Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433127
Chin-Pang-Billy Siu, H. Zeng, M. Chiao
This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal near infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20 mum thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. This work demonstrates a microlens with a scanning angle of plusmn24deg driven by an external AC magnetic field orientated at an angle of 30deg from the horizontal rotation axis. A coplanar 152 mum scanning range is demonstrated by a 22.2times10-3 Tesla external magnetic field at 197 Hz.
{"title":"Magnetically actuated scanning microlens for NIR Raman spectroscopy","authors":"Chin-Pang-Billy Siu, H. Zeng, M. Chiao","doi":"10.1109/MEMSYS.2007.4433127","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433127","url":null,"abstract":"This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal near infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20 mum thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. This work demonstrates a microlens with a scanning angle of plusmn24deg driven by an external AC magnetic field orientated at an angle of 30deg from the horizontal rotation axis. A coplanar 152 mum scanning range is demonstrated by a 22.2times10-3 Tesla external magnetic field at 197 Hz.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"735-738"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87097302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433078
C. K. Eun, T. Fung, B. Mitra, Y. Gianchandani
This paper explores a 3-electrode micromachined Geiger counter utilizing a high impedance (floating) electrode to control discharge energy, and its impact on sensitivity and response time. Permanent magnets in a sandwich configuration are used to enhance RF transmission from micro-discharges. Initially, weak (field-emission) leakage current charges the floating electrode capacitor (CPap1.1 pF) to a high voltage through the charging gap (between floating electrode and anode). When beta radiation initiates a micro-discharge in the sensing gap (between floating electrode and cathode), CP dissipates through the low impedance path, lowering the voltage and quickly quenching the discharge. Permanent magnets, positioned perpendicular to the discharge path, increase the efficiency of electron-ion collisions and enhance the consequent RF transmission. Experiments conducted in a neon/air ambient with 90Sr (0.1 muCi) showed a 10times-100times SNR improvement for the 3-electrode design over a similar 2-electrode design that does not utilize the floating electrode. Results also showed a significant increase in high frequency components in the presence of a magnetic field.
{"title":"A magnetically enhanced 3-electrode wireless micro-geiger counter","authors":"C. K. Eun, T. Fung, B. Mitra, Y. Gianchandani","doi":"10.1109/MEMSYS.2007.4433078","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433078","url":null,"abstract":"This paper explores a 3-electrode micromachined Geiger counter utilizing a high impedance (floating) electrode to control discharge energy, and its impact on sensitivity and response time. Permanent magnets in a sandwich configuration are used to enhance RF transmission from micro-discharges. Initially, weak (field-emission) leakage current charges the floating electrode capacitor (CPap1.1 pF) to a high voltage through the charging gap (between floating electrode and anode). When beta radiation initiates a micro-discharge in the sensing gap (between floating electrode and cathode), CP dissipates through the low impedance path, lowering the voltage and quickly quenching the discharge. Permanent magnets, positioned perpendicular to the discharge path, increase the efficiency of electron-ion collisions and enhance the consequent RF transmission. Experiments conducted in a neon/air ambient with 90Sr (0.1 muCi) showed a 10times-100times SNR improvement for the 3-electrode design over a similar 2-electrode design that does not utilize the floating electrode. Results also showed a significant increase in high frequency components in the presence of a magnetic field.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"599-602"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90936140","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433093
P. Stephanou, A. Pisano
This work introduces a new class of low motional resistance piezoelectric aluminum nitride (AlN) MEMS ring resonators that operate in GHz contour modes of vibration. The resonators are based on an annular thin film AlN structural layer sandwiched between two or more pairs of concentric transduction electrodes whose design effectively uncouples the resonant frequency of the device from its transduction area (and consequently its motional resistance) at the layout level. The devices under test exhibit lithographically-defined fundamental series resonant frequencies from 1.03 to 1.60 GHz, motional resistances from 57 to 130 Omega, a resonator figure of merit (FOM = kt 2Q) of 6.4 to 7.4, and no coherent spurious responses from DC to 5 GHz.
