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2019 IEEE 69th Electronic Components and Technology Conference (ECTC)最新文献

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Ultra-Thin QFN-Like 3D Package with 3D Integrated Passive Devices 带有3D集成无源器件的超薄类qfn 3D封装
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00276
A. Ghannam, Niek van Haare, Julian Bravin, Elisabeth Brandl, Birgit Brandstätter, H. Klingler, B. Auer, P. Meunier, S. Kersjes
In this work, a new wafer-level 3D packaging technology is developed to enable integration of an ultra-thin QFN-like (quad-flat no-leads) 3D package that targets both effective electrical and thermal properties and a thickness smaller than 200 µm. The proposed architecture allows 3D interconnection of stacked staggered dies and integration of compact, high-performance 3D integrated passive devices inside the package for added functionality and electrical performance. The developed technology consists of using debonding from a temporary carrier, Cu 2D-RDL (Redistribution Layer), accurate thin die pick & place, 3D-RDL and overmolding processes to integrate a QFN-like 3D package. Interconnection between die and package I/O is achieved using conformal 3D-RDL, thus without wire-bond, flip-chip or TSV.
在这项工作中,开发了一种新的晶圆级3D封装技术,可以集成超薄qfn(四平面无引线)3D封装,其目标是有效的电学和热性能,厚度小于200微米。所提出的架构允许堆叠交错的模具进行3D互连,并在封装内集成紧凑、高性能的3D集成无源器件,以增加功能和电气性能。开发的技术包括使用临时载体,Cu 2D-RDL(再分配层),精确的薄模具拾取和放置,3D- rdl和覆盖成型工艺来集成类似qfn的3D封装。芯片和封装I/O之间的互连使用保形3D-RDL实现,因此没有线键,倒装芯片或TSV。
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引用次数: 3
Additive Laser Metal Deposition Onto Silicon for Enhanced Microelectronics Cooling 用于增强微电子冷却的添加剂激光金属沉积在硅上
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00302
Arad Azizi, Matthias A. Daeumer, Jacob C. Simmons, B. Sammakia, B. Murray, Scott N. Schiffres
We previously demonstrated how the Sn3Ag4Ti alloy can robustly bond onto silicon via selective laser melting (SLM). By employing this technology, thermal management devices (e.g., micro-channels, vapor chamber evaporators, heat pipes) can be directly printed onto the electronic package (silicon die) without using thermal interface materials. Under immersion two-phase cooling (pool boiling), we compare the performance of three chip cooling methods (conventional heat sink, bare silicon die and additively manufactured metal micro-fins) under high heat flux conditions (100 W/cm^2). Heat transfer simulations show a significant reduction in the chip temperature for the silicon micro-fins. Reduction of the chip operating temperature or increase in clock speed are some of the advantages of this technology, which results from the elimination of thermal interface materials in the electronic package. Performance and reliability aspects of this technology are discussed through experiments and computational models.
我们之前展示了Sn3Ag4Ti合金如何通过选择性激光熔化(SLM)牢固地结合到硅上。通过采用该技术,热管理器件(如微通道、蒸汽室蒸发器、热管)可以直接印刷到电子封装(硅模)上,而无需使用热界面材料。在浸入式两相冷却(池沸)条件下,比较了三种芯片冷却方式(传统散热器、裸硅模和增材制造金属微翅片)在高热流密度条件下(100 W/cm^2)的性能。传热模拟结果表明,硅微翅片的芯片温度显著降低。降低芯片工作温度或提高时钟速度是该技术的一些优点,这是由于消除了电子封装中的热界面材料。通过实验和计算模型对该技术的性能和可靠性进行了讨论。
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引用次数: 8
Electrical Performance Limits of Fine Pitch Interconnects for Heterogeneous Integration 异构集成用细间距互连的电气性能限制
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00106
A. C. Durgun, Z. Qian, K. Aygun, R. Mahajan, T. Hoang, Sergey Y. Shumarayev
Heterogeneous integration facilitates faster design cycles with optimal functional IP module and silicon node combinations, but requires ultra-high bandwidth for the die-to-die communications. Fine pitch interconnects can meet such high bandwidth demands with simpler circuits, lower power and less latency. Hence, it is of utmost importance to understand the performance of these interconnects at different speeds and channel lengths. This paper focuses on a parametric study over the basic design parameters of a generic fine pitch interconnect, to explore the electrical performance limits. As a result of this study, practical guidelines are provided for the die-to-die channel design.
