Pub Date : 2022-11-30DOI: 10.1186/s40486-022-00163-6
Jae Hyun Bae, Alexander Zhbanov, Sung Yang
The separation of biological cells or microorganisms in a liquid based on their size by deterministic lateral displacement is widely used in laboratories. The analytical equation for the critical diameter is derived under the assumption that flow between two posts is better described by flow in a rectangular tube than between parallel plates. The height position of the particle is an additional parameter that affects the critical diameter. Preliminary experiments were carried out on the separation of particles in deep and shallow microchannels. This study shows that the critical diameter is not a constant value for a given design but is different on each plane parallel to the top and bottom of the channel. The theoretical model was used to analyze experimental data on the separation of particles larger than 4.2 µm from particles ranging in size from 2.5 to 7.9 µm.
{"title":"Effect of channel height on the critical particle diameter in a deterministic lateral device","authors":"Jae Hyun Bae, Alexander Zhbanov, Sung Yang","doi":"10.1186/s40486-022-00163-6","DOIUrl":"10.1186/s40486-022-00163-6","url":null,"abstract":"<div><p>The separation of biological cells or microorganisms in a liquid based on their size by deterministic lateral displacement is widely used in laboratories. The analytical equation for the critical diameter is derived under the assumption that flow between two posts is better described by flow in a rectangular tube than between parallel plates. The height position of the particle is an additional parameter that affects the critical diameter. Preliminary experiments were carried out on the separation of particles in deep and shallow microchannels. This study shows that the critical diameter is not a constant value for a given design but is different on each plane parallel to the top and bottom of the channel. The theoretical model was used to analyze experimental data on the separation of particles larger than 4.2 µm from particles ranging in size from 2.5 to 7.9 µm.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-11-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00163-6","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44907661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-11-19DOI: 10.1186/s40486-022-00161-8
Yoo Na Kang, Jun-Uk Chu, Kang-Ho Lee, Yongkoo Lee, Sohee Kim
Neural interfaces are fundamental tools for transmitting information from the nervous system. Research on the immune response of an invasive neural interface is a field that requires continuous effort. Various efforts have been made to overcome or minimize limitations through modifying the designs and materials of neural interfaces, modifying surface characteristics, and adding functions to them. In this study, we demonstrate microfluidic channels with crater-shaped structures fabricated using parylene-C membranes for fluid delivery from the perspective of theory, design, and simulation. The simulation results indicated that the fluid flow depended on the size of the outlet and the alignment of microstructures inside the fluidic channel. All the results can be used to support the design of microfluidic channels made by membranes for drug delivery.
{"title":"Design and simulation of a neural interface based on a microfluidic flexible interconnection cable for chemical delivery","authors":"Yoo Na Kang, Jun-Uk Chu, Kang-Ho Lee, Yongkoo Lee, Sohee Kim","doi":"10.1186/s40486-022-00161-8","DOIUrl":"10.1186/s40486-022-00161-8","url":null,"abstract":"<div><p>Neural interfaces are fundamental tools for transmitting information from the nervous system. Research on the immune response of an invasive neural interface is a field that requires continuous effort. Various efforts have been made to overcome or minimize limitations through modifying the designs and materials of neural interfaces, modifying surface characteristics, and adding functions to them. In this study, we demonstrate microfluidic channels with crater-shaped structures fabricated using parylene-C membranes for fluid delivery from the perspective of theory, design, and simulation. The simulation results indicated that the fluid flow depended on the size of the outlet and the alignment of microstructures inside the fluidic channel. All the results can be used to support the design of microfluidic channels made by membranes for drug delivery.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00161-8","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49062386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-11-19DOI: 10.1186/s40486-022-00159-2
Helem B. Flores Marcial, Jiseob Choi, Donghwi Ham, Junghyun Kim, Pyeongho Jeong, Jinho Choi, Woo-Tae Park
Multiple lesions in the same vessel is one of the most common situations found in patients suffering from cardiovascular diseases, this complicates not only the assessment of the severity of each one but also their treatment. To date, the effect of multiple stenoses on different parameters has been simulated by numerical studies. Few others have implemented in vitro platforms for their investigation. However, visualization of thrombosis formation in this kind of lesion is still needed. This in vitro study monitors the formation of thrombus inside microchannels having one, two, and three stenoses. Whole blood was perfused through each channel at high shear rates (> 12,000 s−1), generating thrombosis. Flow changes across each lesion as well as the final percentage of aggregations were monitored. Thus, the location where total occlusion could be produced was found to be the first stenosis for all the cases. Less flow reaching the second and third stenoses was observed which demonstrates that aggregations were growing at the first one. This was verified by measuring the percentage of aggregations at the end of the test.
