Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4432980
Yongmo Yang, J. Chae
This paper reports a miniaturized HPLC (high performance liquid chromatography) column packed with nano-pore beads for flexible medical implants applications. The all-flexible-polymer column capable of integrating with micro/nano-devices on a chip separates biological entities to relax stringent requirements on subsequent detectors and to enable parallel detection in a detector array. The fabricated device has successfully separated a protein mixture using nano-pore beads in a miniaturized column. According to HPLC analysis, the intensity ratio of large to small protein varies significantly, more than a factor of 300, over sample collecting time, ~12mins, suggesting very high separation performance.
{"title":"Miniaturized HPLC column with nano-pore beads for protein separation on flexible medical implants","authors":"Yongmo Yang, J. Chae","doi":"10.1109/MEMSYS.2007.4432980","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432980","url":null,"abstract":"This paper reports a miniaturized HPLC (high performance liquid chromatography) column packed with nano-pore beads for flexible medical implants applications. The all-flexible-polymer column capable of integrating with micro/nano-devices on a chip separates biological entities to relax stringent requirements on subsequent detectors and to enable parallel detection in a detector array. The fabricated device has successfully separated a protein mixture using nano-pore beads in a miniaturized column. According to HPLC analysis, the intensity ratio of large to small protein varies significantly, more than a factor of 300, over sample collecting time, ~12mins, suggesting very high separation performance.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"52 1","pages":"421-424"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87029839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433019
Chuang-yuan Lee, Hongyu Yu, E. S. Kim
This paper reports a microreaction technology for biochemical assay using nanoliter droplets encapsulated inside oil droplets. Microreaction chambers are constructed on a glass substrate by accumulating oil droplets that are dispensed by the directional droplet ejector. Droplets of different aqueous reagents are then directionally ejected into the oil microchambers for parallel and combinatory analysis. Because the reagents are encapsulated in oil, the evaporation rate is greatly reduced, and only small amount of reagents are required. The microchamber size and reagent amount are digitally controlled by the number of ejected oil and reagent droplets, respectively. Ejectors for oil and reagents have been integrated on a single chip so that each assay is performed efficiently without any mechanical movement and alignment. We have carried out both physical and chemical microreactions with this method, and observed negligible difference (in response) from conventional macroreactions.
{"title":"Microreactions using nanoliter droplets with oil encapsulation","authors":"Chuang-yuan Lee, Hongyu Yu, E. S. Kim","doi":"10.1109/MEMSYS.2007.4433019","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433019","url":null,"abstract":"This paper reports a microreaction technology for biochemical assay using nanoliter droplets encapsulated inside oil droplets. Microreaction chambers are constructed on a glass substrate by accumulating oil droplets that are dispensed by the directional droplet ejector. Droplets of different aqueous reagents are then directionally ejected into the oil microchambers for parallel and combinatory analysis. Because the reagents are encapsulated in oil, the evaporation rate is greatly reduced, and only small amount of reagents are required. The microchamber size and reagent amount are digitally controlled by the number of ejected oil and reagent droplets, respectively. Ejectors for oil and reagents have been integrated on a single chip so that each assay is performed efficiently without any mechanical movement and alignment. We have carried out both physical and chemical microreactions with this method, and observed negligible difference (in response) from conventional macroreactions.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"81-84"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83986223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433020
D. D. Meng, C. Kim
This paper introduces a micro direct methanol fuel cell (muDMFC) with an embedded self-pumping mechanism to deliver liquid fuel. The fuel is propelled by the CO2 bubbles generated by the fuel-cell electrochemical reaction, and the bubbles are removed from the system during the self-pumping process. Furthermore, the pumping rate is self- regulated by the reaction, i.e., by the electric load. By eliminating the need for a pump and gas/liquid separator, our design allows much simpler fuel-cell systems, which is especially beneficial for miniaturization. Although we test with muDMFC in this paper, the mechanism applies to other membrane electrode assembly (MEA)-based fuel cells with organic liquid fuels as well.