异构集成通过优化的功能IP模块和硅节点组合,加快了设计周期,但需要超高带宽用于模对模通信。细间距互连可以用更简单的电路、更低的功耗和更少的延迟来满足如此高的带宽需求。因此,了解这些互连在不同速度和信道长度下的性能是至关重要的。本文重点对通用细间距互连的基本设计参数进行了参数化研究,以探索其电气性能极限。研究结果为模具到模具的通道设计提供了实用的指导方针。
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引用次数: 8
CiB(Chip in Board) Optical Engine Module Using Advanced Fan-Out Package Technology 采用先进扇出封装技术的CiB(Chip in Board)光引擎模块
Pub Date : 2019-05-28 DOI: 10.1109/ECTC.2019.00091
Sang Yong Park, Juyeong Nam, Ji Ni Shim, Jun Kyu Lee, Yongtae Kwon, Chang Woo Lee, Jong Heon Kim, N. Kim
In this paper, the development of a new optical chip in board (CiB) package adapting Fan-out technology that offers thermal, electrical and thin structure benefit was reported. Optical CiB package contain 4 optical die and is made smaller and thinner than market with the redistribution layer technology of FO-WLP. The key advantages such as high production yield, low cost and simple process steps surpass the conventional optical packages that depends on high precision alignment but always difficult to achieve good performance. Through finally demonstrated that communication is possible at the target speed of 10Gbps/Ch through actual measurement. In this paper describes the structural features of Embedded optical CiB package with integration of nepes'Fan-out technology.
本文报道了一种采用扇出技术的新型板内光芯片(CiB)封装的开发,该封装具有热、电和薄结构的优点。光CiB封装包含4个光芯片,采用FO-WLP的再分配层技术,使其比市场上更小、更薄。其主要优点是成品率高、成本低、工艺步骤简单,克服了传统光学封装依赖高精度对准而难以达到良好性能的缺点。通过实际测量,最终证明了在10Gbps/Ch的目标速率下通信是可能的。本文介绍了集成nepes扇出技术的嵌入式光CiB封装的结构特点。
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引用次数: 1
WLCSP Package and PCB Design for Board Level Reliability WLCSP封装和PCB板级可靠性设计
Pub Date : 2019-05-01 DOI: 10.1109/ECTC.2019.00121
J. Chiu, K.C. Chang, S. Hsu, P. Tsao, M. Lii
WLCSP packaging is wildly use in portable electronic products such as phone, watch, and intelligent bracelet. The advantages of WLCSP package are parasitic inductance minimized, reduced package size, and enhanced thermal conduction characteristics. To enable these benefits regardless of the die's functional complexity, we adopted Cu with ELK (extreme Low-K) material as inter-metal-dielectric native to advanced silicon fabrication technology, and WLCSP packing with large die size, thus fulfilling requirements for high speed & low power consumption. To investigate wafer WLCSP board level reliability performance is essential and critical for successful product launch and preventing field return risk. Test vehicles were used with combinations in PBO2 opening, PCB thickness, and PCB metal gradient, to understand stress on ELK behavior and potential impact on board level reliability. A quick stress test methodology using 75 cycles of -650C~1500C liquid-to-liquid thermal shock (LLTS), showing ~acceleration factor of 1.9 compared with TCB stress, was validated and used for shortening experiment cycle time. A 6x6 mm2 test vehicle was used for different WLCSP package PBO2 opening, PCB thickness and PCB metal design to assess board level reliability impact. LLTS 75cycles result showed larger PBO2 opening will get die edge ELK delamination defects. Higher PCB metal gradient board (more than 50%) & more thick (1mm) also got higher fail rate. For better WLCSP board level reliability structure, smaller WLCSP package PBO2 opening, thinner PCB thickness and uniform PCB metal distribution are recommended.