{"title":"Influence of multiple stenoses on thrombosis formation: an in vitro study","authors":"Helem B. Flores Marcial, Jiseob Choi, Donghwi Ham, Junghyun Kim, Pyeongho Jeong, Jinho Choi, Woo-Tae Park","doi":"10.1186/s40486-022-00159-2","DOIUrl":"10.1186/s40486-022-00159-2","url":null,"abstract":"<div><p>Multiple lesions in the same vessel is one of the most common situations found in patients suffering from cardiovascular diseases, this complicates not only the assessment of the severity of each one but also their treatment. To date, the effect of multiple stenoses on different parameters has been simulated by numerical studies. Few others have implemented in vitro platforms for their investigation. However, visualization of thrombosis formation in this kind of lesion is still needed. This in vitro study monitors the formation of thrombus inside microchannels having one, two, and three stenoses. Whole blood was perfused through each channel at high shear rates (> 12,000 s<sup>−1</sup>), generating thrombosis. Flow changes across each lesion as well as the final percentage of aggregations were monitored. Thus, the location where total occlusion could be produced was found to be the first stenosis for all the cases. Less flow reaching the second and third stenoses was observed which demonstrates that aggregations were growing at the first one. This was verified by measuring the percentage of aggregations at the end of the test.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00159-2","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47422387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-11-12DOI: 10.1186/s40486-022-00160-9
Leilei Wang, Jungwook Choi
The development of high-performance strain sensors has attracted significant attention in the field of smart wearable devices. However, stretchable strain sensors usually suffer from a trade-off between sensitivity and sensing range. In this study, we investigate a highly sensitive and stretchable piezoresistive strain sensor composed of a hybrid film of 1D multi-walled carbon nanotube (MWCNT) and 2D graphene that forms a percolation network on Ecoflex substrate by spray coating. The mass of spray-coated MWCNT and graphene and their mass ratio are modulated to overcome the trade-off between strain sensitivity and sensing range. We experimentally found that a stable percolation network is formed by 0.18 mg of MWCNTs (coating area of 200 mm2), with a maximum gauge factor (GF) of 1,935.6 and stretchability of 814.2%. By incorporating the 0.36 mg of graphene into the MWCNT film (i.e., a mass ratio of 1:2 between MWCNT and graphene), the GF is further improved to 12,144.7 in a strain range of 650–700%. This high GF is caused by the easy separation of the graphene network under the applied strain due to its two-dimensional (2D) shape. High stretchability originates from the high aspect ratio of MWCNTs that bridges the randomly distributed graphenes, maintaining a conductive network even under sizeable tensile strain. Furthermore, a small difference in work function between MWCNT and graphene and their stable percolation network enables sensitive UV light detection even under a significant strain of 300% that cannot be achieved by sensors composed of MWCNT- or graphene-only. The hybrids of MWCNT and graphene provide an opportunity to achieve high-performance stretchable devices.
