Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056405
D. Melo-Máximo, L. Velásquez-García
We report the design, fabrication, and characterization of the first fully additively manufactured ionic liquid electrospray sources in the literature. The devices are diodes composed of an emitting electrode and an extractor electrode: the emitting electrode is a monolithic array of digital light projection (DLP)-printed solid, conical, polymeric needles covered by a conformal layer of hydrothermally grown zinc oxide (ZnO) nanowires as wicking material, while the extractor electrode is a stainless-steel plate with an array of apertures that matches the pattern of the array of needles. Devices with 1, 7, and 19 2.5 mm-long, $sim 100 mu mathrm{m}$ tip diameter needles (2.1 mm pitch), covered with a forest of $1.2 mu mathrm{m}$ long, 150 nm diameter ZnO nanowires, were designed, fabricated, and characterized in vacuum (∼10−6 Torr) in a triode configuration (i.e. with an external collector electrode) in the negative polarity. Devices emit up to ∼86% of the current produced by the emitting electrode, and attain peremitter currents as high as $15 mu mathrm{A}$ –a tenfold larger than cleanroom-microfabricated counterparts.
我们报道了文献中第一个完全增材制造的离子液体电喷雾源的设计、制造和表征。该装置是由发射电极和提取电极组成的二极管:发射电极是数字光投影(DLP)印刷的固体锥形聚合物针的单片阵列，上面覆盖着一层水热生长的氧化锌(ZnO)纳米线作为吸芯材料，而提取电极是一个不锈钢板，上面有一系列与针阵列相匹配的孔。设计、制造了具有1、7和19个2.5 mm长，$sim 100 mu mathrm{m}$针尖直径(2.1 mm节距)的器件，并在负极三极结构(即具有外部集电极)的真空(～ 10−6 Torr)中覆盖了$1.2 mu mathrm{m}$长，150 nm直径的ZnO纳米线。器件发射高达～ 86% of the current produced by the emitting electrode, and attain peremitter currents as high as $15 mu mathrm{A}$ –a tenfold larger than cleanroom-microfabricated counterparts.
{"title":"Fully Additively Manufactured, Nanostructured, Miniature Ionic Liquid Electrospray Sources","authors":"D. Melo-Máximo, L. Velásquez-García","doi":"10.1109/MEMS46641.2020.9056405","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056405","url":null,"abstract":"We report the design, fabrication, and characterization of the first fully additively manufactured ionic liquid electrospray sources in the literature. The devices are diodes composed of an emitting electrode and an extractor electrode: the emitting electrode is a monolithic array of digital light projection (DLP)-printed solid, conical, polymeric needles covered by a conformal layer of hydrothermally grown zinc oxide (ZnO) nanowires as wicking material, while the extractor electrode is a stainless-steel plate with an array of apertures that matches the pattern of the array of needles. Devices with 1, 7, and 19 2.5 mm-long, $sim 100 mu mathrm{m}$ tip diameter needles (2.1 mm pitch), covered with a forest of $1.2 mu mathrm{m}$ long, 150 nm diameter ZnO nanowires, were designed, fabricated, and characterized in vacuum (∼10−6 Torr) in a triode configuration (i.e. with an external collector electrode) in the negative polarity. Devices emit up to ∼86% of the current produced by the emitting electrode, and attain peremitter currents as high as $15 mu mathrm{A}$ –a tenfold larger than cleanroom-microfabricated counterparts.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"598-601"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83128324","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056324
Yao Yu, M. Rinaldi
In this paper, a micro-acoustic RF circulator with novel “quad” configuration is reported. Four micro-acoustic filters are periodically modulated by RF switches to break the reciprocity. The use of high-Q micro-acoustic filters significantly reduces the modulation frequency (14 MHz) compared to previous demonstrations based on transmission lines (e.g., 333 MHz in [1]). The low modulation frequency translates to an ultra-low power consumption (202 uW, 3600 times smaller than [1]) and one of the highest linearity ($mathrm{P}1mathrm{dB}=31 mathrm{dBm}$) reported for magnet-free circulators. Furthermore, compared to the more conventional differential configuration, this quad configuration shows advantages in terms of intermodulation products (IMPs) suppression for all the in-band IMPs, guaranteeing a pseudo-linear-time-invariant (pseudo-LTI) operation. Furthermore, the isolation of the circulator is further improved by an additional cancellation circuit, achieving more than 50 dB of isolation in a 10MHz bandwidth (BW). This high level of isolation enables the use of this magnet-free circulator in full-duplex radio, which requires large level of self-interference suppression between the transmitter and the receiver nodes.
