Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433051
S. Chung, Yuejun Zhao, U. Yi, S. Cho
Recently, we envisioned so called micro bubble tweezers where EWOD (electrowetting-on-dielectric) actuated bubbles can manipulate micro objects such as biological cells by pushing or pulling them. Besides, oscillating (shrinking and expanding) bubbles in the presence of ultrasonic wave act as a to deliver drugs and molecules into the cells. In this paper, as a great stride in our quest for micro bubble tweezers, we present (1) full realization of two critical bubble operations (generating of bubbles in an on-chip and on-demand manner and splitting of single bubbles) and (2) two possible applications of mobile bubbles oscillating under acoustic excitation (a mobile vortex generator and micro particle carrier).
{"title":"Micro bubble fluidics by EWOD and ultrasonic excitation for micro bubble tweezers","authors":"S. Chung, Yuejun Zhao, U. Yi, S. Cho","doi":"10.1109/MEMSYS.2007.4433051","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433051","url":null,"abstract":"Recently, we envisioned so called micro bubble tweezers where EWOD (electrowetting-on-dielectric) actuated bubbles can manipulate micro objects such as biological cells by pushing or pulling them. Besides, oscillating (shrinking and expanding) bubbles in the presence of ultrasonic wave act as a to deliver drugs and molecules into the cells. In this paper, as a great stride in our quest for micro bubble tweezers, we present (1) full realization of two critical bubble operations (generating of bubbles in an on-chip and on-demand manner and splitting of single bubbles) and (2) two possible applications of mobile bubbles oscillating under acoustic excitation (a mobile vortex generator and micro particle carrier).","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"66 6 1","pages":"31-34"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89880584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433124
Y. Heo, W. Lee, Young‐Ho Cho
We present micromechanical active amplifiers using carrier motion in the mechanical resonance, thereby performing the amplification of displacement, force, and energy. The carrier motion is modulated by variable stiffness springs whose stiffness change is proportional to input motion. We design, fabricate, and test two types of the amplifiers A and B, including two different variable stiffness springs A and B, which are designed to increase output stiffness variation and output-to-input stiffness ratio, respectively. The displacement gain of amplifier A is 5.62, which is 2.15 times larger than that of the amplifier B. The force gain of the amplifier B is 10.0, which is 1.26 times larger than that of the amplifier A. We experimentally verify that the present devices are able to amplify both displacement and force simultaneously, showing potential applications of high-sensitive sensing and high-force/long-range actuation.
{"title":"Micromechanical active amplifiers using the mechanical resonance modulated by variable stiffness springs","authors":"Y. Heo, W. Lee, Young‐Ho Cho","doi":"10.1109/MEMSYS.2007.4433124","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433124","url":null,"abstract":"We present micromechanical active amplifiers using carrier motion in the mechanical resonance, thereby performing the amplification of displacement, force, and energy. The carrier motion is modulated by variable stiffness springs whose stiffness change is proportional to input motion. We design, fabricate, and test two types of the amplifiers A and B, including two different variable stiffness springs A and B, which are designed to increase output stiffness variation and output-to-input stiffness ratio, respectively. The displacement gain of amplifier A is 5.62, which is 2.15 times larger than that of the amplifier B. The force gain of the amplifier B is 10.0, which is 1.26 times larger than that of the amplifier A. We experimentally verify that the present devices are able to amplify both displacement and force simultaneously, showing potential applications of high-sensitive sensing and high-force/long-range actuation.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"671-674"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78290850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433004
H. Lo, Rus Whang, Y. Tai
We developed a novel, yet simple, micro electret power generator prototype for low-frequency energy harvesting applications. In this prototype, two electrodes of the power generator are placed on the stator. The rotor is only a plate with metal strips of half of the spatial frequency of the stator plate. The packaging is to simply fix the stator to a container and put the rotor directly on top of the stator. CYTOP, a MEMS-compatible perfluoropolymer, served as the electret material and charged with corona charging. The power output was 2.267 muW at 60 Hz.
{"title":"A simple micro electret power generator","authors":"H. Lo, Rus Whang, Y. Tai","doi":"10.1109/MEMSYS.2007.4433004","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433004","url":null,"abstract":"We developed a novel, yet simple, micro electret power generator prototype for low-frequency energy harvesting applications. In this prototype, two electrodes of the power generator are placed on the stator. The rotor is only a plate with metal strips of half of the spatial frequency of the stator plate. The packaging is to simply fix the stator to a container and put the rotor directly on top of the stator. CYTOP, a MEMS-compatible perfluoropolymer, served as the electret material and charged with corona charging. The power output was 2.267 muW at 60 Hz.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"859-862"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74824205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433180
K. Takagahara, Y. Takei, K. Matsumoto, I. Shimoyama
We have proposed batch fabrication of silicon pyramids with upward CNTs on the tips at one time by a chemical vapor deposition (CVD) process. To synthesize upward CNTs on the pyramid tips, an upward electric field was applied to the silicon pyramid array during the CVD process. By electric field simulation and verifying experiment on silicon one-dimensional array structures, we found that CNTs tended to grow from sharp tips in our method. We fabricated the silicon pyramid array with sharp tips by anisotropic wet etching. After the CVD process, CNTs growing from the tips of the pyramids were observed by a scanning electron microscope (SEM). As a result, about 70% of 100 times 100 silicon pyramid array had CNTs on the tips. Our method would be valuable for fabricating probes of atomic force microscope (AFM) with CNTs on the tips (CNT-AFM probes).
