Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659096
C. Hong, W. Fang, B. Shew
This study reports a nanoporous anodic aluminum oxide (named np-AAO) template coated with Au nanocrown array on PET substrate for nanophotonic switching application (Fig.1). In this devices, the Au nanocrown array for nanophotonic switching are self-assembled on np-AAO/PET at its one end using batch processes. The advantages of such nano-structure nanophotonic switches are as follows, (1) The surface area of Au nanocrown array/np-AAO is increased. Thus, the photoconductivity of nanophotonic switches is increased; and (2) The Au nanocrown array consists of nanopores transferred from the np-AAO template. Thus, the electron transport induced by localized surface plasmon resonance can be increased by the Au nanocrown array/np-AAO. (3) The np-AAO with higher flexibility and compatibility are promising nanotemplate for flexible application. In applications, flexible nanophotonic switches consisted of Au nanocrown array on np-AAO template is implemented. Measurements demonstrate the sensitivity and photonic instant response of the nanostructure photonic switches is significantly enhanced.
{"title":"Flexible nanoporous anodic aluminum oxide(np-AAO) template coated with self-assembled Au nanocrown array for nanophotonic switching","authors":"C. Hong, W. Fang, B. Shew","doi":"10.1109/OMN.2013.6659096","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659096","url":null,"abstract":"This study reports a nanoporous anodic aluminum oxide (named np-AAO) template coated with Au nanocrown array on PET substrate for nanophotonic switching application (Fig.1). In this devices, the Au nanocrown array for nanophotonic switching are self-assembled on np-AAO/PET at its one end using batch processes. The advantages of such nano-structure nanophotonic switches are as follows, (1) The surface area of Au nanocrown array/np-AAO is increased. Thus, the photoconductivity of nanophotonic switches is increased; and (2) The Au nanocrown array consists of nanopores transferred from the np-AAO template. Thus, the electron transport induced by localized surface plasmon resonance can be increased by the Au nanocrown array/np-AAO. (3) The np-AAO with higher flexibility and compatibility are promising nanotemplate for flexible application. In applications, flexible nanophotonic switches consisted of Au nanocrown array on np-AAO template is implemented. Measurements demonstrate the sensitivity and photonic instant response of the nanostructure photonic switches is significantly enhanced.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"38 1","pages":"135-136"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74499123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659089
J. Suzuki, K. Hirata, K. Iwami, A. Taguchi, N. Umeda
In this study, photochemical polishing based on a nonadiabatic optical near-field etching to sapphire substrate is studied. A sapphire substrate with an initial roughness of Ra=6.00 nm was polished by 100 Pa Cl2 gas atmosphere under laser irradiation for 60 minutes, and smoothened into Ra= 1.91 nm. Due to the Gaussian intensity distribution in the laser beam section, there was in-plane distribution of surface roughness. Furthermore, etching time got longer, the roughness was increased. This result suggests nonadiabatic optical near-field etching to sapphire substrate has an optimal etching time, which agrees with a result of SiO2 substrate.
本文研究了基于非绝热光学近场刻蚀的蓝宝石衬底光化学抛光。将初始粗糙度为Ra=6.00 nm的蓝宝石衬底用100 Pa Cl2气体在激光照射下抛光60 min，使其光滑至Ra= 1.91 nm。由于激光束截面内强度分布为高斯分布，表面粗糙度呈平面内分布。刻蚀时间延长，粗糙度增大。该结果表明，蓝宝石衬底的非绝热光学近场刻蚀具有最佳刻蚀时间，这与SiO2衬底的结果一致。
{"title":"Photochemical polishing of sapphire substrate based on nonadiabatic optical near-field etching","authors":"J. Suzuki, K. Hirata, K. Iwami, A. Taguchi, N. Umeda","doi":"10.1109/OMN.2013.6659089","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659089","url":null,"abstract":"In this study, photochemical polishing based on a nonadiabatic optical near-field etching to sapphire substrate is studied. A sapphire substrate with an initial roughness of Ra=6.00 nm was polished by 100 Pa Cl2 gas atmosphere under laser irradiation for 60 minutes, and smoothened into Ra= 1.91 nm. Due to the Gaussian intensity distribution in the laser beam section, there was in-plane distribution of surface roughness. Furthermore, etching time got longer, the roughness was increased. This result suggests nonadiabatic optical near-field etching to sapphire substrate has an optimal etching time, which agrees with a result of SiO2 substrate.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"36 1","pages":"121-122"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73254517","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659039
S. Maruyama, T. Konishi, K. Machida, N. Ishihara, K. Masu, H. Fujita, H. Toshiyoshi
We report an interface IC (integrated circuit) to electrostatically drive and measure the tilt-mirror angle by switching the actuator's port to either the driver or charge-sensing circuit in a time-multiplex manner in a period shorter than the mechanical response time to minimize the disturbance of sensing.
