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Dielectric-Boosted Gliding Arc Discharge for N2 Fixation into NOx 用于将 N2 固定为氮氧化物的介质增压滑动电弧放电
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-05-13 DOI: 10.1007/s11090-024-10474-8
Xiangyi Meng, Na Lu, Kefeng Shang, Nan Jiang

Plasma nitrogen fixation technology is of great significance in solving the problem of nitrogen fertilizer resource shortage, saving energy and reducing carbon emission, promoting sustainable development of agriculture and promoting resource recycling. To enhance the efficiency and treatment capacity of the two-dimensional, blade-type gliding arc nitrogen fixation reaction, a dielectric-boosted gliding arc discharge reactor with a 50-mm-diameter quartz dielectric (DBGADΦ50) was used to conduct N2 fixation into NOx. The impact of reactor parameters and gas parameters on the nitrogen fixation reaction was systematically investigated in this study. The findings revealed that the DBGADΦ50 significantly improved the nitrogen fixation effect. At a specific input energy of 2.7 kJ/L, the concentration of NOx generated by the dielectric-boosted gliding arc air discharge was 1.12 times that of the conventional gliding arc discharge (GAD). By utilizing the DBGADΦ50 reactor, the energy efficiency of 6.83 g/kW h was achieved at a gas flow rate of 5.6 L/min. Appropriately increasing O2 concentration favors the production of NOx. In the DBGADΦ50, the NOx concentration was 1.33 times higher than that in the air atmosphere when the added O2 volume fraction reached 30%. Performance can be further enhanced by adding TiO2 catalyst particles to the surface of the quartz dielectric to form a catalyst layer approximately 5 mm thick. At an O2 concentration of 30%, the DBGADΦ50 reactor loaded with TiO2 increased NOx concentration by 26% and energy efficiency by 49%, respectively, resulting in an efficiency of 14.9 g/kW h compared to the case without catalyst.

等离子体固氮技术对于解决氮肥资源短缺问题、节能减排、促进农业可持续发展和资源循环利用具有重要意义。为提高二维叶片式滑弧固氮反应的效率和处理能力,采用直径为 50 毫米的石英介质(DBGADΦ50)的介质增压滑弧放电反应器进行 N2 固氮为 NOx 的反应。本研究系统地考察了反应器参数和气体参数对固氮反应的影响。研究结果表明,DBGADΦ50 能显著提高固氮效果。在比输入能量为 2.7 kJ/L 时,电介质增压滑弧气放电产生的氮氧化物浓度是传统滑弧气放电(GAD)的 1.12 倍。利用 DBGADΦ50 反应器,在气体流量为 5.6 L/min 的情况下,能效达到 6.83 g/kW h。适当增加氧气浓度有利于氮氧化物的生成。在 DBGADΦ50 中,当添加的氧气体积分数达到 30% 时,氮氧化物浓度是空气中的 1.33 倍。在石英电介质表面添加 TiO2 催化剂颗粒,形成约 5 毫米厚的催化剂层,可进一步提高性能。在氧气浓度为 30% 的情况下,与不添加催化剂的情况相比,添加了 TiO2 的 DBGADΦ50 反应器的氮氧化物浓度提高了 26%,能效提高了 49%,效率达到 14.9 g/kW h。
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引用次数: 0
Production of Alkaline Plasma Activated Tap Water Using Different Plasma Forming Gas at Sub-Atmospheric Pressure 在亚大气压下使用不同的等离子体形成气体生产碱性等离子体活化自来水
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-05-10 DOI: 10.1007/s11090-024-10464-w
Vikas Rathore, Karaket Watanasit, Suttirak Kaewpawong, Dhammanoon Srinoumm, Arlee Tamman, Dheerawan Boonyawan, Mudtorlep Nisoa

The present study demonstrates the successful production of alkaline plasma-activated tap water (PATW), effectively addressing the challenge of acidity in traditional PATW for a range of applications. Through precise control of plasma-forming gases (oxygen, air, argon) and process parameters, particularly by producing PATW under sub-atmospheric pressure conditions, it becomes possible to shift the pH of acidic PATW towards the alkaline range. This transformation enhances its suitability for applications like agriculture, aquaculture, sterilization, wound healing, disinfection, and food preservation, etc.