WLCSP封装广泛应用于手机、手表、智能手环等便携式电子产品中。WLCSP封装的优点是寄生电感最小化,封装尺寸减小,热传导特性增强。为了在不考虑模具功能复杂性的情况下实现这些优势,我们采用了ELK(极低k)材料的Cu作为先进硅制造技术的金属间介电材料,并采用了大尺寸的WLCSP封装,从而满足了高速低功耗的要求。研究晶圆WLCSP板级可靠性性能对于产品成功上市和防止现场退货风险至关重要。测试车辆使用PBO2开度、PCB厚度和PCB金属梯度组合,以了解ELK行为的应力以及对板级可靠性的潜在影响。采用-650C~1500C的75次液-液热冲击(LLTS)快速应力试验方法,与TCB应力相比,加速系数为1.9,可用于缩短试验周期。采用6x6 mm2测试车对不同的WLCSP封装PBO2开度、PCB厚度和PCB金属设计进行测试,评估板级可靠性影响。LLTS 75次循环的结果表明,较大的PBO2开度会导致模具边缘ELK分层缺陷。更高的PCB金属梯度板(超过50%)和更厚(1mm)也有更高的故障率。为了获得更好的WLCSP板级可靠性结构,建议采用更小的WLCSP封装PBO2开口,更薄的PCB厚度和均匀的PCB金属分布。
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引用次数: 5
High Reliability Solder Resist with Strong Adhesion and High Resolution for High Density Packaging 高可靠性阻焊剂,具有强附着力和高分辨率,适用于高密度封装
Pub Date : 2019-05-01 DOI: 10.1109/ECTC.2019.00159
Sawako Shimada, K. Okada, Tomoya Kudo, Chiho Ueta, Yuya Suzuki
This paper describes material analysis and material design of high reliability solder resist (SR) with excellent performance for high density packaging. There is growing demand for higher speed and higher data bandwidth signal transmission for many applications, such as 5G communication, artificial intelligence (AI), and advanced driver-assistance systems (ADAS). Such applications require high density and high performance IC packaging with fine Cu wiring and high frequency signal transmission. Solder resist materials for such packaging need to satisfy many special properties, such as high resistance to Cu electrochemical migration, strong adhesion to low profile Cu layers, and accurate photo-lithography resolution. However, development of a solder resist material that has all the excellent properties above is highly challenging, because many of these properties are trade-off. Indeed, adhesion of conventional SR to low profile Cu layer dropped more than 80% after high temperature and moisture HAST condition. Additionally, photolithography resolution below 50 μm was highly challenging due to light scattering. To overcome the trade-offs, this research began with the detail material analysis of the organic and inorganic components in SR materials. First analysis in polymer structures showed that resin with less shrinkage and less hydrolysis increased the initial adhesion, as well as adhesion after high temperature and high moisture condition. Next study on filler type and surface treatment revealed that the organic and inorganic surface treatment were effective to improve adhesion stability and resolution. This can be explained by the higher electrical affinity and less light scattering. By integrating the fundamental analyses, a new SR with excellent adhesion stability (85% of initial adhesion), high photolithography resolution below 40 μm, and excellent Cu migration resistance below 8 μm L/S.
介绍了高性能高密度封装用高可靠性阻焊剂(SR)的材料分析和材料设计。5G通信、人工智能(AI)和先进驾驶辅助系统(ADAS)等许多应用对更高速度和更高数据带宽的信号传输的需求不断增长。这种应用需要高密度和高性能的IC封装,采用精细的铜布线和高频信号传输。用于此类封装的阻焊材料需要满足许多特殊性能,例如高抗Cu电化学迁移,对低轮廓Cu层的强附着力以及精确的光刻分辨率。然而,开发具有上述所有优良性能的阻焊材料是极具挑战性的,因为许多这些性能是权衡的。事实上,在高温潮湿的HAST条件下,常规SR与低形状Cu层的附着力下降了80%以上。此外,由于光散射,50 μm以下的光刻分辨率极具挑战性。为了克服权衡,本研究从SR材料中有机和无机成分的详细材料分析开始。首先对聚合物结构进行分析,发现收缩少、水解少的树脂增加了初始黏附力,以及高温高湿条件下的黏附力。接下来对填料类型和表面处理的研究表明,有机和无机表面处理都能有效地提高粘接稳定性和分辨率。这可以用更高的电亲和和更少的光散射来解释。通过综合基础分析,新型SR具有优异的粘附稳定性(初始粘附力的85%),40 μm以下的高光刻分辨率,以及低于8 μm L/S的优异Cu迁移阻力。
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引用次数: 3
Improved Finite Element Modeling of Moisture Diffusion Considering Discontinuity at Material Interfaces in Electronic Packages 考虑材料界面不连续的电子封装中水分扩散的改进有限元建模
Pub Date : 2019-05-01 DOI: 10.1109/ECTC.2019.00127
Lulu Ma, R. Joshi, Keith Keith Newman, Xuejun Fan
The modeling of moisture diffusion plays an important role for the integrity and reliability of electronic packages. In this paper, a new normalization approach and its implementation using ANSYS finite element analysis software are presented. Such an approach can solve the diffusion problem with varying temperature and humidity. Two different options in moisture diffusion modeling provided by ANSYS are discussed. As a validation, the numerical results are compared to that using the conventional normalization approach.
