Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433032
Hanseup Kim, A. J'auregui, C. Morrison, K. Najafi, L. Bernal, P. Washabaugh
This paper reports the development of a low-power electrostatic microthruster based-on Helmholtz resonance. This fluidic resonance phenomenon is utilized to create high-speed jets of air for thrust generation. The microthruster contains a curved-electrode (~8.8 mum deep) and provides high force to, and large deflection of a vibrating membrane thus resulting in twice higher thrust performance than previously reported devices with a flat-electrode design. The out-of-plane curved electrode is formed on a silicon wafer through the controlled buckling of stressed thin films of oxide, poly silicon, and nitride. The fabricated device contains 25 microthrusters, has a footprint of 1.6 times1.6 times 0.1 cm3 , and weighs about 0.35 g. It operates using a 140 V and 70 kHz sinusoidal signal and produces: 1) thrust of 55.6 muN, 2) maximum air velocity of 1.2 m/s, and 3) average velocity of 1.0 m/s across the whole chip. The average power consumption of the 25 micro thruster array is 3.1 mW. The generated jet was visualized by pumping ethanol clouds into a vertical gas stream up to 12 cm.
{"title":"Low-power electrostatic microthruster for propulsion based on helmholtz-resonance","authors":"Hanseup Kim, A. J'auregui, C. Morrison, K. Najafi, L. Bernal, P. Washabaugh","doi":"10.1109/MEMSYS.2007.4433032","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433032","url":null,"abstract":"This paper reports the development of a low-power electrostatic microthruster based-on Helmholtz resonance. This fluidic resonance phenomenon is utilized to create high-speed jets of air for thrust generation. The microthruster contains a curved-electrode (~8.8 mum deep) and provides high force to, and large deflection of a vibrating membrane thus resulting in twice higher thrust performance than previously reported devices with a flat-electrode design. The out-of-plane curved electrode is formed on a silicon wafer through the controlled buckling of stressed thin films of oxide, poly silicon, and nitride. The fabricated device contains 25 microthrusters, has a footprint of 1.6 times1.6 times 0.1 cm3 , and weighs about 0.35 g. It operates using a 140 V and 70 kHz sinusoidal signal and produces: 1) thrust of 55.6 muN, 2) maximum air velocity of 1.2 m/s, and 3) average velocity of 1.0 m/s across the whole chip. The average power consumption of the 25 micro thruster array is 3.1 mW. The generated jet was visualized by pumping ethanol clouds into a vertical gas stream up to 12 cm.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"127-130"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87573010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4432974
S. Aoyagi, H. Izumi, M. Fukuda
This paper proposes a fabrication method of microneedles with various tip angles made of biodegradable polymer (polylactic acid, referred to herein as PL A). It was confirmed by finite element method (FEM) simulation that stress concentration occurs more severely at the tip area, as the needle becomes thin, and tip angle becomes sharp. Masks for silicon cavities (negative dies for micromolding) with various tip angles are designed. The fabrication process involves etching a groove on the surface of a silicon die, molding the polymer into this groove, and then releasing it. The resistance force during inserting a fabricated needle to an artificial skin of silicone rubber was investigated. Effectiveness of sharp tip angle and thin shank for easy insertion is confirmed. Imitating mosquito's needle, the effectiveness of vibrating needle, and giving surface tension to object surface was also confirmed.
{"title":"Biodegradable polymer needle with various tip angles and effect of vibration and surface tension on easy insertion","authors":"S. Aoyagi, H. Izumi, M. Fukuda","doi":"10.1109/MEMSYS.2007.4432974","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432974","url":null,"abstract":"This paper proposes a fabrication method of microneedles with various tip angles made of biodegradable polymer (polylactic acid, referred to herein as PL A). It was confirmed by finite element method (FEM) simulation that stress concentration occurs more severely at the tip area, as the needle becomes thin, and tip angle becomes sharp. Masks for silicon cavities (negative dies for micromolding) with various tip angles are designed. The fabrication process involves etching a groove on the surface of a silicon die, molding the polymer into this groove, and then releasing it. The resistance force during inserting a fabricated needle to an artificial skin of silicone rubber was investigated. Effectiveness of sharp tip angle and thin shank for easy insertion is confirmed. Imitating mosquito's needle, the effectiveness of vibrating needle, and giving surface tension to object surface was also confirmed.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"133 1","pages":"397-400"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88073716","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433145
C. Tsai, T. Ono, M. Esashi
The design, fabrication and characterization of an integrated Schottky emitter array are presented and demonstrated. The integrated emitter array consists of boron-doped diamond heaters with a diamond tip, Si micro gate array and Si focusing lens array. The diamond film is selectively deposited using electrophoresis of diamond seed particles and a hot filament chemical vapor deposition (HF-CVD) technique. The emitters, gate and lens array are electrically isolated from each other on a Pyrex glass substrate. When heating the diamond emitter at a voltage of 2.8 V, an emission current of 490 nA has been observed at an electric field of 0.36 V/ mum. The emission current was found to be stable with a fluctuation of 2% per hr. By fitting the measure data with Schottky emission model, the temperature at the emitter was calculated to be 1680degC.