The investigation encompassed the characterization of plasma and the identification of various plasma species/radicals. The impact of different plasma-forming gases on the pH of PATW and the concentration of reactive species in PATW was thoroughly analyzed. Plasma generated using oxygen and argon resulted in the production of reducing or alkaline PATW, while the use of air and air-argon mixtures led to an acidic or oxidizing nature.

The study also discussed the stability of nitrate ions, nitrite ions, and hydrogen peroxide in PATW, shedding light on their behavior over varying plasma treatment times and plasma-forming gas. Finally, the investigation explored the effects of gas flow rates, gas pressures, water volume, and plasma discharge powers on the concentration of H2O2 in PATW, providing valuable insights into optimizing the production process.

本研究展示了碱性等离子活化自来水(PATW)的成功生产,有效地解决了传统等离子活化自来水在一系列应用中的酸性难题。通过精确控制等离子体形成气体(氧气、空气、氩气)和工艺参数,特别是在亚大气压条件下生产 PATW,可以将酸性 PATW 的 pH 值转变为碱性范围。这种转变提高了其在农业、水产养殖、杀菌、伤口愈合、消毒和食品保鲜等应用领域的适用性。研究还深入分析了不同等离子体形成气体对 PATW 酸碱度和 PATW 中活性物质浓度的影响。研究还讨论了硝酸根离子、亚硝酸根离子和过氧化氢在 PATW 中的稳定性,揭示了它们在不同的等离子处理时间和等离子形成气体中的行为。最后,研究还探讨了气体流速、气体压力、水量和等离子体放电功率对 PATW 中 H2O2 浓度的影响,为优化生产工艺提供了宝贵的见解。
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引用次数: 0
Critical Considerations in Power Measurements for the Precise Estimation of Energy Costs in Plasma NOx Synthesis 等离子氮氧化物合成中精确估算能源成本的功率测量关键考虑因素
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-05-09 DOI: 10.1007/s11090-024-10472-w
Ayman A. Abdelaziz, Yoshiyuki Teramoto, Dae-Yeong Kim, Tomohiro Nozaki, Hyun-Ha Kim

The great advantage of plasma technology in harnessing abundant clean energy for electrifying and decentralizing the chemical industry holds the promise of attaining carbon neutrality. Therefore, recent research efforts have been dedicated to reducing the energy costs of plasma processes to facilitate the commercialization of this technology. However, it has been noted an inconsistency in reporting energy costs across the literature resulted from inaccurate estimation of power consumption within the system, leading to the misevaluation of the process, its underlying mechanism, and the significance of critical factors. This study comprehensively addresses these challenges by discussing and refining methods for estimating power consumption in a plasma system. Insights are drawn from our ongoing research in plasma NOx synthesis, specifically a thorough analysis of the discharge dynamics in a recently developed reactor “high-frequency spark discharge” using a high-speed camera, ICCD camera, and high-performance oscilloscope at various pulse widths of the applied voltage. The investigation revealed the importance of accounting for the post-spark period in the voltage cycle during power estimation, as it demonstrates an influence on NOx synthesis. Furthermore, the study highlighted and addressed critical errors in power measurement and energy cost estimation in the literature. It is found that a significant error, exceeding ± 70%, arises from overlooking signals delay in the setup and improper adjustment of oscilloscope functions, particularly channel impedance, data averaging, bandwidth, and sampling rate. This paper serves as a valuable guide towards establishing standardized measurements toward the precise estimation of energy costs in plasma processes.

