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Effect of substrate miscut angle on critical thickness, structural and electronic properties of MBE-grown NbN films on c-plane sapphire 衬底错切角对c面蓝宝石mbe生长NbN薄膜临界厚度、结构和电子性能的影响
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-30 DOI: 10.1063/5.0312575
Anand Ithepalli, Saumya Vashishtha, Naomi Pieczulewski, Qiao Liu, Amit Rohan Rajapurohita, Matthew Barone, Darrell Schlom, David A. Muller, Huili Grace Xing, Debdeep Jena
We report the structural and electronic properties of niobium nitride (NbN) thin films grown by molecular beam epitaxy on c-plane sapphire with miscut angles of 0.5°, 2°, 4°, and 10° toward m-axis. X-ray diffraction scans reveal that the full width at half maximum of the rocking curves around the 1 1 1 reflection of these NbN films decreases with increasing miscut. Starting from 76 arcsecs on 0.5° miscut, the FWHM reduces to almost 20 arcsecs on 10° miscut sapphire, indicating improved structural quality. Scanning transmission electron microscopy images indicate that NbN on c-sapphire has around 10 nm critical thickness, irrespective of the substrate miscut, above which it turns columnar. The improved structural property is correlated with a marginal increment in superconducting transition temperature Tc from 12.1 K for NbN on 0.5° miscut sapphire to 12.5 K for NbN on 10° miscut sapphire.
本文报道了用分子束外延法在c面蓝宝石上生长的氮化铌(NbN)薄膜的结构和电子性能,其错切角分别为m轴方向0.5°、2°、4°和10°。x射线衍射扫描结果表明,NbN薄膜在11 - 1反射附近的摆动曲线的半最大值全宽度随着误切的增加而减小。从0.5°错切的76圆弧开始,10°错切蓝宝石的FWHM减少到近20圆弧,表明结构质量得到改善。扫描透射电子显微镜图像显示,c-蓝宝石上的NbN具有约10nm的临界厚度,与衬底切割错误无关,超过该临界厚度时,NbN变为柱状。在0.5°错切蓝宝石上,NbN的超导转变温度为12.1 K,而在10°错切蓝宝石上,NbN的超导转变温度为12.5 K。
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引用次数: 0
Impact of AlN buffer thickness on electrical and thermal characteristics of AlGaN/GaN/AlN HEMTs AlN缓冲层厚度对AlGaN/GaN/AlN hemt电学和热特性的影响
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-29 DOI: 10.1063/5.0310464
Minho Kim, Dat Q. Tran, Plamen P. Paskov, Uiho Choi, Okhyun Nam, Vanya Darakchieva
We investigate the influence of AlN buffer thickness on the structural, electrical, and thermal properties of AlGaN/GaN high-electron mobility transistors (HEMTs) grown on semi-insulating SiC substrates by metal-organic chemical vapor deposition. X-ray diffraction and atomic force microscopy reveal that while thin AlN layers (120 nm) exhibit compressive strain and smooth step-flow surfaces, thicker single-layer buffers (550 nm) develop tensile strain and increased surface roughness. Multi-layer buffer structures up to 2 μm alleviate strain and maintain surface integrity. Low-temperature Hall measurements confirm that electron mobility decreases with increasing interface roughness, with the highest mobility observed in the structure with a thin AlN buffer. Transient thermoreflectance measurements show that thermal conductivity (ThC) of the AlN buffer increases with the thickness, reaching 190 W/m.K at 300 K for the 2 μm buffer layer, which is approximately 60% of the bulk AlN ThC value. These results highlight the importance of optimizing AlN buffer design to balance strain relaxation, thermal management, and carrier transport for high-performance GaN-based HEMTs.