{"title":"Micro-Acoustic Quad Circulator with Self-Interference Cancellation","authors":"Yao Yu, M. Rinaldi","doi":"10.1109/MEMS46641.2020.9056324","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056324","url":null,"abstract":"In this paper, a micro-acoustic RF circulator with novel “quad” configuration is reported. Four micro-acoustic filters are periodically modulated by RF switches to break the reciprocity. The use of high-Q micro-acoustic filters significantly reduces the modulation frequency (14 MHz) compared to previous demonstrations based on transmission lines (e.g., 333 MHz in [1]). The low modulation frequency translates to an ultra-low power consumption (202 uW, 3600 times smaller than [1]) and one of the highest linearity ($mathrm{P}1mathrm{dB}=31 mathrm{dBm}$) reported for magnet-free circulators. Furthermore, compared to the more conventional differential configuration, this quad configuration shows advantages in terms of intermodulation products (IMPs) suppression for all the in-band IMPs, guaranteeing a pseudo-linear-time-invariant (pseudo-LTI) operation. Furthermore, the isolation of the circulator is further improved by an additional cancellation circuit, achieving more than 50 dB of isolation in a 10MHz bandwidth (BW). This high level of isolation enables the use of this magnet-free circulator in full-duplex radio, which requires large level of self-interference suppression between the transmitter and the receiver nodes.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"69 1","pages":"1270-1273"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83193307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056193
Tai Nguyen, Noureddine Adjeroud, S. Glinšek, Y. Fleming, J. Guillot, J. Polesel-Maris
This work presents a novel process of magnetoelectric (ME) stacks composed of a highly (002)-oriented aluminum nitride (AlN) film grown by plasma-enhanced atomic layer deposition (PEALD) on magnetostrictive nickel, iron, and cobalt foils. We report an efficient methodology to process high quality piezoelectric AlN films by PEALD at low temperatures. The effective transverse piezoelectric coefficient $e_{31,f}$ was evaluated to be 0.37 C/m2 for the highly (002)-oriented AlN film. Moreover, by the conformal coating obtained by PEALD, a strong ME coupling of 2.8 V.cm−1. Oe−1 is obtained out of resonance on 2–2 composites of a (002)-oriented AlN film on nickel. This ME device could open a novel way for energy harvesting of microsystems.
{"title":"Strong Magnetoelectric Effects of 2–2 Composites Made of AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition on Magnetostrictive Foils for Energy Harvesting Applications","authors":"Tai Nguyen, Noureddine Adjeroud, S. Glinšek, Y. Fleming, J. Guillot, J. Polesel-Maris","doi":"10.1109/MEMS46641.2020.9056193","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056193","url":null,"abstract":"This work presents a novel process of magnetoelectric (ME) stacks composed of a highly (002)-oriented aluminum nitride (AlN) film grown by plasma-enhanced atomic layer deposition (PEALD) on magnetostrictive nickel, iron, and cobalt foils. We report an efficient methodology to process high quality piezoelectric AlN films by PEALD at low temperatures. The effective transverse piezoelectric coefficient $e_{31,f}$ was evaluated to be 0.37 C/m2 for the highly (002)-oriented AlN film. Moreover, by the conformal coating obtained by PEALD, a strong ME coupling of 2.8 V.cm−1. Oe−1 is obtained out of resonance on 2–2 composites of a (002)-oriented AlN film on nickel. This ME device could open a novel way for energy harvesting of microsystems.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"578-581"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81249599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056109
Takumi Yamada, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi
We present a system for measuring electrical resistance of a cellular barrier consisting of < 100 cells. We fabricated a parylene membrane with pores etched by photolithography technique and bonded it to Polydimethylsiloxane (PDMS) wells by H2O vapor plasma treatment. This membrane separated the well into two compartments. In our system, since the placement and number of pores were easy to control, the pore-etched part of the membrane was fully covered with cells. Thus, electrical resistance was easily measured using only a small number of cells. As a demonstration of the measurement with the system, Caco-2 cells were seeded on an upper side of the membrane, and the resistance was measured using a volt-ohm meter.
