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2019 IEEE 69th Electronic Components and Technology Conference (ECTC)最新文献

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A MEMS Microphone in a FOWLP FOWLP中的MEMS麦克风
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00134
H. Theuss, C. Geissler, Franz-Xaver Muehlbauer, Claus von Waechter, T. Kilger, J. Wagner, T. Fischer, U. Bartl, Stephan Helbig, A. Sigl, D. Maier, B. Goller, Matthias Vobl, M. Herrmann, J. Lodermeyer, U. Krumbein, A. Dehé
This work presents a fully functional miniaturized MEMS microphone demonstrator assembled within a modified Fan Out Wafer Level Package (FOWLP) process chain. Core of the development is the adaption of the FOWLP-process to MEMS-microphones, which have not yet been fully processed in the wafer fab. Instead, these microphone chips contain non-released membranes making them sufficiently robust to withstand backend processes, such as laminating and molding. The membrane release itself is performed on the reconstituted mold-wafer and postponed to a later process step. Mechanical stress effects induced by the package onto the MEMS are limited to a minimum by the implementation of stress decoupling suspension structures on the MEMS die.
这项工作提出了一个全功能的小型化MEMS麦克风演示器,组装在一个改进的扇出晶圆级封装(FOWLP)工艺链中。开发的核心是将fowlp工艺应用于mems麦克风,这在晶圆厂尚未完全处理。相反,这些麦克风芯片含有不释放的膜,使它们足够坚固,可以承受后端工艺,如层压和成型。膜释放本身在重组的模片上进行,并推迟到后面的工艺步骤。通过在MEMS芯片上实施应力解耦悬架结构,封装对MEMS产生的机械应力效应被限制到最小。
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引用次数: 7
Bladder Inflation Stretch Test Method for Reliability Characterization of Wearable Electronics 可穿戴电子产品可靠性特性的膀胱膨胀拉伸试验方法
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00065
Benjamin G. Stewart, S. Sitaraman
The recent development of electronic materials that can maintain electrical performance while undergoing large applied strains have demonstrated potential for use in a new breed of electronic systems. The rapid development of these electronic systems that are flexible, stretchable, and/or wearable necessitates the concurrent development of robust mechanical and electrical test methods to improve their design and reliability. In this paper, one such mechanical test method is discussed in which a stretchable electronic test coupon is mounted onto an inflatable bladder of known geometry to induce multiaxial strains, while in-situ 4-point resistance measurement is employed to assess the device's performance and electromechanical integrity. The material combination of a stretchable screen-printed silver ink cured onto a thermoplastic polyurethane (TPU) substrate is studied given the proclivity for the use of TPU in wearable devices. A dome-shaped bladder configuration is employed in this work to study the performance of printed conductors under biaxial stretching. Various monotonic and cyclic loading regimes are employed to characterize the fatigue behavior and maximum use conditions of the samples. Volume of water displaced into the bladder during inflation is measured and correlated to the induced multiaxial strains on the mounted devices using 3D digital image correlation. Relationships between resistance and applied multiaxial strains are presented. Experimental results are compared with literature, and plausible extensions of the test method including direct printing on the bladder material are discussed.
