Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181387
C. Richter, E. Wilhelm, A. Voigt, B. Rapp
In this paper we present a latchable, thermally activated phase change (PC) actuator. The actuator can be controlled using a heating resistor and two pressure sources. Thus several hundred actuators can be driven using a highly integrated platform which allows the individual control of several hundred heating resistors. To optimize the response time of the actuators we analyzed the influence of the heating power of the used resistors, the volume of the used phase change material (PCM) and the PCM itself.
{"title":"A latchable thermally activated phase change actuator and optimization of its response behaviour","authors":"C. Richter, E. Wilhelm, A. Voigt, B. Rapp","doi":"10.1109/TRANSDUCERS.2015.7181387","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181387","url":null,"abstract":"In this paper we present a latchable, thermally activated phase change (PC) actuator. The actuator can be controlled using a heating resistor and two pressure sources. Thus several hundred actuators can be driven using a highly integrated platform which allows the individual control of several hundred heating resistors. To optimize the response time of the actuators we analyzed the influence of the heating power of the used resistors, the volume of the used phase change material (PCM) and the PCM itself.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75460021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181197
Z. Chen, Y. Zhang, J. Q. Xu, P. Xu, X. Li
This work reports a novel nanocomposite material, PtW nanocrystals modified MoS2 nanosheets (PtW/MoS2) for the first time. Having been tuned into electrochemical sensor, it is found that this kind of nanocomposite material shows great anti-interference ability toward uric acid (UA) and ascorbic acid (AA). Furthermore, the incorporation of two different nanomaterials in conjunction with each other to form novel composites improves the selective interaction of hydrogen peroxide (H2O2) with sensing material surface, achieving efficient transport of reactant species, and further increases the sensitivity and selectivity of electrochemical sensor.
{"title":"Cubic platinum-tungsten alloy nanocrystals in-situ grown on molybdenum disulfide nanosheets for high specific and ultra sensitive detection of hydrogen peroxide","authors":"Z. Chen, Y. Zhang, J. Q. Xu, P. Xu, X. Li","doi":"10.1109/TRANSDUCERS.2015.7181197","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181197","url":null,"abstract":"This work reports a novel nanocomposite material, PtW nanocrystals modified MoS2 nanosheets (PtW/MoS2) for the first time. Having been tuned into electrochemical sensor, it is found that this kind of nanocomposite material shows great anti-interference ability toward uric acid (UA) and ascorbic acid (AA). Furthermore, the incorporation of two different nanomaterials in conjunction with each other to form novel composites improves the selective interaction of hydrogen peroxide (H2O2) with sensing material surface, achieving efficient transport of reactant species, and further increases the sensitivity and selectivity of electrochemical sensor.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75259224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180971
S. Chen, X. Wang, J. Pu, S. Li
This paper reports a surface-mount flexible micro-supercapacitor employing a thin parylene-C membrane (10 μm) as the substrate and activated carbon (AC) as the electrodes. A thin parylene-C layer was deposited on a Si wafer by chemical vapor deposition (CVD) without silanization and then peeled off mechanically with the fabricated interdigital electrodes on it. The prototypes show a specific capacitance of 31 mF/cm2 in the solid electrolyte (PVA-H3PO4). After 15 bending cycles, no obvious degradation in capacitance was observed. The prototype without separator also have been demonstrated, after more than 40 bending cycles, the capacitance changes from 20.6 mF/cm2 to 19.3 mF/cm2 with increasing bending cycles and the capacitance retention is 93.7% which indicates that the fabricated devices have good mechanical and electrochemical stability. Our method and design offer an opportunity to apply energy storage devices for wearable electronics.
{"title":"A surface-mount flexible micro-supercapacitor on ultra thin parylene-C substrate","authors":"S. Chen, X. Wang, J. Pu, S. Li","doi":"10.1109/TRANSDUCERS.2015.7180971","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180971","url":null,"abstract":"This paper reports a surface-mount flexible micro-supercapacitor employing a thin parylene-C membrane (10 μm) as the substrate and activated carbon (AC) as the electrodes. A thin parylene-C layer was deposited on a Si wafer by chemical vapor deposition (CVD) without silanization and then peeled off mechanically with the fabricated interdigital electrodes on it. The prototypes show a specific capacitance of 31 mF/cm2 in the solid electrolyte (PVA-H3PO4). After 15 bending cycles, no obvious degradation in capacitance was observed. The prototype without separator also have been demonstrated, after more than 40 bending cycles, the capacitance changes from 20.6 mF/cm2 to 19.3 mF/cm2 with increasing bending cycles and the capacitance retention is 93.7% which indicates that the fabricated devices have good mechanical and electrochemical stability. Our method and design offer an opportunity to apply energy storage devices for wearable electronics.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74480831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181206
C. Y. Cheng, H. Hao, S. Huang, C. M. Yang, K. Tang, D. Yao
The surface acoustic wave (SAW) gas sensor is coated with modified hollow mesoporous carbon nanosphere to replace generally used polymer as new type sensing material, which is used to detect the secondhand smoke marker, 3-ethenylpyridine. This non-polymer sensing layer is more sensitive than poly-acrylic acid due to the much more carboxyl group bonded by treating with nitric acid and the large specific surface area caused by porous structure is leading to rapid detection at low flow rate. Finally, the SAW sensor successfully detects real cigarette smoke with good repeatability, having great potential as real time monitoring for smoking in actual environment.
