Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659112
Yu‐Sheng Lin, C. Ho, Prakash Pitchappa, F. Ma, Y. Qian, P. Kropelnicki, Chengkuo Lee
An electrically tunable MEMS based out-of-plane metamaterials THz filter using stress-induced curved cantilevers to form split-ring resonator in three-dimensional configuration is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 volts bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using curved cantilevers shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters, etc.
{"title":"Tunable THz filter using 3-D split-ring resonators","authors":"Yu‐Sheng Lin, C. Ho, Prakash Pitchappa, F. Ma, Y. Qian, P. Kropelnicki, Chengkuo Lee","doi":"10.1109/OMN.2013.6659112","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659112","url":null,"abstract":"An electrically tunable MEMS based out-of-plane metamaterials THz filter using stress-induced curved cantilevers to form split-ring resonator in three-dimensional configuration is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 volts bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using curved cantilevers shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters, etc.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89444660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659081
Yu-Fan Chen, H. Chang, Bo-Jiun Chen, J. Tsai
A linear array of MEMS corner cube retro-reflectors (CCR) fabricated with the MUMPs polysilicon surface micromachining process is presented. The CCR's opening faces straight upwards, providing ease of use and better field of view. Tunability can be achieved by employing a drivable mirror as one of the CCR's three mirrors. A novel idea of assembling an N × N CCR array is also proposed.
提出了一种利用MUMPs多晶硅表面微加工工艺制备的MEMS角立方反反射器线性阵列。CCR的开口垂直向上，提供了易用性和更好的视野。可调性可以通过采用可驱动反射镜作为CCR的三个反射镜之一来实现。提出了一种新型的N × N CCR阵列的组合方法。
{"title":"Surface-micromachined MEMS corner cube retro-reflector array","authors":"Yu-Fan Chen, H. Chang, Bo-Jiun Chen, J. Tsai","doi":"10.1109/OMN.2013.6659081","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659081","url":null,"abstract":"A linear array of MEMS corner cube retro-reflectors (CCR) fabricated with the MUMPs polysilicon surface micromachining process is presented. The CCR's opening faces straight upwards, providing ease of use and better field of view. Tunability can be achieved by employing a drivable mirror as one of the CCR's three mirrors. A novel idea of assembling an N × N CCR array is also proposed.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91335165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659072
M. Ordu, Y. Kanamori, K. Hane
We propose and experimentally demonstrate microring resonators with transmission width (Q-factor) tuning capability. The width-tuning is performed by ultra-small comb-drive actuators. Transmission width can be tuned from 1nm to 0.14nm range for a resonant mode. Also 15dB transmission drop is obtained.
{"title":"Transmission width (Q-factor) tunable silicon-photonic micro-ring resonators","authors":"M. Ordu, Y. Kanamori, K. Hane","doi":"10.1109/OMN.2013.6659072","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659072","url":null,"abstract":"We propose and experimentally demonstrate microring resonators with transmission width (Q-factor) tuning capability. The width-tuning is performed by ultra-small comb-drive actuators. Transmission width can be tuned from 1nm to 0.14nm range for a resonant mode. Also 15dB transmission drop is obtained.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84856999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659034
Ming-chun Su, Chih-chieh Chang, Yu-cheng Yang, J. Tsai
In this paper, a module of a tunable micro cat's eye retro-reflector array is used as an optical identification (ID) tag. Dynamic images are generated and the module exhibits a limited viewing angle as desired. This brings a more secure identification system.
{"title":"Tunable cat's eye retro-reflector array as an optical identification tag","authors":"Ming-chun Su, Chih-chieh Chang, Yu-cheng Yang, J. Tsai","doi":"10.1109/OMN.2013.6659034","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659034","url":null,"abstract":"In this paper, a module of a tunable micro cat's eye retro-reflector array is used as an optical identification (ID) tag. Dynamic images are generated and the module exhibits a limited viewing angle as desired. This brings a more secure identification system.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88383914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659079
J. Suzuki, T. Miura, K. Terao, H. Takao, F. Shimokawa, T. Namazu, F. Oohira, Takaaki Suzuki
We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn't need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation.
{"title":"Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite","authors":"J. Suzuki, T. Miura, K. Terao, H. Takao, F. Shimokawa, T. Namazu, F. Oohira, Takaaki Suzuki","doi":"10.1109/OMN.2013.6659079","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659079","url":null,"abstract":"We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn't need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86533496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659088
Hirotaka Maenosono, H. Saito, Y. Nishioka
Potentials of the transparent polyimide (PI) substrate were investigated for a possible biological cell culture sheet. Stromal marrow cells (OP9) were used to test the cell culture characteristics, and the OP9 cell culture was compared on three kinds of polymer films of transparent PI, parylene (PA), and polyetheretherketone (PEEK). Microtrenches with the width of 5 μm and the depth of 5 μm were fabricated using hot embossing technique on these films. The cultured cell of OP9 was observed on the transparent PI sheet and PA sheet, but not on PEEK sheet. The culture of OP9 cells were easily observed on the transparent PI sheet using an optical microscope.
