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Frontiers in nanoparticles redefining enzyme immobilization: a review addressing challenges, innovations, and unlocking sustainable future potentials 纳米颗粒重新定义酶固定化的前沿:解决挑战,创新和解锁可持续未来潜力的综述
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-05-12 DOI: 10.1186/s40486-025-00228-2
Heidi M. Abdel-Mageed

Nanoparticles (NPs) are redefining enzyme immobilization, offering a paradigm shift in biocatalysis through precision engineering at the nanoscale. With their exceptional surface area, tunable porosity, and customizable functionalities, NPs provide unprecedented control over enzyme stability, activity, and adaptability, bridging the gap between molecular-scale interactions and industrial-scale applications. In the era of intelligent bioprocessing, how can NP-based immobilization strategies be optimized to drive the next frontier of sustainable and high-performance enzyme technologies? A deep understanding of NP structural diversity, interfacial chemistry, and enzyme-matrix interactions is crucial to unlocking their full potential. This review systematically explores emerging NP-based immobilization platforms, including cross-linked enzyme aggregates (CLEAs), covalent organic frameworks (COFs), nanoflowers, nanofibers, carbon nanotubes (CNTs), graphene oxide (GO), ionic liquids (ILs), and layered double hydroxides (LDHs), each offering tailored advantages for catalytic enhancement and process efficiency. The review outlines current advancements such as 3D printing and wearable biosensors, forecasts the integration of artificial intelligence and smart nano-biocatalysts, and envisions futuristic applications including bio-intelligent nano/micro-robotic systems and space biosensors. Challenges, such as upscaling limitations, nanotoxicity concerns, and environmental risks, are addressed to ensure safe and viable implementation. This review provides a structured roadmap on (I) enzyme immobilization advances using next-generation NPs, (II) challenges in scalability and safety, (III) sustainability benefits of enzyme-based industrial biocatalysis, and (IV) the emergence of intelligence, adaptability, and nanoscale precision immobilization technologies and AI-assisted design and optimization. These visionary approaches mark a paradigm shift toward dynamic, adaptive, and highly specialized, multifunctional nano-enzyme systems.

Graphical Abstract

纳米颗粒(NPs)正在重新定义酶固定化,通过纳米尺度的精密工程为生物催化提供了范式转变。凭借其独特的表面积、可调节的孔隙度和可定制的功能,NPs对酶的稳定性、活性和适应性提供了前所未有的控制,弥合了分子尺度相互作用和工业规模应用之间的差距。在智能生物处理时代,如何优化基于np的固定化策略,以推动可持续和高性能酶技术的下一个前沿?深入了解NP结构多样性、界面化学和酶-基质相互作用对于释放它们的全部潜力至关重要。本综述系统地探讨了新兴的基于纳米颗粒的固定化平台,包括交联酶聚集体(CLEAs)、共价有机框架(COFs)、纳米花、纳米纤维、碳纳米管(CNTs)、氧化石墨烯(GO)、离子液体(ILs)和层状双氢氧化物(LDHs),每种平台都为催化增强和工艺效率提供了独特的优势。该综述概述了当前的进展,如3D打印和可穿戴生物传感器,预测了人工智能和智能纳米生物催化剂的集成,并展望了未来的应用,包括生物智能纳米/微型机器人系统和空间生物传感器。解决了升级限制、纳米毒性问题和环境风险等挑战,以确保安全可行的实施。本综述提供了以下方面的结构化路线图:(I)使用下一代np的酶固定进展,(II)可扩展性和安全性方面的挑战,(III)基于酶的工业生物催化的可持续性效益,以及(IV)智能,适应性和纳米级精密固定技术的出现以及人工智能辅助设计和优化。这些有远见的方法标志着向动态、自适应、高度专业化、多功能纳米酶系统的范式转变。图形抽象
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引用次数: 0
Flexible multilayered skin health sensing platform for eyewear applications 用于眼镜应用的柔性多层皮肤健康传感平台
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-04-30 DOI: 10.1186/s40486-025-00226-4
Byeong-Sun Park, Sangmin Lee, Young-hwan Song, Pyungwoo Yeon, Min-gu Kim