{"title":"Highly stretchable strain sensors with improved sensitivity enabled by a hybrid of carbon nanotube and graphene","authors":"Leilei Wang, Jungwook Choi","doi":"10.1186/s40486-022-00160-9","DOIUrl":"10.1186/s40486-022-00160-9","url":null,"abstract":"<div><p>The development of high-performance strain sensors has attracted significant attention in the field of smart wearable devices. However, stretchable strain sensors usually suffer from a trade-off between sensitivity and sensing range. In this study, we investigate a highly sensitive and stretchable piezoresistive strain sensor composed of a hybrid film of 1D multi-walled carbon nanotube (MWCNT) and 2D graphene that forms a percolation network on Ecoflex substrate by spray coating. The mass of spray-coated MWCNT and graphene and their mass ratio are modulated to overcome the trade-off between strain sensitivity and sensing range. We experimentally found that a stable percolation network is formed by 0.18 mg of MWCNTs (coating area of 200 mm<sup>2</sup>), with a maximum gauge factor (GF) of 1,935.6 and stretchability of 814.2%. By incorporating the 0.36 mg of graphene into the MWCNT film (i.e., a mass ratio of 1:2 between MWCNT and graphene), the GF is further improved to 12,144.7 in a strain range of 650–700%. This high GF is caused by the easy separation of the graphene network under the applied strain due to its two-dimensional (2D) shape. High stretchability originates from the high aspect ratio of MWCNTs that bridges the randomly distributed graphenes, maintaining a conductive network even under sizeable tensile strain. Furthermore, a small difference in work function between MWCNT and graphene and their stable percolation network enables sensitive UV light detection even under a significant strain of 300% that cannot be achieved by sensors composed of MWCNT- or graphene-only. The hybrids of MWCNT and graphene provide an opportunity to achieve high-performance stretchable devices.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00160-9","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49601489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-11-02DOI: 10.1186/s40486-022-00158-3
Byungwook Park, Jae-Won Jang, Sohee Kim
To overcome the limitations of muscle-based prostheses, studies on nerve-based prostheses for sensory feedback have recently been reported. To develop such prostheses, intrafascicular electrodes, a type of peripheral nerve interface, are essentially used to connect the nervous system and external systems. Through these electrodes, sensory feedback to induce sensations in patients is possible. To evoke natural sensations, precise recordings of nerve signals should precede sensory feedback, in order to identify patterns of sensory signals in the nerve and to mimic these patterns in stimulating the nerve. For this purpose, we previously developed a PDMS-based flexible penetrating microelectrode array (FPMA). In the current study, we verified the ability of the FPMA to record sensory nerve signals. The FPMA implanted in the rabbit sciatic nerve was able to record spontaneous neural signals, and the recorded signals were separated into action potential units. In addition, sensory nerve signals synchronized with ankle movement were successfully recorded, demonstrating that the FPMA is a useful peripheral neural interface capable of recording high-resolution sensory signals.
{"title":"In-vivo recording of sensory signals from peripheral nerves using flexible 3D neural electrodes","authors":"Byungwook Park, Jae-Won Jang, Sohee Kim","doi":"10.1186/s40486-022-00158-3","DOIUrl":"10.1186/s40486-022-00158-3","url":null,"abstract":"<div><p>To overcome the limitations of muscle-based prostheses, studies on nerve-based prostheses for sensory feedback have recently been reported. To develop such prostheses, intrafascicular electrodes, a type of peripheral nerve interface, are essentially used to connect the nervous system and external systems. Through these electrodes, sensory feedback to induce sensations in patients is possible. To evoke natural sensations, precise recordings of nerve signals should precede sensory feedback, in order to identify patterns of sensory signals in the nerve and to mimic these patterns in stimulating the nerve. For this purpose, we previously developed a PDMS-based flexible penetrating microelectrode array (FPMA). In the current study, we verified the ability of the FPMA to record sensory nerve signals. The FPMA implanted in the rabbit sciatic nerve was able to record spontaneous neural signals, and the recorded signals were separated into action potential units. In addition, sensory nerve signals synchronized with ankle movement were successfully recorded, demonstrating that the FPMA is a useful peripheral neural interface capable of recording high-resolution sensory signals.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00158-3","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41725678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-31DOI: 10.1186/s40486-022-00157-4
Dong Kwan Kang, Jeong Woo Park, Sangmin Lee
In this study, a pneumatic dispenser driven by a flexible membrane with a capacitive-type sensor using an SLA-type 3D printer was fabricated. It was confirmed that a single droplet in the range of approximately 400–450 nL could be ejected from the current processed 200-μm-diameter nozzle. The deformation varied according to the magnitude and time of the positive pressure applied to the membrane sensor. In addition, the signals of the normal dispensing and abnormal states, in which the solution was not ejected when the inlet pressure was removed, were measured and compared. The base capacitance-to-digital converter (CDC) value decreased when the inlet pressure was removed. Thus, it was able to confirm the feasibility of monitoring the normal and abnormal ejection status of the pneumatic dispenser.