{"title":"Rapid cigarette detection by using surface acoustic wave gas sensor with non-polymer sensing film","authors":"C. Y. Cheng, H. Hao, S. Huang, C. M. Yang, K. Tang, D. Yao","doi":"10.1109/TRANSDUCERS.2015.7181206","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181206","url":null,"abstract":"The surface acoustic wave (SAW) gas sensor is coated with modified hollow mesoporous carbon nanosphere to replace generally used polymer as new type sensing material, which is used to detect the secondhand smoke marker, 3-ethenylpyridine. This non-polymer sensing layer is more sensitive than poly-acrylic acid due to the much more carboxyl group bonded by treating with nitric acid and the large specific surface area caused by porous structure is leading to rapid detection at low flow rate. Finally, the SAW sensor successfully detects real cigarette smoke with good repeatability, having great potential as real time monitoring for smoking in actual environment.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74494224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181379
Yuki Yamamoto, K. Kanao, T. Arie, S. Akita, K. Takei
This study demonstrates thermal and optical responsive actuator operated by skin temperature and sunlight without using electrical power supply. Different types of thermal and optical responsive actuators have been reported to date. However, actuator stimulated by both skin temperature and sunlight has yet to be demonstrated, although these are a high potential as the next class of power sources for devices. To realize an actuation using these stimuli, we propose to use a mixture of poly(N-isopropylacrylamide) (pNIPAM) as a thermal actuation material and carbon nanotubes (CNTs) as a light absorber to convert into heat on a polyethylene terephthalate (PET) substrate. By considering a packaging technique of the pNIPAM film, a human body temperature-and the sunlight-stimulated actuator is successfully demonstrated in air ambient.
{"title":"Electrical powerless, thermal and optical responsive polymer-based actuator","authors":"Yuki Yamamoto, K. Kanao, T. Arie, S. Akita, K. Takei","doi":"10.1109/TRANSDUCERS.2015.7181379","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181379","url":null,"abstract":"This study demonstrates thermal and optical responsive actuator operated by skin temperature and sunlight without using electrical power supply. Different types of thermal and optical responsive actuators have been reported to date. However, actuator stimulated by both skin temperature and sunlight has yet to be demonstrated, although these are a high potential as the next class of power sources for devices. To realize an actuation using these stimuli, we propose to use a mixture of poly(N-isopropylacrylamide) (pNIPAM) as a thermal actuation material and carbon nanotubes (CNTs) as a light absorber to convert into heat on a polyethylene terephthalate (PET) substrate. By considering a packaging technique of the pNIPAM film, a human body temperature-and the sunlight-stimulated actuator is successfully demonstrated in air ambient.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72768512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181327
H. Lee, Seokheun Choi
We report a prototype scalable and stackable biological solar panel by installing miniature biological solar cells in an array format. Nine small-scale biological solar cells were integrated in a panel along with a common feed microfluidic channel. The biological solar panel continuously generated electricity from microbial photosynthetic and respiratory activities under day-night cycles. Requiring only sunlight, water, and carbon dioxide to operate, the biological solar panel offers advantages over potentially competing sustainable power sources such as microbial fuel cell stacks or photovoltaic panels because the photosynthetic microorganisms used here a) do not require an organic fuel, and b) are capable of producing power both during the day and at night.
{"title":"A biological solar panel","authors":"H. Lee, Seokheun Choi","doi":"10.1109/TRANSDUCERS.2015.7181327","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181327","url":null,"abstract":"We report a prototype scalable and stackable biological solar panel by installing miniature biological solar cells in an array format. Nine small-scale biological solar cells were integrated in a panel along with a common feed microfluidic channel. The biological solar panel continuously generated electricity from microbial photosynthetic and respiratory activities under day-night cycles. Requiring only sunlight, water, and carbon dioxide to operate, the biological solar panel offers advantages over potentially competing sustainable power sources such as microbial fuel cell stacks or photovoltaic panels because the photosynthetic microorganisms used here a) do not require an organic fuel, and b) are capable of producing power both during the day and at night.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72661246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180995
A. Moazenzadeh, F. Suárez Sandoval, N. Spengler, U. Wallrabe
We present a novel approach for 3D microstructuring of amorphous soft magnetic alloys. Our unique process is MEMS-compatible and leaves the magnetic properties of the alloys intact. The applicability of the process has been demonstrated in the fabrication of closed-loop core microtransformers. The magnetic core is fabricated using Metglas 2714A, cobalt-based magnetic alloy. The microtransformers show higher performance in terms of inductance density, coupling factor, and power efficiency compared to conventional planar inductors or other published 3D microtransformers. The results are benchmarked to underline the potential of the technology in rendering chip-level power conversion competitive.