{"title":"Evaluation of transparent polyimide film as biological cell culture sheet with microstructures for biomedical engineering","authors":"Hirotaka Maenosono, H. Saito, Y. Nishioka","doi":"10.1109/OMN.2013.6659088","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659088","url":null,"abstract":"Potentials of the transparent polyimide (PI) substrate were investigated for a possible biological cell culture sheet. Stromal marrow cells (OP9) were used to test the cell culture characteristics, and the OP9 cell culture was compared on three kinds of polymer films of transparent PI, parylene (PA), and polyetheretherketone (PEEK). Microtrenches with the width of 5 μm and the depth of 5 μm were fabricated using hot embossing technique on these films. The cultured cell of OP9 was observed on the transparent PI sheet and PA sheet, but not on PEEK sheet. The culture of OP9 cells were easily observed on the transparent PI sheet using an optical microscope.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80472996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659071
C. Koos, J. Leuthold, W. Freude, L. Alloatti, R. Palmer, D. Korn, J. Pfeifle, P. Schindler, M. Lauermann
Silicon-organic hybrid (SOH) integration can extend the capabilities of silicon photonics by combining silicon-on-insulator (SOI) waveguides with functional organic cladding materials. This enables energy-efficient electro-optic modulators and ultra-compact phase shifters. We review recent progress in SOH integration, discussing both fundamental device concepts and experimental demonstrations.
{"title":"Silicon-organic hybrid (SOH) technology: A platform for efficient electro-optical devices","authors":"C. Koos, J. Leuthold, W. Freude, L. Alloatti, R. Palmer, D. Korn, J. Pfeifle, P. Schindler, M. Lauermann","doi":"10.1109/OMN.2013.6659071","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659071","url":null,"abstract":"Silicon-organic hybrid (SOH) integration can extend the capabilities of silicon photonics by combining silicon-on-insulator (SOI) waveguides with functional organic cladding materials. This enables energy-efficient electro-optic modulators and ultra-compact phase shifters. We review recent progress in SOH integration, discussing both fundamental device concepts and experimental demonstrations.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74320987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659062
V. Tseng, Jiping Li, Xiaoyang Zhang, Huikai Xie
An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.
{"title":"Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control","authors":"V. Tseng, Jiping Li, Xiaoyang Zhang, Huikai Xie","doi":"10.1109/OMN.2013.6659062","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659062","url":null,"abstract":"An electromagnetically actuated MEMS mirror with precise tilt angle control for a bi-state optical switch is reported. A tilt angle control of ± 2.29° is achieved by utilizing the 4 μm BOX layer thickness of an SOI wafer together with carefully controlled backside deep silicon etching to construct precise mechanical stoppers. The device is die level packaged with a KOH etched textured silicon encapsulation to prevent scattering reflection from the back cavity to promote high contrast. Measurement results of tilt angle versus applied magnetic field correspond well with theoretical model prediction. The designed device is suitable for optical telecommunication in harsh environments that do not permit any electrical sparks.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90580815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659029
C. Wong
Recent advances in sub-wavelength nanoscale platforms have afforded the control of light from first principles, with impact to optoelectronics and high-density secure communications. In this talk I will highlight two coherent examples where emerging mesoscopic systems can make a difference. Firstly, I will report on chip-scale Kerr frequency comb oscillators, where we have recently observed one of the shortest (74-fs) pulse mode-locking till date (Figure 1a) [1]. The frequency comb dynamics, evolution and coherent nature will be described. The CMOS-compatible frequency combs [2-5], including solitary pulses, have potential to link the RF and optical domains with low phase noise, with implications to precision optical clocks and ultrashort pulse generation.
{"title":"Controlling photons in mesoscopic systems: Precision measurements in frequency combs and optomechanics","authors":"C. Wong","doi":"10.1109/OMN.2013.6659029","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659029","url":null,"abstract":"Recent advances in sub-wavelength nanoscale platforms have afforded the control of light from first principles, with impact to optoelectronics and high-density secure communications. In this talk I will highlight two coherent examples where emerging mesoscopic systems can make a difference. Firstly, I will report on chip-scale Kerr frequency comb oscillators, where we have recently observed one of the shortest (74-fs) pulse mode-locking till date (Figure 1a) [1]. The frequency comb dynamics, evolution and coherent nature will be described. The CMOS-compatible frequency combs [2-5], including solitary pulses, have potential to link the RF and optical domains with low phase noise, with implications to precision optical clocks and ultrashort pulse generation.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75385782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659057
A. Gawarikar, R. Shea, J. Talghader
A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×109 cm Hz1/2/W and 4.4×109 cm Hz1/2/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.
报道了一种峰检出率在3×109 cm Hz1/2/W ~ 4.4×109 cm Hz1/2/W之间的光谱选择性非冷却长波红外探测器。该探测器采用硅微加工技术制造，并将热电读出器与谐振光学腔集成在一起，以实现波长选择性吸收。
{"title":"Resonant cavity coupled infrared detectors with high detectivity operating at room temperature","authors":"A. Gawarikar, R. Shea, J. Talghader","doi":"10.1109/OMN.2013.6659057","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659057","url":null,"abstract":"A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×10<sup>9</sup> cm Hz<sup>1/2</sup>/W and 4.4×10<sup>9</sup> cm Hz<sup>1/2</sup>/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75781737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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