{"title":"A 3D-printed pneumatic dispenser with monitoring droplet ejection","authors":"Dong Kwan Kang, Jeong Woo Park, Sangmin Lee","doi":"10.1186/s40486-022-00157-4","DOIUrl":"10.1186/s40486-022-00157-4","url":null,"abstract":"<div><p>In this study, a pneumatic dispenser driven by a flexible membrane with a capacitive-type sensor using an SLA-type 3D printer was fabricated. It was confirmed that a single droplet in the range of approximately 400–450 nL could be ejected from the current processed 200-μm-diameter nozzle. The deformation varied according to the magnitude and time of the positive pressure applied to the membrane sensor. In addition, the signals of the normal dispensing and abnormal states, in which the solution was not ejected when the inlet pressure was removed, were measured and compared. The base capacitance-to-digital converter (CDC) value decreased when the inlet pressure was removed. Thus, it was able to confirm the feasibility of monitoring the normal and abnormal ejection status of the pneumatic dispenser.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00157-4","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46301218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-10-28DOI: 10.1186/s40486-022-00156-5
Yongmin Kwon, Jaesung Park
Extracellular vesicles (EVs) are nano-sized vesicles derived from cells that transport biomaterials between cells through biofluids. Due to their biological role and components, they are considered as potential drug carriers and for diagnostic applications. Today's advanced nanotechnology enables single-particle-level analysis that was difficult in the past due to its small size below the diffraction limit. Single EV analysis reveals the heterogeneity of EVs, which could not be discovered by various ensemble analysis methods. Understanding the characteristics of single EVs enables more advanced pathological and biological researches. This review focuses on the advanced techniques employed for EV analysis at the single particle level and describes the principles of each technique.
{"title":"Methods to analyze extracellular vesicles at single particle level","authors":"Yongmin Kwon, Jaesung Park","doi":"10.1186/s40486-022-00156-5","DOIUrl":"10.1186/s40486-022-00156-5","url":null,"abstract":"<div><p>Extracellular vesicles (EVs) are nano-sized vesicles derived from cells that transport biomaterials between cells through biofluids. Due to their biological role and components, they are considered as potential drug carriers and for diagnostic applications. Today's advanced nanotechnology enables single-particle-level analysis that was difficult in the past due to its small size below the diffraction limit. Single EV analysis reveals the heterogeneity of EVs, which could not be discovered by various ensemble analysis methods. Understanding the characteristics of single EVs enables more advanced pathological and biological researches. This review focuses on the advanced techniques employed for EV analysis at the single particle level and describes the principles of each technique.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00156-5","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43804782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-09-16DOI: 10.1186/s40486-022-00154-7
Arunkumar Shanmugasundaram, Dong-Weon Lee
Metal oxide-based sensors have been widely used to detection biomarkers in exhaled breath for identification of various diseases such as asthma, diabetes, halitosis, and lung cancer. Herein, we proposed one step hydrothermal method for the preparation of SnO2 nanospheres and reduced graphene oxide incorporated SnO2 nanospheres for the detection of two important biomarkers such as decane and heptane from the exhaled breath of lung cancer patients. The as prepared materials are investigated in detail through various analytical techniques and the findings are consistent with each other. The sensing response of the proposed sensors were systematically investigated to enhance their sensing performance as a function of operating temperatures and gas concentration, and different analyte gases. The sensors showed maximum sensing response toward heptane and decane compared to other interfering gases such as hydrogen, carbon monoxide, acetone, ethanol, and methanol at 125 °C. The proposed sensors exhibit excellent detection range as low as 1 ppm with appreciably fast response and recovery time. Lung cancer patients may be easily screened using the proposed sensor, by detecting decane and heptane in their exhaled breath.