研究了AlN缓冲层厚度对半绝缘SiC衬底上生长的AlGaN/GaN高电子迁移率晶体管(HEMTs)结构、电学和热性能的影响。x射线衍射和原子力显微镜显示,虽然薄AlN层(120 nm)表现出压缩应变和光滑的阶梯流表面,但较厚的单层缓冲层(550 nm)表现出拉伸应变和表面粗糙度增加。厚度达2 μm的多层缓冲结构可缓解应变并保持表面完整性。低温霍尔测量证实,电子迁移率随着界面粗糙度的增加而降低,在薄AlN缓冲层中观察到的迁移率最高。瞬态热反射测量表明,AlN缓冲液的热导率(ThC)随厚度的增加而增加,达到190 W/m。对于2 μm缓冲层,K在300 K时,约为体AlN ThC值的60%。这些结果强调了优化AlN缓冲设计以平衡应变松弛、热管理和载流子输运对高性能gan基hemt的重要性。
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引用次数: 0
Highly efficient pixelated quantum-dot light-emitting diodes enabled by bi-color-converting cavities 利用双色转换腔实现的高效像素化量子点发光二极管
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-29 DOI: 10.1063/5.0307943
Peili Gao, Haohao Yang, Zhen Yin, Cuixia Yuan, Qiang Su, Shuming Chen
Fabricating quantum-dot (QD) light-emitting diode (LED) arrays typically relies on direct QD patterning or costly color filters (CFs), highlighting the need for cost-effective patterning techniques to achieve high-efficiency pixelated QLEDs. This study presents a bi-color-converting cavity that transforms yellow emissions from non-patterned mixed red and green QDs into saturated red and green emissions by adjusting the thickness of the indium-zinc-oxide phase tuning layer. Excluding blue QDs with low quantum yields and high injection barriers, this approach is expected to achieve excellent device performance tailored for specific outdoor display applications. The cavity yellow QLEDs exhibit maximum current efficiencies of 28.20 and 36.32 cd/A for red and green emissions, representing enhancements of 144% and 148% over CF yellow QLEDs, respectively. These improvements stem from the bi-color-converting cavity, which enhances the forward emissions in the cavity yellow QLED and redistributes exciton energy in mixed QDs by modulating the energy transfer. Furthermore, bi-color pixelated QLEDs with a resolution of 423 pixels per inch have been demonstrated. This bi-color-converting cavity technique relies on established photolithography techniques and holds great potential in high-performance and high-resolution display applications.
制造量子点(QD)发光二极管(LED)阵列通常依赖于直接的QD图图化或昂贵的彩色滤光片(cf),这突出了对经济高效的图图化技术的需求,以实现高效的像素化qled。本研究提出了一种双色转换腔,通过调整铟锌氧化物相位调谐层的厚度,将无图案的混合红绿量子点的黄色发射转化为饱和的红绿发射。排除低量子产率和高注入势垒的蓝色量子点,该方法有望实现为特定户外显示应用量身定制的卓越器件性能。腔黄色qled在红光和绿光下的最大电流效率分别为28.20和36.32 cd/A,比CF黄色qled分别提高了144%和148%。这些改进源于双色转换腔增强了腔黄色QLED的正向发射,并通过调节能量转移来重新分配混合量子点中的激子能量。此外,双色像素化qled的分辨率为每英寸423像素已被证明。这种双色转换空腔技术依赖于现有的光刻技术,在高性能和高分辨率显示应用中具有巨大的潜力。
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引用次数: 0
Achieving analog and digital resistive switching for quasi-2D perovskite memristors by compositional regulation and crystalline manipulation 通过成分调节和晶体操作实现准二维钙钛矿记忆电阻器的模拟和数字电阻开关
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-29 DOI: 10.1063/5.0276050
Chenhui Su, Xuemiao Wen, Wen Lei, Guanglu Lin, Tianjiao Liu, Yijing Fan, Yibo Peng, Cuiying Hu, Zhenfang Tang, Zhichao Chen, Shuyan Fang, Renqiang Yang, Dongping Yang, Xingui Tang, Lintao Hou
With the advent of the information age, the demand for memristors in neuromorphic circuits and artificial intelligence has become increasingly urgent. In this Letter, analog- and digital-type resistive switching is concurrently obtained in quasi-2D perovskite memristors by regulating elemental composition and crystallinity. For the high Pb sample treated with MACl, continuous enhancement and suppression of analog-type conductance are achieved under direct current voltage sweep and voltage pulse stimulation, which shows 62.2% enhancement and 68.4% inhibition after long-term synaptic plasticity. The analog-type memristor also presents good spike voltage-dependent and frequency-dependent plasticities with a paired-pulse facilitation index of 55.5%. In contrast, for the low Pb sample treated with MACl, the lattice distortion and crystal defects are further decreased, leading to a sudden change of digital-type resistance in the current−voltage curve. The digital-type memristor has very good non-volatile memory performance with a resistance-to-switch ratio of 5 × 103, an endurance of more than 2100 cycles, a retention characteristic of more than 104 s, a statistical set voltage of 0.55 V, and a reset voltage of −1 V. This study elucidates analog and digital resistive switching mechanism in quasi-2D perovskites and demonstrates their significant potential and prospects in neuronal circuit and storage-computing technologies.
