Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433128
T. Yamamura, M. Kitamura, K. Kuribayashi, Y. Arakawa, S. Takeuchi
This paper describes an ultra thin, flexible device with organic light emitting diodes (OLEDs) between Parylene thin films (20 mum or less in total thickness). The device was formed on a glass substrate and could be easily peeled off without breaking. The OLEDs in the flexible device emitted light with high brightness, and were useful as excitation light sources for fluorescent dyes. We have also demonstrated a flexible probe with an OLED for the application of biological implants toward in vivo fluorescent imaging and optical stimulation of cells.
{"title":"Flexible organic leds with parylene thin films for biological implants","authors":"T. Yamamura, M. Kitamura, K. Kuribayashi, Y. Arakawa, S. Takeuchi","doi":"10.1109/MEMSYS.2007.4433128","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433128","url":null,"abstract":"This paper describes an ultra thin, flexible device with organic light emitting diodes (OLEDs) between Parylene thin films (20 mum or less in total thickness). The device was formed on a glass substrate and could be easily peeled off without breaking. The OLEDs in the flexible device emitted light with high brightness, and were useful as excitation light sources for fluorescent dyes. We have also demonstrated a flexible probe with an OLED for the application of biological implants toward in vivo fluorescent imaging and optical stimulation of cells.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"739-742"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78093929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433027
O. Jeong, S. Konishi
This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.
{"title":"3 dimensionally combined pyrolyzed polymer sensor and heater toward all polymeric gas detection system","authors":"O. Jeong, S. Konishi","doi":"10.1109/MEMSYS.2007.4433027","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433027","url":null,"abstract":"This paper proposes for the first time all polymeric gas detection system consisting of the 3 dimensionally combined carbon structures and the gas regulator with the three-stage pneumatic valves. The pyrolyzed photo-resist structure as an absorbent of nitrogen dioxide sensor and 3D bridge-type resistive heater are fabricated and assembled with the gas regulator. The valve efficiency of the gas regulator and the sensitivity of the gas sensor to NO2 are characterized.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"111-114"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75945438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433161
L. Cheung, R. Quick, S.K. Singh, A. Weichsel, W. Montfort, Y. Zohar
polydimethylsiloxane (PDMS) based microsystems have successfully been fabricated and characterized for studying protein crystals utilizing both UV-visible spectroscopy and X-ray crystallography. Transmittance tests have been conducted with PDMS and glass substrates; the measurements indicate that in PDMS, unlike glass, the emerging intensity is higher than 50% of the incident intensity as long as the total optical path is shorter than 100 mum. Indeed, both the UV-visible spectrum and X-ray diffraction of a protein crystal enclosed in a PDMS device are almost identical to those of the crystal alone. Hence, PDMS is suitable as substrate material in device fabrication to study protein crystals. In glass, however, the UV-visible spectrum is significantly distorted and the X-ray diffraction pattern is rather weak resulting in poor signal to noise ratio. Furthermore, microsystems integrated with micro- channels allowing continuous exchange of buffer solution around the protein crystals have been tested; this would greatly enhance the potential to induce, trap and characterize functional states in proteins.
{"title":"Microsystems for UV-visible and x-ray analysis of protein crystals","authors":"L. Cheung, R. Quick, S.K. Singh, A. Weichsel, W. Montfort, Y. Zohar","doi":"10.1109/MEMSYS.2007.4433161","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433161","url":null,"abstract":"polydimethylsiloxane (PDMS) based microsystems have successfully been fabricated and characterized for studying protein crystals utilizing both UV-visible spectroscopy and X-ray crystallography. Transmittance tests have been conducted with PDMS and glass substrates; the measurements indicate that in PDMS, unlike glass, the emerging intensity is higher than 50% of the incident intensity as long as the total optical path is shorter than 100 mum. Indeed, both the UV-visible spectrum and X-ray diffraction of a protein crystal enclosed in a PDMS device are almost identical to those of the crystal alone. Hence, PDMS is suitable as substrate material in device fabrication to study protein crystals. In glass, however, the UV-visible spectrum is significantly distorted and the X-ray diffraction pattern is rather weak resulting in poor signal to noise ratio. Furthermore, microsystems integrated with micro- channels allowing continuous exchange of buffer solution around the protein crystals have been tested; this would greatly enhance the potential to induce, trap and characterize functional states in proteins.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"44 1","pages":"569-572"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73753510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433157
T. Yamamoto, T. Arakawa, S. Shoji
Continuous and regulated micro bubble generation system was realized in a water flow microchannel including a lumped gas and organic injection junction. The idea was originated in the soap bubble formation. The diameter and thickness of organic micro bubble were well controlled by the flow rates of water and organic respectively. The controllable diameter of the bubble was ranged from 110 mum to 220 mum, while its thickness from 4 mum to 16 mum. The generation rate is mainly dependant on the water flow rate. The organic phase membrane is useful for the chemical reaction media. The organic bubbles are expected to be used as capsules of reactive gas handling.