{"title":"Fabrication and characterization of an integrated schottky emitter array for multi-beam lithography applications","authors":"C. Tsai, T. Ono, M. Esashi","doi":"10.1109/MEMSYS.2007.4433145","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433145","url":null,"abstract":"The design, fabrication and characterization of an integrated Schottky emitter array are presented and demonstrated. The integrated emitter array consists of boron-doped diamond heaters with a diamond tip, Si micro gate array and Si focusing lens array. The diamond film is selectively deposited using electrophoresis of diamond seed particles and a hot filament chemical vapor deposition (HF-CVD) technique. The emitters, gate and lens array are electrically isolated from each other on a Pyrex glass substrate. When heating the diamond emitter at a voltage of 2.8 V, an emission current of 490 nA has been observed at an electric field of 0.36 V/ mum. The emission current was found to be stable with a fluctuation of 2% per hr. By fitting the measure data with Schottky emission model, the temperature at the emitter was calculated to be 1680degC.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"373-376"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88445720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433159
C. Steinert, J. Mueller-Dieckmann, M. Weiss, M. Roessle, R. Zengerle, P. Koltay
For the first time we present a new microfluidic system for miniaturized and highly parallel protein crystallization experiments by the free interface diffusion (FID) method. The novel system is based on a microfluidic disc fabricated by hot embossing which features 100 protein crystallization chambers enabling up to 100 different crystallization experiments in parallel. The mi- crostructures exhibit minimal feature sizes of 30mum and a maximum aspect ratio of 1. The fluidic design of the disc enables lamination of nanoliter volumes of protein and crystallization solution (precipitant) in a crystallization chamber of minimum volume of 5 nL. The protein sample is loaded to the disc by a non-contact nL-dispenser with a minimal dosage volume of 1 nL and dead volume of only 500 nL. All liquid processing steps on the disc are accomplished by centrifugal forces caused by rotation of the disc. Up to 80mum large crystals of catalase, lysozyme, proteinase K and insulin, have been produced on the disc to demonstrate the proper performance. Subsequently the crystals have been analyzed in situ in an X-ray experiment without removing them from the disc.
{"title":"Miniaturized and highly parallel protein crystallization on a microfluidic disc","authors":"C. Steinert, J. Mueller-Dieckmann, M. Weiss, M. Roessle, R. Zengerle, P. Koltay","doi":"10.1109/MEMSYS.2007.4433159","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433159","url":null,"abstract":"For the first time we present a new microfluidic system for miniaturized and highly parallel protein crystallization experiments by the free interface diffusion (FID) method. The novel system is based on a microfluidic disc fabricated by hot embossing which features 100 protein crystallization chambers enabling up to 100 different crystallization experiments in parallel. The mi- crostructures exhibit minimal feature sizes of 30mum and a maximum aspect ratio of 1. The fluidic design of the disc enables lamination of nanoliter volumes of protein and crystallization solution (precipitant) in a crystallization chamber of minimum volume of 5 nL. The protein sample is loaded to the disc by a non-contact nL-dispenser with a minimal dosage volume of 1 nL and dead volume of only 500 nL. All liquid processing steps on the disc are accomplished by centrifugal forces caused by rotation of the disc. Up to 80mum large crystals of catalase, lysozyme, proteinase K and insulin, have been produced on the disc to demonstrate the proper performance. Subsequently the crystals have been analyzed in situ in an X-ray experiment without removing them from the disc.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"561-564"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83949982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433169
T. Horie, S. Sawano, Satoshi Konishi
This paper proposes a micro switchable sucker for medical sensing and operation. We are interested in the practical application of medical MEMS devices to low inversion medical operation. It becomes indispensable to guarantee relative positioning between the medical MEMS and the objective part of the body. The micro sucker is proposed to fix medical MEMS on a surface of objective part. This paper describes the micro suckers integrated with medical MEMS. A temperature sensor and a micropump for DDS are integrated with the micro suckers as typical sensor and actuator. In-vitro experiment validates a feasibility of the proposed sucker as an assistive medical interface. Furthermore, in-vivo experiment of local DDS and local temperature sensing performed successfully. In addition, micro crawling robots combined the micro sucker and pneumatic balloon actuator are designed and developed. The mobile function is expected to allow distributive inspection and treatment in the body.