{"title":"GHZ higher order contour mode ALN annular resonators","authors":"P. Stephanou, A. Pisano","doi":"10.1109/MEMSYS.2007.4433093","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433093","url":null,"abstract":"This work introduces a new class of low motional resistance piezoelectric aluminum nitride (AlN) MEMS ring resonators that operate in GHz contour modes of vibration. The resonators are based on an annular thin film AlN structural layer sandwiched between two or more pairs of concentric transduction electrodes whose design effectively uncouples the resonant frequency of the device from its transduction area (and consequently its motional resistance) at the layout level. The devices under test exhibit lithographically-defined fundamental series resonant frequencies from 1.03 to 1.60 GHz, motional resistances from 57 to 130 Omega, a resonator figure of merit (FOM = kt 2Q) of 6.4 to 7.4, and no coherent spurious responses from DC to 5 GHz.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"21 1","pages":"787-790"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88722268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433020
D. D. Meng, C. Kim
This paper introduces a micro direct methanol fuel cell (muDMFC) with an embedded self-pumping mechanism to deliver liquid fuel. The fuel is propelled by the CO2 bubbles generated by the fuel-cell electrochemical reaction, and the bubbles are removed from the system during the self-pumping process. Furthermore, the pumping rate is self- regulated by the reaction, i.e., by the electric load. By eliminating the need for a pump and gas/liquid separator, our design allows much simpler fuel-cell systems, which is especially beneficial for miniaturization. Although we test with muDMFC in this paper, the mechanism applies to other membrane electrode assembly (MEA)-based fuel cells with organic liquid fuels as well.
{"title":"Embedded self-circulation of liquid fuel for a micro direct methanol fuel cell","authors":"D. D. Meng, C. Kim","doi":"10.1109/MEMSYS.2007.4433020","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433020","url":null,"abstract":"This paper introduces a micro direct methanol fuel cell (muDMFC) with an embedded self-pumping mechanism to deliver liquid fuel. The fuel is propelled by the CO2 bubbles generated by the fuel-cell electrochemical reaction, and the bubbles are removed from the system during the self-pumping process. Furthermore, the pumping rate is self- regulated by the reaction, i.e., by the electric load. By eliminating the need for a pump and gas/liquid separator, our design allows much simpler fuel-cell systems, which is especially beneficial for miniaturization. Although we test with muDMFC in this paper, the mechanism applies to other membrane electrode assembly (MEA)-based fuel cells with organic liquid fuels as well.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"64 1","pages":"85-88"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86046248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433019
Chuang-yuan Lee, Hongyu Yu, E. S. Kim
This paper reports a microreaction technology for biochemical assay using nanoliter droplets encapsulated inside oil droplets. Microreaction chambers are constructed on a glass substrate by accumulating oil droplets that are dispensed by the directional droplet ejector. Droplets of different aqueous reagents are then directionally ejected into the oil microchambers for parallel and combinatory analysis. Because the reagents are encapsulated in oil, the evaporation rate is greatly reduced, and only small amount of reagents are required. The microchamber size and reagent amount are digitally controlled by the number of ejected oil and reagent droplets, respectively. Ejectors for oil and reagents have been integrated on a single chip so that each assay is performed efficiently without any mechanical movement and alignment. We have carried out both physical and chemical microreactions with this method, and observed negligible difference (in response) from conventional macroreactions.
{"title":"Microreactions using nanoliter droplets with oil encapsulation","authors":"Chuang-yuan Lee, Hongyu Yu, E. S. Kim","doi":"10.1109/MEMSYS.2007.4433019","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433019","url":null,"abstract":"This paper reports a microreaction technology for biochemical assay using nanoliter droplets encapsulated inside oil droplets. Microreaction chambers are constructed on a glass substrate by accumulating oil droplets that are dispensed by the directional droplet ejector. Droplets of different aqueous reagents are then directionally ejected into the oil microchambers for parallel and combinatory analysis. Because the reagents are encapsulated in oil, the evaporation rate is greatly reduced, and only small amount of reagents are required. The microchamber size and reagent amount are digitally controlled by the number of ejected oil and reagent droplets, respectively. Ejectors for oil and reagents have been integrated on a single chip so that each assay is performed efficiently without any mechanical movement and alignment. We have carried out both physical and chemical microreactions with this method, and observed negligible difference (in response) from conventional macroreactions.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"81-84"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83986223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433164
Man Lee, Yi-Kuen Lee, Y. Zohar
A thermal microsystem with integrated heaters, pressure and temperature microsensors, has been fabricated to study local temperature and pressure fluctuations occurring in forced convective boiling in microchannels. The observed two-phase flows can be classified into two patterns: oscillating liquid/vapour interface and liquid burst flow; both leading to unsteady temperature and pressure fields. FFT power spectra of the measured signals are correlated with flow visualizations to analyse the two-phase flow modes. The dominant fluctuation frequency of each flow mode increases with input power; and, under similar conditions, the frequency of the periodically oscillating liquid/vapour interface is higher than the dominant frequency of the liquid bursts. Dimensional analysis is performed to derive empirical correlations for the dimensionless fluctuation frequency, Strouhal number, for both flow patterns.