随着信息时代的到来,神经形态电路和人工智能对忆阻器的需求日益迫切。在本文中,通过调节元素组成和结晶度,在准二维钙钛矿记忆电阻器中同时获得了模拟和数字型电阻开关。对于经MACl处理的高铅样品,在直流电压扫描和电压脉冲刺激下,模拟型电导得到了持续的增强和抑制,经长期突触可塑性后,模拟型电导的增强和抑制分别为62.2%和68.4%。模拟型忆阻器还具有良好的峰值电压依赖性和频率依赖性塑性,其对脉冲易化指数为55.5%。而对于经MACl处理的低Pb样品,晶格畸变和晶体缺陷进一步减少,导致电流-电压曲线上的数字型电阻发生突变。该数字型忆阻器具有良好的非易失性存储性能,其电阻开关比为5 × 103,续航时间超过2100次,保持特性超过104 s,统计设定电压为0.55 V,复位电压为−1 V。本研究阐明了准二维钙钛矿的模拟和数字电阻开关机制,并展示了其在神经元电路和存储计算技术方面的巨大潜力和前景。
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引用次数: 0
Quantum anomalous Hall state and Weyl nodal line semimetal state in room-temperature magnetic VTiCF2 monolayer 室温磁性VTiCF2单层中量子反常霍尔态和Weyl节点线半金属态
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-29 DOI: 10.1063/5.0307107
Jiahui Li, Yinong Liu, Yuqing Mao, Jie Li, Lijuan Meng, Xiaojing Yao, Ailei He, Xiuyun Zhang
Two-dimensional MXenes exhibit exceptional magnetic and topological properties, making them promising candidates for spintronic devices. Herein, we investigate the electronic and magnetic characteristics of HHH- and HTT-phase bimetallic VTiCF2 monolayers via first-principles calculations. Our results show that the HHH-phase VTiCF2 monolayer is a robust out-of-plane ferromagnetic (FM) half-metal with an ultrahigh Curie temperature (TC) of 1020 K. Incorporating spin–orbit coupling transforms it into a quantum anomalous Hall (QAH) insulator with a 36.59 meV bandgap and Chern number C = 1. In contrast, the HTT-phase is a ferrimagnetic (FIM) nodal-line semimetal with in-plane magnetization and TC = 494 K. Notably, the HHH-phase retains its QAH properties under biaxial strains, while the HTT-phase undergoes FIM-to-FM transition at 3% biaxial tensile strain. These findings expand the functional MXene libraries and provide a candidate for room-temperature spintronic devices.
二维MXenes表现出特殊的磁性和拓扑特性,使其成为自旋电子器件的有希望的候选者。本文通过第一性原理计算研究了HHH相和htt相双金属VTiCF2单层的电子和磁性特征。结果表明,hhh相VTiCF2单层材料是一种坚固的面外铁磁半金属,具有1020k的超高居里温度。结合自旋轨道耦合,使其成为带隙36.59 meV、陈氏数C = 1的量子异常霍尔(QAH)绝缘子。相比之下,高温相是铁磁(FIM)节线半金属,具有面内磁化强度,TC = 494 K。值得注意的是,hhh相在双轴应变下仍保持QAH特性,而hht相在3%的双轴拉伸应变下经历了从fim到fm的转变。这些发现扩展了功能性MXene库,并为室温自旋电子器件提供了候选材料。
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引用次数: 0
Tunable spin-to-charge conversion across semiconductor–semimetal transition in large-area PtSe2 thin films 大面积PtSe2薄膜中半导体-半金属跃迁的可调自旋-电荷转换
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-29 DOI: 10.1063/5.0307058
Wenzhuo Zhuang, Wenxuan Sun, Ruijie Xu, Anke Song, Zhihao Li, Yifan Zhang, Yu Li, Di Wang, Guozhong Xing, Rong Zhang, Xuefeng Wang
High-speed and low-power spin–orbit torque (SOT) devices necessitate materials with high spin-to-charge conversion efficiency. Transition metal dichalcogenides (TMDs) have emerged as a promising platform for SOT research due to their topological features and band structure tunability. In this work, we fabricate large-area PtSe2 films via a two-step method and demonstrate a thickness-dependent semiconductor-to-semimetal transition. The spin-to-charge conversion efficiency of PtSe2 films exhibits an approximately sixty-fold enhancement across this semiconductor-to-semimetal transition. This work provides an alternative approach for modulating spin-to-charge conversion in TMDs and advances their potential applications in spintronics.