最近发展的电子材料,可以保持电气性能,同时承受大的应用应变已经证明了在新型电子系统中使用的潜力。这些灵活、可拉伸和/或可穿戴的电子系统的快速发展,需要同时开发强大的机械和电气测试方法,以提高其设计和可靠性。本文讨论了一种这样的机械测试方法:将可拉伸的电子测试片安装在已知几何形状的充气气囊上,以诱导多轴应变,同时采用原位四点电阻测量来评估设备的性能和机电完整性。考虑到热塑性聚氨酯(TPU)在可穿戴设备中的应用趋势,研究了在热塑性聚氨酯(TPU)基板上固化的可拉伸丝网印刷银墨水的材料组合。本文采用一个圆顶形的气囊结构来研究印刷导体在双轴拉伸下的性能。采用不同的单调和循环加载模式来表征试样的疲劳行为和最大使用条件。在充气过程中排入膀胱的水量被测量,并使用3D数字图像相关将其与安装的设备上的诱导多轴应变相关联。给出了电阻与施加的多轴应变之间的关系。实验结果与文献进行了比较,并讨论了测试方法的合理扩展,包括直接打印膀胱材料。
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引用次数: 5
Process Development of Power Delivery Through Wafer Vias for Silicon Interconnect Fabric 硅互连结构晶圆通孔供电工艺开发
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00093
M. Liu, Boris Vaisband, A. Hanna, Yandong Luo, Zhe Wan, S. Iyer
At UCLA Center for Heterogeneous Integration and Performance Scaling (CHIPS), we have been developing a fine pitch heterogeneous wafer-scale platform with a single level of hierarchy called the silicon interconnect fabric (Si-IF). The Si-IF is a platform for heterogeneous integration of different bare dies at fine pitch (2 to 10 µm) and close proximity (<100 µm die spacing). The Si-IF platform can accommodate an entire 50 kW data center on a single 300 mm diameter wafer. Power delivery and heat extraction are fundamental challenges. To minimize the overhead of power conversion, current at mission (point-of-load) voltage is planned to be delivered directly to the assembly; this requires a uniform delivery of tens of kilo-amperes. Our approach is to deliver the current from the back of the Si-IF, using cooled Cu fins and through wafer vias (TWVs), to the front side of the wafer, where the dies are assembled facedown. TWVs are a key component of this power delivery system and are required to penetrate through the entire thickness of the Si-IF (500 - 700 µm). A process for fabrication of large-sized (100 µm diameter) TWVs for the Si-IF is described in this paper. The TWVs are etched in 500 µm Si wafer (aspect ratio of 1:5) and are designed to enable back-side power delivery to the integrated system. Each TWV exhibits a resistance of 1.1 mΩ with an extracted resistivity of 1.73⋅10^-8 Ωm. The scale and performance of these large-sized TWVs supports high current density for power delivery applications.
在加州大学洛杉矶分校异构集成和性能扩展中心(CHIPS),我们一直在开发一种具有单一层次结构的细间距异构晶圆级平台,称为硅互连结构(Si-IF)。Si-IF是一个平台,可以在小间距(2至10 μ m)和近距离(<100 μ m的模具间距)下集成不同的裸模。Si-IF平台可以在单个直径300 mm的晶圆上容纳整个50 kW的数据中心。电力输送和热量提取是最基本的挑战。为了最大限度地减少功率转换的开销,任务(负载点)电压的电流计划直接输送到组件;这需要几十千安的均匀输出。我们的方法是使用冷却的Cu翅片和晶圆通孔(twv)将电流从Si-IF的背面输送到晶圆的正面,在那里模具是面朝下组装的。twv是该电力输送系统的关键组件,需要穿透Si-IF的整个厚度(500 - 700 μ m)。本文介绍了一种制造大尺寸(直径100 μ m)硅中频twv的工艺。twv蚀刻在500 μ m Si晶圆上(宽高比为1:5),旨在为集成系统提供背面电源。每个TWV的电阻为1.1 mΩ,提取的电阻率为1.73⋅10^-8 Ωm。这些大型twv的规模和性能支持电力输送应用的高电流密度。
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引用次数: 6
Preparation and Characterization of Electroplated Cu/Graphene Composite 电镀铜/石墨烯复合材料的制备与表征
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00-12
Xin Wang, Qian Wang, Jian Cai, Changmin Song, Yang Hu, Yang Zhao, Yu Pei
Cu and unoxidized graphene composite films were prepared by electroplating under room temperature. Graphene was added to the electrolyte of Cu to form composite materials to improve the performance of Cu for interconnection. Composite electrolyte containing high concentration of graphene (up to 0.5 g/L) was prepared by adding CTAB as surfactant. And ultrasound was also used to increase dispersion degree and reduce graphene agglomeration in electrolyte. Average coefficient of thermal expansion (CTE) of the composite films determined by thermo-mechanical analysis (TMA) shows a decrease from 17.3 ppm/K to 14.2 ppm/K from 260 K to 320 K, which reduce CTE by 18 % compared with Cu. CTE of the composite materials can be reduced to 10 ppm/K at 243 K, which is only 60 % of CTE of Cu. The thermal conductivity of the composite materials measured by phase sensitive transient thermo-reflectance (PSTTR) technique shows an improvement from 385 W/m.K to 468 W/m.K. CTE and thermal conductivity of the composite materials both decrease with the increase of current density. And they also both increase with the increase of graphene concentration. The composite materials also show good mechanical properties. The average hardness is 2.5 GPa, which is about 2 times of Cu. And the average elastic modulus is 145 GPa, which is 38 % higher than that of Cu. The resistivity of the composite materials is basically equivalent to that of pure Cu. Result of the experiment proved that the composite materials have better performance under low temperature conditions. The improvement of material properties makes composite materials have good application prospects for 3D interconnection in the near future.