{"title":"Embedded self-circulation of liquid fuel for a micro direct methanol fuel cell","authors":"D. D. Meng, C. Kim","doi":"10.1109/MEMSYS.2007.4433020","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433020","url":null,"abstract":"This paper introduces a micro direct methanol fuel cell (muDMFC) with an embedded self-pumping mechanism to deliver liquid fuel. The fuel is propelled by the CO2 bubbles generated by the fuel-cell electrochemical reaction, and the bubbles are removed from the system during the self-pumping process. Furthermore, the pumping rate is self- regulated by the reaction, i.e., by the electric load. By eliminating the need for a pump and gas/liquid separator, our design allows much simpler fuel-cell systems, which is especially beneficial for miniaturization. Although we test with muDMFC in this paper, the mechanism applies to other membrane electrode assembly (MEA)-based fuel cells with organic liquid fuels as well.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"64 1","pages":"85-88"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86046248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433163
P. Gieschke, J. Held, M. Doelle, J. Bartholomeyczik, P. Ruther, O. Paul
This paper reports on a CMOS integrated stress sensor array combined with SU-8 posts fabricated on the chip surface. The chip contains an array of 1024 field effect transistor (FET)-based stress sensors occupying a total area of ca. 1 x 1 mm2. On-chip circuitry is used for sensor addressing, signal amplification, A/D conversion, signal processing, and serial bus communication. A novel scalable matrix-based sensor selection concept enables the integration of high-density stress sensor arrays with minimum wiring. The system significantly expands previous stress sensor arrays in terms of an increased number of sensors and reduced sensor pitch. An array of 8 x 8 circular SU-8 posts with a diameter of 62 mum and a height of 300 mum was fabricated on the CMOS chips. The new brush-like device was used for measuring vertical and horizontal force distributions.
本文报道了一种结合SU-8柱的CMOS集成应力传感器阵列。该芯片包含1024个基于场效应晶体管(FET)的应力传感器阵列，占据总面积约为1 x 1 mm2。片上电路用于传感器寻址、信号放大、A/D转换、信号处理和串行总线通信。一种新颖的可扩展的基于矩阵的传感器选择概念，使高密度应力传感器阵列的集成与最少的布线。该系统在增加传感器数量和减小传感器间距方面显著扩展了以前的应力传感器阵列。在CMOS芯片上制备了直径为62 μ m，高度为300 μ m的8 × 8圆形SU-8柱阵列。该新型刷状装置用于测量垂直和水平方向的力分布。
{"title":"Smart brush based on a high density CMOS stress sensor array and SU-8 microposts","authors":"P. Gieschke, J. Held, M. Doelle, J. Bartholomeyczik, P. Ruther, O. Paul","doi":"10.1109/MEMSYS.2007.4433163","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433163","url":null,"abstract":"This paper reports on a CMOS integrated stress sensor array combined with SU-8 posts fabricated on the chip surface. The chip contains an array of 1024 field effect transistor (FET)-based stress sensors occupying a total area of ca. 1 x 1 mm2. On-chip circuitry is used for sensor addressing, signal amplification, A/D conversion, signal processing, and serial bus communication. A novel scalable matrix-based sensor selection concept enables the integration of high-density stress sensor arrays with minimum wiring. The system significantly expands previous stress sensor arrays in terms of an increased number of sensors and reduced sensor pitch. An array of 8 x 8 circular SU-8 posts with a diameter of 62 mum and a height of 300 mum was fabricated on the CMOS chips. The new brush-like device was used for measuring vertical and horizontal force distributions.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"631-634"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86695538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433149
Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan
This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.
{"title":"Design and fabrication of an artificial skin using PI-copper films","authors":"Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan","doi":"10.1109/MEMSYS.2007.4433149","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433149","url":null,"abstract":"This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"389-392"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79509343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433096
B. D. Sosnowchik, Liwei Lin
In this work, we report a rapid yet simple methodology for the synthesis of carbon nanotubes (CNTs) in a room temperature environment using an inductive heating system with either a) bulk synthesis on silicon chips, or b) local synthesis on suspended MEMS structures. This setup enables growth and integration of CNTs with MEMS structures in a matter of 1-2 minutes. For bulk synthesis, high growth rates of up to 200 mum/min were obtained, resulting in growth of vertically aligned CNTs with an average diameter of 6.8nm. Integration from bulk- grown CNTs on MEMS structures resulted in lower resistances from larger diameter CNTs. Localized synthesis and integration was also obtained on suspended copper microstructures, illustrating an ohmic CNT response with a resistance of 110 kOmega. The breadth of synthesis and integration capabilities enabled by inductive heating illustrates a new class of rapid synthesis for vapor-liquid-solid-grown nanostructures.