{"title":"Locally-Patterned Parylene Membrane Enables Electrical Resistance Measurement for a Cellular Barrier Consisting of < 100 Cells","authors":"Takumi Yamada, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056109","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056109","url":null,"abstract":"We present a system for measuring electrical resistance of a cellular barrier consisting of < 100 cells. We fabricated a parylene membrane with pores etched by photolithography technique and bonded it to Polydimethylsiloxane (PDMS) wells by H2O vapor plasma treatment. This membrane separated the well into two compartments. In our system, since the placement and number of pores were easy to control, the pore-etched part of the membrane was fully covered with cells. Thus, electrical resistance was easily measured using only a small number of cells. As a demonstration of the measurement with the system, Caco-2 cells were seeded on an upper side of the membrane, and the resistance was measured using a volt-ohm meter.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"325-327"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88891792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056207
Binbin Cui, Chunchen Liu, S. Yao
The dysregulation of the microRNAs, small noncoding RNA around 22 bases, accounts for a wide range of diseases including cancer. However, current methods technologies for of the microRNA the detection and analysis of microRNA are limited to the analysis of bulk exosomes, which fails to depict the heterogeneity of the exosome population as individual vesicles. In this work, we developed a reverse transcription polymerase chain reaction (RT-PCR) protocol on a droplet microfluidic platform. We employed the synthetic hsa-miR-21-5p and exosomes extracted from lung cancer patients in the proof-of-concept experiments. The results indicated that our method can detect as low as a single molecule of microRNA per droplet, which is promising for single exosome microRNA assays.
{"title":"One-Step RT-PCR for Detection of Micrornas in Exosomes Using Droplet Microfluidics","authors":"Binbin Cui, Chunchen Liu, S. Yao","doi":"10.1109/MEMS46641.2020.9056207","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056207","url":null,"abstract":"The dysregulation of the microRNAs, small noncoding RNA around 22 bases, accounts for a wide range of diseases including cancer. However, current methods technologies for of the microRNA the detection and analysis of microRNA are limited to the analysis of bulk exosomes, which fails to depict the heterogeneity of the exosome population as individual vesicles. In this work, we developed a reverse transcription polymerase chain reaction (RT-PCR) protocol on a droplet microfluidic platform. We employed the synthetic hsa-miR-21-5p and exosomes extracted from lung cancer patients in the proof-of-concept experiments. The results indicated that our method can detect as low as a single molecule of microRNA per droplet, which is promising for single exosome microRNA assays.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"142-146"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88760047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056337
Manimuthu Veerappan, Fei Wang
In this abstract, we present GaN microsphere with dandelion flower-like morphology and high crystalline quality, synthesized using the optimized ammonothermal-ammonolysis hybrid method. The GaN micro-spherical flower are further functionalized with APTES for immobilization of biomolecules. Therefore, GaN microsphere has been first ever utilized for BSA protein biosensor. We studied the influence of the ammonolysis temperature on the BSA sensing performance of the GaN based protein biosensors. By varying the band-gap of the material, APTES modified GaN microspheres have demonstrated tunable blue and green fluorescent emission from BSA, which shows promising application for protein detection.