等离子体技术在利用丰富的清洁能源实现化工行业电气化和分散化方面具有巨大优势,有望实现碳中和。因此,最近的研究工作致力于降低等离子工艺的能源成本,以促进该技术的商业化。然而,人们注意到,由于对系统内功耗的估算不准确,导致文献中对能源成本的报告不一致,从而对工艺、其基本机制和关键因素的重要性造成错误评估。本研究通过讨论和改进等离子体系统功耗的估算方法,全面应对了这些挑战。本研究从我们正在进行的等离子体氮氧化物合成研究中获得启发,特别是使用高速摄像机、ICCD 摄像机和高性能示波器,在不同的施加电压脉冲宽度下,对最近开发的 "高频火花放电 "反应器中的放电动态进行了全面分析。调查显示,在功率估算过程中,考虑电压周期中的后火花期非常重要,因为它对氮氧化物的合成有影响。此外,研究还强调并解决了文献中功率测量和能源成本估算的关键误差。研究发现,由于在设置过程中忽略了信号延迟,以及对示波器功能(尤其是通道阻抗、数据平均化、带宽和采样率)的不当调整,造成了超过 ± 70% 的重大误差。本文对建立标准化测量方法以精确估算等离子过程中的能源成本具有重要指导意义。
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引用次数: 0
Diverse Texturing Characteristics Through Metal-Assisted Plasma Etching with Silver Nanowires 利用银纳米线进行金属辅助等离子体蚀刻实现多样化纹理特征
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-04-23 DOI: 10.1007/s11090-024-10469-5
Dong-Geon Lee, Hyun-Seung Ryu, Mi-Jin Jin, Doo-Seung Um, Chang-Il Kim

The process of texturing silicon surfaces is critical for enhancing the performance of complementary metal–oxide–semiconductor image sensors that utilize silicon-based photodetectors. Traditional wet etching methods using strong acids or alkaline solutions have been commonly used but present challenges in precision, particularly for microscopic devices. As a viable alternative, dry etching processes using patterned metals and plasma are being explored. However, extensive studies across various metals are necessary. This study introduces a silicon nanotexturing process using silver nanowires and Cl2-based plasma. The etching mechanism involves accelerated etching through eddy currents and hole injection coupled with a diffusion phenomenon of silver. In this study, we examined variations in the etching profile with respect to etching time, upper and bottom radio-frequency powers, and process pressure. Additionally, we analyzed the effects of ion bombardment, enhanced by the introduction of Ar gas. The findings are expected to significantly contribute to the improvement of micro-optoelectronic devices.

硅表面纹理加工工艺对于提高使用硅基光电探测器的互补金属氧化物半导体图像传感器的性能至关重要。传统的湿法蚀刻通常使用强酸或碱性溶液,但在精度方面存在挑战,尤其是对于微观器件而言。作为一种可行的替代方法,人们正在探索使用图案化金属和等离子体的干蚀刻工艺。不过,有必要对各种金属进行广泛研究。本研究介绍了一种使用银纳米线和 Cl2 等离子体的硅纳米蚀刻工艺。蚀刻机制包括通过涡流和孔注入加速蚀刻,以及银的扩散现象。在这项研究中,我们研究了蚀刻曲线随蚀刻时间、上下射频功率和工艺压力的变化。此外,我们还分析了离子轰击的影响,并通过引入氩气予以加强。预计这些研究结果将大大有助于微光电器件的改进。
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引用次数: 0
One-Stage Method for Removing Dyes under the Action of Underwater Plasma and Ferrites of Cobalt, Nickel, and Titanium 在水下等离子体和钴、镍和钛铁氧体作用下去除染料的一步法
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-04-23 DOI: 10.1007/s11090-024-10471-x
Anna Khlyustova, Nikolay Sirotkin

Pulsed underwater direct current discharge is considered as a tool for a one-step process for ferrite synthesis and organic dye removal. The formation of cobalt, nickel and titanium ferrites during the discharge firing process was confirmed by methods of dynamic light scattering and X-ray phase analysis. The transformation of dye molecules (fluorescein, methylene green) during the combined action of plasma and ferrites was detected by UV absorption spectroscopy. The contributions of the separate action of plasma and ferrites to the process of dye removal from the solution were investigated. It was found that the synthesized structures have a high sorption capacity. It was found that fluorescein can be used as an indicator for the presence of nickel ferrites.