水分扩散建模对电子封装的完整性和可靠性起着重要的作用。本文提出了一种新的归一化方法,并利用ANSYS有限元分析软件进行了实现。这种方法可以解决变温变湿条件下的扩散问题。讨论了ANSYS提供的两种不同的水分扩散建模方法。作为验证,将数值结果与常规归一化方法进行了比较。
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引用次数: 6
Micro Fountain-Like Resonators 微型喷泉状谐振器
Pub Date : 2019-05-01 DOI: 10.1109/ECTC.2019.00139
Jianfeng Zhang, J. Shang, Bin Luo, Zhaoxi Su
This paper presents a novel shell resonator, fountain like resonator (FLR). The FLR is of doughnut shape, anchored at the outer rim to enlarge the bonding or support area. The working mode, wineglass n=2 mode, is generated by the inner rim. Finite element mechanical (FEM) simulation is utilized to analyze the influence of shell size on the resonant frequencies. The foaming process is adopted to fabricated the FLR. The frequency response is obtained by Laser Doppler Vibrometer (LDV), and the wineglass n=2 frequency of this resonator is 50.1kHz. The novel shell resonator with doughnut shape shows potential for gyroscopic application.
提出了一种新型壳体谐振器——喷泉谐振器(FLR)。FLR是甜甜圈形状,锚定在外缘,以扩大粘接或支持面积。工作模式,酒杯n=2模式,由内圈产生。采用有限元力学模拟分析了壳体尺寸对谐振频率的影响。采用发泡工艺制备FLR。通过激光多普勒测振仪(LDV)获得谐振腔的频率响应,该谐振腔的酒杯n=2频率为50.1kHz。这种具有甜甜圈形状的壳谐振器具有陀螺应用的潜力。
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引用次数: 0
Development of Flexible Hybrid Electronics Using Reflow Assembly with Stretchable Film 利用可拉伸薄膜回流流组件开发柔性混合电子器件
Pub Date : 2019-05-01 DOI: 10.1109/ECTC.2019.00197
Weifeng Liu, W. Uy, Alex Chan, D. Shangguan, Andy Behr, Takatoshi Abe, Fukao Tomohiro
Flexible hybrid electronics (FHE) are manufactured by combining traditional circuit board fabrication and assembly processes with emerging printed electronics technology. By integrating surface mounted electronic components with printed stretchable conductive circuits and compliant/stretchable substrates these hybrid constructions have potential to revolutionize electronic assemblies used for Internet of Things (IOT), wearable, medical, wellness, automotive and aerospace markets. By employing FHE principles, designers can create heterogeneous electronic systems with unique form factors and functionality. These devices can conform to the curves of a human body or even be applied to the surface of or molded within an irregularly shaped mechanical structure. FHEs also offer the promise of light-weight and cost-effectiveness, scalable manufacturing. The FHE industry remains in the early stages of development. A variety of design, material, assembly and reliability issues remain to be addressed. For example, the typical polymer based conductive pastes used for forming FHE circuit structures are not as conductive as the etched copper on traditional printed circuit boards (PCBs.) Additionally, most of these polymer-based conductive pastes are not readily solderable and the electrical interconnections formed with conductive adhesives in current FHE designs may not be as conductive or reliable as those formed with solder. Additionally, commercially available stretchable thermoplastic film substrates have relatively low thermal resistance and cannot withstand the current lead-free surface mount technology (SMT) reflow temperatures. This paper discusses these challenges and presents an FHE manufacturing process utilizing a stretchable thermosetting polymer substrate, a combination of both screen-printed stretchable conductive paste and etched copper structure, and the conventional SMT processes to create a functional proof of concept double-sided device integrating both active and passive components.