{"title":"Dandelion Flower Like, APTES Functionalized Gallium Nitirde Microsphere for Fluorescence Detection of Bovine Serum Albumin Protein","authors":"Manimuthu Veerappan, Fei Wang","doi":"10.1109/MEMS46641.2020.9056337","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056337","url":null,"abstract":"In this abstract, we present GaN microsphere with dandelion flower-like morphology and high crystalline quality, synthesized using the optimized ammonothermal-ammonolysis hybrid method. The GaN micro-spherical flower are further functionalized with APTES for immobilization of biomolecules. Therefore, GaN microsphere has been first ever utilized for BSA protein biosensor. We studied the influence of the ammonolysis temperature on the BSA sensing performance of the GaN based protein biosensors. By varying the band-gap of the material, APTES modified GaN microspheres have demonstrated tunable blue and green fluorescent emission from BSA, which shows promising application for protein detection.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"342-345"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89606929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056230
Renuka Bowrothu, T. Schumann, Hae-in Kim, Kyoung-Tae Kim, S. Hwang, Yoonseok Lee, Y. Yoon
Cobalt (Co) ion selective electrode (ISE) has been studied for selective phosphate detection. As the electromotive force (EMF) response of this electrode to phosphate is affected by surrounding pH conditions, it has not been readily utilized for in-situ monitoring. In this work, we present an integrated Co based phosphate and antimony (Sb) based pH sensing system, which enables us to monitor precise phosphorous concentration taking into account a local pH level in aqueous solution. Platinum is used as the reference electrode. An extremely broad sensing range of phosphate concentration with 9 orders of magnitude concentration ranging between $5times 10^{-3}$ to $5times 10^{-12}$ M is reported. The sensing sensitive of 5 pM is one of the best reported in this kind of sensors in literature. Also, simultaneous detection of pH and phosphate concentration is presented using integrated wireless Bluetooth module. The total area of the fabricated sensor is 4 cm2.
{"title":"Integrated Phosphate and pH Sensing System for Water Quality Monitoring","authors":"Renuka Bowrothu, T. Schumann, Hae-in Kim, Kyoung-Tae Kim, S. Hwang, Yoonseok Lee, Y. Yoon","doi":"10.1109/MEMS46641.2020.9056230","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056230","url":null,"abstract":"Cobalt (Co) ion selective electrode (ISE) has been studied for selective phosphate detection. As the electromotive force (EMF) response of this electrode to phosphate is affected by surrounding pH conditions, it has not been readily utilized for in-situ monitoring. In this work, we present an integrated Co based phosphate and antimony (Sb) based pH sensing system, which enables us to monitor precise phosphorous concentration taking into account a local pH level in aqueous solution. Platinum is used as the reference electrode. An extremely broad sensing range of phosphate concentration with 9 orders of magnitude concentration ranging between $5times 10^{-3}$ to $5times 10^{-12}$ M is reported. The sensing sensitive of 5 pM is one of the best reported in this kind of sensors in literature. Also, simultaneous detection of pH and phosphate concentration is presented using integrated wireless Bluetooth module. The total area of the fabricated sensor is 4 cm2.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 4 1","pages":"713-716"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90061332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056216
S. Schwartz, O. Brand, L. Beardslee
We present a novel micromachined chemical multisensor that simultaneously detects mass and dielectric property changes in the same polymeric sensing film. The multisensor is comprised of a cantilever-type, mass-sensitive resonant sensor with a semicircular annulus and an embedded on-resonator interdigitated electrode structure for capacitive sensing. The resonant chemical sensor utilizes a high-Q in-plane resonance mode enabling sub-parts per million limits of detection for volatile organic compounds. The embedded capacitive sensor enables the discrimination between toluene and methanol by evaluating the ratio between the mass-sensitive and capacitive sensor signal.