脉冲水下直流放电被认为是一步法合成铁氧体和去除有机染料的工具。动态光散射和 X 射线相分析方法证实了放电烧制过程中钴、镍和钛铁氧体的形成。在等离子体和铁氧体的共同作用下,染料分子(荧光素、亚甲基绿)的转化是通过紫外吸收光谱法检测的。研究了等离子体和铁氧体的单独作用对从溶液中去除染料过程的贡献。结果发现,合成的结构具有很高的吸附能力。研究还发现荧光素可用作镍铁氧体存在的指示剂。
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引用次数: 0
Plasma Bubble Column Reactor: A High Throughput Reactor Design for Water Treatment 等离子泡柱反应器:用于水处理的高通量反应器设计
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-04-22 DOI: 10.1007/s11090-024-10470-y
Mikhail Vasilev, Robert Stephens, Meredith Muller, Selma Mededovic Thagard

Plasma-based water treatment (PWT) is a promising technology that can degrade various emerging contaminants. However, PWT application on an industrially viable scale is hindered by the lack of an efficient reactor design that combines enhanced plasma-liquid contact with high liquid throughput. This work investigates the applicability of a bubble column gas–liquid contactor to PWT. A pulsed plasma bubble column reactor with a concentric rod-cylinder electrode configuration was used to correlate contaminant removal performance with the gas–liquid contact parameters of the bubble column. A surfactant, rhodamine B dye, and a nonsurfactant, caffeine, were used as model contaminants at µM concentration levels. The bubble column characteristics, i.e., gas holdup, bubble size distribution, and gas–liquid area, were measured as a function of superficial gas velocity using image-based methods. Degradation rates of both contaminants increased with gas flowrate. For caffeine, the increase was attributed to intensified bulk liquid mixing, while dye degradation increased due to the increased gas–liquid area. Ultimately, we show that bubble column contactors significantly improve the utilization of plasma-generated reactive species toward contaminant degradation by distributing them over a large contact area. As a result, a better match between the plasma species interfacial flux and the interfacial contaminant concentration leads to improved treatment energy efficiency. Typical degradation energy efficiencies were ~ 10 g/kWh for caffeine and ~ 60 g/kWh for rhodamine B.

基于等离子体的水处理技术(PWT)是一项前景广阔的技术,可以降解各种新出现的污染物。然而,由于缺乏将增强等离子体-液体接触与高液体吞吐量相结合的高效反应器设计,阻碍了 PWT 在工业规模上的应用。这项工作研究了气泡柱气液接触器在压水试验中的适用性。采用同心杆-圆柱电极配置的脉冲等离子体泡柱反应器,将污染物去除性能与泡柱的气液接触参数相关联。以表面活性剂罗丹明 B 染料和非表面活性剂咖啡因为模型污染物,浓度为 µM。利用基于图像的方法测量了气泡柱的特性,即气体容纳量、气泡大小分布和气液面积与表面气体速度的函数关系。两种污染物的降解率都随着气体流速的增加而增加。咖啡因的降解率增加是由于散装液体混合加剧,而染料的降解率增加则是由于气液面积增大。最终,我们发现气泡柱接触器通过将等离子体产生的反应物分布在较大的接触面积上,大大提高了等离子体对污染物降解的利用率。因此,等离子体物种界面通量与界面污染物浓度之间的更好匹配可提高处理能效。咖啡因的典型降解能效约为 10 克/千瓦时,罗丹明 B 的降解能效约为 60 克/千瓦时。
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引用次数: 0
Degradation of Methylene Blue by Pulsed Nanosecond Discharge in Water with Ar-O2 Gaseous Bubbles 利用脉冲纳秒放电在含有 Ar-O2 气体气泡的水中降解亚甲基蓝
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-04-09 DOI: 10.1007/s11090-024-10468-6
Nadir Aloui, Julien Pregent, Camille Gouze, Ibtissem Belgacem, Ahmad Hamdan