{"title":"Micro switchable sucker for fixable and mobile mechanism of medical MEMS","authors":"T. Horie, S. Sawano, Satoshi Konishi","doi":"10.1109/MEMSYS.2007.4433169","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433169","url":null,"abstract":"This paper proposes a micro switchable sucker for medical sensing and operation. We are interested in the practical application of medical MEMS devices to low inversion medical operation. It becomes indispensable to guarantee relative positioning between the medical MEMS and the objective part of the body. The micro sucker is proposed to fix medical MEMS on a surface of objective part. This paper describes the micro suckers integrated with medical MEMS. A temperature sensor and a micropump for DDS are integrated with the micro suckers as typical sensor and actuator. In-vitro experiment validates a feasibility of the proposed sucker as an assistive medical interface. Furthermore, in-vivo experiment of local DDS and local temperature sensing performed successfully. In addition, micro crawling robots combined the micro sucker and pneumatic balloon actuator are designed and developed. The mobile function is expected to allow distributive inspection and treatment in the body.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"691-694"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82897169","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433116
Seung-Il Yoon, M. Lim, Se‐Chul Park, Jeon-Soo Shin, Yong-Jun Kim
Detection of Neisseria meningitidis, that is one of the most common causes of bacterial meningitis, is being reported, using a micromachined microcalorimeter with a split-flow microchannel structure. The splitflow microchannel scheme constantly keeps the output of the microcalorimeter near zero level when there is no biochemical reaction, which eliminates the need of an active element such as a heater. Thermal components for the microcalorimeter have been fabricated on a high thermal resistivity layer to improve the sensitivity of the device. Using the fabricated sensor, a biological reaction between Neisseria meningitidis group B (NMGB) and a specific monoclonal antibody to its capsular polysaccharide was detected. In order to verify the reliability of the measurement, exactly same number of NMGB was reacted with HmenB3, and optical density was measured by ELISA.
{"title":"Detection of Neisseria meningitidis using a micromachined split-flow microcalorimeter","authors":"Seung-Il Yoon, M. Lim, Se‐Chul Park, Jeon-Soo Shin, Yong-Jun Kim","doi":"10.1109/MEMSYS.2007.4433116","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433116","url":null,"abstract":"Detection of Neisseria meningitidis, that is one of the most common causes of bacterial meningitis, is being reported, using a micromachined microcalorimeter with a split-flow microchannel structure. The splitflow microchannel scheme constantly keeps the output of the microcalorimeter near zero level when there is no biochemical reaction, which eliminates the need of an active element such as a heater. Thermal components for the microcalorimeter have been fabricated on a high thermal resistivity layer to improve the sensitivity of the device. Using the fabricated sensor, a biological reaction between Neisseria meningitidis group B (NMGB) and a specific monoclonal antibody to its capsular polysaccharide was detected. In order to verify the reliability of the measurement, exactly same number of NMGB was reacted with HmenB3, and optical density was measured by ELISA.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"509-512"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91531517","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433008
T. Fujimori, Y. Hanaoka, H. Fukuda
A surface-micromachined capacitive pressure sensor fabricated with a standard CMOS back-end of line processes was integrated above a CMOS LSI with a sensor front end circuit, and the output signal was obtained via the integrated circuit. The sensor was fabricated using only low-temperature processes and conventional materials and equipment. The sensor measures capacitance and electrical output of the C-V converter integrated on the same substrate with no degradation in signal quality. The sensor was placed above the IC region and sub-half-micron CMOS processes were applied to the IC, so the effective chip size is smaller than 2 mm2. Basic reliability of the sensor was examined. A passivation layer thicker than 150 nm is necessary for suppressing sensitivity change below 1% for the pressure cooker test (120 deg, 100% relative humidity for 100 hr). Our process enables MEMS integrated on any generation CMOS-LSI, enhancing functionality of the sensor chip and minimizing chip size.
{"title":"Above-IC integration of capacitive pressure sensor fabricated with CMOS interconnect processes","authors":"T. Fujimori, Y. Hanaoka, H. Fukuda","doi":"10.1109/MEMSYS.2007.4433008","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433008","url":null,"abstract":"A surface-micromachined capacitive pressure sensor fabricated with a standard CMOS back-end of line processes was integrated above a CMOS LSI with a sensor front end circuit, and the output signal was obtained via the integrated circuit. The sensor was fabricated using only low-temperature processes and conventional materials and equipment. The sensor measures capacitance and electrical output of the C-V converter integrated on the same substrate with no degradation in signal quality. The sensor was placed above the IC region and sub-half-micron CMOS processes were applied to the IC, so the effective chip size is smaller than 2 mm2. Basic reliability of the sensor was examined. A passivation layer thicker than 150 nm is necessary for suppressing sensitivity change below 1% for the pressure cooker test (120 deg, 100% relative humidity for 100 hr). Our process enables MEMS integrated on any generation CMOS-LSI, enhancing functionality of the sensor chip and minimizing chip size.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"40 1","pages":"43-46"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90055365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433014
C. Leinenbach, H. Seidel, T. Fuchs, S. Kronmüller, F. Laermer
This paper introduces a new sacrificial layer and etching technology for the surface-micromachining of MEMS. Poly crystalline silicon-germanium (SiGe) is used as sacrificial material in combination with poly-Si as active functional layer. Applying a new plasmaless dry etching technique based on ClF3-gas, SiGe can be etched with an extremely high selectivity of up to 5000:1 with respect to silicon. This technique opens new opportunities for enhanced design freedom, increased underetching ranges and speed, and offers full compatibility to most dielectric and metal materials, and to monolithic integration with electronic circuitry on the same chip.
