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2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)最新文献

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Development of a read-out circuitry for piezoresistive microcantilever electrical properties measurement 压阻式微悬臂电性能测量读出电路的研制
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354911
A. Anuar, S. Johari, Y. Wahab, M. Zainol, H. Fazmir, M. Mazalan, M. Arshad
This paper reports on the development of a piezoresistive microcantilever sensor read-out circuitry to detect acceleration, biological or chemical activities. Laser micromachining technique is used in fabricating the piezoresistive microcantilever sensor as well as assisting in the cantilever beam and piezoresistor shape formation. In order to test the sensor performance, a Wheatstone bridge which acts as resistive sensor is integrated with three other resistors and the fabricated sensor. A set of amplifier circuit consisting of INA128 is developed to amplify and extract the electrical signal component of the bridge circuit. The resistance and output voltage characteristic of the Wheatstone bridge is investigated, where the percentages difference between the calculated and measured output voltage is very low and similar to each other. The sensor response to vibration is also studied using an electro-dynamic vibration system. The system is designed specifically to enable the accessibility of a small resistivity change due to outside reaction.
本文报道了一种用于检测加速度、生物或化学活动的压阻式微悬臂传感器读出电路的开发。激光微加工技术用于压阻式微悬臂传感器的制作,并辅助悬臂梁和压阻器的成形。为了测试传感器的性能,将惠斯通电桥作为电阻传感器与其他三个电阻和制造的传感器集成在一起。设计了一套由INA128构成的放大电路,对桥接电路的电信号分量进行放大和提取。研究了惠斯通电桥的电阻和输出电压特性,其中计算输出电压和测量输出电压之间的百分比差异非常小,彼此相似。利用电动力振动系统研究了传感器对振动的响应。该系统是专门设计的,可以实现由外部反应引起的小电阻率变化。
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引用次数: 3
Verification of the thin film metal layer thickness by energy dispersive X-ray 用能量色散x射线验证薄膜金属层厚度
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355004
Lai Chin Yung, C. C. Fei
Leadframe fabrication process normally involves additional thin film metal layer plating on the bulk copper substrate surface for wire bond purpose. The recent commonly adopted plating materials are silver, tin, and copper flake. To assess the thickness quality, the conventional X-section methods involving grinding and polishing process are utilized. However, the process may lead to inaccurate results, which stems from the occurrence of sample preparation artifact, such as smearing effect attributable to the grinding or polishing process. Thus, alternative advanced methods are developed for assessing the thin film metal layer thickness, such as Focus Ion Beam (FIB), SIMS profiling or XPS, readily available in worldwide market. However, these alternative measurement services are very costly and time consuming per sample measure. To cater the cost and long sample preparation time due to the abovementioned advanced methods, an Energy Dispersive X-ray (EDX) can be applied. In this study, the newly invented methodology breakthrough had been validated by applying EDX for the first time on known bulk elemental analysis purpose. EDX feature is not only useful for elemental analysis but also applicable for thin film-metal layer thickness measurement and bulk material densification determination. A promising result was observed from the detailed experiment work through applying EDX in this evaluation.
引线框架的制造过程通常涉及在大块铜基板表面镀上额外的薄膜金属层,用于导线粘合目的。目前普遍采用的电镀材料有银、锡、铜片等。为了评估厚度质量,采用了传统的x -切片方法,包括研磨和抛光过程。然而,该过程可能导致不准确的结果,这源于样品制备伪影的发生,例如由于研磨或抛光过程造成的涂抹效应。因此,用于评估薄膜金属层厚度的替代先进方法被开发出来,例如焦点离子束(FIB), SIMS分析或XPS,在全球市场上都很容易获得。然而,这些可选的测量服务对于每个样本测量都非常昂贵和耗时。由于上述先进方法的成本和样品制备时间长,可以使用能量色散x射线(EDX)。在本研究中,首次将EDX应用于已知的体元素分析目的,验证了新发明的方法突破。EDX特征不仅可用于元素分析,还可用于薄膜-金属层厚度测量和块状材料密度测定。通过详细的实验工作,将EDX应用于该评价中,得到了令人满意的结果。
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引用次数: 0
Simulation of an hybrid blood cells micro-separator 混合血细胞微型分离器的模拟
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354955
Foughalia Aissa, R. A. Rahim, A. Nordin, S. Ibrahim
The paper presents numerical analysis in three-dimensional (3D) of a hybrid micro-separator that uses magnetophoresis (MAP) and hydrodynamic forces for blood cells separation. The separation between red blood cells (RBC) and white blood cells (WBC) is done by manipulating the differences of their physical and magnetic susceptibilities. The MAP force is induced from ferromagnetic line fabricated on a glass slide while the hydrodynamic force is obtained by a `U' shape microfluidic channel. The analysis was conducted using finite element software, COMSOL Multiphysics®. The particles trajectories, which represent the actual blood cells' movements on the micro-separator, were profiled and show successful separation between RBCs and WBCs by using the MAP and hydrodynamic forces. This study also provides insights of challenges associated with blood separation towards the realization of better diagnostic devices.
