Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956821
M. Tsai, Chuan Hsuan Lin, Chi-Hsien Huang, Wen Yen Woon, Chih-Ting Lin
In this work, we modified the single layer graphene by nitrogen modification through the low-damage plasma treatment (LD-plasma). The electronic transport characteristics for different modified parameters under aqueous environment were performed by Agilent semiconductor analysis B1500A. We choose potassium chloride (KCl) as our electrolyte. Based on the experimental results, the Dirac point is shifted linearly with the concentration of KCl. At the same time, the experimental results also show that the behaviors of 1-min and 3-min modifications are quite different between each other because of modification to graphene structure. As a consequence, this work shows an opportunity of being an ionic sensor with the developed nitrogen-doped graphene.
{"title":"Ionic concentration sensing via nitrogen modified graphene through low-damage plasma treatment","authors":"M. Tsai, Chuan Hsuan Lin, Chi-Hsien Huang, Wen Yen Woon, Chih-Ting Lin","doi":"10.1109/SENSORS43011.2019.8956821","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956821","url":null,"abstract":"In this work, we modified the single layer graphene by nitrogen modification through the low-damage plasma treatment (LD-plasma). The electronic transport characteristics for different modified parameters under aqueous environment were performed by Agilent semiconductor analysis B1500A. We choose potassium chloride (KCl) as our electrolyte. Based on the experimental results, the Dirac point is shifted linearly with the concentration of KCl. At the same time, the experimental results also show that the behaviors of 1-min and 3-min modifications are quite different between each other because of modification to graphene structure. As a consequence, this work shows an opportunity of being an ionic sensor with the developed nitrogen-doped graphene.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"66 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90255863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956530
Alasatri Suresh, Ko Lok Mak, J. Benserhir, Joshua E-Y Lee, L. Rufer
This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.
{"title":"Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process","authors":"Alasatri Suresh, Ko Lok Mak, J. Benserhir, Joshua E-Y Lee, L. Rufer","doi":"10.1109/SENSORS43011.2019.8956530","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956530","url":null,"abstract":"This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"86 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90328889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956710
D. S. Arya, Sushil Kumar, Pushpapraj Singh
This paper reports a mechanism of introducing bistability in the cantilever switch for the microelectromechanical system based non-volatile memory (MEMS-NVM). The bistability in cantilever switch is a fine play of adhesion and restoring force. The innovation lies in the adopted method to control the switch contact adhesion force. The prototype MEM-NVM imbeds piezoelectric slabs, which on biasing alters the surface roughness and thus the adhesion force. The prototype bistable cantilever switch is fabricated and tested for its bistability and memory applications. The obtained SET/RESET voltages, to toggle in two logic states is 10 volts at ~250 °C. The memory SET/RESET time is ~1µs. The idea is not limited to non-volatile memories but can be extended to any of the adhesion failed MEMS devices.
{"title":"A Cantilever Type Bistable MEM Nonvolatile Memory with Piezoelectric Deactuation for High-Temperature Applications","authors":"D. S. Arya, Sushil Kumar, Pushpapraj Singh","doi":"10.1109/SENSORS43011.2019.8956710","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956710","url":null,"abstract":"This paper reports a mechanism of introducing bistability in the cantilever switch for the microelectromechanical system based non-volatile memory (MEMS-NVM). The bistability in cantilever switch is a fine play of adhesion and restoring force. The innovation lies in the adopted method to control the switch contact adhesion force. The prototype MEM-NVM imbeds piezoelectric slabs, which on biasing alters the surface roughness and thus the adhesion force. The prototype bistable cantilever switch is fabricated and tested for its bistability and memory applications. The obtained SET/RESET voltages, to toggle in two logic states is 10 volts at ~250 °C. The memory SET/RESET time is ~1µs. The idea is not limited to non-volatile memories but can be extended to any of the adhesion failed MEMS devices.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"68 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75039964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956878
Arthur Cruz de Araujo, A. Etemad
This paper focuses on prediction if vehicle travel time. An established open dataset of taxi trips in New York City is used. We first perform statistical analysis on the data in order to determine the informative features that can be used for the problem at hand. Successive to detailed analysis of the data and features, we develop a deep neural network for travel time prediction. We show that our model performs with high accuracy, and outperforms a number of baseline techniques.