{"title":"Rapid synthesis of carbon nanotubes by bulk and localized inductive heating","authors":"B. D. Sosnowchik, Liwei Lin","doi":"10.1109/MEMSYS.2007.4433096","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433096","url":null,"abstract":"In this work, we report a rapid yet simple methodology for the synthesis of carbon nanotubes (CNTs) in a room temperature environment using an inductive heating system with either a) bulk synthesis on silicon chips, or b) local synthesis on suspended MEMS structures. This setup enables growth and integration of CNTs with MEMS structures in a matter of 1-2 minutes. For bulk synthesis, high growth rates of up to 200 mum/min were obtained, resulting in growth of vertically aligned CNTs with an average diameter of 6.8nm. Integration from bulk- grown CNTs on MEMS structures resulted in lower resistances from larger diameter CNTs. Localized synthesis and integration was also obtained on suspended copper microstructures, illustrating an ohmic CNT response with a resistance of 110 kOmega. The breadth of synthesis and integration capabilities enabled by inductive heating illustrates a new class of rapid synthesis for vapor-liquid-solid-grown nanostructures.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"143 1","pages":"835-838"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80313966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4432964
J. Gaspar, Y. Nurcahyo, P. Ruther, O. Paul
This paper reports on the mechanical characterization of microtensile specimens made of silicon nitride (SiNx) thin-films with integrated 2D reflective gratings. By applying an axial force, the structures respond mechanically with an elongation and contraction in the longitudinal and transversal directions, respectively. The corresponding variations of both periods of the grating are monitored in real time by measuring the diffraction pattern resulting from the illumination of the grating with monochromatic light. The strain components are thus evaluated locally in the structure. By integrating such an optical technique with an efficient test structure previously developed, the extraction of materials' Young's modulus E, Poisson's ratio nu, residual strain epsivres and stress sigmares and fracture strength sigma0 is in principle made possible from the measurement of a single test structure. Here we demonstrate the extraction of E, epsivres, sigmares and sigma0 of the nitride films.
{"title":"Mechanical characterization of silicon nitride thin-films using microtensile specimens with integrated 2D diffraction gratings","authors":"J. Gaspar, Y. Nurcahyo, P. Ruther, O. Paul","doi":"10.1109/MEMSYS.2007.4432964","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432964","url":null,"abstract":"This paper reports on the mechanical characterization of microtensile specimens made of silicon nitride (SiNx) thin-films with integrated 2D reflective gratings. By applying an axial force, the structures respond mechanically with an elongation and contraction in the longitudinal and transversal directions, respectively. The corresponding variations of both periods of the grating are monitored in real time by measuring the diffraction pattern resulting from the illumination of the grating with monochromatic light. The strain components are thus evaluated locally in the structure. By integrating such an optical technique with an efficient test structure previously developed, the extraction of materials' Young's modulus E, Poisson's ratio nu, residual strain epsivres and stress sigmares and fracture strength sigma0 is in principle made possible from the measurement of a single test structure. Here we demonstrate the extraction of E, epsivres, sigmares and sigma0 of the nitride films.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"69 1","pages":"223-226"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77910115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433083
Yusaku Watanabe, Masanori Maeda, N. Yaji, R. Nakamura, H. Iseki, M. Yamato, T. Okano, Sadao Hori, Satoshi Konishi
This paper proposes a novel surgical tool for the retinal pigment epithelium (RPE) sheet transplantation. The proposed tool employs the principle of pneumatic balloon actuator (PBA). It is possible to design small, soft and safe surgical tool by using PBA because PBA is made of PDMS and driven by pneumatic pressure. These distinctive characteristics of PBA are attractive for such a challenging surgery as the RPE sheet transplantation in an eyeball. The designed head size of tool is 3 mm times 3 mm times 100 mum by taking account of the size of the RPE sheet (3 mm times 3 mm). The developed tool can perform sequential motions through independent control of different PBA so as to introduce and transplant the RPE sheet to an eyeball. Generated force by the movement of the transplantation tool is measured around 3 mN, which is allowable in an eyeball. Experimental results of both in vitro and in vivo test by using the developed tool will be reported to demonstrate feasibility of our strategy.
