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2019 IEEE 69th Electronic Components and Technology Conference (ECTC)最新文献

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Further Enhancement of Thermal Conductivity through Optimal Uses of h-BN Fillers in Polymer-Based Thermal Interface Material for Power Electronics 优化h-BN填料在电力电子聚合物热界面材料中的应用,进一步增强导热性
Pub Date : 2019-08-26 DOI: 10.1109/ECTC.2019.00241
Hanqing Jiang, Han Zhou, S. Robertson, Zhaoxia Zhou, Liguo Zhao, Changqing Liu
Due to the demand of miniaturization and increasing functionality in power electronics, thermal dissipation becomes a challenging problem for thermal management and reliability. To enable effective heat transfer across the interconnect interfaces, thermal interface materials (TIMs) are required. Electrically insulating TIMs are primarily polymer-based composites which use conductive fillers to enhance thermal conductivity (TC). In this study, the optimal hybrid filler constituents, achieved through mixing spherical and platelet h-BN particles with different ratios, in polymer-based TIM was predicted using finite element (FE) simulations. The underpinning mechanisms of the variation in TC of the TIMs were analyzed from the temperature distribution patterns and micro heat flux paths. Results showed that with the same total volume fraction of h-BN, mixed spherical and platelet h-BN fillers of a certain ratio can further improve the thermal properties of the TIMs compared with those with spherical or platelet h-BN particles alone.
由于电力电子产品小型化和功能化的要求,散热成为热管理和可靠性的一个具有挑战性的问题。为了在互连界面上实现有效的传热,需要热界面材料(TIMs)。电绝缘TIMs主要是聚合物基复合材料,它使用导电填料来提高导热性(TC)。在这项研究中,通过以不同比例混合球形和血小板h-BN颗粒,通过有限元模拟预测了聚合物基TIM中最优的杂化填料成分。从温度分布模式和微热流通量路径分析了TIMs温度变化的基础机制。结果表明,在h-BN总体积分数相同的情况下,一定比例的球形和血小板h-BN混合填料比单独添加球形或血小板h-BN颗粒的填料能进一步改善TIMs的热性能。
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引用次数: 2
A Novel Design of a Bandwidth Enhanced Dual-Band Impedance Matching Network with Coupled Line Wave Slowing 一种带耦合线波慢化的带宽增强双带阻抗匹配网络设计
Pub Date : 2019-05-30 DOI: 10.1109/ECTC.2019.00271
D. Banerjee, A. Saxena, M. Hashmi
This paper presents a novel design of a bandwidth enhanced dual-band impedance matching network utilizing the principle of wave slowing. Coupled-line sections have been used in their all-pass configuration to incorporate the same. The proposed design is generalized for real as well as complex loads with simple closed form design equations. The design is compact and robust and solves the hurdle of bandwidth crunch at GSM and near-GSM frequencies. To validate the proposed concept, prototypes have been fabricated on RO5880, which demonstrate wide band performance for real loads at 900MHz and 2.4GHz.
本文提出了一种利用波慢化原理的带宽增强双带阻抗匹配网络的新设计。在它们的全通配置中使用了耦合线部分来合并相同的功能。采用简单的封闭形式设计方程,对实际载荷和复杂载荷进行了推广。该设计结构紧凑、健壮,解决了GSM和近GSM频段的带宽紧张问题。为了验证提出的概念,在RO5880上制作了原型,在900MHz和2.4GHz的实际负载下展示了宽带性能。
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引用次数: 5
Die-to-Wafer (D2W) Processing and Reliability for 3D Packaging of Advanced Node Logic 先进节点逻辑3D封装的D2W工艺与可靠性
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00096
L. England, D. Fisher, K. Rivera, B. Guthrie, Ping-Jui Kuo, Chang-Chi Lee, Che-Ming Hsu, Fan-Yu Min, Kuo-Chang Kang, Chen-Yuan Weng
In order to support emerging applications such as machine learning, where large amounts of fast access memory are required, the use of 3D packaging is inevitable. Previous work on 3D packaging with advanced node logic has shown that the technology is ready for implementation. In this paper, GF and ASE have demonstrated a Die-to-Wafer (D2W) process using 50um thickness logic wafers as the base. The 3D package also includes integrated thermal structures for heat removal from the base logic die. The process flow will be reviewed in detail, and challenges that were faced and overcome will be discussed. Reliability performance of the 3D package will also be reported. In addition, extensive thermal modeling was completed to understand the impact of two competing solutions for heat removal, which will also be reviewed in detail.
