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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)最新文献

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Estimating the Surface Adhesion Force Using Pull-in/-out Hysteresis in Comb-Drive Devices 利用梳状传动装置的拉入/拉出迟滞估计表面附着力
J. Mouro, S. Rana, J. Reynolds, Harold M. H. Chong, D. Pamunuwa
Surface adhesion forces play a critical role in the operation of NEM relays, but characterization data for micro/nanoscale contact areas of relevant materials are scarce. A novel technique to estimate the adhesion force between two contacting surfaces is presented. This method uses the hysteresis in the pull-in/-out voltages measured experimentally in electrostatically actuated comb-drive and circular NEM devices with two contacting electrodes. In these geometries the electrostatic actuation force is independent of the device displacement and the surface adhesion forces can be analytically calculated from the force balance describing the pull-out event. Finite-element ANSYS simulations of the electromechanical behavior of the devices support the analytical approach. Adhesion forces of 0.081 µN and 0.167 µN were calculated for Au-Au and Ti-Ti contacts with areas of 750 nm × 300 nm and 100 nm × 300 nm, respectively.
表面附着力在NEM继电器的工作中起着至关重要的作用,但相关材料的微/纳米尺度接触面积的表征数据很少。提出了一种估算接触面间附着力的新方法。该方法利用了在静电驱动的梳状驱动装置和带有两个接触电极的圆形NEM装置中实验测量的拉进/拉出电压的滞后。在这些几何形状中,静电致动力与器件位移无关,表面附着力可以从描述拔出事件的力平衡中解析计算出来。设备机电行为的有限元ANSYS模拟支持分析方法。在750 nm × 300 nm和100 nm × 300 nm范围内,Au-Au和Ti-Ti的粘附力分别为0.081µN和0.167µN。
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引用次数: 1
Film Bulk Acoustic Wave Resonator for Trace Chemical Warfare Agents Simulants Detection in Micro Chromatography 微色谱中痕量化学战剂模拟物检测的薄膜体声波谐振器
Jizhou Hu, H. Qu, Wenlan Guo, Ye Chang, W. Pang, X. Duan
This paper reported the polymer coated film bulk acoustic resonators (FBAR) as a sensitive detector in micro chromatography for the detection of trace chemical warfare agents (CWA) simulants. The FBAR sensor was enclosed in a microfluidic channel and then coupled with microfabricated separation column. The subsequent chromatographic analysis successfully demonstrated the detection of parts per billion (ppb) concentrations of chemical warfare agents (CWAs) simulants in a five components gas mixture. This work represented an important step toward the realization of FBAR based handheld micro chromatography for CWA detection in the field.
本文报道了聚合物包覆膜体声谐振器(FBAR)作为微色谱检测痕量化学战剂(CWA)模拟物的灵敏探测器。将FBAR传感器封装在微流控通道内,并与微制造的分离柱耦合。随后的色谱分析成功地证明了在五组分气体混合物中检测到十亿分之一(ppb)浓度的化学战剂(CWAs)模拟物。本工作是实现基于FBAR手持式微色谱法检测CWA的重要一步。
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引用次数: 3
Shape Memory Foil-Based Active Micro Damping for Portable Applications 基于形状记忆箔的便携式有源微阻尼
K. Jacob, S. Ahmadi, F. Wendler, S. Miyazaki, M. Gueltig, M. Kohl
Novel damping devices are presented and characterized that make use of energy dissipation due to the one-way shape memory effect in micromachined shape memory alloy (SMA) foil actuators of 30 µm thickness and lateral dimensions a few mm. The design of SMA foil actuators consists of free-standing planar suspensions with bridge, spiral and folded beam design for load control in-plane and out-of-plane. In contrast to SMA wire-based solutions, this new approach is compatible to MEMS batch fabrication technology. Under pulsed loading, a damping capacity of up to 0.92 is achieved, which compares favorably with the best viscoelastic damping concepts.