{"title":"Small, soft, and safe microactuator for retinal pigment epithelium transplantation","authors":"Yusaku Watanabe, Masanori Maeda, N. Yaji, R. Nakamura, H. Iseki, M. Yamato, T. Okano, Sadao Hori, Satoshi Konishi","doi":"10.1109/MEMSYS.2007.4433083","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433083","url":null,"abstract":"This paper proposes a novel surgical tool for the retinal pigment epithelium (RPE) sheet transplantation. The proposed tool employs the principle of pneumatic balloon actuator (PBA). It is possible to design small, soft and safe surgical tool by using PBA because PBA is made of PDMS and driven by pneumatic pressure. These distinctive characteristics of PBA are attractive for such a challenging surgery as the RPE sheet transplantation in an eyeball. The designed head size of tool is 3 mm times 3 mm times 100 mum by taking account of the size of the RPE sheet (3 mm times 3 mm). The developed tool can perform sequential motions through independent control of different PBA so as to introduce and transplant the RPE sheet to an eyeball. Generated force by the movement of the transplantation tool is measured around 3 mN, which is allowable in an eyeball. Experimental results of both in vitro and in vivo test by using the developed tool will be reported to demonstrate feasibility of our strategy.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"100 1","pages":"659-662"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78014345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433062
Weibin Zhu, M. White, D. W. Hoch, G. Nellis, S. Klein, Y. Gianchandani
This paper describes results from two types of micromachined recuperative heat exchangers intended for Joule-Thomson (J-T) cryosurgical probes, which require high stream-to-stream thermal conductance while restricting parasitic stream-wise (axial) conduction. In design A, rows of fins composed of high conductivity silicon are bonded onto a 100 mum thick base plate composed of low conductivity Pyrex glass. This planar device has a footprint of 6times1.5 cm2 and 2.5 mm thickness, and is fabricated using a 5-mask process. In design B, numerous high-conductivity silicon plates alternating with low-conductivity Pyrex spacers are stacked together. This has a footprint of 1times1cm2, a length of 1.4 cm, and is fabricated using a 3-mask process. Preliminary experiments show that the primary performance constraint for design A is imposed by the compromise between mechanical robustness and transverse conductance of the thin glass base plate that separates the high pressure and low pressure streams. Design B enhances the robustness of the device and can sustain higher pressure.
{"title":"Two approaches to micromachining si heat exchanger for Joule-Thomson cryosurgical probes","authors":"Weibin Zhu, M. White, D. W. Hoch, G. Nellis, S. Klein, Y. Gianchandani","doi":"10.1109/MEMSYS.2007.4433062","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433062","url":null,"abstract":"This paper describes results from two types of micromachined recuperative heat exchangers intended for Joule-Thomson (J-T) cryosurgical probes, which require high stream-to-stream thermal conductance while restricting parasitic stream-wise (axial) conduction. In design A, rows of fins composed of high conductivity silicon are bonded onto a 100 mum thick base plate composed of low conductivity Pyrex glass. This planar device has a footprint of 6times1.5 cm2 and 2.5 mm thickness, and is fabricated using a 5-mask process. In design B, numerous high-conductivity silicon plates alternating with low-conductivity Pyrex spacers are stacked together. This has a footprint of 1times1cm2, a length of 1.4 cm, and is fabricated using a 3-mask process. Preliminary experiments show that the primary performance constraint for design A is imposed by the compromise between mechanical robustness and transverse conductance of the thin glass base plate that separates the high pressure and low pressure streams. Design B enhances the robustness of the device and can sustain higher pressure.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"59 1","pages":"317-320"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84461458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433142
Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya
This paper reports on a tensile-mode fatigue test in a constant humidity, even in a very high humidity, to reveal the mechanism of fatigue fractures of MEMS materials. A newly developed tensile-mode fatigue tester using the electrostatic grip can control the humidity from 25% RH to 90% RH. Using this tester, the fatigue life and strength of single crystal silicon (SCS) thin films and their dependence on the humidity were evaluated. In addition, using the statistical analysis for the fatigue test results, the fatigue parameter of SCS was obtained. The scale parameter, Weibull modulus, and fatigue parameter in the high humidity (85-90% RH) were 2.9times109 Pa, 13.6, and 86.3, respectively. With these parameters, the fatigue life prediction of SCS was performed for the long-term reliability assessment of MEMS devices.
{"title":"Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments","authors":"Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya","doi":"10.1109/MEMSYS.2007.4433142","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433142","url":null,"abstract":"This paper reports on a tensile-mode fatigue test in a constant humidity, even in a very high humidity, to reveal the mechanism of fatigue fractures of MEMS materials. A newly developed tensile-mode fatigue tester using the electrostatic grip can control the humidity from 25% RH to 90% RH. Using this tester, the fatigue life and strength of single crystal silicon (SCS) thin films and their dependence on the humidity were evaluated. In addition, using the statistical analysis for the fatigue test results, the fatigue parameter of SCS was obtained. The scale parameter, Weibull modulus, and fatigue parameter in the high humidity (85-90% RH) were 2.9times109 Pa, 13.6, and 86.3, respectively. With these parameters, the fatigue life prediction of SCS was performed for the long-term reliability assessment of MEMS devices.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"60 1","pages":"267-270"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85655937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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