{"title":"Deep Neural Networks for Predicting Vehicle Travel Times","authors":"Arthur Cruz de Araujo, A. Etemad","doi":"10.1109/SENSORS43011.2019.8956878","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956878","url":null,"abstract":"This paper focuses on prediction if vehicle travel time. An established open dataset of taxi trips in New York City is used. We first perform statistical analysis on the data in order to determine the informative features that can be used for the problem at hand. Successive to detailed analysis of the data and features, we develop a deep neural network for travel time prediction. We show that our model performs with high accuracy, and outperforms a number of baseline techniques.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"5 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75184288","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956547
M. Zlatanski, P. Sommer, F. Zurfluh, Saleh Gholam Zadeh, Antonino Faraone, N. Perera
Speed and separation monitoring, operation defined in safety standards for collaborative robots, is meant for real-time collision avoidance. Laser scanners are safety-certified devices and a traditional sensor choice for this application. Unfortunately, the limited amount of target information they provide restricts their use in realistic collaborative robot scenarios, in which knowledge about the nature of the detected targets is required. We propose a machine perception platform for safe human-robot collaboration based on a broadband W-band radar, a 3D camera, and a laser scanner. Besides computing range and angle-of-arrival information, we use the micro-Doppler signatures of the radar echo signals to distinguish between humans and objects.
{"title":"Machine Perception Platform for Safe Human-Robot Collaboration","authors":"M. Zlatanski, P. Sommer, F. Zurfluh, Saleh Gholam Zadeh, Antonino Faraone, N. Perera","doi":"10.1109/SENSORS43011.2019.8956547","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956547","url":null,"abstract":"Speed and separation monitoring, operation defined in safety standards for collaborative robots, is meant for real-time collision avoidance. Laser scanners are safety-certified devices and a traditional sensor choice for this application. Unfortunately, the limited amount of target information they provide restricts their use in realistic collaborative robot scenarios, in which knowledge about the nature of the detected targets is required. We propose a machine perception platform for safe human-robot collaboration based on a broadband W-band radar, a 3D camera, and a laser scanner. Besides computing range and angle-of-arrival information, we use the micro-Doppler signatures of the radar echo signals to distinguish between humans and objects.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"363 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75409294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956661
S. Mahmoudkhani, B. Algohi, Junhui Zhao, Henry Ling, A. Mufti, D. Thomson
Steel tendons have a vital role in prestressed concrete members and the stability of the members depends on tendons. The steel tendons corrode over time or when encased in grouts with excessive levels of chloride. The steel tendons are pre-tensioned or post-tensioned to 80 percent of their ultimate tensile strength, and significant corrosions can increase tensile stress leading to tendon breakage. For the purpose of safety and maintaining schedule, it is critical to develop a wire break monitoring methods for post-tensioning bridges. In this work, Fuzzy C-means clustering technique was employed to detect acoustic emissions released from breaking wires of post-tensioning steel tendons bounded in grout. To collect acoustic emissions of wire break and grout cracks, a constant rate tensile loads were applied to tendons embedded in grouts until a wire broke, and piezoelectric transducers attached to the tendons were used pick up the released acoustic signals. To improve the robustness of the clustering method, environmental acoustic noises were collected from a bridge and added to the database of the tensile tests. Wire break detection using acoustic emissions and Fuzzy C-mean clustering achieved 100 percent accuracy in detecting wire breaking acoustic signals while the acoustic signals of grout cracks and environmental noises were not detected as a wire break.