本文对一种利用磁泳术和水动力分离血液细胞的混合式微型分离器进行了三维数值分析。红细胞(RBC)和白细胞(WBC)之间的分离是通过操纵它们的物理和磁敏感性的差异来完成的。MAP力由构筑在玻璃载玻片上的铁磁线产生,而流体动力则由“U”型微流控通道获得。分析使用有限元软件COMSOL Multiphysics®进行。这些粒子的运动轨迹代表了血细胞在微分离器上的实际运动,并通过MAP和水动力显示了红细胞和白细胞之间的成功分离。这项研究也为实现更好的诊断设备提供了与血液分离相关的挑战的见解。
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引用次数: 2
Numerical simulation of one dimensional (1D) photonic crystal multiple cavities based on silicon on insulator (SOI) 基于绝缘体硅(SOI)的一维光子晶体多腔的数值模拟
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7355022
J. Husna, M. A. Mohamed, J. Sampe, A. M. Md Zain
We have theoretically demonstrated the variation of geometrical parameters for the cavities design of one dimensional (1D) photonic crystal nanocavity based on silicon on insulator (SOI) waveguides. To evaluate the cavity numerically, we have successfully computed it using the 2D finite difference time domain (FDTD) approach. We have varied the geometrical hole size, lattice and number of cavity. We have also varied the length of the cavity parameter, from 530 to 675 nm and for lattice constant from 345 to 410 nm. The optimized quality factors of approximately 4300 at 1617.9 nm resonance wavelengths were obtained and the free spectral range (FSR) was calculated to be in the range of 10 to 60 nm.
我们从理论上证明了基于绝缘体上硅(SOI)波导的一维光子晶体纳米腔设计中几何参数的变化。为了对空腔进行数值评价,我们成功地利用二维时域有限差分(FDTD)方法对其进行了计算。我们改变了几何孔的大小、晶格和空腔的数量。我们还改变了空腔参数的长度,从530到675 nm,晶格常数从345到410 nm。在1617.9 nm共振波长处,优化后的质量因子约为4300,自由光谱范围(FSR)在10 ~ 60 nm之间。
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引用次数: 5
A 3-stage 40 GHz CMOS power amplifier driver for radio-over-fiber technology 用于光纤无线电技术的3级40 GHz CMOS功率放大器驱动器
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354978
N. Farid, S. Hassan, R. Sanusi, A. Rahim
A 40 GHz power amplifier (PA) driver for the remote antenna unit (RAU) transceiver of a mm-wave radio-over-fiber (RoF) system is presented in this paper. Mm-wave RAU is proposed as a complementary technology to fiber-to-the-home to minimize costs and to increase bandwidth. In order for RoF to be feasible, the cost of the RAU must be minimized through low-cost technology such as CMOS. The PA driver is designed using a 0.13μm RF CMOS process. The architecture used is a 3-stage, double-cascode amplifier. It has input and output reflection coefficients that are better than -10 dB over a bandwidth of 7 GHz. Maximum gain is 33.6 dB and output P1dB is 7.6 dBm. This is the first reported use of a three-stage, double-cascode, 130nm CMOS amplifier for the implementation of a 40 GHz radio-over-fiber system.
