The disruption of the volumetric balance of water and oxygen molecules in a low-pressure DC glow discharge in mixtures of helium with water vapor and oxygen in a quartz discharge tube was studied experimentally and theoretically. The concentrations of H2O and O2 molecules were measured synchronously by absorption in the spectral regions of about 760 and 1390 nm in a two-channel diode laser spectrometer. The dependences of concentrations on time were studied in a cycle with duration of about 200 s. The cycle included a stage of filling a tube treated according to a set procedure with a plasma-forming gas, a stage of burning a 35 mA DC discharge, and a stage after switching off the discharge. It was found that a significant increase in the H2O concentration only occurs during the discharge and in the presence of oxygen additives. To describe the observed dynamics of molecule concentrations, a plasma-chemical 0D model was created, which included reactions both in the volume and on the wall of the discharge tube, the Boltzmann equation for electron energies, and the equation of an external electric circuit. The presence of the ballast volume of the vacuum system and the heating of the neutral gas were taken into account. The observed misbalance is proposed to be associated with the heterogeneous reaction of oxygen atoms O(3P), produced in the gas-discharge plasma, with water molecules adsorbed on the tube wall. The estimated probability of this reaction is 5 10−6.
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