为了支持机器学习等需要大量快速访问存储器的新兴应用,使用3D封装是不可避免的。先前对具有先进节点逻辑的3D封装的研究表明,该技术已经准备好实施。在本文中,格芯和日月光展示了一种以50um厚度的逻辑晶圆为基础的芯片到晶圆(D2W)工艺。3D封装还包括用于从基本逻辑模具散热的集成热结构。将详细回顾工艺流程,并讨论所面临和克服的挑战。3D封装的可靠性性能也将被报告。此外,还完成了广泛的热建模,以了解两种相互竞争的散热解决方案的影响,并将对其进行详细审查。
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引用次数: 4
Ultra-Thin FO Package-on-Package for Mobile Application 移动应用的超薄FO包对包
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00011
H. Hsiao, S. W. Ho, S. Lim, L. Wai, S. Chong, Pei Siang Sharon Lim, Yong Han, T. Chai
Today, Package on Package is a major trend of three-dimensional fabrication for processors and high-performance memory applications in portable applications. Package-on-Package has the benefit of a mini packaging size with multi-functionality by stacking two different packs. However, an ordinary Printed circuit board substrate Package on Package has a weak point to meet the now low profile necessary of high-performance in the thin portable application. To overcome this weak point, the package has been introduced to the market by Fan Out Wafer Level, and this structure of the package allows I/O to be within the device surface and expand through the combination of form so that they can be accommodated more FOWLP. Ultra-thin Fan-out PoP was developed using RDL-first process flow. The developed Fan-out PoP has a package size of 15 x 15 mm2 and thickness of 800 µm, and it consists of three embedded chips. The bottom package consists of a 10 x 10 mm2 processor chip assembled to under bump metallization (UBM) of the bottom RDL layers. Vertical wire-bonds are integrated into the bottom package to act as vertical through mold interconnect (TMI) to the top RDL layers. The top package consist of two 7 x 11 mm2 silicon chips assembled laterally on top of the bottom package and connected to the top RDL layer with low-loop wire-bonds. The top chips were encapsulated in epoxy mold compound to form an integrated PoP. RDL-first integration flow was used to fabricate the fan-out package whereby RDL, molding and chips assembly processes were performed on a carrier wafer to overcome warpage associated with conventional Mold-first process. The ultra-thin Fan-out PoP samples pass the reliability include the MST level 3, drop impact test and the Thermal Cycling. It also provides good thermal performance on packaging level and system level applied in mobile device.
