Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659068
Kuo-Wei Huang, Yu-Chun Kung, Yi-Chien Wu, Yu-Jui Fan, P. Chiou
We report on a novel optoelectronic tweezers (OET) platform integrated with three-dimensional microfluidic networks to enable single-cell manipulation and advance fluid control functions such as mixing droplets and thermal cycles on a chip.
{"title":"Optoelectronic tweezers integrated with 3D microfluidic networks","authors":"Kuo-Wei Huang, Yu-Chun Kung, Yi-Chien Wu, Yu-Jui Fan, P. Chiou","doi":"10.1109/OMN.2013.6659068","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659068","url":null,"abstract":"We report on a novel optoelectronic tweezers (OET) platform integrated with three-dimensional microfluidic networks to enable single-cell manipulation and advance fluid control functions such as mixing droplets and thermal cycles on a chip.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88450617","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659043
Yongchao Zou, Guangya Zhou, Y. Du, F. Chau
Characteristics and alignment tolerances of a MEMS Alvarez lens are studied. Results show that the lens can adjust its focal length substantially with small lateral displacements of its constituent elements along the x axis. Meanwhile, it is also revealed that the lens performance degrades with the increasing displacements. The lens is most sensitive to the misalignment along the y direction. Normalized RMS spot radius (NRSR) rises from 1 to 10 with a misalignment of 0.1 mm in this direction. In addition, a tilt of 1 degree about the x, y or z axis leads to a NRSR change from 0.96 to 1.02, 0.92, and 1.28, respectively.
{"title":"Alignment tolerances of MEMS Alvarez lenses","authors":"Yongchao Zou, Guangya Zhou, Y. Du, F. Chau","doi":"10.1109/OMN.2013.6659043","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659043","url":null,"abstract":"Characteristics and alignment tolerances of a MEMS Alvarez lens are studied. Results show that the lens can adjust its focal length substantially with small lateral displacements of its constituent elements along the x axis. Meanwhile, it is also revealed that the lens performance degrades with the increasing displacements. The lens is most sensitive to the misalignment along the y direction. Normalized RMS spot radius (NRSR) rises from 1 to 10 with a misalignment of 0.1 mm in this direction. In addition, a tilt of 1 degree about the x, y or z axis leads to a NRSR change from 0.96 to 1.02, 0.92, and 1.28, respectively.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85073380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659047
F. Koyama
Our research activities on the wavelength control of MEMS VCSELs are reviewed. This paper explores the potential and challenges for wavelength engineering of VCSELs, including the wavelength athermalization and wavelength tuning. We demonstrate the athermal operation and wavelength tuning of 850nm-GaAs-VCSELs with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables to compensate the temperature drift of lasing wavelengths. The temperature dependence of lasing wavelengths could be reduced by adjusting the cantilever length. Also, a T-shape membrane structure was introduced for efficient electro-thermal tuning. Small temperature dependences and continuous wavelength tuning were obtained.
{"title":"Wavelength engineering of VCSELS based on MEMS technologies","authors":"F. Koyama","doi":"10.1109/OMN.2013.6659047","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659047","url":null,"abstract":"Our research activities on the wavelength control of MEMS VCSELs are reviewed. This paper explores the potential and challenges for wavelength engineering of VCSELs, including the wavelength athermalization and wavelength tuning. We demonstrate the athermal operation and wavelength tuning of 850nm-GaAs-VCSELs with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables to compensate the temperature drift of lasing wavelengths. The temperature dependence of lasing wavelengths could be reduced by adjusting the cantilever length. Also, a T-shape membrane structure was introduced for efficient electro-thermal tuning. Small temperature dependences and continuous wavelength tuning were obtained.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90713750","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659040
Jae‐Woong Jeong, B. Park, H. Keum, Seok Kim, J. Rogers, O. Solgaard
We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.
{"title":"High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing","authors":"Jae‐Woong Jeong, B. Park, H. Keum, Seok Kim, J. Rogers, O. Solgaard","doi":"10.1109/OMN.2013.6659040","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659040","url":null,"abstract":"We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81722798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659035
Xiaoyang Zhang, Lin Liu, Wenxuan Liang, Xingde Li, Huikai Xie
This paper reports the design, fabrication and characterization of an MEMS scanner with combined electrothermal and electrostatic actuation. The scanner can generate large out-of-plane and in-plane displacement. The out-of-plane displacement is achieved by a pair of electro-thermal bimorph actuators, which is as much as 370 μm at only 2.5 V. The in-plane displacement is obtained by employing electrostatic comb drives, which can achieve fast scan up to 10 kHz. A special process has been developed to fabricate microstructures with both thin-film bimorphs and single-crystal-silicon comb drives.