{"title":"SnO2/rGO nanocomposite for the detection of biomarkers of lung cancer","authors":"Arunkumar Shanmugasundaram, Dong-Weon Lee","doi":"10.1186/s40486-022-00154-7","DOIUrl":"10.1186/s40486-022-00154-7","url":null,"abstract":"<div><p>Metal oxide-based sensors have been widely used to detection biomarkers in exhaled breath for identification of various diseases such as asthma, diabetes, halitosis, and lung cancer. Herein, we proposed one step hydrothermal method for the preparation of SnO<sub>2</sub> nanospheres and reduced graphene oxide incorporated SnO<sub>2</sub> nanospheres for the detection of two important biomarkers such as decane and heptane from the exhaled breath of lung cancer patients. The as prepared materials are investigated in detail through various analytical techniques and the findings are consistent with each other. The sensing response of the proposed sensors were systematically investigated to enhance their sensing performance as a function of operating temperatures and gas concentration, and different analyte gases. The sensors showed maximum sensing response toward heptane and decane compared to other interfering gases such as hydrogen, carbon monoxide, acetone, ethanol, and methanol at 125 °C. The proposed sensors exhibit excellent detection range as low as 1 ppm with appreciably fast response and recovery time. Lung cancer patients may be easily screened using the proposed sensor, by detecting decane and heptane in their exhaled breath.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00154-7","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48501412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-09-09DOI: 10.1186/s40486-022-00155-6
Taeyeong Kim, Jungchul Lee
During deep reactive ion etching (DRIE), microscale etch masks with small opening such as trenches or holes suffer from limited aspect ratio because diffusion of reactive ions and free radicals become progressively difficult as the number of DRIE cycle increases. For this reason, high aspect ratio structures of microscale trenches or holes are not readily available with standard DRIE recipes and microscale holes are more problematic than trenches due to omnidirectional confinement. In this letter, we propose an optimization for fabrication of high aspect ratio microscale hole arrays with an improved cross-sectional etch profile. Bias voltage and inductively coupled plasma power are considered as optimization parameters to promote the bottom etching of the high aspect ratio hole array. In addition, flow rates of octafluorocyclobutane (C(_{4})F(_{8})) and sulfur hexafluoride (SF(_{6})) for passivation and depassivation steps, respectively, are considered as optimization parameters to reduce the etch undercut. As a result of optimization, the aspect ratio of 20 is achieved for 1.3 μm-diameter hole array and etch area reduction at the bottom relative to the top is improved to 21%.
在深度反应离子蚀刻(DRIE)过程中,随着DRIE循环次数的增加,反应离子和自由基的扩散变得越来越困难,因此具有小开口的微尺度蚀刻掩膜(如沟槽或孔)受到宽高比的限制。因此,高纵横比结构的微尺度沟槽或孔洞并不容易用标准的DRIE配方获得,而且由于全向限制,微尺度孔洞比沟槽更有问题。在这封信中,我们提出了一种优化的制造高纵横比微尺度孔阵列与改进的横截面蚀刻轮廓。以偏置电压和电感耦合等离子体功率为优化参数,促进高纵横比孔阵列的底蚀。此外,在钝化和脱钝化步骤中,分别考虑了八氟环丁烷(C (_{4}) F (_{8}))和六氟化硫(SF (_{6}))的流量作为降低蚀刻凹损的优化参数。优化后,直径1.3 μm的孔阵列的纵横比达到20,底部的蚀刻面积相对于顶部减少到21%.