今天,包对包是一个主要的趋势,三维制造的处理器和高性能存储器应用在便携式应用。包上包的好处是一个迷你的包装尺寸与多功能堆叠两个不同的包。然而,普通的印刷电路板基板封装在封装上有一个弱点,以满足现在在薄便携式应用中高性能所必需的低轮廓。为了克服这一弱点,该封装已通过扇出晶圆级(Fan Out Wafer Level)推向市场,该封装的这种结构允许I/O位于器件表面内,并通过组合形式进行扩展,从而可以容纳更多的FOWLP。采用RDL-first工艺流程开发了超薄扇形PoP。开发的Fan-out PoP封装尺寸为15 x 15 mm2,厚度为800µm,由三个嵌入式芯片组成。底部封装由一个10 x 10 mm2的处理器芯片组成,组装在底部RDL层的碰撞下金属化(UBM)上。垂直线键集成到底部封装中,作为垂直通过模具互连(TMI)到顶部RDL层。顶部封装由两个7 x 11 mm2的硅芯片组成,横向组装在底部封装的顶部,并通过低环线键连接到顶部RDL层。顶部的芯片被封装在环氧模化合物中,形成一个集成的PoP。RDL-first集成流程用于制造扇形封装,其中RDL,成型和芯片组装过程在载体晶圆上执行,以克服与传统模具-first工艺相关的弯曲。超薄扇出式PoP样品通过了MST 3级、跌落冲击测试和热循环测试。在移动设备的封装级和系统级均具有良好的散热性能。
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引用次数: 12
On-Chip ESD Monitor 片上ESD监视器
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00-13
Kannan Kalappurakal Thankappan, Boris Vaisband, S. Iyer
Electrostatic discharge (ESD) failure results in about 35% of IC field returns, and is the cause of several billiondollar loss to the semiconductor industry. An on-chip ESD detector can help track the electrostatic history of ICs from manufacturing to end-of-life. Two approaches for on-chip ESD detection are presented: variable dielectric width capacitor, and vertical MOSCAP array. The variable dielectric width capacitor approach employs metal plates terminated with sharp corners to enhance local electric field and facilitate easy breakdown of the thin dielectric between the metal plates. The vertical MOSCAP array consists of a capacitor array connected in series. Both approaches were simulated, fabricated, and experimentally characterized in GlobalFoundries 22 nm fully depleted silicon-oninsulator. Vertical MOSCAP arrays detect ESD events starting from ~6 V with 6V granularity, while the variable dielectric width capacitor is suitable for detection of high ESD voltage from 40 V and above.
静电放电(ESD)故障导致了大约35%的IC领域退货,并给半导体行业造成了数十亿美元的损失。片上ESD检测器可以帮助跟踪ic从制造到寿命结束的静电历史。提出了两种片上ESD检测方法:变介电宽电容和垂直MOSCAP阵列。可变介电宽电容器方法采用端部有尖角的金属板,以增强局部电场,使金属板之间的薄介电易于击穿。垂直MOSCAP阵列由串联的电容阵列组成。这两种方法都在GlobalFoundries公司的22纳米全贫硅绝缘体上进行了模拟、制造和实验表征。垂直MOSCAP阵列以6V粒度检测~ 6V起的ESD事件,而可变介电宽电容则适用于检测40 V及以上的高ESD电压。
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引用次数: 2
Effects of Oven and Laser Sintering Parameters on the Electrical Resistance of IJP Nano-Silver Traces on Mesoporous PET Before and During Fatigue Cycling 烘箱和激光烧结参数对IJP纳米银在介孔PET表面疲劳循环前后电阻的影响
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00299
G. Khinda, M. Kokash, M. Alhendi, M. Yadav, J. Lombardi, D. Weerawarne, M. Poliks, P. Borgesen, N. Stoffel
Inkjet printing of conducting traces offers well established advantages and disadvantages as an alternative to electroplating of interconnects in flexible electronics. Assessment and optimization of their reliability is, however, often more complicated than commonly recognized. This is the case for an approach based on the deposition of silver nano-particle inks onto mesoporous PET substrates. In this case heating leads the trace resistance to drop not only because of the shrinkage and cure of the organic matrix holding the particles together, but also because some of that matrix 'disappears' into the substrate pores. The substrates can however only sustain relatively brief excursions above their glass transition, nominally 75°C, so it is not always practical to sinter the traces completely by conventional means. That has consequences such as ongoing reductions in resistance over time or under cyclic loading. Laser sintering does however offer the opportunity for much better fusing of the particles without excessive heating of the PET. The present work addresses effects of sintering parameters such as time/temperature and power/speed in oven and laser sintering, respectively, on the initial resistance and its evolution in subsequent low cycle fatigue testing. Interconnects of an average width of 80 µm and thickness of 550 nm were printed and post processed by one of two different sintering techniques: a) Convection oven sintering, and (b) Laser sintering. The resulting resistances were quantified, and samples finally subjected to tensile cycling with amplitudes of 1-2% and in-situ monitoring of the resulting resistance changes using a four-point probe. As expected, the resistance increased in each cycle as the substrate was stretched and it decreased again during unloading. However unlike for other kinds of traces, even though a remaining viscoelastic strain on the substrate prevented the complete elimination of the strain on the trace, the resistance of oven sintered traces usually ended up slightly lower after each cycle than before it. This effect was stronger for higher strain amplitudes, but it could be reduced or eliminated by longer preceding sintering of the traces. While a reduction in resistance may seem preferable to an increase, an even better solution would be a lower initial resistance that remained insensitive to subsequent fatigue cycling. This could be achieved by laser sintering, but careful optimization was required as too low a power did not prevent further resistance drops in cycling while too high ones led to significant degradations in fatigue resistance.