The rise of water effluents containing emerging contaminants that resist conventional chemical and physical treatments makes the treatment of wastewater more complex. Plasma-based treatment methods have great potential to degrade many of the emerging contaminants, including dyes. In this study, using pulsed nanosecond discharges, we investigate the degradation of methylene blue (MB) dye in water by generating plasma in Ar-O2 gas bubbles in water. The scalability of the setup is studied by producing discharges in a one electrode setup (a needle-to-plate configuration) and in a four electrodes setup (four needles-to-wire configuration). The discharge was characterized by electrical measurements (current and voltage waveforms) and optical emission spectroscopy. We find that the discharge properties are stable during the 30 min of processing, with and without the presence of MB in solution at low electrical conductivity. The production rate of H2O2 in the one electrode setup was measured in 0% and 70% O2, and it was found to be ∼2.3 and 2.9 mg/Lmin, respectively. In the four electrodes setup, H2O2 production rate was lower: ∼1.2 and 1.9 mg/Lmin in 0% and 100% O2. Degradation of MB was assessed in both setups for (i) different % of O2 in the gas mixture, (ii) different MB initial concentration, and (iii) different initial water conductivity. In the one electrode setup, a high MB degradation (> 85%) was generally achieved in all conditions, but a better performance is noted in high O2 percentage (> 50%) at low initial water conductivity. At low MB concentration and low electrical conductivity, the performance of the four electrodes setup was better than the one electrode setup.

含有新出现的污染物的废水越来越多,这些污染物对传统的化学和物理处理方法具有抵抗力,这使得废水处理变得更加复杂。基于等离子体的处理方法在降解包括染料在内的许多新兴污染物方面具有巨大潜力。在本研究中,我们利用脉冲纳秒放电,通过在水中的 Ar-O2 气体气泡中产生等离子体,研究了水中亚甲基蓝(MB)染料的降解。通过在单电极装置(针对板配置)和四电极装置(四针对线配置)中产生放电,研究了该装置的可扩展性。放电通过电学测量(电流和电压波形)和光学发射光谱进行表征。我们发现,在 30 分钟的处理过程中,无论溶液中是否存在低电导率的甲基溴,放电特性都很稳定。在 0% 和 70% 的氧气条件下,测量了单电极设置中 H2O2 的产生率,发现分别为 2.3 和 2.9 mg/Lmin。在四电极设置中,H2O2 的产生率较低:在 0% 和 100%O2 条件下分别为 1.2 和 1.9 mg/Lmin。在这两种设置中,对甲基溴的降解情况进行了评估:(i) 气体混合物中不同的氧气%;(ii) 不同的甲基溴初始浓度;(iii) 不同的初始水电导率。在单电极设置中,所有条件下一般都能实现较高的甲基溴降解率(85%),但在初始水电导率较低的情况下,氧气比例较高(50%)时性能更好。在甲基溴浓度低和电导率低的情况下,四电极装置的性能优于单电极装置。
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引用次数: 0
Kinetics Driving H2(a) Continuum Emission in Low-Frequency Ar-NH3 Dielectric Barrier Discharges at Atmospheric Pressure 大气压下低频 Ar-NH3 绝缘屏障放电中 H2(a) 连续发射的动力学驱动力
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-03-29 DOI: 10.1007/s11090-024-10459-7
Raphaël Robert, Françoise Massines, Luc Stafford