{"title":"An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement","authors":"Xiaoyang Zhang, Lin Liu, Wenxuan Liang, Xingde Li, Huikai Xie","doi":"10.1109/OMN.2013.6659035","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659035","url":null,"abstract":"This paper reports the design, fabrication and characterization of an MEMS scanner with combined electrothermal and electrostatic actuation. The scanner can generate large out-of-plane and in-plane displacement. The out-of-plane displacement is achieved by a pair of electro-thermal bimorph actuators, which is as much as 370 μm at only 2.5 V. The in-plane displacement is obtained by employing electrostatic comb drives, which can achieve fast scan up to 10 kHz. A special process has been developed to fabricate microstructures with both thin-film bimorphs and single-crystal-silicon comb drives.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88755587","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659049
Jumpei Nitta, Shoichi Kishimoto, Y. Taguchi, T. Saiki, Y. Nagasaka
A novel nanoscale temperature measurement system using polarized near-field light which enables the high spatial resolution at nanoscale has been developed. In this measurement system, the temperature dependence of the rotation of the polarization plane in near field is detected. However, the signal light variation is extremely weak, therefore, more sensitive measurement system is required. In this paper, we proposed a novel high sensitive nanoscale temperature measurement method. In addition, this paper reports the analytical and experimental results by using platinum nanostructures in order to confirm the validity of the measurement principle.
{"title":"Experimental study on nanoscale temperature measurement method using rotation of near-field polarization","authors":"Jumpei Nitta, Shoichi Kishimoto, Y. Taguchi, T. Saiki, Y. Nagasaka","doi":"10.1109/OMN.2013.6659049","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659049","url":null,"abstract":"A novel nanoscale temperature measurement system using polarized near-field light which enables the high spatial resolution at nanoscale has been developed. In this measurement system, the temperature dependence of the rotation of the polarization plane in near field is detected. However, the signal light variation is extremely weak, therefore, more sensitive measurement system is required. In this paper, we proposed a novel high sensitive nanoscale temperature measurement method. In addition, this paper reports the analytical and experimental results by using platinum nanostructures in order to confirm the validity of the measurement principle.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81355285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659064
H. Chang, Chun-Wei Tsai, Shih-Hsiang Liu, J. Tsai
This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.
{"title":"Magnetically actuated swing-type micromirror","authors":"H. Chang, Chun-Wei Tsai, Shih-Hsiang Liu, J. Tsai","doi":"10.1109/OMN.2013.6659064","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659064","url":null,"abstract":"This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79196850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659082
H. Honma, Kazuhiro Takahashi, H. Ishii, M. Ishida, K. Sawada
This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm.
{"title":"A 3.3 V operated variable transmission attenuator based on subwavelength grating","authors":"H. Honma, Kazuhiro Takahashi, H. Ishii, M. Ishida, K. Sawada","doi":"10.1109/OMN.2013.6659082","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659082","url":null,"abstract":"This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76026154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659095
B. Thubthimthong, K. Hane
A fast guided mode of a photonic crystal (PC) waveguide was investigated. Dispersion curve of the PC waveguide was calculated and compared to that of a volume-equivalent Si rectangular waveguide. At a wavelength of 1550 nm, the dominant phase velocity and the group velocity of the PC waveguide were higher by 4.6% and 3.4%, respectively. The PC waveguide was incorporated into a Mach-Zehnder interferometer for measuring the guided mode. Normalized measured intensity versus PC waveguide length was found to obey the predicted interference intensity curve which suggested guiding of the mode. Loss associated with the PC waveguide was estimated from the curve to be about -5.6 dB.
{"title":"Fast guided mode of a photonic crystal waveguide","authors":"B. Thubthimthong, K. Hane","doi":"10.1109/OMN.2013.6659095","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659095","url":null,"abstract":"A fast guided mode of a photonic crystal (PC) waveguide was investigated. Dispersion curve of the PC waveguide was calculated and compared to that of a volume-equivalent Si rectangular waveguide. At a wavelength of 1550 nm, the dominant phase velocity and the group velocity of the PC waveguide were higher by 4.6% and 3.4%, respectively. The PC waveguide was incorporated into a Mach-Zehnder interferometer for measuring the guided mode. Normalized measured intensity versus PC waveguide length was found to obey the predicted interference intensity curve which suggested guiding of the mode. Loss associated with the PC waveguide was estimated from the curve to be about -5.6 dB.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84812381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659085
Masahiro Ikuta, Y. Ezoe, I. Mitsuishi, T. Ogawa, T. Kakiuchi, T. Ohashi, K. Mitsuda
Low-cost and high-resolution X-ray optics based on MEMS technologies is proposed and being developed by our group. We have succeeded in soft X-ray imaging using sample optics. However, roughness of the side walls etched through a thin silicon wafer, which are used as X-ray mirrors, limited the image resolution. In this paper, a new process condition is tested in the dry etching process to achieve better resolution. By simply changing the etching mask from aluminum to thick photoresist plus aluminum, the side wall roughness is improved by a factor of ~3 to about 38 nm at 200 um scale.
{"title":"Improvement in sidewall roughness of MEMS X-ray optics","authors":"Masahiro Ikuta, Y. Ezoe, I. Mitsuishi, T. Ogawa, T. Kakiuchi, T. Ohashi, K. Mitsuda","doi":"10.1109/OMN.2013.6659085","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659085","url":null,"abstract":"Low-cost and high-resolution X-ray optics based on MEMS technologies is proposed and being developed by our group. We have succeeded in soft X-ray imaging using sample optics. However, roughness of the side walls etched through a thin silicon wafer, which are used as X-ray mirrors, limited the image resolution. In this paper, a new process condition is tested in the dry etching process to achieve better resolution. By simply changing the etching mask from aluminum to thick photoresist plus aluminum, the side wall roughness is improved by a factor of ~3 to about 38 nm at 200 um scale.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80231244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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