导电痕迹的喷墨印刷作为柔性电子器件中互连电镀的替代方案,提供了良好的优点和缺点。然而,对其可靠性的评估和优化往往比通常认为的要复杂得多。这是一种基于在介孔PET衬底上沉积银纳米颗粒油墨的方法。在这种情况下,加热导致微量电阻下降,这不仅是因为将颗粒结合在一起的有机基质的收缩和固化,还因为一些基质“消失”到基质孔隙中。然而,基板只能维持相对短暂的玻璃化转变,名义上是75°C,因此用传统方法完全烧结痕迹并不总是可行的。其结果是,随着时间的推移或在循环载荷下,电阻不断降低。然而,激光烧结确实提供了更好地融合颗粒的机会,而无需过度加热PET。本文研究了烧结参数(如烘箱和激光烧结的时间/温度和功率/速度)对初始电阻及其在随后的低周疲劳试验中的演变的影响。通过两种不同的烧结技术(a)对流烤箱烧结和(b)激光烧结)中的一种,打印出平均宽度为80µm,厚度为550 nm的互连。将得到的电阻进行量化,并最终对样品进行幅度为1-2%的拉伸循环,并使用四点探头对产生的电阻变化进行现场监测。正如预期的那样,随着基材的拉伸,电阻在每个循环中增加,在卸载过程中又减少。然而,与其他类型的痕迹不同的是,即使基材上残余的粘弹性应变阻止了痕迹上应变的完全消除,烘炉烧结痕迹的电阻通常在每次循环后比之前略低。这种影响在应变幅值较高时更为明显,但可以通过较长的烧结时间来减小或消除。虽然减少阻力似乎比增加阻力更可取,但更好的解决方案是降低初始阻力,使其对随后的疲劳循环不敏感。这可以通过激光烧结来实现,但需要仔细优化,因为过低的功率不能防止循环中进一步的电阻下降,而过高的功率会导致疲劳抗力显著下降。
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引用次数: 7
A Study of 3D Packaging Interconnection Performance Affected by Thermal Diffusivity and Pressure Transmission 热扩散率和压力传递对三维封装互连性能的影响研究
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00038
Jin-San Jung, H. Lee, Ji-Min Kim, Yong-Jin Park, Jin Yu, Y. Park, J. Lim, H. Choi, Sung-il Cho, Dong Wook Kim, Sang-ho An
3D packaging technology has been considered as one of the best candidates to improve the system performance by implementing high I/O density as well as providing shortest signal channel path with given package form factor. However, it is difficult to uniformly control the bonding thickness and the precisely align the bumps other than thermo compression (TC) bonding to enable 3D packaging. Moreover, high chip cost and possibly low productivity of TC bonding are main business reasons to prevent this attractive technology from prevailing the mass production environment. To address these well-known technical issues of TC bonding, non-conductive film are proposed for especially high vertical stack with small bump pitch and also minimum chip to chip distance required packages such as high bandwidth memory. In this article, we investigated key process parameters to understand how to optimize bonding process to ensure excellent joint quality for highly dense 3D packages products.