{"title":"A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners","authors":"S. Maruyama, T. Konishi, K. Machida, N. Ishihara, K. Masu, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMN.2013.6659039","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659039","url":null,"abstract":"We report an interface IC (integrated circuit) to electrostatically drive and measure the tilt-mirror angle by switching the actuator's port to either the driver or charge-sensing circuit in a time-multiplex manner in a period shorter than the mechanical response time to minimize the disturbance of sensing.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"31 1","pages":"21-22"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80950777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659054
Wei-ting Chen, C. Tseng, Ku-Hung Chen, N. Na, Ming-Chang M. Lee
A novel process using self-aligned microbonding technique for Ge butt-coupled to silicon waveguides is presented. The photodetector features a low dark current of 0.29 μA and a high responsivity of 1.01 A/W at 1310 nm at -1 V bias.
提出了一种利用自对准微键技术制备锗对接硅波导的新工艺。该光电探测器具有0.29 μA的低暗电流和1.01 a /W的高响应率，波长为1310 nm，偏置为-1 V。
{"title":"Self-aligned microbonding technique for making butt-coupled germanium metal-semiconductor-metal waveguide photodetectors","authors":"Wei-ting Chen, C. Tseng, Ku-Hung Chen, N. Na, Ming-Chang M. Lee","doi":"10.1109/OMN.2013.6659054","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659054","url":null,"abstract":"A novel process using self-aligned microbonding technique for Ge butt-coupled to silicon waveguides is presented. The photodetector features a low dark current of 0.29 μA and a high responsivity of 1.01 A/W at 1310 nm at -1 V bias.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"3 1","pages":"51-52"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73462148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659102
A. Takeda, T. Aihara, M. Fukuhara, Y. Ishii, M. Fukuda
We propose a polarization-independent Au/Si Schottky-type photodetector with a ring-type grating that excites surface plasmon polaritons. The electromagnetic fields in ring-type and rectangular-type grating structures are calculated using the finite-difference time-domain method. For samples with the two geometries (slit width of 100 nm, slit pitch of 440 nm, and Au film thickness of 300 nm), the polarization dependence of the photocurrent is measured and compared. We confirm that the ring-type grating photodetector has a polarization-independent photocurrent, whereas the rectangular-type grating photodetector has only higher sensitivity at specific polarization angles.
{"title":"Polarization-independent photodetector with ring-type grating","authors":"A. Takeda, T. Aihara, M. Fukuhara, Y. Ishii, M. Fukuda","doi":"10.1109/OMN.2013.6659102","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659102","url":null,"abstract":"We propose a polarization-independent Au/Si Schottky-type photodetector with a ring-type grating that excites surface plasmon polaritons. The electromagnetic fields in ring-type and rectangular-type grating structures are calculated using the finite-difference time-domain method. For samples with the two geometries (slit width of 100 nm, slit pitch of 440 nm, and Au film thickness of 300 nm), the polarization dependence of the photocurrent is measured and compared. We confirm that the ring-type grating photodetector has a polarization-independent photocurrent, whereas the rectangular-type grating photodetector has only higher sensitivity at specific polarization angles.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"11 1","pages":"147-148"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85874789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659048
S. Hussain, C. S. Bhatia, Hyunsoo Yang, A. Danner
The goal of this work is to determine the possibility of using nano-aperture VCSELs in heat-assisted magnetic recording (HAMR) applications. The VCSELs in this work, specifically, are primarily used as miniature testbeds for characterizing near field transducer designs. We have fabricated 850 nm VCSELs with large arrays of differently shaped nano-apertures in the gold layer on top of each VCSEL and used statistical methods to obtain reliable indicators of performance of each aperture. The focusing and transmission characteristics of differently shaped nano-apertures are compared by both simulation and experiment.
{"title":"Fabrication and characterization of nano-aperture VCSELS for 10 Tb/in2 magnetic storage densities","authors":"S. Hussain, C. S. Bhatia, Hyunsoo Yang, A. Danner","doi":"10.1109/OMN.2013.6659048","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659048","url":null,"abstract":"The goal of this work is to determine the possibility of using nano-aperture VCSELs in heat-assisted magnetic recording (HAMR) applications. The VCSELs in this work, specifically, are primarily used as miniature testbeds for characterizing near field transducer designs. We have fabricated 850 nm VCSELs with large arrays of differently shaped nano-apertures in the gold layer on top of each VCSEL and used statistical methods to obtain reliable indicators of performance of each aperture. The focusing and transmission characteristics of differently shaped nano-apertures are compared by both simulation and experiment.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"45 1","pages":"39-40"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85505966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659067
Ting-Hsiang Wu, Yi-Chien Wu, Enrico Sagullo, M. Teitell, P. Chiou
We demonstrated direct nuclear delivery of macromolecules into live mammalian cells using the photothermal nanoblade. Pulsed laser triggered cavitation bubbles on a titanium thin film coated micropipette tip was utilized to puncture both the cell plasma and nuclear membranes followed by pressure controlled delivery of cargo into the nucleus. High plasmid expression (79-100%) in different cell types with maintained cell viability was achieved.