{"title":"Continuous and regulated organic micro bubble generation using lumped gas and organic injected junction","authors":"T. Yamamoto, T. Arakawa, S. Shoji","doi":"10.1109/MEMSYS.2007.4433157","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433157","url":null,"abstract":"Continuous and regulated micro bubble generation system was realized in a water flow microchannel including a lumped gas and organic injection junction. The idea was originated in the soap bubble formation. The diameter and thickness of organic micro bubble were well controlled by the flow rates of water and organic respectively. The controllable diameter of the bubble was ranged from 110 mum to 220 mum, while its thickness from 4 mum to 16 mum. The generation rate is mainly dependant on the water flow rate. The organic phase membrane is useful for the chemical reaction media. The organic bubbles are expected to be used as capsules of reactive gas handling.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"553-556"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81643047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433111
N. Siwak, X. Fan, D. Hines, E. Williams, N. Goldsman, R. Ghodssi
We present a MEMS cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface functionalization layer. Detection of vapor by way of mass induced frequency shift is demonstrated. Frequency shifts due to mass absorption of 509 and 236 Hz were measured to plusmn85 Hz corresponding to a sensitivity of plusmn0.507 pg. The III-V Indium Phosphide (InP) material enables passive waveguides and active optical components to be monolithically integrated, yielding single-chip sensors in the future.
{"title":"Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer","authors":"N. Siwak, X. Fan, D. Hines, E. Williams, N. Goldsman, R. Ghodssi","doi":"10.1109/MEMSYS.2007.4433111","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433111","url":null,"abstract":"We present a MEMS cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface functionalization layer. Detection of vapor by way of mass induced frequency shift is demonstrated. Frequency shifts due to mass absorption of 509 and 236 Hz were measured to plusmn85 Hz corresponding to a sensitivity of plusmn0.507 pg. The III-V Indium Phosphide (InP) material enables passive waveguides and active optical components to be monolithically integrated, yielding single-chip sensors in the future.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"489-492"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81795681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433173
M. Gromova, L. Haspeslagh, A. Verbist, B. du Bois, R. Van Hoof, B. Eyckens, B. Sijmus, I. De Wolf, V. Simons, P. Mutter, T. Lauwagie, M. Willegems, S. Locorotondo, W. Boullart, K. Baert, A. Witvrouw
This paper presents very reliable and stable micro- mirrors made of hydrogenated microcrystalline SiGe (muc-SiGe:H) at temperatures that would allow processing above standard CMOS circuitry. Very flat micro-mirrors with sizes ranging between 7.5 x 7.5 and 16 x 16 mum2 size and submicron hinges are fabricated. No hinge creep is observed over a period of 20 days and no fatigue damage is seen after 5 x 1010 cycles.
本文介绍了一种非常可靠和稳定的由氢化微晶SiGe (much -SiGe:H)制成的微反射镜，其温度可以超过标准的CMOS电路。制作了尺寸在7.5 x 7.5和16 x 16 mum2之间的非常扁平的微镜和亚微米铰链。在20天内没有观察到铰链蠕变，在5 x 1010次循环后没有看到疲劳损伤。
{"title":"Highly reliable and extremely stable SiGe micro-mirrors","authors":"M. Gromova, L. Haspeslagh, A. Verbist, B. du Bois, R. Van Hoof, B. Eyckens, B. Sijmus, I. De Wolf, V. Simons, P. Mutter, T. Lauwagie, M. Willegems, S. Locorotondo, W. Boullart, K. Baert, A. Witvrouw","doi":"10.1109/MEMSYS.2007.4433173","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433173","url":null,"abstract":"This paper presents very reliable and stable micro- mirrors made of hydrogenated microcrystalline SiGe (muc-SiGe:H) at temperatures that would allow processing above standard CMOS circuitry. Very flat micro-mirrors with sizes ranging between 7.5 x 7.5 and 16 x 16 mum2 size and submicron hinges are fabricated. No hinge creep is observed over a period of 20 days and no fatigue damage is seen after 5 x 1010 cycles.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"46 1","pages":"759-762"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85992035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433023
B. Ilic, S. Krylov, L. Bellan, H. Craighead
We report on the dynamic quantitative characterization of nanoelectromechanical systems (NEMS) through direct coupling with a micromechanical (MEMS) probe. The nanomechanical structures were driven using piezoelectric transducers and the resulting out-of-plane vibrations were monitored with a conventional commercially available atomic force microscope (AFM) probe. Intermittent contact imaging data and non-contact AFM interrogation revealed the initiation of interaction between the two oscillators, providing a description of the resonant response. The vibrational spectra measured through optical detection was in good agreement with the coupled NEMS-AFM system measurement results. The dynamic response of the coupled system was modelled through a combination of long range van der Waals and contact forces using the Derjaguin-Muller-Toporov model.