Skin diseases are among the most prevalent health issues worldwide, and the prevalence of these diseases is increasing, driven by factors such as aging populations and urbanization-related infrastructure imbalance. As skin diseases become more widespread, the need for their early detection and proper management is gaining prominence, underscoring the importance of developing advanced real-time skin health monitoring technologies. In this study, we propose a flexible, multi-layered skin health monitoring platform capable of the real-time measurement of key indicators such as humidity, sweat secretion, and pH levels. The platform collects sweat from direct skin contact, providing real-time, noninvasive data on humidity, sweat secretion, and pH levels, which are transmitted to a smartphone for continuous monitoring. Sensors for this platform were fabricated using inkjet printing, which enables low-cost and straightforward manufacturing, and were integrated into a vertically stacked configuration designed to fit wearable forms, such as eyewear. In addition, each sensor was constructed using a flexible substrate, making the platform adaptable to various applications beyond skin health monitoring. This platform holds potential for broader use across diverse areas of healthcare and medical science, laying the groundwork for technologies that enable continuous physiological monitoring to advance fundamental research and facilitate practical solutions.

皮肤病是世界上最普遍的健康问题之一,在人口老龄化和城市化相关基础设施失衡等因素的推动下,这些疾病的患病率正在上升。随着皮肤病变得越来越普遍,对其早期发现和适当管理的需求日益突出,强调了开发先进的实时皮肤健康监测技术的重要性。在这项研究中,我们提出了一个灵活的、多层次的皮肤健康监测平台,能够实时测量湿度、汗液分泌和pH值等关键指标。该平台收集直接接触皮肤的汗液,提供实时、无创的湿度、汗液分泌和pH值数据,并将这些数据传输到智能手机上进行持续监测。该平台的传感器是使用喷墨打印制造的,这使得低成本和简单的制造成为可能,并且集成到一个垂直堆叠的配置中,以适应可穿戴形式,如眼镜。此外,每个传感器都使用柔性基板构建,使该平台适用于皮肤健康监测以外的各种应用。该平台在医疗保健和医学科学的各个领域具有更广泛的应用潜力,为实现持续生理监测的技术奠定基础,从而推进基础研究和促进实际解决方案。
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引用次数: 0
Advances in inorganic conductive material- and organic conductive polymer-based resistive gas sensors for room-temperature H2S detection 室温H2S检测用无机导电材料和有机导电聚合物电阻式气体传感器的研究进展
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-04-22 DOI: 10.1186/s40486-025-00225-5
Leilei Wang, Jungwook Choi

Hydrogen sulfide (H2S) is a colorless, flammable, and highly toxic gas that underscores the need for cost-effective, energy-efficient, simple, convenient, and durable detection methods. Resistive gas sensors based on inorganic conductive materials and organic conductive polymers can effectively address these requirements. This review discusses the hazards of H2S gas and reviews sensors capable of detecting H2S at room temperature, including those based on metal oxides, MXene/carbon materials, and p-type conductive polymers. It explores the mechanisms behind their enhanced response at room temperature, such as utilizing special structures (e.g., porous/hollow nanospheres, nanowires, nanotubes, and nanocapsules) to increase the effective surface area of the sensing materials, employing metal particles sensitization to improve gas adsorption, and leveraging heterojunctions to amplify the response. Additionally, this review highlights the limitations of these sensors and provides insights for the further development of low-power resistive H2S gas sensors.