Time-resolved optical emission and absorption spectroscopy was used to analyze a 50 kHz Ar-NH3 dielectric barrier discharge operated in a homogeneous glow discharge regime at atmospheric pressure. In addition to the typical NH(A-X), N2(C-B), and Ar(2p-1s) transitions, a continuum emission linked to de-excitation of ({{text{H}}}_{2}left({{text{a}}}^{3}{Sigma }_{{text{g}}}^{+}right)) states was detected between 180 and 250 nm and lasted for a long time after discharge extinction. Over the range of experimental conditions investigated, the emitting ({{text{H}}}_{2}left({{text{a}}}^{3}{Sigma }_{{text{g}}}^{+}right)) states are proposed to be populated by collisions of ({{text{H}}}_{2}left({{text{X}}}^{1}{Sigma }_{{text{g}}}^{+}right)) with Ar(1s) states during discharge, and by dissociative recombination of the vibrationally-excited ammonia ion (NH3+(v)) after the discharge. NH3+(v) is produced by charge transfer from Ar2+ to NH3, and it breaks into ({{text{H}}}_{2}left({{text{a}}}^{3}{Sigma }_{{text{g}}}^{+}right)) (or ({{text{H}}}_{2}left({{text{c}}}^{3}{Pi }_{u}right)) or ({{text{H}}}_{2}left({{text{d}}}^{3}{Pi }_{u}right))) and NH upon gas phase recombination with a low-energy electron. Based on this proposed mechanism, a 1D fluid model was refined to include these reactions and used to simulate the emission intensity from ({{text{H}}}_{2}left({{text{a}}}^{3}{Sigma }_{{text{g}}}^{+}right)) and revealed good agreement with experimental data.

利用时间分辨光学发射和吸收光谱分析了在大气压下均相辉光放电条件下运行的 50 kHz Ar-NH3 介质势垒放电。除了典型的 NH(A-X)、N2(C-B)和 Ar(2p-1s)跃迁之外,在 180 纳米到 250 纳米之间还检测到了与({{text{H}}}_{2}}left({{text{a}}^{3}{Sigma }_{{text{g}}^{+}right))态去激发有关的连续发射,并且在放电熄灭后持续了很长时间。在所研究的实验条件范围内、发射的 ({{text{H}}}_{2}left({{text{a}}}^{3}{{text{g}}}^{+}right)态是通过({{text{H}}}_{2}/left({{text{X}}}^{1}{text{g}}^{+}/right))态在放电过程中与 Ar(1s)态碰撞而填充、以及放电后振动激发的氨离子 (NH3+(v)) 的离解重组。NH3+(v) 由 Ar2+ 向 NH3 的电荷转移产生、它分裂成 ({{text{H}}}_{2}/left({{text{a}}}^{3}{Sigma}_{text{g}}^{+}/right))(或 ({{text{H}}}_{2}/left({{text{c}}}^{3}{Pi或({{text{H}}_{2}left({{text{d}}}^{3}{Pi}_{u}right))和 NH 在气相中与一个低能电子重组时。和 NH。基于这一机制,我们改进了一维流体模型以包含这些反应,并用它模拟了 ({{text{H}}_{2}}left({{text{a}}^{3}{{Sigma }_{{text{g}}^{+}/right)) 的发射强度,结果显示与实验数据非常吻合。
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引用次数: 0
Destruction of 2,4-Dichlorophenol Vapor in a Process Involving the Combined Action of DBD in Oxygen and a Catalyst 在氧气和催化剂共同作用的过程中销毁 2,4-二氯苯酚蒸气
IF 2.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-03-17 DOI: 10.1007/s11090-024-10462-y
K. A. Lapshova, N. E. Gordina, E. Yu. Kvitkova, T. V. Izvekova, V. I. Grinevich, G. I. Gusev, V. V. Rybkin, A. A. Gushchin

