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2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)最新文献

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PDMS young's modulus calibration for micropillar force sensor application PDMS杨氏模量校正在微柱力传感器中的应用
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354912
S. Johari, H. Fazmir, A. Anuar, M. Zainol, Volker Nock, Wenhui Wang
This paper reports on the calibration of PDMS Young's Modulus device which is applied as force sensor to measure C. elegans locomotion. The Young's Modulus of the PDMS is determined using a piezoresistive silicon force sensor. Four sets of PDMS devices are prepared using similar fabrication method, as we want to ensure that the PDMS fabrication process used in this work is capable of producing consistent material properties. From each device, three different samples are produced and tested using the sensor. The Young's Modulus of the PDMS is determined to be 1.47 MPa. The results are also compared with Young's Modulus values obtained in other researches. We found that the two main factors that affect the PDMS Young's Modulus value are baking time and curing temperature, where higher and longer temperature and baking time lead to stiffer PDMS.
本文报道了用于秀丽隐杆线虫运动测量的PDMS杨氏模量装置的标定。PDMS的杨氏模量是用压阻式硅力传感器测定的。使用类似的制造方法制备了四组PDMS器件,因为我们希望确保本工作中使用的PDMS制造工艺能够产生一致的材料特性。从每个设备中,产生三个不同的样品,并使用传感器进行测试。测定了PDMS的杨氏模量为1.47 MPa。并将所得结果与其它研究的杨氏模量进行了比较。研究发现,影响PDMS杨氏模量的两个主要因素是烘烤时间和固化温度,温度和烘烤时间越长,PDMS越硬。
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引用次数: 9
Physical properties of hydrothermal growth nanostructure metal titanium dioxide 水热生长纳米结构金属二氧化钛的物理性质
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355032
M. Zakaria, N. Farahin, R. Osman, Sh. Nadzirah, A. H. Azman, U. Hashim, M. K. Md Arshad
Growth of titanium dioxide (TiO2) nanowires was studied on the seed layer of TiO2 through hydrothermal growth method. Here, the growth of nanowires TiO2 on Si (100) substrates by using the two steps method. Different seed layers of TiO2 were prepared by using sol-gel method, deposited by spin coating and annealing, followed by the growth of TiO2 nanowires by using the hydrothermal method. Acetic acid was used as a stabilizer to synthesize a TiO2 seed layer. The aim of this study was to understand the role of polycrystalline size on thin film towards the diameter of nanowires grown as a sensing area in Surface Acoustic Wave (SAW) Biosensor. The morphology and microstructure of the thin film seed layer and TiO2 nanowires were characterized using X-Ray diffraction (XRD), scanning electron microscope (SEM), field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM).
采用水热法在TiO2种子层上研究了二氧化钛(TiO2)纳米线的生长。本文采用两步法在Si(100)衬底上生长纳米线TiO2。采用溶胶-凝胶法制备不同的TiO2种子层,经自旋包覆和退火沉积,然后采用水热法制备TiO2纳米线。以乙酸为稳定剂合成TiO2种子层。本研究的目的是了解薄膜上的多晶尺寸对作为表面声波(SAW)生物传感器传感区域的纳米线直径的作用。采用x射线衍射(XRD)、扫描电镜(SEM)、场发射扫描电镜(FESEM)和原子力显微镜(AFM)对薄膜种子层和TiO2纳米线的形貌和微观结构进行了表征。
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引用次数: 0
3C-SiC-on-Si based MEMS packaged capacitive pressure sensor operating up to 500 ºC and 5 MPa 基于3C-SiC-on-Si的MEMS封装电容式压力传感器,工作温度高达500ºC和5 MPa
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354962
Noraini Marsi, B. Majlis, A. A. Hamzah, H. E. Z. Abidin, F. Mohd-Yasin
This paper reports a packaged MEMS capacitive pressure sensor based 3C-SiC using bulk-micromachining technology that operates on the pressure up to 5.0 MPa and temperature up to 500 oC. The diaphragm employs a single-crystal 3C-SiC thin film that is back-etched from its Si substrate. A photosensitive ProTEK PSB is used as a protection mask layer to reduce the process steps. We compare our results with similar work that also employs a single-crystal 3C-SiC-on-Si capacitive pressure sensor with ceramic package. The MEMS capacitive pressure sensor is employed with 3C-SiC that was performed using hot wall low pressure chemical vapor deposition (LPCVD) reactors at the Queensland Micro and Nanotechnology Center (QMNC), Griffith University. This paper also focuses on comparing those two highest efficiency distributions in MEMS capacitive pressure sensor device to other types of MEMS capacitive pressure sensor. Different temperature, hysteresis and repeatability tests are presented to demonstrate the functionality of the packaged MEMS capacitive pressure sensor. As expected, the output hysteresis has low hysteresis (less than 0.05%) which has inflexibility greater than traditional silicon. By utilizing this low hysteresis was revealed the packaged MEMS capacitive pressure sensor has high repeatability and stability of the sensor.