硫化氢(H2S)是一种无色、易燃、剧毒的气体,因此需要具有成本效益、高能效、简单、方便和耐用的检测方法。基于无机导电材料和有机导电聚合物的电阻式气体传感器可以有效地满足这些要求。本文讨论了H2S气体的危害,并介绍了能够在室温下检测H2S的传感器,包括基于金属氧化物、MXene/碳材料和p型导电聚合物的传感器。它探索了室温下增强响应的机制,如利用特殊结构(如多孔/空心纳米球、纳米线、纳米管和纳米胶囊)来增加传感材料的有效表面积,利用金属颗粒增敏来改善气体吸附,利用异质结来放大响应。此外,本文还强调了这些传感器的局限性,并为低功耗电阻式H2S气体传感器的进一步开发提供了见解。
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引用次数: 0
Structural design strategies of triboelectric nanogenerators for omnidirectional wind energy harvesting 面向全方位风能收集的摩擦纳米发电机结构设计策略
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-04-12 DOI: 10.1186/s40486-025-00224-6
Jingu Jeong, Eunhwan Jo, Jong-An Choi, Yunsung Kang, Soonjae Pyo

Omnidirectional wind energy harvesting has gained increasing attention as a means of harnessing the inherently variable and multidirectional flows encountered in real-world environments. Triboelectric nanogenerators (TENGs), which leverage contact electrification and electrostatic induction to convert mechanical motion into electrical power, are particularly well-suited for such applications due to their ability to operate effectively under low-speed and intermittent wind conditions. In this review, we first outline the fundamental triboelectric processes and operating modes that underpin TENG functionality, emphasizing how their low inertia and high-voltage outputs make them compatible with a wide range of wind profiles. We then discuss three predominant device classifications—rotary, aeroelastic, and rolling-based—highlighting their distinct mechanical configurations and capacities for omnidirectional capture. Key examples illustrate how strategically designed rotor geometries, flutter-driven films, and rolling elements can maximize contact–separation events and enhance triboelectric generation under complex airflow patterns. Finally, we examine the major obstacles faced by TENG-based harvesters, including durability, hybrid system design, and intelligent power management. Strategies to overcome these barriers involve wear-resistant materials, adaptive architectures, and advanced circuitry, offering TENG solutions that are feasible in micro- or off-grid scenarios.

全方位风能收集作为一种利用现实环境中遇到的内在可变和多向流动的手段,越来越受到关注。摩擦电纳米发电机(TENGs)利用接触通电和静电感应将机械运动转化为电能,特别适合于这种应用,因为它们能够在低速和间歇性风力条件下有效运行。在这篇综述中,我们首先概述了支撑TENG功能的基本摩擦电过程和工作模式,强调了它们的低惯性和高电压输出如何使它们与广泛的风廓线兼容。然后,我们讨论了三种主要的设备分类-旋转,气动弹性和滚动-强调了它们独特的机械结构和全方位捕获的能力。关键的例子说明了战略性设计的转子几何形状,颤振驱动薄膜和滚动元件如何最大化接触分离事件并增强复杂气流模式下的摩擦发电。最后,我们研究了基于teng的收割机面临的主要障碍,包括耐久性、混合动力系统设计和智能电源管理。克服这些障碍的策略包括耐磨材料、自适应架构和先进的电路,提供在微型或离网情况下可行的TENG解决方案。
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引用次数: 0
Innovative green and bio-based approaches for photosensitive nanoparticle synthesis: a review on methodologies, characterization, and applications 光敏纳米颗粒合成的创新绿色和生物基方法:方法、表征和应用综述
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-03-24 DOI: 10.1186/s40486-025-00223-7
Fatemeh Zanbili, Ahmad Poursattar Marjani