采用室温电镀法制备了Cu和未氧化石墨烯复合薄膜。将石墨烯加入到Cu的电解液中形成复合材料,提高Cu的互连性能。以CTAB为表面活性剂,制备了含高浓度石墨烯(高达0.5 g/L)的复合电解质。超声波也可以提高石墨烯在电解液中的分散程度,减少石墨烯的团聚。热力学分析(TMA)测定的复合膜的平均热膨胀系数(CTE)在260 ~ 320 K时从17.3 ppm/K降至14.2 ppm/K,与Cu相比降低了18%。在243 K时,复合材料的CTE可降至10 ppm/K,仅为Cu的60%。采用相敏瞬态热反射(pstr)技术测量复合材料的导热系数比385 W/m有所提高。K至468 W/m.K。复合材料的CTE和导热系数均随电流密度的增大而减小。它们都随着石墨烯浓度的增加而增加。复合材料也表现出良好的力学性能。平均硬度为2.5 GPa,约为Cu的2倍。平均弹性模量为145 GPa,比Cu的弹性模量高38%。复合材料的电阻率基本相当于纯铜的电阻率。实验结果表明,该复合材料在低温条件下具有较好的性能。材料性能的提高使得复合材料在不久的将来具有良好的三维互联应用前景。
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引用次数: 0
The Thermal Dissipation Characteristics of The Novel System-In-Package Technology (ICE-SiP) for Mobile and 3D High-end Packages 用于移动和3D高端封装的新型系统级封装技术(ICE-SiP)的散热特性
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00098
Taejoo Hwang, D. Oh, Jaechoon Kim, Euseok Song, Taehun Kim, Kilsoo Kim, Joungphil Lee, Taehwan Kim
As information technologies evolve with the 4th industry revolution, such as artificial intelligence and 5G mobile communication, much more computing power and data bandwidth are required for both mobile and server systems. However, one-dimensional thermal packaging solutions such as a heat spreader or high conductive materials are not sufficient to solve the heat dissipation problems for the system-in-packages. In this research, a novel thermal dissipation technology based on two-dimensional heat flow was studied for the 5G high thermal power system-in-package modems and high performance computing logics. By applying a high thermal conductive material such as silver paste to conventional epoxy mold compound structures and creating direct high thermal dissipation paths from a bottom logic die to the heat spreader, it can bypass memory die that is more sensitive to the temperature rise than the logic die. The thermal performance of this novel technology was demonstrated using actual 5G modem system-in-packages comprised of a modem and two LPDDR4x dice. In conclusion, two-dimensional heat dissipation technique using thermal chimney is effective to reduce thermal crosstalk between top memory and bottom logic dice. Consequently, the overall system thermal performance was able to be improved by reducing heat flow through top memory dice.