{"title":"Direct nuclear delivery of DNA macromolecules using the photothermal nanoblade","authors":"Ting-Hsiang Wu, Yi-Chien Wu, Enrico Sagullo, M. Teitell, P. Chiou","doi":"10.1109/OMN.2013.6659067","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659067","url":null,"abstract":"We demonstrated direct nuclear delivery of macromolecules into live mammalian cells using the photothermal nanoblade. Pulsed laser triggered cavitation bubbles on a titanium thin film coated micropipette tip was utilized to puncture both the cell plasma and nuclear membranes followed by pressure controlled delivery of cargo into the nucleus. High plasmid expression (79-100%) in different cell types with maintained cell viability was achieved.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"13 1","pages":"77-78"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76678742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659094
Nan Wang, M. Tang, F. Hsiao, C. Ho, M. Palaniapan, D. Kwong, Chengkuo Lee
This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region.
{"title":"Experimental verification of phononic crystal slab based silicon microresonators","authors":"Nan Wang, M. Tang, F. Hsiao, C. Ho, M. Palaniapan, D. Kwong, Chengkuo Lee","doi":"10.1109/OMN.2013.6659094","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659094","url":null,"abstract":"This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"24 1","pages":"131-132"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82563134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659051
T. Sawada, K. Masuno, S. Kumagai, M. Ishii, S. Uematsu, M. Sasaki
A newly proposed surface plasmon polariton (SPP) based wavelength selective IR emitter is combined with microheater. The excited SPP propagates on the metallic grating carrying IR having the wavelength near to the grating pitch. By confining IR having other wavelength inside the cavity, the thermal emission is controlled. Emission peak at the wavelength near to the period of the grating is observed. Since the microheater can minimize the loss due to the thermal conduction from the high temperature region to the surrounding basement, the energy efficiently is expected.
{"title":"Surface plasmon polariton based wavelength selective IR emitter combined with microheater","authors":"T. Sawada, K. Masuno, S. Kumagai, M. Ishii, S. Uematsu, M. Sasaki","doi":"10.1109/OMN.2013.6659051","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659051","url":null,"abstract":"A newly proposed surface plasmon polariton (SPP) based wavelength selective IR emitter is combined with microheater. The excited SPP propagates on the metallic grating carrying IR having the wavelength near to the grating pitch. By confining IR having other wavelength inside the cavity, the thermal emission is controlled. Emission peak at the wavelength near to the period of the grating is observed. Since the microheater can minimize the loss due to the thermal conduction from the high temperature region to the surrounding basement, the energy efficiently is expected.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"54 1","pages":"45-46"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85672552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659069
Ye Ming, T. Gessei, K. Miyajima, Munkhbayar Munkhjargal, T. Arakawa, K. Mitsubayashi
A fibre-optic biochemical gas sensor (bio-sniffer) for gaseous formaldehyde (FA) was developed and applied for on-site assessment of FA detoxification. The bio-sniffer measures FA as a fluorescence of reduced nicotinamide adenine dinucleotide (NADH) which is the product of formaldehyde dehydrogenase reaction. The detection limit of the bio-sniffer for gaseous FA was 2.5 ppb, which is enough lower for the purpose of evaluating FA detoxification. The bio-sniffer was then applied to measure phytoremediation with N. E. “Bostoniensis”. The FA level in the measurement chamber decreased down to the detection limit (2.5 ppb), which is lower level than FA level of room air (12 ppb), within 95 min and the value increased to FA level when the chamber was vented.
研制了一种用于气体甲醛(FA)脱毒的光纤生化气体传感器(生物嗅探器)，并应用于FA脱毒的现场评价。该生物嗅探器通过甲醛脱氢酶反应产物烟酰胺腺嘌呤二核苷酸(NADH)的荧光检测FA。生物嗅探器对气态FA的检出限为2.5 ppb，足以用于评价FA的解毒作用。然后应用生物嗅探器测量N. E. " boston oniensis "对植物的修复作用。在95分钟内，测量室内的FA水平下降到检测极限(2.5 ppb)，低于室内空气的FA水平(12 ppb)，当室内通风时，该值上升到FA水平。
{"title":"Fluorometric gas-phase biosensor (bio-sniffer) with UV-LED emission light for formaldehyde vapor","authors":"Ye Ming, T. Gessei, K. Miyajima, Munkhbayar Munkhjargal, T. Arakawa, K. Mitsubayashi","doi":"10.1109/OMN.2013.6659069","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659069","url":null,"abstract":"A fibre-optic biochemical gas sensor (bio-sniffer) for gaseous formaldehyde (FA) was developed and applied for on-site assessment of FA detoxification. The bio-sniffer measures FA as a fluorescence of reduced nicotinamide adenine dinucleotide (NADH) which is the product of formaldehyde dehydrogenase reaction. The detection limit of the bio-sniffer for gaseous FA was 2.5 ppb, which is enough lower for the purpose of evaluating FA detoxification. The bio-sniffer was then applied to measure phytoremediation with N. E. “Bostoniensis”. The FA level in the measurement chamber decreased down to the detection limit (2.5 ppb), which is lower level than FA level of room air (12 ppb), within 95 min and the value increased to FA level when the chamber was vented.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"31 1","pages":"81-82"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72730500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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