The increasing demand for sustainable and eco-friendly technologies has recently led to the development of green and bio-based synthesis methods for a broad range of nanoparticles (NPs). This is because these methods are non-toxic, biocompatible, and cost-effective. Photosensitive nanoparticles (PSNPs) have gained popularity due to their photo-responsive properties. PSNPs have also been found to be promising nanomaterials with applications in optoelectronics, photocatalysis, photovoltaics, bioimaging, drug delivery, and cancer treatment. However, conventional synthesis methods for PSNPs raise concerns about their environmental impact. To address these challenges, researchers have explored alternative synthesis approaches for PSNPs. This review comprehensively evaluates green and bio-based synthesis methods and their advantages and limitations for PSNPs and highlights their unique properties and applications in various fields. It also covers general concepts about PSNPs, their mechanism of action, characterization techniques, and challenges that have not been discussed in detail in previous studies. Moreover, this review uniquely addresses the challenges and potential solutions for scaling up green synthesis methods, an aspect often overlooked in the existing literature. By connecting fundamental research with industrial-scale applications, this review offers a comprehensive perspective on the sustainable production and various applications of PSNPs, emphasizing their potential in multiple fields.

Graphical Abstract

近年来,对可持续和环保技术的需求不断增长,导致了各种纳米颗粒(NPs)的绿色和生物基合成方法的发展。这是因为这些方法是无毒的,生物相容性和成本效益。光敏纳米粒子(PSNPs)由于其光响应特性而受到广泛的关注。psnp在光电子学、光催化、光电、生物成像、药物传递和癌症治疗等领域也有很好的应用前景。然而,传统的psnp合成方法引起了人们对其环境影响的担忧。为了解决这些挑战,研究人员已经探索了psnp的替代合成方法。本文综述了绿色和生物基合成psnp的方法及其优缺点,重点介绍了其独特的性质和在各个领域的应用。它还涵盖了关于psnp的一般概念,它们的作用机制,表征技术,以及在以前的研究中没有详细讨论的挑战。此外,本综述独特地解决了扩大绿色合成方法的挑战和潜在解决方案,这是现有文献中经常被忽视的一个方面。本文通过将基础研究与工业规模应用相结合,对psnp的可持续生产和各种应用进行了综述,强调了其在多个领域的潜力。图形抽象
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引用次数: 0
Self-powered gas sensor based on triboelectric nanogenerators (TENG): a comparative review of sensing mechanisms 基于摩擦电纳米发电机(TENG)的自供电气体传感器:传感机制的比较综述
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-03-01 DOI: 10.1186/s40486-025-00222-8
Sungjong Lee, Hee-Jin Ko, Jongbaeg Kim

With the advancements of industrialization and the Internet of Things (IoT), the demand for gas sensing technologies has grown significantly. However, conventional gas sensors, which rely on external power supplies, face limitations in lifespan, capacity, and replacement convenience. As a result, interest in self-powered solutions has grown, with triboelectric nanogenerators (TENGs) emerging as a promising alternative. TENG-based self-powered gas sensors utilize triboelectricity, enabling gas detection without external power. Notably, TENGs offer the unique advantage of integrating energy harvesting and gas detection into a single device. This review categorizes the sensing mechanisms of TENG-based gas sensors into two main types and introduces each mechanism in detail. Through case studies, it provides a comprehensive understanding of these gas sensors. Additionally, it aims to analyze the challenges faced by TENG-based gas sensors and offer new insights into research strategies, ultimately contributing to the advancement of this technology.

随着工业化和物联网(IoT)的发展,对气体传感技术的需求显著增长。然而,传统的气体传感器依赖外部电源,在使用寿命、容量和更换便利性方面存在限制。因此,人们对自供电解决方案的兴趣越来越大,摩擦电纳米发电机(TENGs)成为一种有前途的替代方案。基于teng的自供电气体传感器利用摩擦电,无需外部电源即可进行气体检测。值得注意的是,teng提供了将能量收集和气体检测集成到单个设备中的独特优势。本文将基于teng的气体传感器的传感机制分为两大类,并对每种传感机制进行了详细介绍。通过案例研究,它提供了这些气体传感器的全面了解。此外,它旨在分析基于teng的气体传感器面临的挑战,并为研究策略提供新的见解,最终为该技术的进步做出贡献。
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引用次数: 0
A lightweight resonance tracking system for piezoresistive microcantilever sensors 压阻式微悬臂传感器的轻量化共振跟踪系统
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2025-02-26 DOI: 10.1186/s40486-025-00221-9
Andi Setiono,  Nelfyenny,  Suryadi,  Qomaruddin, Wilson Ombati Nyang’au, Erwin Peiner