随着人工智能、5G移动通信等第四次工业革命带来的信息技术的发展,移动和服务器系统都需要更多的计算能力和数据带宽。然而,一维的热封装解决方案,如散热器或高导电性材料,不足以解决系统级封装的散热问题。本文研究了一种基于二维热流的新型5G高热功率系统级调制解调器和高性能计算逻辑散热技术。通过在传统的环氧模复合结构上应用银膏等高导热材料,并从底部逻辑模到散热片之间建立直接的高散热路径,可以绕过比逻辑模对温升更敏感的记忆模。这项新技术的热性能通过实际的5G调制解调器系统级封装进行了演示,该系统级封装由一个调制解调器和两个LPDDR4x骰子组成。综上所述,利用热烟囱的二维散热技术可以有效地减少顶部存储器和底部逻辑骰子之间的热串扰。因此,整个系统的热性能能够通过减少热流通过顶部存储骰子得到改善。
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引用次数: 7
Active Interposer Technology for Chiplet-Based Advanced 3D System Architectures 基于芯片的先进3D系统架构的主动中介技术
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00092
P. Coudrain, J. Charbonnier, A. Garnier, P. Vivet, R. Vélard, A. Vinci, F. Ponthenier, A. Farcy, R. Segaud, P. Chausse, L. Arnaud, D. Lattard, E. Guthmuller, G. Romano, A. Gueugnot, F. Berger, J. Beltritti, T. Mourier, M. Gottardi, S. Minoret, C. Ribiére, G. Romero, Pierre-Emile Philip, Y. Exbrayat, D. Scevola, D. Campos, M. Argoud, N. Allouti, R. Eleouet, César Fuguet Tortolero, C. Aumont, D. Dutoit, Corinne Legalland, J. Michailos, S. Chéramy, G. Simon
We report the first successful technology integration of chiplets on an active silicon interposer, fully processed, packaged and tested. Benefits of chiplet-based architectures are discussed. Built up technology is presented and focused on 3D interconnects process and characterization. 3D packaging is presented up to the successful structural test and characterization of the demonstrator.
我们报告了第一个成功的技术集成芯片上的有源硅中间层,充分加工,封装和测试。讨论了基于芯片的体系结构的优点。建立了技术,并重点介绍了三维互连的过程和表征。三维封装提出,直到成功的结构测试和表征的演示。
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引用次数: 37
Room-Temperature Bonding with Pd Coated Cu Wire on Al Pads: Ball Bond Optimization with 2-Stage Methodology Al衬垫上Pd涂层铜线的室温键合:用两阶段方法优化球键合
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00-14
Nicholas Kam, M. Hook, Celal Con, K. Karim, M. Mayer
Wirebonding performed at elevated temperatures is the standard interconnect process for integrated circuits, typically with the use of low-cost copper bonding wire. However, for specific applications it is necessary for wire bonds to be reliably joined at room-temperature. This paper details the development of a room-temperature ball bonding process using a 2-stage optimization method. The first stage optimizes ball geometry by applying a 32 design of experiment to bonding parameters impact force (IF) and electric flame-off (EFO) current. In the second stage bond shear strength is optimized by stepwise increase in ultrasonic amplitude. Target ball bond values were attained at optimized parameters: IF of 1331 mN, EFO current of 59.9 mA, and an ultrasonic amplitude of 26.46 US%. Pad lift during bonding was observed at excessive ultrasonic amplitudes above 40 US%, as determined by optical images at the bond interface. Bonding parameters at room-temperature (23°C) were increased when compared to a high temperature process (175°C) to account for reduced thermal energy. For the same geometry at room-temperature a 7 % increase to impact force was required. EFO current levels remained relatively constant between the two bonding temperatures. For the same shear strength at room-temperature a 18 % increase in ultrasound amplitude was required. The confirmed average shear strength achieved via the room-temperature process was 116 MPa. Higher values are possible.