{"title":"Micromachined Mass-Sensitive and Capacitive Chemical Multisensor Using Single Polymeric Sensing Film","authors":"S. Schwartz, O. Brand, L. Beardslee","doi":"10.1109/MEMS46641.2020.9056216","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056216","url":null,"abstract":"We present a novel micromachined chemical multisensor that simultaneously detects mass and dielectric property changes in the same polymeric sensing film. The multisensor is comprised of a cantilever-type, mass-sensitive resonant sensor with a semicircular annulus and an embedded on-resonator interdigitated electrode structure for capacitive sensing. The resonant chemical sensor utilizes a high-Q in-plane resonance mode enabling sub-parts per million limits of detection for volatile organic compounds. The embedded capacitive sensor enables the discrimination between toluene and methanol by evaluating the ratio between the mass-sensitive and capacitive sensor signal.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"721-724"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84497667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056123
Xuefeng Wang, Yarong Cheng, Shengran Cai, P. Xu, Ying Chen, Haitao Yu, Xinxin Li
An in-plane mode resonant cantilever sensor working in solution is developed for detecting physicochemical parameters of aptamer-ligand binding. The cantilever body is enclosed inside a hydrophobic parylene shell, and a ring-shaped hydrophobic slit is designed to prevent the solution leak inside the shell, allowing the cantilever structure keeps high-Q resonance in air while the binding sensing pool is exposed to aqueous solution for the biological binding. The resonant cantilever continuously records the frequency-shift according to the binding induced mass change on the cantilever. The frequency signal is useful for revealing kinetic/thermodynamic mechanism of the interface binding by fitting the detected sensorgram with classic equations. This detection strategy is label-free and calibration-free, with all the measurement completed using one device to avoid system error.
{"title":"In-Plane Mode Resonant Cantilever Sensor to Detect Kinetic/Thermodynamic Parameters for Aptamer-Ligand Binding","authors":"Xuefeng Wang, Yarong Cheng, Shengran Cai, P. Xu, Ying Chen, Haitao Yu, Xinxin Li","doi":"10.1109/MEMS46641.2020.9056123","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056123","url":null,"abstract":"An in-plane mode resonant cantilever sensor working in solution is developed for detecting physicochemical parameters of aptamer-ligand binding. The cantilever body is enclosed inside a hydrophobic parylene shell, and a ring-shaped hydrophobic slit is designed to prevent the solution leak inside the shell, allowing the cantilever structure keeps high-Q resonance in air while the binding sensing pool is exposed to aqueous solution for the biological binding. The resonant cantilever continuously records the frequency-shift according to the binding induced mass change on the cantilever. The frequency signal is useful for revealing kinetic/thermodynamic mechanism of the interface binding by fitting the detected sensorgram with classic equations. This detection strategy is label-free and calibration-free, with all the measurement completed using one device to avoid system error.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"88-91"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86273885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056252
Tomoya Nakamura, Y. Hirai, O. Tabata, T. Tsuchiya
A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has $100-mu mathrm{m}$ square plate of $5 mu mathrm{m}$ thick, which is suspended by thin silicon nanowire of about $1 mu mathrm{m}$ thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of $4times 4$ devices at relatively low actuation voltage (∼20 Vpp) and large mechanical deflection amplitude (∼9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason.
为实现高谐振频率、大偏转角、高机械可靠性的高性能空间光调制器，提出了一种新的阵列微镜器件设计方案。镜子有$100- mu mathm {m}$厚的$5 mu mathm {m}$方板，由约$1 mu mathm {m}$粗和宽的细硅纳米线悬浮。该器件采用博世工艺和各向同性等离子体刻蚀技术制备。我们成功地演示了在相对低的驱动电压(~ 20 Vpp)和大的机械偏转幅度(~ 9°)下，$4 × 4$器件的阵列操作。但单元谐振器之间的振动幅值偏差较大。通过对Duffing方程的频响拟合，发现垂直梳子非线性引起的自增强作动力是主要原因。
{"title":"Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire","authors":"Tomoya Nakamura, Y. Hirai, O. Tabata, T. Tsuchiya","doi":"10.1109/MEMS46641.2020.9056252","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056252","url":null,"abstract":"A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has $100-mu mathrm{m}$ square plate of $5 mu mathrm{m}$ thick, which is suspended by thin silicon nanowire of about $1 mu mathrm{m}$ thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of $4times 4$ devices at relatively low actuation voltage (∼20 Vpp) and large mechanical deflection amplitude (∼9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"1157-1160"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86963191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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