Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659100
Prakash Pitchappa, C. Ho, P. Kropelnicki, Chengkuo Lee
Complementary metamaterial based infrared (IR) absorber using complementary metal oxide semiconductor (CMOS) compatible material is presented. The robustness of the proposed device is ensured by studying the effect of fabrication deviation on the device performance. The measured absorption was 70% in the near IR region. The complementary metamaterial absorber can be engineered to provide near unity absorption in IR region.
{"title":"Complementary metamaterial infrared absorber","authors":"Prakash Pitchappa, C. Ho, P. Kropelnicki, Chengkuo Lee","doi":"10.1109/OMN.2013.6659100","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659100","url":null,"abstract":"Complementary metamaterial based infrared (IR) absorber using complementary metal oxide semiconductor (CMOS) compatible material is presented. The robustness of the proposed device is ensured by studying the effect of fabrication deviation on the device performance. The measured absorption was 70% in the near IR region. The complementary metamaterial absorber can be engineered to provide near unity absorption in IR region.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88985475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659073
Deng Jun, S. Hussian, S. Saha, C. Png, M. Tsang, A. Danner
A microring resonator was fabricated in LiNbO3 substrate by annealed proton exchange (APE) method. Measurement results show that thermal annealing is necessary to improve the performance of the channel waveguides. The measured extinction ratio is approximately 13dB. By making use of Cr film as electrodes, a tunability of 2 pm/V is obtained by applying 150V.
{"title":"Optical microring resonators in lithium niobate for classical and quantum microwave photonics","authors":"Deng Jun, S. Hussian, S. Saha, C. Png, M. Tsang, A. Danner","doi":"10.1109/OMN.2013.6659073","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659073","url":null,"abstract":"A microring resonator was fabricated in LiNbO3 substrate by annealed proton exchange (APE) method. Measurement results show that thermal annealing is necessary to improve the performance of the channel waveguides. The measured extinction ratio is approximately 13dB. By making use of Cr film as electrodes, a tunability of 2 pm/V is obtained by applying 150V.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75853131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659036
S. Jeon, H. Fujita, H. Toshiyoshi
We report a novel method to use a MEMS optical scanner for laser projection display as well as for laser range finder (LRF) to make the display system interactive with viewers. Laser light scattered from the screen is detected with photodiodes, and the distance is measured by triangulation. The LRF measurement system has been programmed in LabView™ to alter the projected image.
{"title":"A MEMS interactive laser projection display with a built-in laser range finder","authors":"S. Jeon, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMN.2013.6659036","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659036","url":null,"abstract":"We report a novel method to use a MEMS optical scanner for laser projection display as well as for laser range finder (LRF) to make the display system interactive with viewers. Laser light scattered from the screen is detected with photodiodes, and the distance is measured by triangulation. The LRF measurement system has been programmed in LabView™ to alter the projected image.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82105200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659052
V. Bardinal, T. Camps, B. Reig, J. Doucet, S. Abada, E. Daran
We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.
{"title":"Polymer optical MEMS integrated on VCSELs for biosensing","authors":"V. Bardinal, T. Camps, B. Reig, J. Doucet, S. Abada, E. Daran","doi":"10.1109/OMN.2013.6659052","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659052","url":null,"abstract":"We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84355880","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659084
Minyoung Yun, Daehun Jeong, Seunghwan Moon, Jong-Hyun Lee
In a two-dimensional (2-D) electrostatic microscanner, electrical isolation for separating the current paths of the 2-D actuator and temporary support for enhancing the reliability of the scanner fabrication are still major issues. In this paper, a glass reflow process was proposed to achieve both electrical isolation and temporary support. The glass was successfully reflowed into the silicon trenches with various widths (15 μm, 25 μm and 35 μm) and lengths (25 μm, 50 μm and 100 μm), which will be also evaluated in terms of breakdown voltage and fabrication yield.
{"title":"Glass reflow process for an electrical isolation and temporary support of two-dimensional microscanner","authors":"Minyoung Yun, Daehun Jeong, Seunghwan Moon, Jong-Hyun Lee","doi":"10.1109/OMN.2013.6659084","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659084","url":null,"abstract":"In a two-dimensional (2-D) electrostatic microscanner, electrical isolation for separating the current paths of the 2-D actuator and temporary support for enhancing the reliability of the scanner fabrication are still major issues. In this paper, a glass reflow process was proposed to achieve both electrical isolation and temporary support. The glass was successfully reflowed into the silicon trenches with various widths (15 μm, 25 μm and 35 μm) and lengths (25 μm, 50 μm and 100 μm), which will be also evaluated in terms of breakdown voltage and fabrication yield.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79758513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659086
I. Mitsuishi, Y. Ezoe, T. Ogawa, T. Kakiuchi, Masahiro Ikuta, T. Hayashi, Toshiki Sato, T. Ohashi, K. Mitsuda, K. Morishita, K. Nakajima
We have been developing original MEMS-based X-ray optics toward future astronomical missions such as a planetary exploration mission. In this paper, we report results on the first X-ray irradiation test for a 2-stage MEMS-based optic. The obtained FWHM of the focusing image is 13±2 arcmin. However, an occultation effect and a deformation accuracy possibly affect a reduction of effective area.