本文报道了一种基于3g - sic的封装MEMS电容式压力传感器,该传感器采用体微加工技术,工作压力高达5.0 MPa,温度高达500℃。膜片采用单晶3C-SiC薄膜,从其Si衬底背面蚀刻。光敏的ProTEK PSB用作保护掩膜层,以减少工艺步骤。我们将我们的结果与同样采用陶瓷封装的单晶3C-SiC-on-Si电容性压力传感器的类似工作进行了比较。MEMS电容式压力传感器采用3C-SiC,该传感器是在格里菲斯大学昆士兰微纳米技术中心(QMNC)的热壁低压化学气相沉积(LPCVD)反应器中完成的。本文还将这两种最高效率分布在MEMS电容压力传感器器件中与其他类型的MEMS电容压力传感器进行了比较。通过不同的温度、滞后和重复性测试来验证封装MEMS电容式压力传感器的功能。正如预期的那样,输出迟滞率低(小于0.05%),比传统硅具有更大的灵活性。利用这一低迟滞特性揭示了封装后的MEMS电容式压力传感器具有较高的重复性和稳定性。
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引用次数: 0
Study on chemically modified graphene platforms for biosensor applications 用于生物传感器的化学修饰石墨烯平台研究
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355036
M. Fadhlina, A. R. Ruslinda, M. K. Md Arshad, S. Gopinath, M. F. Fatin, C. Voon, K. L. Foo, U. Hashim, R. M. Ayub
The biosensor platform of graphene material has grown rapidly in the past few years due to their unique properties in electrical, thermal conductivity, large surface area, high fracture strength, high young modulus and biocompatibility. In this work, the chemically modified graphene oxide solutions were studied for electrical performance toward biosensor applications. The graphene oxide solutions were sprayed manually on top of silicon substrate at various temperatures of 100, 200 and 300°C, respectively. Out of those temperatures, at 100°C, the surface morphology of reduction graphene oxide showed a better performance in electrical measurement. Atomic Force Microscopy (AFM) and Scanning Electron Microscopy were carried out to investigate the thermal reduction and the formation of graphene through surface morphology observation. Then a surface modification will conducted using APTES and electrical characteristic of the current-voltage (i-v) were performed.
由于石墨烯材料具有电导率、导热性、大表面积、高断裂强度、高杨氏模量和生物相容性等独特性能,近年来生物传感器平台发展迅速。在这项工作中,研究了化学修饰的氧化石墨烯溶液在生物传感器应用中的电性能。在100、200和300℃的不同温度下,将氧化石墨烯溶液手动喷涂在硅衬底上。在这些温度之外,在100°C时,还原氧化石墨烯的表面形貌在电测量中表现出更好的性能。采用原子力显微镜(AFM)和扫描电镜(sem)对石墨烯的表面形貌进行观察,研究了石墨烯的热还原和形成过程。然后使用APTES进行表面改性,并进行电流-电压(i-v)的电特性测试。
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引用次数: 0
Towards high performance graphene nanoribbon transistors (GNR-FETs) 迈向高性能石墨烯纳米带晶体管(gnr - fet)
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355030
A. Khalid, J. Sampe, B. Majlis, M. A. Mohamed, T. Chikuba, T. Iwasaki, H. Mizuta
We fabricated trilayer graphene nanoribbon (GNR) Field Effect Transistors (FETs) by means of mechanical exfoliation method and investigate the characteristics of the device. The device shows ambipolar operation with a good Ohmic contact between the graphene and electrodes. Arrhenius plots of temperature dependence of conductance are consistence with thermal activated conduction above 273 K, and variable range hopping conduction at low temperature. GNR charge carrier provides high electron mobility of 6198 cm2V-1s-1 at 273 K, and lower activation energy of 0.592 meV. This device possesses high performance and requires ultra-low power compare to other reported graphene-based transistors.