{"title":"Dynamic characterization of nano oscillators by atomic force microscopy","authors":"B. Ilic, S. Krylov, L. Bellan, H. Craighead","doi":"10.1109/MEMSYS.2007.4433023","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433023","url":null,"abstract":"We report on the dynamic quantitative characterization of nanoelectromechanical systems (NEMS) through direct coupling with a micromechanical (MEMS) probe. The nanomechanical structures were driven using piezoelectric transducers and the resulting out-of-plane vibrations were monitored with a conventional commercially available atomic force microscope (AFM) probe. Intermittent contact imaging data and non-contact AFM interrogation revealed the initiation of interaction between the two oscillators, providing a description of the resonant response. The vibrational spectra measured through optical detection was in good agreement with the coupled NEMS-AFM system measurement results. The dynamic response of the coupled system was modelled through a combination of long range van der Waals and contact forces using the Derjaguin-Muller-Toporov model.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"85 1","pages":"95-98"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86098257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433077
Tae Yoon Kim, Dong Woo Lee, Young‐Ho Cho
We present the first proposal to detect both particle position and velocity based on the electrical measurement of particle transit time across uneven inter-gap electrodes. Compared to the previous methods, the present detector provides higher integrability for chip-based systems and achieves higher measurement stability robust to particle size variation. The position uncertainty of polystyrene particles is measured as 3.3%. Particle velocity uncertainty is measured as 2.21% from the fabricated devices, achieving 2.4 times improvement compared to the uncertainty of 5.38% from the conventional optical methods. The stable performance of the present detector insensitive to particle size variation is also verified by the experiments using different particle sizes.
{"title":"In-channel particle position and velocity detectors based on particle transit time across uneven inter-gap electrodes","authors":"Tae Yoon Kim, Dong Woo Lee, Young‐Ho Cho","doi":"10.1109/MEMSYS.2007.4433077","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433077","url":null,"abstract":"We present the first proposal to detect both particle position and velocity based on the electrical measurement of particle transit time across uneven inter-gap electrodes. Compared to the previous methods, the present detector provides higher integrability for chip-based systems and achieves higher measurement stability robust to particle size variation. The position uncertainty of polystyrene particles is measured as 3.3%. Particle velocity uncertainty is measured as 2.21% from the fabricated devices, achieving 2.4 times improvement compared to the uncertainty of 5.38% from the conventional optical methods. The stable performance of the present detector insensitive to particle size variation is also verified by the experiments using different particle sizes.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"127 1","pages":"485-488"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85277966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433031
Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek
A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.
{"title":"Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels","authors":"Marcel Dijkstra, M. D. de Boer, M.J.W. Berenschot, T. Lammerink, R. Wiegerink, M. Elwenspoek","doi":"10.1109/MEMSYS.2007.4433031","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433031","url":null,"abstract":"A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for DI water flow from 40 nlmin-1 up to 300 nlmin-1. A versatile technological concept is used to realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid. Chemical-resistant fluidic connections can be made directly on top of the microchannels, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"123-126"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91007149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433107
Sangwoo Lee, J. Cho, K. Najafi
This paper presents a new fabrication technology for forming vertical comb (VC) electrodes used in sensors and actuators. The main feature of VC electrodes is that they are positioned above and below the plane of a moving microstructure that is used as the sensing or actuating plate, thus enabling one to either measure or create out-of-plane motion. In our method, VC electrodes and the moving microstructure are first fabricated using the silicon-on-glass (SOG) process. Next, the VC electrodes are moved into position by selectively displacing them up or down using electrostatic force applied during an anodic bonding step specifically utilized for this purpose. Three different VC electrode designs and analytic approaches to determine mechanical stiffness and required pull-down force are presented. VC structures with both 8mum and 4.6mum gaps to glass wafers are successfully fabricated. VC electrodes with vertical (out of plane) displacement of as large as 45mum in 100mum-thick structure have been realized.
{"title":"Fabrication of vertical comb electrodes using selective anodic bonding","authors":"Sangwoo Lee, J. Cho, K. Najafi","doi":"10.1109/MEMSYS.2007.4433107","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433107","url":null,"abstract":"This paper presents a new fabrication technology for forming vertical comb (VC) electrodes used in sensors and actuators. The main feature of VC electrodes is that they are positioned above and below the plane of a moving microstructure that is used as the sensing or actuating plate, thus enabling one to either measure or create out-of-plane motion. In our method, VC electrodes and the moving microstructure are first fabricated using the silicon-on-glass (SOG) process. Next, the VC electrodes are moved into position by selectively displacing them up or down using electrostatic force applied during an anodic bonding step specifically utilized for this purpose. Three different VC electrode designs and analytic approaches to determine mechanical stiffness and required pull-down force are presented. VC structures with both 8mum and 4.6mum gaps to glass wafers are successfully fabricated. VC electrodes with vertical (out of plane) displacement of as large as 45mum in 100mum-thick structure have been realized.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"349-352"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81183160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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