Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659098
W. Kuo, Jiayue Yan, W. Chou, H. Yu
This paper reports a low-cost fabrication method of sensitivity-enhanced SERS substrate using nanoimprinting lithography. A PDMS elastomer with grating structure is deformed by compressing to achieve the better pitch for SERS substrate. Experimental results show that the sensitivity can be enhanced about three times by this method.
{"title":"Sensitivity-enhanced SERS substrate fabrication by nanoimprinting compressed PDMS elastomer","authors":"W. Kuo, Jiayue Yan, W. Chou, H. Yu","doi":"10.1109/OMN.2013.6659098","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659098","url":null,"abstract":"This paper reports a low-cost fabrication method of sensitivity-enhanced SERS substrate using nanoimprinting lithography. A PDMS elastomer with grating structure is deformed by compressing to achieve the better pitch for SERS substrate. Experimental results show that the sensitivity can be enhanced about three times by this method.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"14 1","pages":"139-140"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76079101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659037
Li Li, Ran Li, W. Lubeigt, D. Uttamchandani
A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
{"title":"Thermoelectrically controlled varifocal micromirror for near aberration free imaging","authors":"Li Li, Ran Li, W. Lubeigt, D. Uttamchandani","doi":"10.1109/OMN.2013.6659037","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659037","url":null,"abstract":"A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"60 1","pages":"17-18"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78119011","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659060
Wei Dong, T. Hirohata, K. Nakajima, Xiao-ping Wang
Finite-difference-time-domain (FDTD) computer simulations reveal interesting features of Germanium (Ge) subwavelength nanostructures designed in x-y plane on substrate of InP with normal incidence, which can be applied in quantum well infrared photodetector (QWIP). Unlike the mechanism of excellent near field effects through periodic metallic nanostructures, large intensity of Ez field is achieved at near-infrared range by subwavelength arrays of Ge which has no surface plasmons (SPs). The evanescent Ez field generated along the surface of Ge is interpreted due to waveguide mode interference of coupled scattering. The existence of the enhanced field is confirmed by comparing the Fourier transform infrared (FTIR) spectra of real-fabricated samples with simulation outcomes. Positions of resonant peaks obtained in experiment are in good agreement with those of simulation.
{"title":"Vertical field enhanced nanostructure for quantum well infrared photodetector through Germanium subwavelength arrays","authors":"Wei Dong, T. Hirohata, K. Nakajima, Xiao-ping Wang","doi":"10.1109/OMN.2013.6659060","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659060","url":null,"abstract":"Finite-difference-time-domain (FDTD) computer simulations reveal interesting features of Germanium (Ge) subwavelength nanostructures designed in x-y plane on substrate of InP with normal incidence, which can be applied in quantum well infrared photodetector (QWIP). Unlike the mechanism of excellent near field effects through periodic metallic nanostructures, large intensity of Ez field is achieved at near-infrared range by subwavelength arrays of Ge which has no surface plasmons (SPs). The evanescent Ez field generated along the surface of Ge is interpreted due to waveguide mode interference of coupled scattering. The existence of the enhanced field is confirmed by comparing the Fourier transform infrared (FTIR) spectra of real-fabricated samples with simulation outcomes. Positions of resonant peaks obtained in experiment are in good agreement with those of simulation.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"39 1","pages":"63-64"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81403940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659110
Daisuke Momonoi, T. Yamazaki, S. Kumagai, M. Sasaki
An infrared detector that uses nonlinear oscillation was fabricated for achieving high sensitivity. Transducer of the infrared detection was a torsional oscillator consisting bi-materials structures. When the incident infrared is absorbed by the torsional oscillator, the oscillator is bended due to the differences in thermal expansions. The bending hardens the spring constant of torsional oscillator to shift the resonant frequency. To improve the response to light incidence, the light-absorbing material of copper black film was deposited on the light-absorber. Reflectivity of the copper black film was 0.2%. Irradiating light onto the detector shifted the resonant frequency.
{"title":"An infrared detector based on nonlinear oscillation","authors":"Daisuke Momonoi, T. Yamazaki, S. Kumagai, M. Sasaki","doi":"10.1109/OMN.2013.6659110","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659110","url":null,"abstract":"An infrared detector that uses nonlinear oscillation was fabricated for achieving high sensitivity. Transducer of the infrared detection was a torsional oscillator consisting bi-materials structures. When the incident infrared is absorbed by the torsional oscillator, the oscillator is bended due to the differences in thermal expansions. The bending hardens the spring constant of torsional oscillator to shift the resonant frequency. To improve the response to light incidence, the light-absorbing material of copper black film was deposited on the light-absorber. Reflectivity of the copper black film was 0.2%. Irradiating light onto the detector shifted the resonant frequency.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"312 1","pages":"163-164"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77242831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Sandner, Simon Kimme, T. Grasshoff, U. Todt, A. Graf, Christian Tulea, A. Lenenbach, H. Schenk
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.