In this work, the process of decomposition of 2,4-dichlorophenol (2,4-DCP) vapor under the influence of atmospheric pressure DBD in oxygen was studied. The studies were carried out in two modes: with a catalyst (natural vermiculite doped with zirconium) and without it. A number of basic characteristics of the catalyst were assessed. The rates and effective rate constants of sorption processes, as well as decomposition processes in plasma and plasma-catalytic systems, were determined. Based on these data, the energy efficiency of the decomposition process was calculated. The data obtained suggested that the initial stage of decomposition is the reaction of interaction of electrons with pollutant molecules. The catalyst has been shown to speed up the decomposition process, increase energy efficiency and the conversion of 2,4-DCP to CO2 molecules, and prevent the formation of condensed products on the reactor walls. The work estimates the carbon and chlorine balances before and after treatment, which reach a maximum of 99 and 60%, respectively. It was also shown that the catalyst retains its activity for at least 7 h of continuous operation.

在这项工作中,研究了在氧气中的常压 DBD 作用下,2,4-二氯苯酚(2,4-DCP)蒸气的分解过程。研究以两种模式进行:使用催化剂(掺杂锆的天然蛭石)和不使用催化剂。对催化剂的一些基本特性进行了评估。确定了吸附过程的速率和有效速率常数,以及等离子体和等离子体催化系统中的分解过程。根据这些数据,计算了分解过程的能效。所得数据表明,分解的初始阶段是电子与污染物分子的相互作用反应。研究表明,催化剂可加快分解过程,提高能量效率,将 2,4-DCP 转化为二氧化碳分子,并防止在反应器壁上形成冷凝产物。这项研究对处理前后的碳和氯平衡进行了估算,结果表明,处理前后的碳和氯平衡最高分别达到 99% 和 60%。研究还表明,催化剂在连续运行至少 7 小时后仍能保持活性。
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引用次数: 0
Pulsed Aerosol-Assisted Low-Pressure Plasma for Thin-Film Deposition 用于薄膜沉积的脉冲气溶胶辅助低压等离子体
IF 3.6 3区 物理与天体物理 Q3 ENGINEERING, CHEMICAL Pub Date : 2024-03-12 DOI: 10.1007/s11090-024-10455-x

Abstract

Plasma-enhanced chemical vapor deposition is a well-developed technique that is commonly applied in the preparation of thin films. However, this technique is limited to thermodynamically stable and chemically inert precursor gases or vapors. Recently, pulsed aerosol-assisted plasma processes have emerged as an advantageous alternative that allows for the injection of various liquid solutions in the plasma, regardless of their properties. This study examines the production of thin films by pulsed injection of pentane aerosols into a low-pressure RF capacitively coupled plasma. This technique produces thin films with high material balance and a high degree of control by adjusting the pulsed injection parameters. At the pulse scale, pulsed injection induces a temporary increase in the working pressure, resulting in time-dependent mechanisms that can affect the dynamics of thin-film deposition at the process scale. Overall, the results show a key role of droplets and their kinetics (ballistic transport, vaporization kinetics, electrostatic confinement). Hence, to efficiently apply this method in the preparation of (multi-)functional coatings, the aerosol must be carefully characterized.

摘要 等离子体增强化学气相沉积是一种成熟的技术,通常用于制备薄膜。然而,这种技术仅限于热力学稳定和化学惰性的前驱气体或蒸汽。最近,脉冲气溶胶辅助等离子体工艺作为一种有利的替代方法出现了,它允许在等离子体中注入各种液体溶液,而不管其性质如何。本研究探讨了将戊烷气溶胶脉冲注入低压射频电容耦合等离子体生产薄膜的方法。通过调整脉冲注入参数,该技术生产出的薄膜具有很高的材料平衡性和高度可控性。在脉冲尺度上,脉冲注入会导致工作压力暂时增加,从而产生与时间相关的机制,这些机制会影响薄膜沉积过程的动态。总之,研究结果表明液滴及其动力学(弹道传输、汽化动力学、静电约束)起着关键作用。因此,要将这种方法有效地应用于制备(多)功能涂层,必须仔细研究气溶胶的特性。
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引用次数: 0
期刊
Plasma Chemistry and Plasma Processing
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