采用机械剥离法制备了三层石墨烯纳米带场效应晶体管(fet),并对其特性进行了研究。该器件显示双极性操作,石墨烯和电极之间具有良好的欧姆接触。电导的温度依赖性Arrhenius图与273 K以上的热激活传导和低温下的变程跳变传导相一致。GNR载流子在273 K下具有6198 cm2V-1s-1的高电子迁移率和0.592 meV的低活化能。与其他基于石墨烯的晶体管相比,该器件具有高性能和超低功耗。
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引用次数: 15
FPGA-based hardware-in-the-loop verification of dual-stage HDD head position control 基于fpga的双级硬盘磁头位置控制硬件在环验证
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354973
Kiattisak Sengchuai, W. Wichakool, N. Jindapetch, P. Smithmaitrie
This paper presents a design and verification of a digital controller for dual-stage hard disk drive (HDD) head positioning. A continuous time model of an adaptive PID controller of the dual-stage track following control is converted to a stable discrete time model. Then, the optimizations of sampling rate, arithmetic operation bit-width, and control parameters are performed during digital controller design. Xilinx System Generator is used to generate the hardware description language that can be implemented in a real FPGA. Finally, hardware-in-the-loop verification is performed through a hardware board to guarantee the control model. This method can not only accelerate the design cycle of new HDD models, but also achieve high sampling rate precise head position control implementations. From the verification results, our proposed controller can work at 5.64 MHz sampling rate on a low cost FPGA (Xilinx Spartan-III XC3S400) and the position error (3-sigma) is only 4.2138 % of track.
本文介绍了一种双级硬盘磁头定位数字控制器的设计与验证。将双级跟踪控制的自适应PID控制器的连续时间模型转化为稳定的离散时间模型。然后,在数字控制器设计过程中对采样率、算术运算位宽和控制参数进行优化。Xilinx System Generator用于生成可在实际FPGA中实现的硬件描述语言。最后,通过硬件板进行硬件在环验证,以保证控制模型的正确性。该方法不仅可以加快新型硬盘的设计周期,而且可以实现高采样率精确的磁头位置控制。从验证结果来看,我们提出的控制器可以在低成本FPGA (Xilinx Spartan-III XC3S400)上以5.64 MHz的采样率工作,位置误差(3-sigma)仅为轨迹的4.2138%。
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引用次数: 3
A computational study on transport properties of square graphene nanoconstriction 方形石墨烯纳米结构输运性质的计算研究
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355028
S. Husain, Z. Johari
Continuous scaling of device dimension allows the integration of an increasing number of transistors on a single chip. As its move beyond the Moore's Law, carbon - based nanoelectronics such as Graphene emerges. The purpose of this study is to investigate the transport behaviour of Graphene Nanoconstriction (GNC) with square geometry. The transmission spectra and current - voltage (I-V) characteristic are simulated. From the simulation, markable change in I-V trend is achieved when the GNC dimension was vary where saturation region appear. The length of the constriction is found to have considerable effect to the transport properties. The result provides physical insight for better understanding the transport properties of GNC.
器件尺寸的持续缩放允许在单个芯片上集成越来越多的晶体管。随着它超越摩尔定律,碳基纳米电子学如石墨烯出现了。本研究的目的是研究具有正方形几何结构的石墨烯纳米缩窄(GNC)的输运行为。对其透射谱和电流-电压特性进行了仿真。从仿真结果可以看出,当GNC维数发生变化时,在饱和区出现的地方,I-V趋势发生了显著变化。收缩的长度对输运性质有相当大的影响。该结果为更好地理解GNC的输运性质提供了物理见解。
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引用次数: 0
Real time motorcycle image detections on field programmable gate array 基于现场可编程门阵列的摩托车实时图像检测
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354961
M. Nong, R. Osman, Juraina Md Yusof, R. Sidek
Development of real time motorcycle image detections on field programmable architecture is presented in this paper. This paper describes a process to generate a bounding box and analyzes the system performance in tracking the image and hardware utilize. This paper also discussed on image processing algorithm used and embedded techniques involved. The performance evaluation results also indicated and shows that development design meet the requirement.