A lightweight resonance tracking system designed for precise monitoring of resonant frequency shifts in microcantilever sensors is introduced. The system integrates a Phase-Locked Loop (PLL)-based technique with a Python-based interface for real-time control and visualization. A tipless microcantilever sensor was tested under relative humidity (RH) conditions ranging from 63% to 90% to experimentally validate the system. The system demonstrated a sensitivity of 1.082 Hz/% RH and a Limit of Detection (LOD) of 1.89% RH. The silicon dioxide ((SiO_2)) surface of the microcantilever is hygroscopic, allowing water vapor adsorption and causing frequency shifts. This effect is more pronounced at high humidity levels (>80% RH) due to multilayer adsorption. These results confirm the reliability and precision of the system in detecting environmental changes. The findings highlight the potential of the developed system for applications in environmental monitoring, healthcare diagnostics, and industrial chemical sensing.

介绍了一种用于精确监测微悬臂传感器谐振频移的轻量化谐振跟踪系统。该系统集成了基于锁相环(PLL)的技术和基于python的接口,用于实时控制和可视化。在相对湿度(RH)为63% to 90% to experimentally validate the system. The system demonstrated a sensitivity of 1.082 Hz/% RH and a Limit of Detection (LOD) of 1.89% RH. The silicon dioxide ((SiO_2)) surface of the microcantilever is hygroscopic, allowing water vapor adsorption and causing frequency shifts. This effect is more pronounced at high humidity levels (>80% RH) due to multilayer adsorption. These results confirm the reliability and precision of the system in detecting environmental changes. The findings highlight the potential of the developed system for applications in environmental monitoring, healthcare diagnostics, and industrial chemical sensing.
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引用次数: 0
Surface roughness impact of 3D Ti-alloy printed WR-10 waveguide and rectangular horn antenna at W-band (75-110 GHz) w波段(75 ~ 110 GHz) 3D钛合金打印WR-10波导和矩形喇叭天线表面粗糙度影响
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2024-12-19 DOI: 10.1186/s40486-024-00220-2
Cheolbok Kim, Ryan Cadwell, Anthony Ngoma, Zhong Yang, Md Mufassal Ahmad, Jungkwun Kim, Sung Jin Kim

To investigate the effect of the surface roughness of 3D-metal-printed sub-THz components, the WR-10 3-inch-long waveguide and 24 dBi rectangular horn antenna were 3D-metal-printed using a titanium alloy powder and a high-resolution 3D metal printer. The characterized surface roughness of the printed components was 17.27 µm in RMS from a 3D optical surface profiler, and a nodule ratio of 7.89 µm and surface ratio of 1.52 for Huray model from the analyzed SEM images. The measured results of the 3D-metal-printed waveguide and rectangular horn antenna were compared with the ones of commercial waveguide and horn antenna having the same shapes. The 3D-metal-printed waveguide has 4.02 dB higher loss than the commercial waveguide, which may be caused by an ohmic loss of 0.85 dB and a surface roughness loss of 2.81 dB. The 3D-metal-printed horn antenna has 2 dB higher loss then the commercial horn antenna, which may be caused by an ohmic loss of 0.2 dB, surface roughness of 0.1 dB and fabrication tolerance loss of 1.7 dB. The loss separation was done from the EM simulation by changing the conductor material and surface roughness.