本文设计了两种新型的大孔径微扫描镜，采用HR介质涂层，适用于小型激光仪器的高功率激光应用。采用5×7.1mm孔径的静电驱动二维光栅扫描镜对激光切割过程中的ps激光束进行动态转向。第二个磁性2d光束转向镜使手动制导激光仪器的静态光束校正成为可能。介绍了一种6 mm × 8 mm反射板磁万向节微镜的优化设计。这里达到了3°的静态偏转。两种MEMS器件都成功地在532nm高功率ps激光器上进行了20W连续波测试。
{"title":"Micro-scanning mirrors for high-power laser applications in laser surgery","authors":"T. Sandner, Simon Kimme, T. Grasshoff, U. Todt, A. Graf, Christian Tulea, A. Lenenbach, H. Schenk","doi":"10.1117/12.2042671","DOIUrl":"https://doi.org/10.1117/12.2042671","url":null,"abstract":"We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"58 1","pages":"83-84"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78902700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659053
Xuan Wu, C. Jan, O. Solgaard
We developed a monolithic photonic crystal-based optical fiber-tip static pressure sensor. The single-crystalline silicon, from which the sensor was built, ensures a low-stress membrane free of the buckling that is characteristic of oxide membranes on silicon. The photonic crystals on the membrane improve its reflectance and sharpen the Fabry-Pérot resonance peaks. The sensor head fits within an 11 mm × 1.8 mm × 1.8 mm volume and exhibits a sensitivity of 6.76 nm/kPa with excellent linearity up to 3.73 kPa.
研制了基于单片光子晶体的光纤尖端静压传感器。单晶硅是传感器的制造材料，它保证了低应力膜不会出现硅氧化膜的屈曲现象。膜上的光子晶体提高了膜的反射率，使膜的法布里-普氏共振峰锐化。传感器头的尺寸为11 mm × 1.8 mm × 1.8 mm，灵敏度为6.76 nm/kPa，线性度最高可达3.73 kPa。
{"title":"Monolithic photonic crystal-based fiber-tip Fabry-Pérot static pressure sensor","authors":"Xuan Wu, C. Jan, O. Solgaard","doi":"10.1109/OMN.2013.6659053","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659053","url":null,"abstract":"We developed a monolithic photonic crystal-based optical fiber-tip static pressure sensor. The single-crystalline silicon, from which the sensor was built, ensures a low-stress membrane free of the buckling that is characteristic of oxide membranes on silicon. The photonic crystals on the membrane improve its reflectance and sharpen the Fabry-Pérot resonance peaks. The sensor head fits within an 11 mm × 1.8 mm × 1.8 mm volume and exhibits a sensitivity of 6.76 nm/kPa with excellent linearity up to 3.73 kPa.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"41 1","pages":"49-50"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74141630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659078
I. Aoyagi, K. Hamaguchi, Y. Nonomura, T. Akashi
A moving-magnet-type raster-output 2D MEMS scanner with a rotation-angle detector has been developed. To realize high precision and low temperature dependence, we propose the detector composed of four Hall sensors. By operation the outputs of the four Hall sensors, we enhanced the sensitivity and linearity of the detector, and realized the high precision detector. The fabricated detector achieved the detecting linearity of <; ± 0.11° for movable frame, and <; ± 0.07° for movable mirror at room temperature.
{"title":"2D MEMS scanner with a rotation-angle detector for a time-of-flight image sensor","authors":"I. Aoyagi, K. Hamaguchi, Y. Nonomura, T. Akashi","doi":"10.1109/OMN.2013.6659078","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659078","url":null,"abstract":"A moving-magnet-type raster-output 2D MEMS scanner with a rotation-angle detector has been developed. To realize high precision and low temperature dependence, we propose the detector composed of four Hall sensors. By operation the outputs of the four Hall sensors, we enhanced the sensitivity and linearity of the detector, and realized the high precision detector. The fabricated detector achieved the detecting linearity of <; ± 0.11° for movable frame, and <; ± 0.07° for movable mirror at room temperature.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"102 1","pages":"99-100"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73220549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659063
Hirofumi Yamashita, K. Terao, H. Takao, F. Shimokawa, F. Oohira, Takaaki Suzuki
Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror.
{"title":"Integration of angular rate sensor on large deflection polymer-MEMS mirror","authors":"Hirofumi Yamashita, K. Terao, H. Takao, F. Shimokawa, F. Oohira, Takaaki Suzuki","doi":"10.1109/OMN.2013.6659063","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659063","url":null,"abstract":"Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"100 2 1","pages":"69-70"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77578428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659042
Y. Chiu, Yan-Ting Wu, Hao-Chiao Hong
This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.
{"title":"Assembly of 3D MEMS mirrors and scanners using compliant push pads","authors":"Y. Chiu, Yan-Ting Wu, Hao-Chiao Hong","doi":"10.1109/OMN.2013.6659042","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659042","url":null,"abstract":"This paper presents a novel assembly technique for 3D micro structures on the substrate. The technique is based on pushing the structure to rotate to a predefined angle by using a micro probe. A compliant push pad is used to fix the position of the assembled structures. No other latching mechanism is necessary and thus the push operation can be significantly simplified. Micro mirrors and scanners assembled by this technique are demonstrated.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"52 1","pages":"27-28"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79396361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659061
S. Hadzialic, M. Taklo
We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.
{"title":"Mirrors and anti-reflective surfaces in single crystal silicon by patterning of the silicon surface","authors":"S. Hadzialic, M. Taklo","doi":"10.1109/OMN.2013.6659061","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659061","url":null,"abstract":"We present mirrors and anti-reflective (AR) surfaces based on micro-structuring of silicon. Compared to dielectric Bragg reflector mirrors and thin film AR-coatings these structures are thinner, result in less material stress, and are compatible with CMOS technology (all silicon). Our surface structures are optimized for the 7-14 μm wavelength range. Such structures have applications within fields of infrared imaging, alcoholmeters, and cooling and anesthesia gas-detectors.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"2021 1","pages":"65-66"},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76744906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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