介绍了一种用于毫米波光纤无线电(RoF)系统中远程天线单元(RAU)收发器的40ghz功率放大器驱动器。毫米波RAU被提议作为光纤到户的补充技术,以最大限度地降低成本并增加带宽。为了使RoF可行,必须通过CMOS等低成本技术将RAU的成本降至最低。PA驱动器采用0.13μm RF CMOS工艺设计。使用的架构是一个3级,双级联码放大器。在7 GHz带宽下,其输入和输出反射系数均优于-10 dB。最大增益为33.6 dB,输出P1dB为7.6 dBm。这是首次报道使用三级、双级联、130nm CMOS放大器来实现40ghz无线光纤系统。
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引用次数: 0
Modeling and simulation of polysilicon piezoresistors in a CMOS-MEMS resonator for mass detection 用于质量检测的CMOS-MEMS谐振器中多晶硅压敏电阻的建模与仿真
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354957
Mawahib Gafare, M. H. M. Md Khir, A. Rabih, A. Ahmed, J. Dennis
This paper reports modeling and simulation of polysilicon piezoresistors as sensing mechanism using commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The CMOS-MEMS resonator is designed to detect change in mass. The designed piezoresistors are composed of two types; longitudinal and transverse. CMOS polysilicon thin film is used as the piezoresistive sensing material. The finite element analysis (FEA) software CoventorWare is adopted to simulate the piezoresistors and hence, compare its values with the modeled one. When actuation voltage is applied to the piezoresistors, it generates a change in resistance which is detected by the change in current. The percentage difference between simulated stressed and unstressed current is found to be 0.28 % and 0.47 % while the difference in the resistance between the model and simulation is 1.96 % and 4.54 % for the transverse and longitudinal piezoresistors, respectively.
本文报道了利用商用0.35 μm互补金属氧化物半导体(CMOS)工艺对多晶硅压敏电阻作为传感机构的建模和仿真。CMOS-MEMS谐振器设计用于检测质量变化。所设计的压敏电阻由两种类型组成;纵向和横向。采用CMOS多晶硅薄膜作为压阻式传感材料。采用有限元分析软件CoventorWare对压敏电阻进行仿真,并与模型值进行比较。当驱动电压施加到压敏电阻上时,它会产生电阻的变化,通过电流的变化来检测。模拟应力电流和非应力电流的差值分别为0.28%和0.47%,而横向和纵向压敏电阻的模型和仿真值的差值分别为1.96%和4.54%。
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引用次数: 1
A low power multiplexer based pass transistor logic full adder 基于通型晶体管逻辑全加法器的低功耗多路复用器
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354994
N. Kamsani, Veeraiyah Thangasamy, S. Hashim, Z. Yusoff, M. Bukhori, M. Hamidon
In this paper, a high-speed low-power full adder design using multiplexer based pass transistor logic featuring full-swing output is proposed. The adder is designed and simulated using the industry standard 130 nm CMOS technology, at a supply voltage of 1.2 V. The obtained Power Delay Product (PDP) of its critical path is 29×10-18 J and its power consumption is 2.01μW. The proposed full adder is also capable to function at lower supply voltages of 0.4 V and 0.8 V without significant performance degradation. The proposed adder when cascaded in a 4-bit ripple carry adder configuration, its power, delay and PDP performance are better than the other adders making it suitable for larger arithmetic circuits.
本文提出了一种高速低功耗全加法器的设计,该加法器采用基于多路复用器的通型晶体管逻辑,具有全摆幅输出。该加法器的设计和仿真采用了行业标准的130纳米CMOS技术,电源电压为1.2 V。得到其关键路径的PDP (Power Delay Product)为29×10-18 J,功耗为2.01μW。所提出的全加法器也能够在0.4 V和0.8 V的较低电源电压下工作,而不会显着降低性能。该加法器在级联4位纹波进位加法器配置时,其功率、延迟和PDP性能优于其他加法器,适用于较大的算术电路。
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引用次数: 7
CMOS-MEMS thermoelectric generator for low power medical devices 用于低功耗医疗设备的CMOS-MEMS热电发电机
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354965
Z. H. A. Rahman, M. H. M. Md Khir, Z. A. Burhanudin
This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that result in achievement of larger temperature difference between two junctions. First, a thicker dielectric layer is designed between two metal layers. Second, trenches isolation is introduced to isolate the hot and cold junction area. Third, thermal insulator and heat sink layer are deposited on the top surface of the TEG at the hot and cold junction area, respectively. Based on the simulation results of these three abovementioned features, a device with size of 25 mm2 consisting of 1712 thermocouples with 5 K temperature difference between two sides, is capable of producing output voltage and power of 3.294 V and 0.925 μW, respectively. Voltage factor is 2.635 Vcm-2K-1 and power factor is 0.148 μWcm-2K-2.