柔性混合电子(FHE)是将传统的电路板制造和组装工艺与新兴的印刷电子技术相结合而制造出来的。通过将表面安装的电子元件与印刷可拉伸导电电路和兼容/可拉伸基板集成在一起,这些混合结构有可能彻底改变用于物联网(IOT)、可穿戴、医疗、健康、汽车和航空航天市场的电子组件。通过采用FHE原理,设计师可以创建具有独特外形因素和功能的异构电子系统。这些装置可以符合人体的曲线,甚至可以应用于不规则形状的机械结构的表面或成型。FHEs还提供了轻量化、成本效益高、可扩展制造的承诺。FHE行业仍处于发展的早期阶段。各种设计、材料、装配和可靠性问题仍有待解决。例如,用于形成FHE电路结构的典型聚合物导电浆料的导电性不如传统印刷电路板(pcb)上的蚀刻铜。此外,大多数这些基于聚合物的导电浆料不容易焊接,并且在当前的FHE设计中,用导电粘合剂形成的电气互连可能不如用焊料形成的导电或可靠。此外,市售的可拉伸热塑性薄膜基板具有相对较低的热阻,无法承受目前的无铅表面贴装技术(SMT)回流温度。本文讨论了这些挑战,并提出了一种FHE制造工艺,利用可拉伸热固性聚合物衬底,结合丝网印刷可拉伸导电浆料和蚀刻铜结构,以及传统的SMT工艺来创建集成有源和无源组件的功能概念验证双面器件。
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引用次数: 2
Study of the Board Level Reliability Performance of a Large 0.3 mm Pitch Wafer Level Package 大型0.3 mm间距晶圆级封装板级可靠性性能研究
Pub Date : 2019-05-01 DOI: 10.1109/ECTC.2019.00179
B. Waidhas, Jan Proschwitz, Christoph Pietryga, Thomas Wagner, B. Keser
Board level reliability investigations have been performed on 36 mm² wafer level packages (WLP) with a 0.3 mm ball pitch. Three different solder ball alloys were included in the temperature cycling, thermal shock and mechanical shock test. In addition to daisy chain test vehicles to address the solder joint reliability, 28 nm die packaged with WLP were included in the assessment to check the stress impact on extreme low K dielectric (ELK) in the die back-end-of-line (BEOL). The tests have included selected studies on the influence of printed circuit board (PCB) thickness and usage of a board level underfill. WLP with SAC-Q solder ball show a significant improvement versus the industry standard SAC405 solder balls. In temperature cycling on board (TCoB), WLP's with SAC-Q (SAC405 with 3% Bi) achieve more than 2000 cycles without fail in temperature range from -40°C to 85°C on a 0.8 mm thick PCB, whereby first fails with SAC405 balls were observed above 800 cycles. All WLP's with LF35 (SAC125Ni) solder alloy fail before 1000 cycles. The failure mode in TCoB changes from solder joint fatigue for SAC405 and LF35 to Cu redistribution layer (RDL) cracks for SAC-Q. The 28 nm functional die packaged with WLP show no ELK crack or any other fail after 1000 cycles for SAC-Q alloy balls. The TCoB with SAC405 WLP pass 2000 cycles without fail when an underfill was applied. Non-underfilled WLP with SAC405 balls assembled on a thickness reduced 0.4 mm PCB show also a significant improvement with a first fail above 1900 cycles. WLP with SAC-Q and SAC405 passed mechanical shock (24 drops at 10k g).
电路板级可靠性研究已在36 mm²圆片级封装(WLP)上进行,球距为0.3 mm。采用三种不同的钎料球合金进行了温度循环、热冲击和机械冲击试验。除了采用菊花链测试车辆来解决焊点可靠性问题外,还将采用WLP封装的28 nm芯片纳入评估范围,以检查芯片后端线(BEOL)中极低K介电(ELK)的应力影响。这些测试包括对印刷电路板(PCB)厚度和使用板级底填料的影响的选定研究。与行业标准SAC405焊锡球相比,采用SAC-Q焊锡球的WLP有了显著改进。在板上温度循环(TCoB)中,带有SAC-Q (SAC405含3% Bi)的WLP在0.8 mm厚的PCB上在-40°C至85°C的温度范围内实现了超过2000次循环而没有失败,其中SAC405球的首次失败超过800次循环。所有使用LF35 (SAC125Ni)钎料合金的WLP在1000次循环前失效。TCoB的失效模式由SAC405和LF35的焊点疲劳转变为SAC-Q的Cu重分布层(RDL)裂纹。使用WLP封装的28 nm功能芯片在SAC-Q合金球的1000次循环后没有显示ELK裂纹或任何其他故障。采用SAC405 WLP的TCoB在进行下填时通过2000次循环而没有失败。在厚度减少0.4 mm的PCB上组装SAC405球的非未填充WLP也显示出首次失败超过1900次的显着改善。含有SAC-Q和SAC405的WLP通过了机械冲击(在10k g时滴24次)。
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引用次数: 4
期刊
2019 IEEE 69th Electronic Components and Technology Conference (ECTC)
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