高速、低功率自旋-轨道转矩(SOT)器件需要具有高自旋-电荷转换效率的材料。过渡金属二硫族化合物(TMDs)由于其拓扑特性和能带结构的可调性而成为SOT研究的一个有前途的平台。在这项工作中,我们通过两步法制造大面积的PtSe2薄膜,并展示了与厚度相关的半导体到半金属的转变。PtSe2薄膜的自旋到电荷转换效率在这种半导体到半金属的转变中表现出大约60倍的增强。这项工作为调制tmd中自旋到电荷的转换提供了一种替代方法,并推进了tmd在自旋电子学中的潜在应用。
{"title":"Tunable spin-to-charge conversion across semiconductor–semimetal transition in large-area PtSe2 thin films","authors":"Wenzhuo Zhuang, Wenxuan Sun, Ruijie Xu, Anke Song, Zhihao Li, Yifan Zhang, Yu Li, Di Wang, Guozhong Xing, Rong Zhang, Xuefeng Wang","doi":"10.1063/5.0307058","DOIUrl":"https://doi.org/10.1063/5.0307058","url":null,"abstract":"High-speed and low-power spin–orbit torque (SOT) devices necessitate materials with high spin-to-charge conversion efficiency. Transition metal dichalcogenides (TMDs) have emerged as a promising platform for SOT research due to their topological features and band structure tunability. In this work, we fabricate large-area PtSe2 films via a two-step method and demonstrate a thickness-dependent semiconductor-to-semimetal transition. The spin-to-charge conversion efficiency of PtSe2 films exhibits an approximately sixty-fold enhancement across this semiconductor-to-semimetal transition. This work provides an alternative approach for modulating spin-to-charge conversion in TMDs and advances their potential applications in spintronics.","PeriodicalId":8094,"journal":{"name":"Applied Physics Letters","volume":"54 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146072363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-performance Ku-band thin-barrier AlGaN/GaN MIS-HEMTs on Si using high-stress LPCVD-SiN passivation for low-voltage applications 采用高应力LPCVD-SiN钝化技术实现低电压应用的高性能ku波段薄势垒AlGaN/GaN miss - hemts
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-28 DOI: 10.1063/5.0297174
Jiejie Zhu, Mengdi Li, Qing Zhu, Wanshuo Liao, Sheng Zhang, Yuchen Qian, Yichong Ding, Yiwei Wang, Lingjie Qin, Yuxi Zhou, Bowen Zhang, Ke Wei, Xinyu Liu, Yue Hao, Xiaohua Ma
This paper reports on high-performance Ku-band AlGaN/GaN metal–insulator–semiconductor high electron mobility transistors (MIS-HEMTs) on a Si substrate for low-voltage applications. Benefiting from the 7 nm thin-barrier AlGaN and the high-stress low pressure chemical vapor deposition (LPCVD) SiN passivation, a high saturation current of 1.56 A/mm, a low on-resistance of 0.87 Ω mm, and a small current collapse at 20 V drain quiescent condition of 2.1% were achieved. Enabled by the ability of LPCVD-SiN to allow the devices to withstand high-temperature conditions during gate dielectric deposition and post-deposition annealing, a 7 nm plasma-enhanced atomic layer deposition SiN was employed as the gate dielectric. The MIS-HEMTs show low leakage current and a large on/off current ratio. At 18 GHz, the devices achieve a peak power-added efficiency (PAE) exceeding 60% at a low drain voltage (Vds) range of 5–12 V. A peak PAE of 65.1% (Vds = 8 V) and a maximum output power density (Pout,max) of 3.46 W/mm (Vds = 12 V) were demonstrated, which are the highest PAE and Pout,max at the same operating voltage reported by GaN HEMTs in Ku-band. These excellent results show that the MIS-HEMTs have great potential in Ku-band low-voltage applications.