{"title":"Assembly of a MEMS-based Wolter type-I X-ray optic toward a future planetary exploration mission","authors":"I. Mitsuishi, Y. Ezoe, T. Ogawa, T. Kakiuchi, Masahiro Ikuta, T. Hayashi, Toshiki Sato, T. Ohashi, K. Mitsuda, K. Morishita, K. Nakajima","doi":"10.1109/OMN.2013.6659086","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659086","url":null,"abstract":"We have been developing original MEMS-based X-ray optics toward future astronomical missions such as a planetary exploration mission. In this paper, we report results on the first X-ray irradiation test for a 2-stage MEMS-based optic. The obtained FWHM of the focusing image is 13±2 arcmin. However, an occultation effect and a deformation accuracy possibly affect a reduction of effective area.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87388366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659099
F. Ma, Yu‐Sheng Lin, Y. Qian, C. Ho, Prakash Pitchappa, Chengkuo Lee
Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability has been demonstrated by both the electromagnetic simulation and the experimental measurement.
{"title":"Development of tunable 3-D eSRR for THz applications","authors":"F. Ma, Yu‐Sheng Lin, Y. Qian, C. Ho, Prakash Pitchappa, Chengkuo Lee","doi":"10.1109/OMN.2013.6659099","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659099","url":null,"abstract":"Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability has been demonstrated by both the electromagnetic simulation and the experimental measurement.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87418352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659032
Hyeon-cheol Park, Yeong-Hyeon Seo, Seung-Bum Yang, Min-seog Choi, Seungwan Lee, Woon-Bae Kim, K. Jeong
This work presents a forward viewing endoscopic OCT catheter based on a resonant fiber scanning. Two-dimensional optical scanning in a Lissajous pattern was realized by a piezoelectric tube with quartered electrodes and asymmetrically resonant fiber cantilever. Asymmetrically resonant fiber cantilever was assembled by additional fiber fragment and silicon supporting structure to avoid mechanical coupling effect at resonance. The endoscopic catheter of 3.2 mm diameter was assembled and combined with SD-OCT system. Three dimensional images were directly reconstructed by mapping the A-line data sets along non-repeating Lissajous trajectories with high temporal resolution.
{"title":"Forward-viewing endoscopic OCT catheter using asymmetrically resonant fiber scanner","authors":"Hyeon-cheol Park, Yeong-Hyeon Seo, Seung-Bum Yang, Min-seog Choi, Seungwan Lee, Woon-Bae Kim, K. Jeong","doi":"10.1109/OMN.2013.6659032","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659032","url":null,"abstract":"This work presents a forward viewing endoscopic OCT catheter based on a resonant fiber scanning. Two-dimensional optical scanning in a Lissajous pattern was realized by a piezoelectric tube with quartered electrodes and asymmetrically resonant fiber cantilever. Asymmetrically resonant fiber cantilever was assembled by additional fiber fragment and silicon supporting structure to avoid mechanical coupling effect at resonance. The endoscopic catheter of 3.2 mm diameter was assembled and combined with SD-OCT system. Three dimensional images were directly reconstructed by mapping the A-line data sets along non-repeating Lissajous trajectories with high temporal resolution.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81867571","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659074
Bo Li, C. Ho, Chengkuo Lee
This paper reports experimentally measured data of a tunable whispered gallery mode photonic dual-disk resonator (DDR) with enhanced quality factors. The measured result shows 25 nm of free spectrum range (FSR) and the data has a good agreement with three dimensional (3-D) finite difference time domain (FDTD) simulation results. Thermo-optics effect enables the resonance peak tunability of DDR throughout the free spectrum range (FSR) range.
{"title":"Thermally tunable photonic dual-disk resonator with wide operation range","authors":"Bo Li, C. Ho, Chengkuo Lee","doi":"10.1109/OMN.2013.6659074","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659074","url":null,"abstract":"This paper reports experimentally measured data of a tunable whispered gallery mode photonic dual-disk resonator (DDR) with enhanced quality factors. The measured result shows 25 nm of free spectrum range (FSR) and the data has a good agreement with three dimensional (3-D) finite difference time domain (FDTD) simulation results. Thermo-optics effect enables the resonance peak tunability of DDR throughout the free spectrum range (FSR) range.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83372189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659090
Takuro Aonuma, S. Kumagai, M. Sasaki
Infrared collecting microlens is prepared at the backside of Si photo cell. The preform technique based on the stacked resist layers can give the shape variation of the lens. Not only the simple convex spherical shape but also the combination of the flat center plane and the spherical surrounding ring can be realized. This is for the shorter focus length to combine with IR detector. The Si photo cell realizes the power generation from the visible light.
{"title":"Infrared collecting microlens integrated with Si photo cell","authors":"Takuro Aonuma, S. Kumagai, M. Sasaki","doi":"10.1109/OMN.2013.6659090","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659090","url":null,"abstract":"Infrared collecting microlens is prepared at the backside of Si photo cell. The preform technique based on the stacked resist layers can give the shape variation of the lens. Not only the simple convex spherical shape but also the combination of the flat center plane and the spherical surrounding ring can be realized. This is for the shorter focus length to combine with IR detector. The Si photo cell realizes the power generation from the visible light.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80419509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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