为了研究金属3D打印亚太赫兹组件表面粗糙度的影响,利用钛合金粉末和高分辨率金属3D打印机对WR-10 3英寸长波导和24 dBi矩形喇叭天线进行了金属3D打印。3D光学表面轮廓仪表征的打印部件表面粗糙度的均方根值为17.27µm,分析的SEM图像显示,Huray模型的结节比为7.89µm,表面比为1.52。将3d金属打印波导和矩形喇叭天线的测量结果与相同形状的商用波导和喇叭天线的测量结果进行了比较。金属3d打印波导的损耗比商用波导高4.02 dB,这可能是由于欧姆损耗为0.85 dB,表面粗糙度损失为2.81 dB。金属3d打印喇叭天线的损耗比商用喇叭天线高2 dB,这可能是由于欧姆损耗为0.2 dB,表面粗糙度为0.1 dB,制造公差损耗为1.7 dB。通过改变导体材料和表面粗糙度来实现损耗分离。
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引用次数: 0
Phytochemical analysis and biogenic synthesis of silver nanoparticles from Phlomis bracteosa Royle ex Benth. and screening of their antimicrobial and antioxidant potential 苞片蕨植物化学分析及纳米银的生物合成。筛选它们的抗菌和抗氧化能力
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2024-12-17 DOI: 10.1186/s40486-024-00218-w
Jagriti Rana, Ankush Sharma, Jyoti Rana, Anand Sagar

The Phlomis bracteosa Royle ex Benth. is one of the medicinal plants used by the people of the north-western Himalayan region, India. Initially, phytochemical components of this plants have been evaluated by estimating total phenolic, flavonoid and tannin contents, and also by GCMS analysis in acetone and methanol solvents, which listed twenty-four compounds in acetone and twenty-two in methanol extract with different percentage peak areas. Later, silver nanoparticles (SNPs) were biogenically synthesized from the acetone extract of the same plant. The formation of SNPs was observed with UV-vis spectroscopy with surface plasmon resonance (SPR) at 438 nm. Further, the Fourier transform infrared spectroscopy suggested the presence of carbonyls, nitrogenous compounds and different types of hydrocarbons in SNPs. The field emission scanning electron microscopy (FESEM) and the high-resolution transmission electron microscopy suggested the spherical shape of SNPs with average size of 43.53 ± 0.71 nm. On the other hand, the energy dispersive X-ray spectroscopy depicted Ag as major element, the selected area electron diffraction and the X-ray diffraction supported crystalline nature of synthesized SNPs. The antimicrobial and antioxidant activities of both extracts (acetone and methanol) and SNPs were also studied. For the antimicrobial activity analysis, disk diffusion and broth microdilution methods were selected which displayed that plant extracts (PEs) exhibited better activity against Gram-positive bacteria and were inactive against Escherichia coli, while synthesized SNPs displayed better antimicrobial activity against all selected microorganisms. In case of antioxidant activity, by following two methods i.e., DPPH radicle scavenging and reducing power methods again SNPs expressed better antioxidant property with lower IC50 value (40.55 µg/mL) than PEs i.e., 93.48 µg/mL (acetone) and 92.57 µg/mL (methanol). Therefore, biosynthetic SNPs can be a useful strategy in the biomedical sector.

苞片蕨(Phlomis bracteosa Royle)前底。是印度西北喜马拉雅地区人们使用的药用植物之一。通过测定其总酚、类黄酮和单宁含量,以及在丙酮和甲醇溶剂中进行气相色谱分析,对其化学成分进行了初步评价,其中丙酮提取物中有24种化合物,甲醇提取物中有22种化合物具有不同的峰面积百分比。随后,从同一种植物的丙酮提取物中生物合成纳米银(SNPs)。在438 nm处用表面等离子体共振(SPR)紫外-可见光谱观察snp的形成。傅里叶红外光谱分析表明,SNPs中存在羰基、含氮化合物和不同类型的碳氢化合物。场发射扫描电镜(FESEM)和高分辨率透射电镜显示snp为球形,平均尺寸为43.53±0.71 nm。另一方面,能量色散x射线谱分析表明银是主元素,选择区电子衍射和x射线衍射支持了合成snp的结晶性。研究了两种提取物(丙酮和甲醇)的抑菌活性和抗氧化活性。结果表明,植物提取物(PEs)对革兰氏阳性菌的抑菌活性较好,对大肠杆菌的抑菌活性较低,而合成的snp对所选微生物均有较好的抑菌活性。在抗氧化性能方面,通过DPPH自由基清除和还原力两种方法,SNPs的抗氧化性能也比pe的93.48µg/mL(丙酮)和92.57µg/mL(甲醇)表现出更低的IC50值(40.55µg/mL)。因此,生物合成snp可能是生物医学领域的一个有用的策略。
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引用次数: 0
A review of the mechanism and optimization of metal-assisted chemical etching and applications in semiconductors 综述了金属辅助化学蚀刻的机理、优化及其在半导体中的应用
IF 4.7 Q2 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2024-12-11 DOI: 10.1186/s40486-024-00217-x
Kibum Jung, Jungchul Lee