本文报道了在硅衬底上用于低压应用的高性能ku波段AlGaN/GaN金属绝缘体半导体高电子迁移率晶体管(MIS-HEMTs)。利用7 nm薄势垒AlGaN和高应力低压化学气相沉积(LPCVD) SiN钝化,获得了1.56 a /mm的高饱和电流,0.87 Ω mm的低导通电阻,以及20 V漏极静态条件下2.1%的小电流崩溃。由于LPCVD-SiN能够承受栅介电沉积和沉积后退火过程中的高温条件,因此采用7 nm等离子体增强原子层沉积SiN作为栅介电。mis - hemt具有低漏电流和大开/关电流比。在18ghz频段,器件在5 - 12v的低漏极电压(Vds)范围内实现了超过60%的峰值功率附加效率(PAE)。结果表明,在相同工作电压下,GaN HEMTs的峰值PAE为65.1% (Vds = 8 V),最大输出功率密度(Pout,max)为3.46 W/mm (Vds = 12 V),是目前ku波段GaN HEMTs所报道的最高PAE和Pout,max。这些优异的结果表明miss - hemt在ku波段低压应用中具有巨大的潜力。
{"title":"High-performance Ku-band thin-barrier AlGaN/GaN MIS-HEMTs on Si using high-stress LPCVD-SiN passivation for low-voltage applications","authors":"Jiejie Zhu, Mengdi Li, Qing Zhu, Wanshuo Liao, Sheng Zhang, Yuchen Qian, Yichong Ding, Yiwei Wang, Lingjie Qin, Yuxi Zhou, Bowen Zhang, Ke Wei, Xinyu Liu, Yue Hao, Xiaohua Ma","doi":"10.1063/5.0297174","DOIUrl":"https://doi.org/10.1063/5.0297174","url":null,"abstract":"This paper reports on high-performance Ku-band AlGaN/GaN metal–insulator–semiconductor high electron mobility transistors (MIS-HEMTs) on a Si substrate for low-voltage applications. Benefiting from the 7 nm thin-barrier AlGaN and the high-stress low pressure chemical vapor deposition (LPCVD) SiN passivation, a high saturation current of 1.56 A/mm, a low on-resistance of 0.87 Ω mm, and a small current collapse at 20 V drain quiescent condition of 2.1% were achieved. Enabled by the ability of LPCVD-SiN to allow the devices to withstand high-temperature conditions during gate dielectric deposition and post-deposition annealing, a 7 nm plasma-enhanced atomic layer deposition SiN was employed as the gate dielectric. The MIS-HEMTs show low leakage current and a large on/off current ratio. At 18 GHz, the devices achieve a peak power-added efficiency (PAE) exceeding 60% at a low drain voltage (Vds) range of 5–12 V. A peak PAE of 65.1% (Vds = 8 V) and a maximum output power density (Pout,max) of 3.46 W/mm (Vds = 12 V) were demonstrated, which are the highest PAE and Pout,max at the same operating voltage reported by GaN HEMTs in Ku-band. These excellent results show that the MIS-HEMTs have great potential in Ku-band low-voltage applications.","PeriodicalId":8094,"journal":{"name":"Applied Physics Letters","volume":"118 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146072367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The cooperative cation– π interaction in two-dimensional THD-C as a high-capacity anode material for Li-ion batteries 作为锂离子电池高容量负极材料的二维THD-C阳离子- π协同相互作用
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-28 DOI: 10.1063/5.0312468
Zihao Wang, Haoxuan Chen, Zhenjie Zhao, Huadong Zeng, Xinlu Cheng
Two-dimensional (2D) carbon allotropes for high-performance electrode materials in lithium-ion batteries (LIBs) are attracting a great deal of research interest due to their unique architectures. Herein, we perform the first-principles calculations to systematically investigate the feasibility of 2D sp–sp2 hybridized THD-C (tetra-, hexa-, and dodeca-membered rings), as a potential anode for LIBs. Our simulations indicate that two spatially adjacent acetylenic bonds engender a modest Li–C coupling via the cooperative cation–π interaction driven by partial electron transfer, which exhibits a suitable Li adsorption energy of –0.78 eV. 2D THD-C is proven to be a favorable anode material that offers a high theoretical capacity (1116.7 mAh/g), a low Li diffusion barrier (0.49 eV), and a moderate open-circuit voltage (0.40 V). Furthermore, it retains a small volume change (∼3%) as well as favorable structural and thermal stability even at maximum Li concentration. Overall, those findings not only provide an in-depth mechanistic insight but also extend an effective method to search for high-performance anode materials in advancing LIB technology.