{"title":"Batch fabrication of carbon nanotubes on tips of a silicon pyramid array","authors":"K. Takagahara, Y. Takei, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2007.4433180","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433180","url":null,"abstract":"We have proposed batch fabrication of silicon pyramids with upward CNTs on the tips at one time by a chemical vapor deposition (CVD) process. To synthesize upward CNTs on the pyramid tips, an upward electric field was applied to the silicon pyramid array during the CVD process. By electric field simulation and verifying experiment on silicon one-dimensional array structures, we found that CNTs tended to grow from sharp tips in our method. We fabricated the silicon pyramid array with sharp tips by anisotropic wet etching. After the CVD process, CNTs growing from the tips of the pyramids were observed by a scanning electron microscope (SEM). As a result, about 70% of 100 times 100 silicon pyramid array had CNTs on the tips. Our method would be valuable for fabricating probes of atomic force microscope (AFM) with CNTs on the tips (CNT-AFM probes).","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"113 1","pages":"855-858"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72880469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433046
A. J. Shum, B. Parviz
The survival rate of Drosophila when exposed to moderate vacuum levels is studied and it is established that the organism can be subjected to 55 mTorr vacuum for periods as long as 70 minutes with a significant rate of survival (>20%). This finding opens a number of new opportunities for performing fabrication processes, similar to the ones performed on a silicon wafer, on a fruit fly as a live substrate. As a model microfabrication process, it is shown how a collection of Drosophila can be made to self-assemble into an array of microfabricated recesses on a silicon wafer and how a shadow mask can be used to thermally evaporate 100 nm of indium on flies. The procedure resulted in the production of a number of live flies with 50 mum indium micro patterns on their wings. The first demonstration of vacuum microfabrication on a live organism provides the first step towards the development of a hybrid biological/solid-state manufacturing process for complex microsystems.
{"title":"Vacuum microfabrication on live fruit fly","authors":"A. J. Shum, B. Parviz","doi":"10.1109/MEMSYS.2007.4433046","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433046","url":null,"abstract":"The survival rate of Drosophila when exposed to moderate vacuum levels is studied and it is established that the organism can be subjected to 55 mTorr vacuum for periods as long as 70 minutes with a significant rate of survival (>20%). This finding opens a number of new opportunities for performing fabrication processes, similar to the ones performed on a silicon wafer, on a fruit fly as a live substrate. As a model microfabrication process, it is shown how a collection of Drosophila can be made to self-assemble into an array of microfabricated recesses on a silicon wafer and how a shadow mask can be used to thermally evaporate 100 nm of indium on flies. The procedure resulted in the production of a number of live flies with 50 mum indium micro patterns on their wings. The first demonstration of vacuum microfabrication on a live organism provides the first step towards the development of a hybrid biological/solid-state manufacturing process for complex microsystems.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"31 1","pages":"179-182"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72905858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4432999
Lei Gu, Xinxin Li
We report on concave-suspended high-Q solenoid inductors with a post-CMOS MEMS process in low-resistivity silicon substrate. The 3-mask processes include copper electroplating, photo-resist spray-coating and XeF2 gaseous etching. The peak Q-factor value is measured as 47 at 5.3 GHz with 2.96 nH inductance. A compact and four curving layouts of inductors are fabricated and tested. Both finite element simulation and shock testing results show that the suspended inductor is almost free of influence from environmental vibration and shock. Featuring the high-Q value and the good robustness, the novel solenoid inductors are promising for high-performance RF IC applications.
{"title":"Concave-suspended high-Q solenoid inductors with a post-CMOS MEMS process in standard wafers","authors":"Lei Gu, Xinxin Li","doi":"10.1109/MEMSYS.2007.4432999","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432999","url":null,"abstract":"We report on concave-suspended high-Q solenoid inductors with a post-CMOS MEMS process in low-resistivity silicon substrate. The 3-mask processes include copper electroplating, photo-resist spray-coating and XeF2 gaseous etching. The peak Q-factor value is measured as 47 at 5.3 GHz with 2.96 nH inductance. A compact and four curving layouts of inductors are fabricated and tested. Both finite element simulation and shock testing results show that the suspended inductor is almost free of influence from environmental vibration and shock. Featuring the high-Q value and the good robustness, the novel solenoid inductors are promising for high-performance RF IC applications.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"28 1","pages":"771-774"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72741635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433024
N. Watanabe, Y. Isono, T. Kakinaga, T. Nagamura, T. Sasaki
This research developed an individually driving one-dimensional (1D) multi-probes cantilever array used in a scanning probe parallel nano writing system. The multi-probes cantilever array comprises two kinds of probes for writing and imaging. The writing probes each have thermal actuators for an on-off switch of contact between probes and a sample surface, whereas imaging probes function as a piezoresistive sensor for detecting a deflection of the cantilever array. This study prepared several kinds of writing probes by changing the electrical heater pattern of the actuators and the cantilever length, based on electro thermo-mechanical coupled FE simulations. Consequently, we were able to determine a better design for the multi-probes cantilever array.