{"title":"Microtransformers on 3D closed-loop cores made of amorphous magnetic alloys","authors":"A. Moazenzadeh, F. Suárez Sandoval, N. Spengler, U. Wallrabe","doi":"10.1109/TRANSDUCERS.2015.7180995","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180995","url":null,"abstract":"We present a novel approach for 3D microstructuring of amorphous soft magnetic alloys. Our unique process is MEMS-compatible and leaves the magnetic properties of the alloys intact. The applicability of the process has been demonstrated in the fabrication of closed-loop core microtransformers. The magnetic core is fabricated using Metglas 2714A, cobalt-based magnetic alloy. The microtransformers show higher performance in terms of inductance density, coupling factor, and power efficiency compared to conventional planar inductors or other published 3D microtransformers. The results are benchmarked to underline the potential of the technology in rendering chip-level power conversion competitive.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73419590","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181293
H. Obata, T. Kuji, M. Yokokawa, H. Suzuki
An electrochemical micropump based on the production and shrinkage of hydrogen bubbles was fabricated. Bidirectional movement of a solution in a microfluidic channel was realized by producing and shrinking hydrogen bubbles on a platinum black electrode. The pump could also be operated autonomously by changing the mixed potential, which was realized by coupling the reduction and oxidation of protons/hydrogen with the oxidation (dissolution) of zinc and deposition of silver on electrodes connected to the platinum black electrode. The pump could withdraw an external solution through a microneedle. Also, two integrated pumps could manipulate solution plugs in microfabricated flow channels.
{"title":"Electrochemical bidirectional micropump for processing of liquid plugs","authors":"H. Obata, T. Kuji, M. Yokokawa, H. Suzuki","doi":"10.1109/TRANSDUCERS.2015.7181293","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181293","url":null,"abstract":"An electrochemical micropump based on the production and shrinkage of hydrogen bubbles was fabricated. Bidirectional movement of a solution in a microfluidic channel was realized by producing and shrinking hydrogen bubbles on a platinum black electrode. The pump could also be operated autonomously by changing the mixed potential, which was realized by coupling the reduction and oxidation of protons/hydrogen with the oxidation (dissolution) of zinc and deposition of silver on electrodes connected to the platinum black electrode. The pump could withdraw an external solution through a microneedle. Also, two integrated pumps could manipulate solution plugs in microfabricated flow channels.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73715876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Affinity glucose sensors based on equilibrium binding can offer improved stability and accuracy for continuous glucose monitoring in diabetes care. This paper presents a graphene-based affinity nanosensor for glucose measurements. The nanosensor exploits the affinity binding of a novel, surface-immobilized synthetic polymer with glucose. The binding induces changes in the bulk electrical properties of graphene, which are measured for sensitive glucose detection in a highly miniaturized device without the use of physical barriers commonly employed by existing affinity glucose sensors.
{"title":"A graphene-based affinity glucose nanosensor","authors":"Yibo Zhu, Jing Yan, Cheng Wang, X. Wang, Kexin Xu, Dachao Li, Qian Wang, Q. Lin","doi":"10.1109/TRANSDUCERS.2015.7181196","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181196","url":null,"abstract":"Affinity glucose sensors based on equilibrium binding can offer improved stability and accuracy for continuous glucose monitoring in diabetes care. This paper presents a graphene-based affinity nanosensor for glucose measurements. The nanosensor exploits the affinity binding of a novel, surface-immobilized synthetic polymer with glucose. The binding induces changes in the bulk electrical properties of graphene, which are measured for sensitive glucose detection in a highly miniaturized device without the use of physical barriers commonly employed by existing affinity glucose sensors.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73794958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181400
Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata
This paper reports a 10×10 arrayed single-axis accelerometer, whose unit size is 1/10 of conventional accelerometers. From the theoretical calculation, we can increase sensitivity per sensing area volume by 10 times when decreasing all dimensions by 1/10. The negative resist pattern with a sub-õm gap was obtained by electron beam lithography. The reliability (stiction and pull-in) issue, which was more apparent on miniaturizing, was solved by a nonlinear programming method in the design. In this research in-plane size effect was demonstrated by a 10×10 array of 80-õm-square unit accelerometers that have the 0.5-õm gap in the sensing capacitance. The measured sensitivity is 0.99 fF/g, which is the same as that of conventional 3-õm gap accelerometers.
{"title":"A sub-micron-gap soi capacitive accelerometer array utilizing size effect","authors":"Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata","doi":"10.1109/TRANSDUCERS.2015.7181400","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181400","url":null,"abstract":"This paper reports a 10×10 arrayed single-axis accelerometer, whose unit size is 1/10 of conventional accelerometers. From the theoretical calculation, we can increase sensitivity per sensing area volume by 10 times when decreasing all dimensions by 1/10. The negative resist pattern with a sub-õm gap was obtained by electron beam lithography. The reliability (stiction and pull-in) issue, which was more apparent on miniaturizing, was solved by a nonlinear programming method in the design. In this research in-plane size effect was demonstrated by a 10×10 array of 80-õm-square unit accelerometers that have the 0.5-õm gap in the sensing capacitance. The measured sensitivity is 0.99 fF/g, which is the same as that of conventional 3-õm gap accelerometers.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82124796","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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