本文介绍了一种新的CMOS-MEMS热电发生器(TEG)的设计和仿真,该热电发生器能够将热能转化为电能,用于低功耗医疗设备。TEG设计具有三个独特的功能,可确保最佳的传热,从而实现两个结之间的较大温差。首先,在两个金属层之间设计一个较厚的介电层。其次,引入沟槽隔离,隔离冷热接点区域。第三,在TEG的上表面热端和冷端区域分别沉积隔热层和散热器层。基于上述三个特性的仿真结果,一个由1712个热电偶组成、两侧温差为5 K、尺寸为25 mm2的器件可以分别产生3.294 V和0.925 μW的输出电压和功率。电压因数为2.635 μ wcm - 2k -1,功率因数为0.148 μWcm-2K-2。
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引用次数: 3
Modelling of microfluidics network using electric circuits 基于电路的微流体网络建模
Pub Date : 2015-12-17 DOI: 10.1109/RSM.2015.7354954
N. Zaidon, A. Nordin, A. Ismail
This paper presents microfluidic network analysis using electric circuit methods by modifying the length of the channel segments that represent hydraulic resistance. It is crucial to precisely predicts flow and pressure in the channel by an accurate estimation of the hydraulic resistance of each segment, as microfluidics network become more complex and challenging. Furthermore, manipulation of channel length and size can be applied to design concentration gradient that based on repeated splitting, mixing and recombination fluid flow process, thereby producing a desired concentration profile. By using Hagen-Poiseuille's law-Ohm's law analogy, a batch of simulation 3D-microfluidic geometries was done using FLUENT while PSpice was used to validate the correlations of flow rate to current and hydraulic resistance to electrical resistance. This is done by characterizing hydraulic resistance of microchannels with different length to make-controlled volumetric mixing ratios at each branch. Different velocity magnitude contours and pressure profiles obtained from the channel length combinations agree well this analogy.
本文提出了微流控网络分析使用电路的方法,通过修改长度的通道段,表示液压阻力。随着微流控网络的日益复杂和具有挑战性,通过准确估计各段的水力阻力来准确预测通道内的流量和压力至关重要。此外,可以通过控制通道长度和大小来设计基于反复分裂、混合和重组流体流动过程的浓度梯度,从而产生所需的浓度分布。采用Hagen-Poiseuille’s law- ohm’s law类比,利用FLUENT进行了一批三维微流控几何仿真,并利用PSpice验证了流量与电流、水力阻力与电阻的相关性。这是通过表征不同长度微通道的水力阻力来实现的,以控制每个分支的体积混合比。从通道长度组合中得到的不同速度大小等值线和压力分布都很好地符合这一类比。
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引用次数: 3
Effect of zeta potential variation in single phase flow characteristics of a rectangular nanochannel zeta电位变化对矩形纳米通道单相流动特性的影响
Pub Date : 2015-12-11 DOI: 10.1109/RSM.2015.7354972
T. Yaakub, J. Yunas, B. Majlis
This report presented a 2D model for electroosmotic (EOF) aqueous fluid flow analysis along nanochannels connecting two reservoirs. The model uses the Navier-Stokes equations with electroosmotic velocity boundary condition at nanochannel wall. Zeta potential of the wall surface is varied and the influences on the velocity profile are observed for various channel height. Shear stress rate near the nanochannel entrance of different width has also been investigated. The magnitude velocity lies on the magnitude of zeta potential or the surface charge of the wall. The increased charged on the solid wall, also increased the velocity flow. The decreased height of channel helps to increase the flow velocity along it. The maximum and minimum flow velocities are recorded at channel height of 50nm and 250nm respectively with 35% difference. At all simulated channel height, the flow at the entrance of nanochannel is increased and formed a peak velocity but it will decrease and become uniform at the position far from the channel wall. The shear stress at the reservoir-nanochannel edge is increased with the decreased of channel height due to low aspect ratio of reservoir-channel dimension.
本文提出了电渗透(EOF)水流体沿连接两个储层的纳米通道流动的二维模型。该模型采用具有纳米通道壁面电渗透速度边界条件的Navier-Stokes方程。壁面Zeta电位变化,并观察到不同通道高度对速度分布的影响。研究了不同宽度纳米通道入口附近的剪切应力速率。速度的大小取决于ζ电位的大小或壁面电荷的大小。固体壁面电荷的增加,也增加了流动速度。通道高度的降低有助于提高沿通道的流速。在通道高度为50nm和250nm处记录最大流速和最小流速,两者相差35%。在所有模拟通道高度下,纳米通道入口的流速都有所增加并形成峰值流速,但在远离通道壁的位置流速会减小并趋于均匀。由于储层-通道尺寸宽高比较低,储层-纳米通道边缘剪切应力随通道高度的减小而增大。
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引用次数: 0
期刊
2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)
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