在高温下进行的线键合是集成电路的标准互连工艺,通常使用低成本的铜键合线。然而,对于特定的应用,有必要在室温下可靠地连接导线键。本文详细介绍了一种采用两阶段优化方法的室温球键合工艺的开发。第一阶段通过对键合参数(冲击力(IF)和电燃断(EFO)电流)进行32次实验设计,优化了球的几何形状。在第二阶段,通过逐步提高超声振幅来优化粘结强度。优化参数为:IF为1331 mN, EFO电流为59.9 mA,超声振幅为26.46 US%。根据键合界面的光学图像,在超过40 US%的超声波振幅下,可以观察到键合过程中的垫升。与高温工艺(175°C)相比,室温(23°C)下的键合参数增加,以减少热能。对于相同的几何形状,在室温下需要增加7%的冲击力。EFO电流水平在两个键合温度之间保持相对恒定。在室温下,相同的抗剪强度需要增加18%的超声振幅。通过室温处理获得的确定平均抗剪强度为116 MPa。更高的值是可能的。
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引用次数: 0
Cu Pillar with Nanocopper Caps: The Next Interconnection Node Beyond Traditional Cu Pillar 纳米铜帽铜柱:超越传统铜柱的下一个互连节点
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00104
Ramón A. Sosa, K. Mohan, L. Nguyen, R. Tummala, A. Antoniou, V. Smet
Off-chip interconnection pitch scaling has been aggressively driven over the last several decades by the continuous need for higher bandwidth and computing power in smaller form factors in emerging high-performance computing systems. It is expected to reach below 10µm I/O pitch in the near future, beyond the fundamental limits of traditional solder-based interconnection technologies. While the Cu pillar with solder caps technology remains attractive in chip-to-substrate (C2S) applications as it can accommodate substrate and chip non-coplanarities during assembly through melting of the solder, all-Cu interconnections are now pursued as the next interconnection node for their pitch and performance scalability. However, direct Cu-Cu bonding faces several key challenges that have hindered large-scale adoption in C2S, including its relatively high elastic modulus, giving low compliance in assembly. To address this challenge, a novel interconnection technology - Cu pillar with nanocopper caps - is proposed where a solid-state sub-20 GPa modulus nanoporous Cu cap is introduced to replace the solder cap and retain solder-like compliance in assembly, while achieving bulk-like properties through densification in low-temperature sintering. This paper presents the design of this new interconnection system, the developed wafer bumping process, compatible with current industry infrastructures, and a first assembly demonstration where a seamless interface was achieved.
在过去的几十年里,由于在新兴的高性能计算系统中不断需要更高的带宽和更小尺寸的计算能力,片外互连的间距缩放一直在积极推动。预计在不久的将来I/O间距将低于10 μ m,超越传统基于焊料的互连技术的基本限制。虽然带有焊帽技术的铜柱在芯片到衬底(C2S)应用中仍然具有吸引力,因为它可以通过焊料熔化来适应组装过程中衬底和芯片的非共面性,但由于其间距和性能可扩展性,全铜互连现在被视为下一个互连节点。然而,直接Cu-Cu键合面临几个关键挑战,这些挑战阻碍了C2S的大规模应用,包括其相对较高的弹性模量,装配时的顺应性较低。为了应对这一挑战,研究人员提出了一种新的互连技术——铜柱与纳米铜帽,其中引入了一种低于20 GPa模数的固态纳米多孔铜帽来取代焊帽,并在组装中保持类似焊料的适应性,同时通过低温烧结致密化获得类似块状的性能。本文介绍了这种新的互连系统的设计,开发的晶圆碰撞工艺,与当前的工业基础设施兼容,以及实现无缝接口的首次组装演示。
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引用次数: 3
A Wearable Fingernail Deformation Sensing System and Three-Dimensional Finite Element Model of Fingertip 一种可穿戴式指甲变形传感系统及指尖三维有限元模型
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00047
K. Sakuma, B. Webb, R. Narayanan, Avner Abrami, Jeff Rogers, J. Knickerbocker, S. Heisig
This paper describes the sensor, electronics, software, modeling, and characterization of a fingernail-mounted RF-connected wearable strain sensor system that measures nail deformation from finger movement. Applications to health monitoring and human computer interfaces in homes, hospitals, and workplaces are discussed. The mechanical deformation of a fingertip pressed or drawn against a plate is demonstrated using a three-dimensional finite-element linear-elastic model to predict the signal level, optimum sensor locations and the type and location of deformation expected for different finger motions. The 3D finite-element linear elastic model is derived from X-ray images of a human finger but generalized and parameterized to allow new models to be created by scaling internal and external parameters such as skin thickness and nail and finger shape to predict sensor system performance for a more general human population. Our analysis finds that a single sensor mounted in the center of the nail will respond to typical grip pressures on the fingertip with readily detectible strain amplitudes but that a multi-sensor array will be sensitive to more general haptic phenomena such as the direction and magnitude of frictional loads and loading of the distal phalangeal joint. It is shown that depending on finger use and loading the nail exhibits shifts in direction, location and sign of strain over the fingernail surface. Measurement data from a simple multi-sensor array is shown to be useful in distinguishing between load conditions, however additional sensors are required for full determination.