{"title":"Optimization of deep reactive ion etching for microscale silicon hole arrays with high aspect ratio","authors":"Taeyeong Kim, Jungchul Lee","doi":"10.1186/s40486-022-00155-6","DOIUrl":"10.1186/s40486-022-00155-6","url":null,"abstract":"<div><p>During deep reactive ion etching (DRIE), microscale etch masks with small opening such as trenches or holes suffer from limited aspect ratio because diffusion of reactive ions and free radicals become progressively difficult as the number of DRIE cycle increases. For this reason, high aspect ratio structures of microscale trenches or holes are not readily available with standard DRIE recipes and microscale holes are more problematic than trenches due to omnidirectional confinement. In this letter, we propose an optimization for fabrication of high aspect ratio microscale hole arrays with an improved cross-sectional etch profile. Bias voltage and inductively coupled plasma power are considered as optimization parameters to promote the bottom etching of the high aspect ratio hole array. In addition, flow rates of octafluorocyclobutane (C<span>(_{4})</span>F<span>(_{8})</span>) and sulfur hexafluoride (SF<span>(_{6})</span>) for passivation and depassivation steps, respectively, are considered as optimization parameters to reduce the etch undercut. As a result of optimization, the aspect ratio of 20 is achieved for 1.3 μm-diameter hole array and etch area reduction at the bottom relative to the top is improved to 21%.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00155-6","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"65886617","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-08-22DOI: 10.1186/s40486-022-00153-8
Tai-Yong Kim, Min-Cheol Lim, Jeong-A Lim, Sung-Wook Choi, Min-Ah Woo
A microarray detection method based on on-chip signal amplification using terminal deoxynucleotidyl transferase (TdT) was developed to visualize pathogenic genes. Cyclic olefin copolymer (COC) substrate for microarrays was treated with oxygen plasma to induce hydrophilic surface properties. The capture probe DNA was immobilized on the COC surface by UV irradiation. The 3ʹ end of the capture probe DNA immobilized on the COC surface was modified with a phosphate group to provide resistance against the TdT reaction. Therefore, the TdT reaction was triggered only when the capture probe DNA acquired the target gene, and biotin-11-deoxyuridine triphosphate (b-dUTP) was continuously added to the 3ʹ end of the target gene. Thereafter, streptavidin-conjugated gold nanoparticles (s-AuNPs) tagged the poly uridine tails by the biotin–streptavidin interaction. The visual signal was amplified by silver enhancement in the presence of the s-AuNPs. The usefulness of this detection method was confirmed by analyzing four pathogens and allowing their visual identification.
{"title":"Microarray detection method for pathogen genes by on-chip signal amplification using terminal deoxynucleotidyl transferase","authors":"Tai-Yong Kim, Min-Cheol Lim, Jeong-A Lim, Sung-Wook Choi, Min-Ah Woo","doi":"10.1186/s40486-022-00153-8","DOIUrl":"10.1186/s40486-022-00153-8","url":null,"abstract":"<div><p>A microarray detection method based on on-chip signal amplification using terminal deoxynucleotidyl transferase (TdT) was developed to visualize pathogenic genes. Cyclic olefin copolymer (COC) substrate for microarrays was treated with oxygen plasma to induce hydrophilic surface properties. The capture probe DNA was immobilized on the COC surface by UV irradiation. The 3ʹ end of the capture probe DNA immobilized on the COC surface was modified with a phosphate group to provide resistance against the TdT reaction. Therefore, the TdT reaction was triggered only when the capture probe DNA acquired the target gene, and biotin-11-deoxyuridine triphosphate (b-dUTP) was continuously added to the 3ʹ end of the target gene. Thereafter, streptavidin-conjugated gold nanoparticles (s-AuNPs) tagged the poly uridine tails by the biotin–streptavidin interaction. The visual signal was amplified by silver enhancement in the presence of the s-AuNPs. The usefulness of this detection method was confirmed by analyzing four pathogens and allowing their visual identification.</p></div>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"10 1","pages":""},"PeriodicalIF":3.6,"publicationDate":"2022-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://mnsl-journal.springeropen.com/counter/pdf/10.1186/s40486-022-00153-8","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134878376","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}