提出了一种新颖的阻尼装置,利用30µm厚度、几mm横向尺寸的微加工形状记忆合金(SMA)箔致动器的单向形状记忆效应所产生的能量耗散。SMA箔致动器的设计包括独立式平面悬架、桥式螺旋梁和折叠梁设计,用于面内和面外的负载控制。与基于SMA线的解决方案相比,这种新方法与MEMS批量制造技术兼容。在脉冲载荷下,阻尼能力可达0.92,与最佳粘弹性阻尼概念相比具有优势。
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引用次数: 2
Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips 超薄硅片真空封装Mems谐振器的大应变测量
L. Belsito, M. Ferri, A. Roncaglia
Silicon resonators fabricated with wafer-level vacuum packaging on ultrathin silicon chips (overall thickness around 60 μm) are utilized for strain measurements on steel slabs. The thinned chips are glued on steel using M-bond 610 and Loctite EA 9461 adhesives and the sensor response during bending tests performed while operating the resonators in closed loop is measured, evaluating possible non-ideal effects such as creep and hysteresis. In the measurements, the results obtained on the ultrathin chips are compared with those achieved on sensors manufactured on the native 500 μm thick silicon substrates. The results obtained show an astonishing improvement in the measurements realized with the thinned chips, which show creep levels below 0.1%, no appreciable hysteresis phenomena and strain measurement range extended beyond 850 με, indicating that chip thinning can be a viable way to obtain high-quality strain measurements on a large range by vacuum-packaged silicon MEMS resonators
在超薄硅片(总厚度约60 μm)上采用晶片级真空封装制作的硅谐振器用于钢板的应变测量。使用M-bond 610和乐泰EA 9461粘合剂将薄芯片粘在钢上,并测量传感器在闭环操作谐振器时进行弯曲测试时的响应,评估可能的非理想影响,如蠕变和滞后。在测量中,将在超薄芯片上获得的结果与在500 μm厚硅衬底上制造的传感器上获得的结果进行了比较。结果表明,薄化芯片的蠕变水平低于0.1%,没有明显的滞后现象,应变测量范围超过850 με,这表明薄化芯片可以在大范围内获得高质量的真空封装硅MEMS谐振器应变测量
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引用次数: 0
Study on the Influence of Ferroelectric Materials on the Output Performance of Triboelectric Nanogenerators 铁电材料对摩擦纳米发电机输出性能影响的研究
Xin Chen, Lingxiao Gao, Junfei Chen, Mengke Qi, Dongxiao Li, S. Zeng, X. Mu
Triboelectric nanogenerators (TENGs) have demonstrated as an effective way to harvest mechanical energy to drive small electronics. The density of triboelectric charges generated on contact surfaces between two distinct materials is a critical factor for dictating the output power. Herein, we demonstrate the unusual ability of ferroelectric materials to enhance the output performance of the triboelectric nanogenerators (TENG) by taking advantage of the dipole moment in the documents. The output voltage ranged from 100 V to 215 V under a constant contact force of 40 N. This work not only provides a new method of enhancing output power of TENGs but also offers an insight into charge transfer in contact electrification by investigating dipole-moment-induced effects on the electrical output of TENGs.
摩擦电纳米发电机(TENGs)已经被证明是一种有效的获取机械能来驱动小型电子设备的方法。在两种不同材料之间的接触面上产生的摩擦电荷的密度是决定输出功率的关键因素。本文中,我们展示了铁电材料利用文献中的偶极矩来提高摩擦电纳米发电机(TENG)输出性能的非凡能力。在恒定的接触力为40n的条件下,输出电压范围为100v ~ 215v。这项工作不仅为提高TENGs的输出功率提供了一种新的方法,而且通过研究偶极矩对TENGs电输出的影响,为接触通电过程中的电荷转移提供了新的思路。
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引用次数: 1
Self-Powered Transparent Stretchable 3D Motion Sensor 自供电透明可拉伸3D运动传感器
Hang Guo, Xuexian Chen, Liming Miao, Haobin Wang, Ji Wan, Haixia Zhang
This paper reports a novel self-powered three-dimension motion sensor capable of independently detecting contact trajectory, pressure and velocity based on triboelectrification and electrostatic induction synchronously. Motion trajectories in the full plane can be identified by using a unique net-cross electrodes configuration design. In addition, the patterned silver nanowires (AgNWs) electrodes are sprayed onto the polydimethylsilane (PDMS) substrate to achieve good transparency and stretchability. By attaching the 3D motion sensor on human skin or robot surface directly, the 3D motion information of the object could be acquired including pressure, velocity and trajectory. The self-powered 3D motion sensor is a promising candidate in terms of human-computer interaction, anti-counterfeiting signatures, etc.
本文报道了一种基于摩擦电感应和静电感应的三维自供电运动传感器,该传感器能够同步独立检测接触轨迹、压力和速度。在整个平面上的运动轨迹可以通过使用独特的网络交叉电极配置设计来识别。此外,图案化的银纳米线(AgNWs)电极被喷涂到聚二甲基硅烷(PDMS)衬底上,以获得良好的透明度和拉伸性。通过将三维运动传感器直接附着在人体皮肤或机器人表面,可以获取物体的三维运动信息,包括压力、速度和轨迹。自供电的三维运动传感器在人机交互、防伪签名等方面具有广阔的应用前景。
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引用次数: 2
Digital DNA Sequence Profiling of Rare Epigenetic Cancer Biomarkers in A Highly Parallelized Microfluidic Platform 高度并行微流控平台中罕见表观遗传癌症生物标志物的数字DNA序列分析
C. O’Keefe, Sixuan Li, Tza-Huei Wang
We present a microfluidic platform for molecule-by-molecule detection of heterogeneous epigenetic patterns of rare tumor-derived DNA by highly parallelized digital melt assessment. We introduce a multilayer geometric strategy to capture single molecules in a pico-array at high efficiency. We demonstrate sensitive detection and comprehensive profiling of rare heterogeneously methylated DNA of a classic tumor suppressor gene, p14ARF, at frequencies as low as 0.0001% methylated/unmethylated.