Metal-Assisted Chemical Etching (MACE) is a technique for precisely forming nanostructures on semiconductor substrates, and it is actively researched in various fields such as electronic devices, optoelectronic devices, energy storage, and conversion systems. This process offers economic efficiency and effectiveness because it can be performed in a simple chemical laboratory environment without the need for expensive equipment. Particularly, MACE is recognized as an excellent technology for forming various nanostructures due to its advantage of precisely controlling the shape, size, and orientation of nanostructures compared to traditional etching techniques. MACE operates by inducing electrochemical reactions using a metal catalyst, selectively etching the semiconductor surface in a mixed solution of hydrofluoric acid (HF) and hydrogen peroxide ((hbox {H}_2hbox {O}_2)). The metal catalyst reacts with the oxidant to generate holes, which are injected into the semiconductor substrate to promote oxidation reactions. The oxidized material is then dissolved by HF, progressing the etching process. Precise nanostructures are formed only in the areas with the metal catalyst, and the etching results vary depending on the type, thickness, and deposition method of the catalyst. In this study, we comprehensively review the mechanism of the MACE process, the patterns of nanostructure formation according to the characteristics of catalysts and substrates, and the influence of process variables. We also analyze application cases of MACE in various semiconductor substrates such as silicon (Si), germanium (Ge), indium phosphide (InP), and gallium arsenide (GaAs), and examine the latest research trends and applications utilizing MACE. Nanostructures formed through MACE have the potential to maximize the performance of next-generation semiconductor and optoelectronic devices, and research in this area is expected to greatly contribute to the future development of the semiconductor industry.

金属辅助化学蚀刻(Metal-Assisted Chemical Etching, MACE)是一种在半导体基底上精确形成纳米结构的技术,在电子器件、光电器件、储能和转换系统等领域得到了积极的研究。该过程提供了经济效率和有效性,因为它可以在简单的化学实验室环境中进行,而不需要昂贵的设备。特别是,与传统的蚀刻技术相比,MACE具有精确控制纳米结构的形状、尺寸和方向的优势,被认为是形成各种纳米结构的一种优秀技术。MACE的工作原理是使用金属催化剂诱导电化学反应,选择性地在氢氟酸(HF)和过氧化氢的混合溶液中蚀刻半导体表面((hbox {H}_2hbox {O}_2))。所述金属催化剂与氧化剂发生反应生成空穴,所述空穴注入半导体衬底以促进氧化反应。然后用HF溶解被氧化的材料,进行蚀刻过程。精确的纳米结构只在有金属催化剂的区域形成,蚀刻结果取决于催化剂的类型、厚度和沉积方法。在本研究中,我们全面回顾了MACE工艺的机理,根据催化剂和底物的特点,纳米结构的形成模式,以及工艺变量的影响。我们还分析了MACE在硅(Si)、锗(Ge)、磷化铟(InP)和砷化镓(GaAs)等各种半导体衬底中的应用案例,并探讨了MACE的最新研究趋势和应用。通过MACE形成的纳米结构有可能最大限度地提高下一代半导体和光电子器件的性能,这一领域的研究有望为半导体产业的未来发展做出巨大贡献。
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引用次数: 0
期刊
Micro and Nano Systems Letters
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