热老化加剧了应力分布的不均匀性。富锡相的塑性应变较大,裂纹主要在富铋相萌生和扩展。粗化加速裂纹扩展,影响应力-应变响应。本研究提供了相粗化和不均匀变形对锡铋焊料互连的影响,这可能有助于三维封装互连设计和可靠性分析。
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引用次数: 0
Resistive Defect Analysis and Fault Modeling of DICE Memory in Commercial 40-nm CMOS Technology 商用40纳米CMOS技术中DICE存储器的电阻性缺陷分析与故障建模
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-26 DOI: 10.1109/TDMR.2025.3573599
Yi Wang;Jiahao Yin;Yaohua Xu;Chunmei Hu
The complex architecture of double interlocked storage cell (DICE) static random access memories (SRAM), which consists of 12 Metal Oxide Semiconductor Field Effect Transistors (MOSFETs), presents challenges in manufacturing test. Manufacturing defects can cause faults in DICE SRAMs, and undetected faults may lead to test escapes, resulting in early in-field failures. These issues can prevent DICE SRAMs from meeting the applications requiring high quality in sectors such as aerospace. This paper proposes a new type of SEU fault for DICE SRAM, analyzing how physical defects influence its SEU resilience, which forms a new fault space together with parameter faults and functional faults.This paper presents a detailed analysis and fault modeling of resistive defects that may occur in DICE SRAMs and proposes a novel test algorithm to enhance fault coverage and reduce test escapes during manufacturing test. First, we define and classify the fault space, including functional faults, parameter faults, and single event upset (SEU) faults, and outline the methodology to validate faults within this space. Next, we inject resistive defects into the SPICE netlist of DICE SRAMs, conduct SPICE simulation, and inspect its corresponding behavior. Furthermore, through the analysis of the fault modeling results of DICE SRAMs and evaluating the test coverage and limitations of existing test solutions, we propose a new test algorithm. This results in a substantial increase in dynamic fault coverage from 20.57% to 28.37% and an overall improvement in fault coverage from 33.88% to 39.89% when compared to the March C+ algorithm, while reducing the possibility of test escape for parameter faults (including HSNM and RSNM faults) and SEU faults. In summary, the findings of the paper are effective in detecting the realistic faults in DICE SRAMs, thereby bolstering the effectiveness of DICE SRAMs test for critical applications.
双联锁存储单元(DICE)静态随机存取存储器(SRAM)由12个金属氧化物半导体场效应晶体管(mosfet)组成,其复杂的结构给制造测试带来了挑战。制造缺陷可能导致DICE sram出现故障,而未检测到的故障可能导致测试逃逸,从而导致早期现场故障。这些问题可能会阻止DICE sram满足航空航天等部门对高质量的应用要求。本文针对DICE SRAM提出了一种新的单单元故障类型,分析了物理缺陷对其单单元弹性的影响,与参数故障和功能故障共同构成了一个新的故障空间。本文对DICE sram中可能出现的电阻性缺陷进行了详细的分析和故障建模,并提出了一种新的测试算法,以提高故障覆盖率和减少制造测试中的测试逃逸。首先,对故障空间进行了定义和分类,包括功能故障、参数故障和单事件故障,并概述了在该空间内验证故障的方法。接下来,我们将电阻性缺陷注入DICE sram的SPICE网络列表中,进行SPICE仿真,并检测其相应的行为。此外,通过分析DICE sram的故障建模结果,评估现有测试方案的测试覆盖率和局限性,提出了一种新的测试算法。与March C+算法相比,动态故障覆盖率从20.57%大幅提高到28.37%,总体故障覆盖率从33.88%提高到39.89%,同时降低了参数故障(包括HSNM和RSNM故障)和SEU故障的测试逃逸可能性。综上所述,本文的研究结果有效地检测了DICE sram中的实际故障,从而提高了DICE sram测试在关键应用中的有效性。
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引用次数: 0
Thermal Shock Reliability of Silver-Sintered Bonding of Metal-Plated Aluminum Surfaces 镀金属铝表面银烧结键合的热冲击可靠性
IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-03-24 DOI: 10.1109/TDMR.2025.3554369
Lisheng Wang;Gert Rietveld;Raymond J. E. Hueting
Silver (Ag) sintering is becoming more critical for future wide bandgap (WBG) power module substrate attachments. However, sintered Ag joints with plated aluminum (Al) heatsinks and directly bonded aluminum (DBA) substrates presently suffer from poor reliability. To resolve this problem, this work studies the reliability of plated (Nickel) Ni/Ag metallization on Al for sintered Ag joints and proposes a new plated Ni/Copper (Cu)/Ag metallization stack for improved reliability. The shear strength and thermal shock (TS) reliability of the sintered Ag joints for different metallization layers are studied, and microstructural and elemental analyses were performed to analyze the failure modes. The results show that the reliability of the sintered Ag joints by the traditional Ni/Ag metallization is rather limited because of poor adhesion between Ni and Ag. In contrast, the shear strength of the new Ni/Cu/Ag metallized sintered Ag joints is consistently above 40 MPa up to 500 TS cycles, with the dominant failure modes formed by Al/Ni delamination and cohesive failure. Preparing sintered Ag joints with the Ni/Cu/Ag metallization with longer sintering times removed the unwanted delamination failure mode and only left the preferred cohesive failure mode; moreover, the shear strength improved significantly, with values reaching 130 MPa. Furthermore, a new failure mode appears in the sintered Ag joint of the Ni/Cu/Ag stack, implying that the Al/Ni metallization weakness there is less of a limiting factor. This proves that our new metallization stack resolves present delamination issues in Ag sintered joints with Al heatsinks and DBA substrates and thereby supports exploiting the full potential of sintered Ag joints.
银(Ag)烧结对未来宽带隙(WBG)功率模块衬底的连接变得越来越重要。然而,目前,镀铝(Al)散热器和直接粘合铝(DBA)衬底的烧结银接头可靠性较差。为了解决这一问题,本文研究了烧结银接头铝表面镀镍/银金属化的可靠性,并提出了一种新的镀镍/铜/银金属化堆栈,以提高可靠性。研究了不同金属化层的烧结银接头的抗剪强度和热冲击可靠性,并对其破坏模式进行了金相组织和元素分析。结果表明,传统的Ni/Ag金属化烧结的Ag接头由于Ni与Ag之间的附着力差,可靠性受到很大限制。相比之下,新型Ni/Cu/Ag金属化烧结Ag接头的抗剪强度在500 TS循环中始终保持在40 MPa以上,其主要破坏模式为Al/Ni分层和内聚破坏。烧结时间较长的Ni/Cu/Ag金属化制备的烧结Ag接头消除了不必要的分层破坏模式,只留下了首选的内聚破坏模式;抗剪强度显著提高,达到130 MPa。此外,在Ni/Cu/Ag堆的烧结Ag接头中出现了一种新的失效模式,表明Al/Ni金属化缺陷的限制因素较小。这证明了我们的新型金属化堆叠解决了目前使用Al散热器和DBA衬底的银烧结接头中的分层问题,从而支持开发烧结银接头的全部潜力。
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引用次数: 0
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