{"title":"Thermal actuated multi-probes cantilever array for scanning probe parallel nano writing system","authors":"N. Watanabe, Y. Isono, T. Kakinaga, T. Nagamura, T. Sasaki","doi":"10.1109/MEMSYS.2007.4433024","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433024","url":null,"abstract":"This research developed an individually driving one-dimensional (1D) multi-probes cantilever array used in a scanning probe parallel nano writing system. The multi-probes cantilever array comprises two kinds of probes for writing and imaging. The writing probes each have thermal actuators for an on-off switch of contact between probes and a sample surface, whereas imaging probes function as a piezoresistive sensor for detecting a deflection of the cantilever array. This study prepared several kinds of writing probes by changing the electrical heater pattern of the actuators and the cantilever length, based on electro thermo-mechanical coupled FE simulations. Consequently, we were able to determine a better design for the multi-probes cantilever array.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"99-102"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85014797","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4432968
J. Ohara, K. Kano, Y. Takeuchi
We have developed a new fabrication process of micro optical elements by applying DRIE (Deep Reactive Ion Etching) process and thermal oxidation, which enables us to make micro lenses and prisms on a silicon substrate without assembling. This process can also form other optical elements, such as light wave-guides by changing mask pattern.
我们通过应用DRIE (Deep Reactive Ion Etching)工艺和热氧化技术，开发了一种新的微光学元件制造工艺，使我们能够在硅衬底上制造微透镜和棱镜，而无需组装。这个过程也可以形成其他光学元件，如光波导通过改变掩模模式。
{"title":"A new fabrication process for micro optical elements using drie and oxidation","authors":"J. Ohara, K. Kano, Y. Takeuchi","doi":"10.1109/MEMSYS.2007.4432968","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4432968","url":null,"abstract":"We have developed a new fabrication process of micro optical elements by applying DRIE (Deep Reactive Ion Etching) process and thermal oxidation, which enables us to make micro lenses and prisms on a silicon substrate without assembling. This process can also form other optical elements, such as light wave-guides by changing mask pattern.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"78 1","pages":"279-282"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79742671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433160
B. Samel, P. Griss, G. Stemme
In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.
{"title":"Active liquid aspiration and dispensing based on an expanding PDMS composite","authors":"B. Samel, P. Griss, G. Stemme","doi":"10.1109/MEMSYS.2007.4433160","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433160","url":null,"abstract":"In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"40 1","pages":"565-568"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80553850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2007-01-01DOI: 10.1109/MEMSYS.2007.4433117
A. Salim, Z. Ding, Babak Ziaie
In this paper, we report on an expandable height hydrogel stamper with built-in reservoir that can be used to repeatedly (without frequent re-inking) stamp functional biomolecules on planar and non-planar surfaces. We have successfully patterned fluorescein isothiocyante (FITC) labeled antibodies (antibodies for O-antigens of Bradyrhizobium japonicum made in rabbits) on planar (silicon) and nonplanar (SU8 on silicon with a height of ~70 mum) topologies. The printed antibodies show the effectiveness of hydrogel stampers in delivering biomolecules on 3D topologies where the hydrogel could be adjusted to stamp on the sidewalls and bottom of deep trenches.
{"title":"A hydrogel stamper with expandable height and built-in reservoirs for patterning biomolecules on 3D topologies","authors":"A. Salim, Z. Ding, Babak Ziaie","doi":"10.1109/MEMSYS.2007.4433117","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433117","url":null,"abstract":"In this paper, we report on an expandable height hydrogel stamper with built-in reservoir that can be used to repeatedly (without frequent re-inking) stamp functional biomolecules on planar and non-planar surfaces. We have successfully patterned fluorescein isothiocyante (FITC) labeled antibodies (antibodies for O-antigens of Bradyrhizobium japonicum made in rabbits) on planar (silicon) and nonplanar (SU8 on silicon with a height of ~70 mum) topologies. The printed antibodies show the effectiveness of hydrogel stampers in delivering biomolecules on 3D topologies where the hydrogel could be adjusted to stamp on the sidewalls and bottom of deep trenches.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"513-516"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80706064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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