{"title":"Two-phase flow oscillations in microchannel convective boiling","authors":"Man Lee, Yi-Kuen Lee, Y. Zohar","doi":"10.1109/MEMSYS.2007.4433164","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433164","url":null,"abstract":"A thermal microsystem with integrated heaters, pressure and temperature microsensors, has been fabricated to study local temperature and pressure fluctuations occurring in forced convective boiling in microchannels. The observed two-phase flows can be classified into two patterns: oscillating liquid/vapour interface and liquid burst flow; both leading to unsteady temperature and pressure fields. FFT power spectra of the measured signals are correlated with flow visualizations to analyse the two-phase flow modes. The dominant fluctuation frequency of each flow mode increases with input power; and, under similar conditions, the frequency of the periodically oscillating liquid/vapour interface is higher than the dominant frequency of the liquid bursts. Dimensional analysis is performed to derive empirical correlations for the dimensionless fluctuation frequency, Strouhal number, for both flow patterns.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"60 1","pages":"635-638"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88183314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433163
P. Gieschke, J. Held, M. Doelle, J. Bartholomeyczik, P. Ruther, O. Paul
This paper reports on a CMOS integrated stress sensor array combined with SU-8 posts fabricated on the chip surface. The chip contains an array of 1024 field effect transistor (FET)-based stress sensors occupying a total area of ca. 1 x 1 mm2. On-chip circuitry is used for sensor addressing, signal amplification, A/D conversion, signal processing, and serial bus communication. A novel scalable matrix-based sensor selection concept enables the integration of high-density stress sensor arrays with minimum wiring. The system significantly expands previous stress sensor arrays in terms of an increased number of sensors and reduced sensor pitch. An array of 8 x 8 circular SU-8 posts with a diameter of 62 mum and a height of 300 mum was fabricated on the CMOS chips. The new brush-like device was used for measuring vertical and horizontal force distributions.
本文报道了一种结合SU-8柱的CMOS集成应力传感器阵列。该芯片包含1024个基于场效应晶体管(FET)的应力传感器阵列，占据总面积约为1 x 1 mm2。片上电路用于传感器寻址、信号放大、A/D转换、信号处理和串行总线通信。一种新颖的可扩展的基于矩阵的传感器选择概念，使高密度应力传感器阵列的集成与最少的布线。该系统在增加传感器数量和减小传感器间距方面显著扩展了以前的应力传感器阵列。在CMOS芯片上制备了直径为62 μ m，高度为300 μ m的8 × 8圆形SU-8柱阵列。该新型刷状装置用于测量垂直和水平方向的力分布。
{"title":"Smart brush based on a high density CMOS stress sensor array and SU-8 microposts","authors":"P. Gieschke, J. Held, M. Doelle, J. Bartholomeyczik, P. Ruther, O. Paul","doi":"10.1109/MEMSYS.2007.4433163","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433163","url":null,"abstract":"This paper reports on a CMOS integrated stress sensor array combined with SU-8 posts fabricated on the chip surface. The chip contains an array of 1024 field effect transistor (FET)-based stress sensors occupying a total area of ca. 1 x 1 mm2. On-chip circuitry is used for sensor addressing, signal amplification, A/D conversion, signal processing, and serial bus communication. A novel scalable matrix-based sensor selection concept enables the integration of high-density stress sensor arrays with minimum wiring. The system significantly expands previous stress sensor arrays in terms of an increased number of sensors and reduced sensor pitch. An array of 8 x 8 circular SU-8 posts with a diameter of 62 mum and a height of 300 mum was fabricated on the CMOS chips. The new brush-like device was used for measuring vertical and horizontal force distributions.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"631-634"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86695538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4432980
Yongmo Yang, J. Chae
This paper reports a miniaturized HPLC (high performance liquid chromatography) column packed with nano-pore beads for flexible medical implants applications. The all-flexible-polymer column capable of integrating with micro/nano-devices on a chip separates biological entities to relax stringent requirements on subsequent detectors and to enable parallel detection in a detector array. The fabricated device has successfully separated a protein mixture using nano-pore beads in a miniaturized column. According to HPLC analysis, the intensity ratio of large to small protein varies significantly, more than a factor of 300, over sample collecting time, ~12mins, suggesting very high separation performance.