本文描述了传感器,电子,软件,建模和表征的指甲安装射频连接可穿戴应变传感器系统,测量指甲变形的手指运动。讨论了在家庭、医院和工作场所的健康监测和人机界面中的应用。使用三维有限元线弹性模型来预测信号水平,最佳传感器位置以及不同手指运动预期的变形类型和位置,演示了指尖按压或拉伸到板上的机械变形。三维有限元线性弹性模型来源于人类手指的x射线图像,但可以通过缩放内部和外部参数(如皮肤厚度、指甲和手指形状)来创建新模型,从而预测更普通人群的传感器系统性能。我们的分析发现,安装在指甲中心的单个传感器将对典型的指尖握持压力做出反应,并具有易于检测的应变幅度,但多传感器阵列将对更一般的触觉现象敏感,例如摩擦载荷的方向和大小以及远端指骨关节的载荷。结果表明,根据手指的使用和载荷,指甲在方向、位置和指甲表面应变的迹象上发生了变化。测量数据从一个简单的多传感器阵列显示是有用的,以区分负载条件,但额外的传感器需要完全确定。
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引用次数: 0
Solder Joint Reliability of Double-Side Mounted DDR Modules for Consumer and Automotive Applications 消费类和汽车应用的双面安装DDR模块的焊点可靠性
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00080
Dongji Xie, Joe Hai, Zhongming Wu, M. Economou
This paper describes solder joint reliability studies for DDR memories using single side and double side mount modules in the application of consumer and automotive fields. The types of DDRs include LPDDR4 and GDDR5. The components are from well-known memory manufacturers. Both experimental work and numerical simulation are employed to understand the reliability and failure mechanisms. It is found the reliability of DDRs changes with different DDR types as well as suppliers. LPDDR4 has much lower reliability as compared to that of GDDR5. The reason is the low ball profile which has increased the thermal stress for LPDDR4. However, the most critical factor is the double side mount vs. single side mount configuration. Both experimental and FEA results show corner fill may be a better choice in handling both mechanical and thermal stresses. To enhance the solder joint reliability, one effective way is to employ corner fill, edge bond or underfill. However, in order to get better reliability, corner fill and underfill are normally recommended.
本文介绍了在消费和汽车领域应用的单侧和双侧安装模块DDR存储器的焊点可靠性研究。ddr的类型包括LPDDR4和GDDR5。这些组件来自知名的存储器制造商。采用实验和数值模拟相结合的方法来了解其可靠性和失效机理。研究发现,DDR的可靠性随DDR类型和供应商的不同而变化。与GDDR5相比,LPDDR4的可靠性要低得多。原因是低球型增加了LPDDR4的热应力。然而,最关键的因素是双面安装与单面安装配置。实验结果和有限元分析结果都表明,角部填充在处理机械应力和热应力方面可能是较好的选择。提高焊点可靠性的一种有效方法是采用补角、补边或补底。然而,为了获得更好的可靠性,通常建议采用角填和底填。
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引用次数: 2
期刊
2019 IEEE 69th Electronic Components and Technology Conference (ECTC)
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