3D封装技术被认为是通过实现高I/O密度以及在给定封装尺寸的情况下提供最短的信号通道路径来提高系统性能的最佳候选技术之一。然而,除了热压缩(TC)键合之外,很难均匀控制键合厚度和精确对齐凸起以实现3D封装。此外,高芯片成本和TC键合可能的低生产率是阻止这种有吸引力的技术在大规模生产环境中流行的主要商业原因。为了解决这些众所周知的TC键合技术问题,提出了非导电薄膜,用于特别高的垂直堆叠,具有小凸距和最小芯片到芯片距离所需的封装,如高带宽存储器。在本文中,我们研究了关键的工艺参数,以了解如何优化粘接工艺,以确保高密度3D封装产品的卓越连接质量。
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引用次数: 5
In-Situ Redox Nanowelding of Copper Nanowires with Surficial Oxide Layer as Solder for Flexible Transparent Electromagnetic Interference Shielding 以表面氧化层为焊料的铜纳米线的原位氧化还原纳米焊接柔性透明电磁干扰屏蔽
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00118
Xianwen Liang, Jianwen Zhou, Gang Li, T. Zhao, Pengli Zhu, R. Sun, C. Wong
Silver nanowire (AgNW) transparent electrode stands out as a promising candidate to replace indium tin oxide (ITO), whereas the high cost and electromigration of silver ions overshadow the applications of AgNWs in optoelectronics. Copper nanowire (CuNW) is attracting increasing interest and attentions due to its high intrinsic electrical conductivity, earth abundance and lower prince, but the oxidation of CuNW severely prohibits its practical applications, which is an issue to be solved urgently. Herein, nanowelding of CuNWs is achieved via an in-situ redox approach. In this welding process, the copper oxide on the surface of CuNWs as a natural solder is reduced by sodium borohydride (NaBH4) to generate Cu atoms, which selectively aggregate at the intersection of CuNWs and merge the junction owing to the positive site here. The sheet resistance of welded CuNW (W-CuNW) transparent conducting films drop obviously without sacrificing its transmittance, which thereby significantly promotes the optoelectronic performance of the film. Poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonate) (PEDOT:PSS) as a protective layer is coated onto the W-CuNW film to prepare PEDOT:PSS/W-CuNW film. The optoelectronic properties of the PEDOT:PSS/W-CuNW film show excellent stability in ambient atmosphere for 30 days. Beside, no obvious change in the sheet resistance of the PEDOT:PSS/W-CuNW film is observed after 5000 bending cycles under a bending radius of 2 mm, indicating the outstanding mechanical flexibility. Finally, electromagnetic interference (EMI) shielding effectiveness (SE) of the PEDOT:PSS/W-CuNW film is measured within the frequency range from 8.2 GHz to 12.5 GHz. The PEDOT:PSS/W-CuNW film with a EMI SE value above 27 dB and transmittance of 85% underlines the great potential applications in displays, touch panels, airborne optoelectronic pods and aviation camcorders.
银纳米线(AgNW)透明电极是取代氧化铟锡(ITO)的一种有前途的候选电极,但银离子的高成本和电迁移使其在光电子学中的应用蒙上了阴影。铜纳米线(cuw)因其固有电导率高、含土丰度高、prince低等优点而日益受到人们的关注和重视,但铜纳米线的氧化严重阻碍了其实际应用,这是一个亟待解决的问题。本文通过原位氧化还原方法实现了CuNWs的纳米焊接。在该焊接过程中,作为天然焊料的铜氧化物在cunw表面被硼氢化钠(NaBH4)还原生成Cu原子,Cu原子选择性地聚集在cunw的交叉处,并由于这里的正电荷而合并结。在不牺牲透光率的情况下,焊接的CuNW透明导电膜的片阻明显下降,从而显著提高了薄膜的光电性能。将聚(3,4-乙烯二氧噻吩)/聚苯乙烯磺酸盐(PEDOT:PSS)作为保护层涂覆在W-CuNW薄膜上,制备了PEDOT:PSS/W-CuNW薄膜。PEDOT:PSS/W-CuNW薄膜的光电性能在环境气氛中表现出30天的优异稳定性。在2 mm的弯曲半径下,PEDOT:PSS/W-CuNW薄膜在5000次弯曲循环后,其片电阻无明显变化,表明其具有优异的机械柔韧性。最后,在8.2 GHz ~ 12.5 GHz频率范围内测量了PEDOT:PSS/W-CuNW薄膜的电磁干扰屏蔽效能(SE)。PEDOT:PSS/W-CuNW薄膜的EMI SE值超过27 dB,透射率为85%,在显示器,触摸面板,机载光电舱和航空摄像机方面具有巨大的应用潜力。