{"title":"Miniaturized HPLC column with nano-pore beads for protein separation on flexible medical implants","authors":"Yongmo Yang, J. Chae","doi":"10.1109/MEMSYS.2007.4432980","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432980","url":null,"abstract":"This paper reports a miniaturized HPLC (high performance liquid chromatography) column packed with nano-pore beads for flexible medical implants applications. The all-flexible-polymer column capable of integrating with micro/nano-devices on a chip separates biological entities to relax stringent requirements on subsequent detectors and to enable parallel detection in a detector array. The fabricated device has successfully separated a protein mixture using nano-pore beads in a miniaturized column. According to HPLC analysis, the intensity ratio of large to small protein varies significantly, more than a factor of 300, over sample collecting time, ~12mins, suggesting very high separation performance.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"52 1","pages":"421-424"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87029839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433060
T. Galchev, W. Welch, K. Najafi
This paper explores the use of dielectric barrier discharge (DBD) surface activated low-temperature wafer bonding in MEMS device fabrication. Characterization of the DBD surface treatment process is included as well as analysis of the optimal bonding conditions. A new high aspect-ratio MEMS technology based on bonding two silicon wafers with an intermediate silicon dioxide layer at 400degC is presented. This silicon-on-silicon (SOS) process requires three masks and provides several advantages compared with silicon-on-glass (SOG) and silicon-on- insulator (SOI) processes, including better dimensional and etch profile control of narrow and slender MEMS structures. This is demonstrated by fabricating a 5 mum wide 30 mm long beam. Additionally, by patterning the intermediate SiO2 insulation layer before bonding, footing is reduced without any extra processing, as compared to both SOG and SOI. All SOS process steps are CMOS compatible.
{"title":"Low-temperature MEMS process using plasma activated Silicon-On-Silicon (SOS) bonding","authors":"T. Galchev, W. Welch, K. Najafi","doi":"10.1109/MEMSYS.2007.4433060","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433060","url":null,"abstract":"This paper explores the use of dielectric barrier discharge (DBD) surface activated low-temperature wafer bonding in MEMS device fabrication. Characterization of the DBD surface treatment process is included as well as analysis of the optimal bonding conditions. A new high aspect-ratio MEMS technology based on bonding two silicon wafers with an intermediate silicon dioxide layer at 400degC is presented. This silicon-on-silicon (SOS) process requires three masks and provides several advantages compared with silicon-on-glass (SOG) and silicon-on- insulator (SOI) processes, including better dimensional and etch profile control of narrow and slender MEMS structures. This is demonstrated by fabricating a 5 mum wide 30 mm long beam. Additionally, by patterning the intermediate SiO2 insulation layer before bonding, footing is reduced without any extra processing, as compared to both SOG and SOI. All SOS process steps are CMOS compatible.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"309-312"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87067880","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433142
Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya
This paper reports on a tensile-mode fatigue test in a constant humidity, even in a very high humidity, to reveal the mechanism of fatigue fractures of MEMS materials. A newly developed tensile-mode fatigue tester using the electrostatic grip can control the humidity from 25% RH to 90% RH. Using this tester, the fatigue life and strength of single crystal silicon (SCS) thin films and their dependence on the humidity were evaluated. In addition, using the statistical analysis for the fatigue test results, the fatigue parameter of SCS was obtained. The scale parameter, Weibull modulus, and fatigue parameter in the high humidity (85-90% RH) were 2.9times109 Pa, 13.6, and 86.3, respectively. With these parameters, the fatigue life prediction of SCS was performed for the long-term reliability assessment of MEMS devices.
{"title":"Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments","authors":"Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya","doi":"10.1109/MEMSYS.2007.4433142","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433142","url":null,"abstract":"This paper reports on a tensile-mode fatigue test in a constant humidity, even in a very high humidity, to reveal the mechanism of fatigue fractures of MEMS materials. A newly developed tensile-mode fatigue tester using the electrostatic grip can control the humidity from 25% RH to 90% RH. Using this tester, the fatigue life and strength of single crystal silicon (SCS) thin films and their dependence on the humidity were evaluated. In addition, using the statistical analysis for the fatigue test results, the fatigue parameter of SCS was obtained. The scale parameter, Weibull modulus, and fatigue parameter in the high humidity (85-90% RH) were 2.9times109 Pa, 13.6, and 86.3, respectively. With these parameters, the fatigue life prediction of SCS was performed for the long-term reliability assessment of MEMS devices.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"60 1","pages":"267-270"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85655937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：