我们提出了一个微流控平台,通过高度并行的数字熔化评估,对罕见肿瘤来源DNA的异质表观遗传模式进行分子-分子检测。我们介绍了一种多层几何策略,可以高效地捕获微阵列中的单分子。我们展示了对一种经典肿瘤抑制基因p14ARF罕见的异质性甲基化DNA的敏感检测和全面分析,甲基化/非甲基化的频率低至0.0001%。
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引用次数: 0
Super High Frequency Lateral-Field-Excited Aluminum Nitride Cross-Sectional Lamé Mode Resonators 超高频侧向场激发氮化铝横截面lam<s:1>模谐振器
Guofeng Chen, Flavius V. Pop, M. Rinaldi
This paper reports on the first demonstration of super high frequency (SHF) lateral-field-excited (LFE) aluminum nitride (AlN) cross-sectional Lamé mode resonators (CLMRs). A simple 2-mask process was used to fabricate LFE AlN CLMRs operating at 4.2 GHz with an electromechanical-coupling coefficient kt2 of 1.2 %, providing > 20 MHz filter bandwidth. Anchor loss is reduced to provide 2X higher quality factor (Qm > 1150) implemented with a small termination impedance of 160 Ω. Such important features render AlN LFE CLMRs promising candidates for low-cost yet high-performance wireless communication technologies, such as LTE‐Advanced contiguous carrier aggregation which requires up to 20 MHz bandwidth.
本文报道了超高频(SHF)横向场激发(LFE)氮化铝(AlN)横截面lam模式谐振器(CLMRs)的首次演示。采用简单的双掩模工艺制备了工作频率为4.2 GHz的LFE AlN CLMRs,其机电耦合系数kt2为1.2%,滤波器带宽> 20 MHz。锚损减少,提供了2倍高的质量因子(Qm > 1150),实现了160的小终端阻抗Ω。这些重要的特性使得AlN LFE CLMRs有希望成为低成本高性能无线通信技术的候选者,例如需要高达20mhz带宽的LTE - Advanced连续载波聚合。
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引用次数: 8
Acoustic Micro-Opto-Mechanical Transducers for Crack Width Measurement on Concrete Structures from Aerial Robots 基于航空机器人的混凝土结构裂缝宽度测量声学微光机械传感器
D. Marini, L. Belsito, L. Masini, M. A. Trujillo, Ángel L. Petrus, D. Martínez, Francisco Gamero, J. M. Barrientos, Elena Blanco, A. Roncaglia
A novel Micro-Opto-Mechanical acoustic sensor that can be utilized to measure the width of surface opening cracks in concrete structures from aerial robots is presented. The sensor is used in combination with a piezoelectric emitter operating at 54 kHz in a crack width measurement procedure that provides a resolution around 0.2 mm. The method is tolerant to pressure variations during contact with concrete, which may easily occur when operating the sensors from aerial robots.
提出了一种用于空中机器人测量混凝土结构表面开口裂缝宽度的新型微光机械声传感器。该传感器与工作频率为54 kHz的压电发射极结合使用,在裂缝宽度测量过程中提供约0.2 mm的分辨率。该方法在与混凝土接触过程中可以承受压力变化,这在操作空中机器人的传感器时很容易发生。
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引用次数: 2
Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion 用高分辨率衍射x射线跟踪方法观察离子通道门控运动的微制溶液室
Ikkei Yamauchi, Tomoki Tabuchi, Y. Hirai, M. Iwamoto, T. Tsuchiya, H. Shimizu, O. Tabata
The Diffracted X-ray Tracking (DXT) method enables capturing the motion of ion-channel proteins upon gating by tracking a diffraction spot from a gold nanocrystal. However, high background noise from the conventional observation chamber prevented the clear detection of diffraction spots. In order to reduce the background noise, we propose a novel solution chamber comprising two microfabricated silicon nitride (SiN) membranes. A reduction in background noise as well as trajectories of diffraction spots were observed with this chamber. Furthermore, the gating dynamics of KcsA potassium ion channel occurring in response to acidic pH was successfully measured.
衍射x射线跟踪(DXT)方法可以通过跟踪金纳米晶体的衍射点来捕获离子通道蛋白在门控时的运动。然而,传统观测室的高背景噪声阻碍了衍射斑点的清晰检测。为了降低背景噪声,我们提出了一种由两个微加工氮化硅(SiN)膜组成的新型溶液室。背景噪声的减少以及衍射点的轨迹被观察到与这个腔。此外,还成功地测量了KcsA钾离子通道在酸性pH条件下的门控动力学。
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引用次数: 0
期刊
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
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