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引用次数: 1
Carbonized Electrodes for Electrochemical Sensing 电化学传感用碳化电极
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00-37
M. A. Haque, N. Lavrik, D. Hensley, N. Mcfarlane
We have fabricated carbonized polymeric 3-D structures on silica substrate and carbonized them within CMOS operating temperature regime towards obtaining an integrated lab-on-CMOS electrochemical sensor. Metal layers of Ti and Au were deposited on silica substrate to provide electrical contact as well as expedite the formation of electrodes on the substrate. Polymeric conical structures were fabricated on metalized silica substrate using 3-D laser writing based on 2-photon polymerization. Desired carbonization of polymeric structures was obtained using a two step annealing process in oxidative and inert environments. Scanning electron microscopy was used to observe structure morphology and Raman spectroscopy verified carbonization. Finally, electrochemical and impedance characterization of the carbonized electrodes was carried out. Experimental results show the potential of these carbonized electrodes to be used in building low-cost and monolithic CMOS electrochemical sensors.
我们在二氧化硅衬底上制备了碳化聚合物三维结构,并在CMOS工作温度范围内对其进行碳化,以获得集成的CMOS实验室电化学传感器。钛和金的金属层沉积在二氧化硅衬底上,以提供电接触,并加速衬底上电极的形成。采用基于双光子聚合的三维激光刻写技术,在金属化二氧化硅衬底上制备了聚合物锥形结构。在氧化和惰性环境下,采用两步退火工艺获得了理想的碳化聚合物结构。用扫描电镜观察结构形貌,拉曼光谱验证碳化。最后,对炭化电极进行了电化学和阻抗表征。实验结果表明,这些碳化电极有潜力用于制造低成本的单片CMOS电化学传感器。
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引用次数: 3
High Yield Precision Transfer and Assembly of GaN µLEDs Using Laser Assisted Micro Transfer Printing 使用激光辅助微转移印刷的GaNµled的高产量精密转移和组装
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00226
G. Ezhilarasu, A. Hanna, A. Paranjpe, S. Iyer
Rapid developments in GaN based µLED mass transfer & assembly have been driven by the demand for high resolution, bright and efficient displays for various solid-state lighting applications. There has however been a roadblock for the commercialization of this technology due to the poor transfer yields attained and high processing costs. The Laser Lift-Off (LLO) process used to release the µLEDs from their native substrate (sapphire) is non-trivial as it can easily crack the chips. In this work, we propose a new µLED transfer and assembly process based on adhesive bonding using a laser de-bondable thermoplastic polyimide (HD3007) that can potentially achieve transfer yields >99%. The LLO process is also done more reliably by using mechanically supported µLEDs which helps to attain nearly 100% LLO yield.
各种固态照明应用对高分辨率、明亮和高效显示器的需求推动了基于GaN的微LED传质和组装的快速发展。然而,由于转移产量低和加工成本高,这一技术的商业化遇到了障碍。用于从其原生衬底(蓝宝石)中释放µled的激光提升(LLO)工艺非常重要,因为它很容易破坏芯片。在这项工作中,我们提出了一种新的基于粘合剂粘合的微LED转移和组装工艺,该工艺使用激光可脱粘热塑性聚酰亚胺(HD3007),可以潜在地实现转移收率>99%。通过使用机械支持的微led, LLO过程也更可靠,这有助于实现近100%的LLO良率。
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引用次数: 4
期刊
2019 IEEE 69th Electronic Components and Technology Conference (ECTC)
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