{"title":"A novel sacrificial layer technology based on highly selective etching of silicon-germanium in CLF3","authors":"C. Leinenbach, H. Seidel, T. Fuchs, S. Kronmüller, F. Laermer","doi":"10.1109/MEMSYS.2007.4433014","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433014","url":null,"abstract":"This paper introduces a new sacrificial layer and etching technology for the surface-micromachining of MEMS. Poly crystalline silicon-germanium (SiGe) is used as sacrificial material in combination with poly-Si as active functional layer. Applying a new plasmaless dry etching technique based on ClF3-gas, SiGe can be etched with an extremely high selectivity of up to 5000:1 with respect to silicon. This technique opens new opportunities for enhanced design freedom, increased underetching ranges and speed, and offers full compatibility to most dielectric and metal materials, and to monolithic integration with electronic circuitry on the same chip.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"32 1","pages":"65-68"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80770964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433162
A. Mercanzini, K. Cheung, D. Buhl, M. Boers, A. Maillard, P. Colin, J. Bensadoun, A. Bertsch, A. Carleton, P. Renaud
We present the fabrication, characterization, use in cortical recording and histological results of a flexible implantable neural probe. The device is microfabricated in polyimide and platinum, allowing for greater flexibility. It incorporates two layers of platinum electrodes, which greatly reduces the size of neural probes and limits the insertion damage. In recording experiments, acute in-vivo measurements were performed in the mouse cortex. Local field potential, single- and multi-neuron activity were simultaneously recorded. We demonstrate using immunohistochemistry techniques reduced inflammation at the implantation site for microfabricated polyimide neural probes. We therefore show that the major advantage of using polymer probes over silicon probes is the reduced damage due to insertion and probe-brain compliance mismatch.
{"title":"Demonstration of cortical recording and reduced inflammatory response using flexible polymer neural probes","authors":"A. Mercanzini, K. Cheung, D. Buhl, M. Boers, A. Maillard, P. Colin, J. Bensadoun, A. Bertsch, A. Carleton, P. Renaud","doi":"10.1109/MEMSYS.2007.4433162","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433162","url":null,"abstract":"We present the fabrication, characterization, use in cortical recording and histological results of a flexible implantable neural probe. The device is microfabricated in polyimide and platinum, allowing for greater flexibility. It incorporates two layers of platinum electrodes, which greatly reduces the size of neural probes and limits the insertion damage. In recording experiments, acute in-vivo measurements were performed in the mouse cortex. Local field potential, single- and multi-neuron activity were simultaneously recorded. We demonstrate using immunohistochemistry techniques reduced inflammation at the implantation site for microfabricated polyimide neural probes. We therefore show that the major advantage of using polymer probes over silicon probes is the reduced damage due to insertion and probe-brain compliance mismatch.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"573-576"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81068094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433106
M. Klein, T. Ono, M. Esashi, J. Korvink
We report the fabrication of a solenoidal microcoil mould structure based on reactive ion etching (RIE) of 100 mum thick borosilicate glass wafers. For magnetic resonance imaging (MRI), glass has superior properties compared to silicon, e.g. the lower dielectric constant and transparency. Double-side polished substrates are pre-etched in a two step process, and then anodically bonded together to achieve a hollow structure inside the coil to serve as a sample container. Two additional etch steps that are each performed on the top and bottom surfaces of the bonded wafers complete the solenoidal coil mould structure.
{"title":"RIE of solenoidal microcoil glass mould with integrated sample container for micro-MRI","authors":"M. Klein, T. Ono, M. Esashi, J. Korvink","doi":"10.1109/MEMSYS.2007.4433106","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433106","url":null,"abstract":"We report the fabrication of a solenoidal microcoil mould structure based on reactive ion etching (RIE) of 100 mum thick borosilicate glass wafers. For magnetic resonance imaging (MRI), glass has superior properties compared to silicon, e.g. the lower dielectric constant and transparency. Double-side polished substrates are pre-etched in a two step process, and then anodically bonded together to achieve a hollow structure inside the coil to serve as a sample container. Two additional etch steps that are each performed on the top and bottom surfaces of the bonded wafers complete the solenoidal coil mould structure.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"77 1","pages":"345-348"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91316538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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