{"title":"Acoustic Emissions Sensor and Fuzzy C-mean Clustering Based Break Detection in Post-Tensioning Tendons","authors":"S. Mahmoudkhani, B. Algohi, Junhui Zhao, Henry Ling, A. Mufti, D. Thomson","doi":"10.1109/SENSORS43011.2019.8956661","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956661","url":null,"abstract":"Steel tendons have a vital role in prestressed concrete members and the stability of the members depends on tendons. The steel tendons corrode over time or when encased in grouts with excessive levels of chloride. The steel tendons are pre-tensioned or post-tensioned to 80 percent of their ultimate tensile strength, and significant corrosions can increase tensile stress leading to tendon breakage. For the purpose of safety and maintaining schedule, it is critical to develop a wire break monitoring methods for post-tensioning bridges. In this work, Fuzzy C-means clustering technique was employed to detect acoustic emissions released from breaking wires of post-tensioning steel tendons bounded in grout. To collect acoustic emissions of wire break and grout cracks, a constant rate tensile loads were applied to tendons embedded in grouts until a wire broke, and piezoelectric transducers attached to the tendons were used pick up the released acoustic signals. To improve the robustness of the clustering method, environmental acoustic noises were collected from a bridge and added to the database of the tensile tests. Wire break detection using acoustic emissions and Fuzzy C-mean clustering achieved 100 percent accuracy in detecting wire breaking acoustic signals while the acoustic signals of grout cracks and environmental noises were not detected as a wire break.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"38 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78011255","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956600
S. Arunachalam, R. Izquierdo, F. Nabki
Ionizations sensors work by identifying the fingerprints of various gases by their ionization characteristics. However, they are limited in application by their size, high power consumption and high voltage characteristics. In this work, a Microelectromechanical systems (MEMS) based suspended Carbon Nanotube (CNT) ionization sensor fabricated by a low temperature surface micromachining process has been presented. The device consists of a CNT beam suspended over a metal electrode at a height of 3.6 µm. The CNT beam is made of billions of individual nanotubes that are randomly aligned horizontally as compared to conventional vertically grown aligned CNT ionization sensors. The sensor response to various gases was tested to determine the sensing characteristics. The resultant sensor demonstrated excellent sensing capabilities for various gases.
{"title":"Fabrication of an Ionization Gas Sensor using Suspended Carbon Nanotubes","authors":"S. Arunachalam, R. Izquierdo, F. Nabki","doi":"10.1109/SENSORS43011.2019.8956600","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956600","url":null,"abstract":"Ionizations sensors work by identifying the fingerprints of various gases by their ionization characteristics. However, they are limited in application by their size, high power consumption and high voltage characteristics. In this work, a Microelectromechanical systems (MEMS) based suspended Carbon Nanotube (CNT) ionization sensor fabricated by a low temperature surface micromachining process has been presented. The device consists of a CNT beam suspended over a metal electrode at a height of 3.6 µm. The CNT beam is made of billions of individual nanotubes that are randomly aligned horizontally as compared to conventional vertically grown aligned CNT ionization sensors. The sensor response to various gases was tested to determine the sensing characteristics. The resultant sensor demonstrated excellent sensing capabilities for various gases.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"242 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73069620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956876
S. Higuchi, S. Takamatsu, T. Itoh, H. Okada
We invented a novel Ag/AgCl reference electrode (RE) system that could control electrolyte outflow using hydrogen pressure and simultaneously deposit AgCl, so that rumen pH could be monitored for two years or more. To overcome a fatal problem of air bubbles insulating a valve liquid junction RE, a platinum electrode system was introduced to apply hydrogen pressure to the junction to remove air bubbles. We prototyped the RE system and demonstrated that potential could be measured from the insulated state. In this system, AgCl deposition simultaneously occurred with hydrogen evolution, and this solved the AgCl dissolution problem of a miniature Ag/AgCl electrode. We experimentally confirmed that AgCl deposition prolonged lifetime of the electrode. By applying the proposed system to a miniature pH sensor, its lifetime was estimated to be 2.1 years.