介绍了基于现场可编程架构的摩托车实时图像检测技术的发展。本文描述了一个生成边界框的过程,分析了系统在图像跟踪和硬件利用方面的性能。本文还讨论了所使用的图像处理算法和所涉及的嵌入式技术。性能评价结果表明,开发设计满足要求。
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引用次数: 1
Wet chemical cleaning effect on the formation of ultrathin interfacial layer between Germanium (Ge) and high-k dielectric 湿式化学清洗对锗(Ge)与高k介电介质之间超薄界面层形成的影响
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355015
S. K. Sahari, Nik Amni Fathi Nik Zaini Fathi, N. M. Sutan, R. Sapawi, A. A. Hamzah, B. Majlis
This paper investigates and discusses the effect of wet chemical cleaning; Hydrochloric Acid (HCl) and Hydrofluoric Acid (HF) to the growth of interfacial layer between high-k material (Al2O3) and Ge (100) surface. Characterization and morphology techniques using Field Emission Scanning Electron Microscope (FESEM) was carried out to determine the thickness of interfacial layer between Al2O3 and Ge (100) surface. Results of this study showed that an HF treatment gives a rougher surface of Al2O3 than HCl treatment. Both wet chemical cleaning resulted with step and terrace trend of Al2O3 and interfacial layer. This may be due to initial Ge surface just after HF cleaning is rougher than the initial Ge surface after HCl cleaning.
本文对湿法化学清洗的效果进行了调查和探讨;盐酸(HCl)和氢氟酸(HF)对高k材料(Al2O3)与Ge(100)表面之间界面层的生长有影响。利用场发射扫描电镜(FESEM)进行表征和形貌技术,确定了Al2O3与Ge(100)表面之间的界面层厚度。研究结果表明,HF处理的Al2O3表面比HCl处理的更粗糙。湿法化学清洗均导致Al2O3和界面层呈阶梯状和阶梯状。这可能是由于HF清洗后的初始Ge表面比HCl清洗后的初始Ge表面粗糙。
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引用次数: 6
Characterization of ROFF/RON ratio of fluidic based memristor sensor for pH detection 流体基忆阻器pH检测ROFF/RON比的表征
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354956
N. Hadis, Asrulnizam Abd Manaf, S. H. Herman
This paper reports a new design for a memristor with an embedded channel to study the effect of liquids on ROFF/RON ratio. There were three types of liquid selected to represent all pH groups comprise of acidity, neutrality, and alkalinity. The liquids were added to the channel and the ROFF/RON ratio was calculated based on the I-V characteristics. The obtained ROFF/RON ratios showed a direct proportional relationship between ROFF/RON ratio and the pH value indicating the potential of this embedded channel memristor to be used as the most flexible ROFF/RON ratio memristor. The low ROFF/RON ratio of normal memristor at low voltage can be improved by adding alkaline liquid to the channel. The structure of the proposed memristor device is believed to be the simplest structure among the other similar sensors developed by other researchers.
为研究液体对ROFF/RON比的影响,设计了一种嵌入式通道记忆电阻器。有三种类型的液体被选择来代表所有的pH值组,包括酸性、中性和碱性。将液体加入到通道中,并根据I-V特性计算ROFF/RON比。得到的ROFF/RON比与pH值成正比关系,表明该嵌入式沟道忆阻器具有作为最灵活的ROFF/RON比忆阻器的潜力。通过在通道中加入碱性液体,可以改善普通忆阻器在低电压下的低ROFF/RON比。所提出的忆阻器器件的结构被认为是其他研究人员开发的其他类似传感器中结构最简单的。
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引用次数: 1
期刊
2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)
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