{"title":"Electrolyte-Flow-Controlled Reference Electrode using Hydrogen Pressure for an Ultra-Long-Life Rumen pH Sensor","authors":"S. Higuchi, S. Takamatsu, T. Itoh, H. Okada","doi":"10.1109/SENSORS43011.2019.8956876","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956876","url":null,"abstract":"We invented a novel Ag/AgCl reference electrode (RE) system that could control electrolyte outflow using hydrogen pressure and simultaneously deposit AgCl, so that rumen pH could be monitored for two years or more. To overcome a fatal problem of air bubbles insulating a valve liquid junction RE, a platinum electrode system was introduced to apply hydrogen pressure to the junction to remove air bubbles. We prototyped the RE system and demonstrated that potential could be measured from the insulated state. In this system, AgCl deposition simultaneously occurred with hydrogen evolution, and this solved the AgCl dissolution problem of a miniature Ag/AgCl electrode. We experimentally confirmed that AgCl deposition prolonged lifetime of the electrode. By applying the proposed system to a miniature pH sensor, its lifetime was estimated to be 2.1 years.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"55 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75237409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956712
M. Asadian, R. Noor, A. Shkel
This paper presents a numerical simulation framework for the micro-glassblowing process to design three-dimensional (3D) resonant shells for inertial sensors, and non-resonant cells for optical and atomic sensors. The micro-glassblowing of micro-spherical atomic cells out of Borosilicate Glass (BSG) and micro Hemi-toroidal shells out of Fused Quartz (FQ) are simulated to predict the resulting 3D geometries. Based on the presented simulation framework, strategies to modify the geometry of glassblown shells for improvement of optical and mechanical properties are presented. Micro-spherical BSG cells with >97% sphericity and improved thickness distribution for optical transmission, and low-frequency FQ micro-shell resonators with more than 6× modal separation were designed. The simulation-based approach in this study can be used for the optimization of the 3D shell geometry to achieve higher sphericity, an improved optical light transmission, structural rigidity in micro-spherical cells, and larger modal separation and decoupled mass and stiffness in micro shell resonator.
{"title":"Simulation-Based Approach in Design of 3D Micro-Glassblown Structures for Inertial and Optical Sensors","authors":"M. Asadian, R. Noor, A. Shkel","doi":"10.1109/SENSORS43011.2019.8956712","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956712","url":null,"abstract":"This paper presents a numerical simulation framework for the micro-glassblowing process to design three-dimensional (3D) resonant shells for inertial sensors, and non-resonant cells for optical and atomic sensors. The micro-glassblowing of micro-spherical atomic cells out of Borosilicate Glass (BSG) and micro Hemi-toroidal shells out of Fused Quartz (FQ) are simulated to predict the resulting 3D geometries. Based on the presented simulation framework, strategies to modify the geometry of glassblown shells for improvement of optical and mechanical properties are presented. Micro-spherical BSG cells with >97% sphericity and improved thickness distribution for optical transmission, and low-frequency FQ micro-shell resonators with more than 6× modal separation were designed. The simulation-based approach in this study can be used for the optimization of the 3D shell geometry to achieve higher sphericity, an improved optical light transmission, structural rigidity in micro-spherical cells, and larger modal separation and decoupled mass and stiffness in micro shell resonator.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"3 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75580667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-10-01DOI: 10.1109/SENSORS43011.2019.8956679
M. Hasan, Mark Pallay, Shahrzad Towfighian
This study illustrates the concept of threshold pressure sensing using the parametric resonance of an electrostatic levitation mechanism. The electrostatic levitation allows the oscillations in the opposite direction of the substrate, thereby not limited to small gaps. The pressure sensor detects the pressure drop below a threshold value by triggering the parametric resonance with significant peak to peak dynamic amplitude changes (~ 25 μm). This detection relies on the fact that the instability region expands when the pressure drop forces the amplitude jump up to the higher oscillation branch. This significant change in the resonator amplitude can be related to a large capacitance variation indicating the threshold pressure. A mathematical model of the resonator is presented to show the working principle of the sensor through frequency response. Our experimental results show that the threshold pressure the sensor detects, can be adjusted by the AC voltage it receives.
{"title":"Threshold Pressure Sensing Using Parametric Resonance in Electrostatic MEMS","authors":"M. Hasan, Mark Pallay, Shahrzad Towfighian","doi":"10.1109/SENSORS43011.2019.8956679","DOIUrl":"https://doi.org/10.1109/SENSORS43011.2019.8956679","url":null,"abstract":"This study illustrates the concept of threshold pressure sensing using the parametric resonance of an electrostatic levitation mechanism. The electrostatic levitation allows the oscillations in the opposite direction of the substrate, thereby not limited to small gaps. The pressure sensor detects the pressure drop below a threshold value by triggering the parametric resonance with significant peak to peak dynamic amplitude changes (~ 25 μm). This detection relies on the fact that the instability region expands when the pressure drop forces the amplitude jump up to the higher oscillation branch. This significant change in the resonator amplitude can be related to a large capacitance variation indicating the threshold pressure. A mathematical model of the resonator is presented to show the working principle of the sensor through frequency response. Our experimental results show that the threshold pressure the sensor detects, can be adjusted by the AC voltage it receives.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"22 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74712124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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