作为高性能锂离子电池电极材料的二维(2D)碳同素异形体由于其独特的结构吸引了大量的研究兴趣。在这里,我们进行第一性原理计算,系统地研究了2D sp-sp2杂化THD-C(四、六、十二元环)作为lib潜在阳极的可行性。模拟结果表明,两个空间相邻的乙炔键通过部分电子转移驱动的阳离子-π相互作用产生了适度的Li - c耦合,其Li吸附能为-0.78 eV。2D THD-C被证明是一种有利的阳极材料,具有高理论容量(1116.7 mAh/g),低Li扩散势垒(0.49 eV)和中等开路电压(0.40 V)。此外,即使在最大Li浓度下,它也保持了较小的体积变化(~ 3%)以及良好的结构和热稳定性。总的来说,这些发现不仅提供了深入的机理见解,而且还扩展了在推进LIB技术中寻找高性能阳极材料的有效方法。
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引用次数: 0
Extending channel attention to kernel space for fluorescence microscopy image denoising 将通道关注扩展到核空间用于荧光显微镜图像去噪
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-28 DOI: 10.1063/5.0311220
Xiangyu Zhou, Wenlong Chen, Zixiong Fan, Xinwei Gao, Wei Yan, Junle Qu
Deep learning has demonstrated significant potential in fluorescence microscopy imaging. However, most existing methods primarily enhance channel or spatial features, overlooking the capabilities of kernel space. This limitation restricts the network's ability to recover fine structures and details, especially under noisy or degraded imaging conditions. In this work, the iKUNet-RCAN model, an architecture that integrates kernel and channel attention mechanisms, is proposed. By explicitly capturing kernel space dependencies, the proposed model enhances feature representation with minimal additional computational cost. Experimental results across multiple microscopy modes (confocal, widefield, and two-photon) reveal superior image quality and reconstruction robustness compared with existing methods.
深度学习在荧光显微镜成像中显示出巨大的潜力。然而,大多数现有方法主要是增强通道或空间特征,而忽略了核空间的功能。这个限制限制了网络恢复精细结构和细节的能力,特别是在噪声或退化的成像条件下。在这项工作中,提出了iKUNet-RCAN模型,一个集成了内核和通道注意机制的体系结构。通过显式捕获核空间依赖关系,提出的模型以最小的额外计算成本增强了特征表示。在多种显微镜模式(共聚焦、宽视场和双光子)下的实验结果表明,与现有方法相比,该方法具有更好的图像质量和重建鲁棒性。
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引用次数: 0
High-performance annealing-free InGaZnOx thin film transistors by thermal ALD 热ALD的高性能无退火InGaZnOx薄膜晶体管
IF 4 2区 物理与天体物理 Q2 PHYSICS, APPLIED Pub Date : 2026-01-28 DOI: 10.1063/5.0299768
Hyeong Seok Choi, Dong Hee Han, Hyun Woo Jeong, Jaejoon Kim, Joonyong Kim, Geun Hyeong Park, Yong Hyeon Cho, Se Hyun Kim, Youngin Goh, Wooje Jung, Daewon Ha, Yoon Jang Chung, Min Hyuk Park
We report indium–gallium–zinc oxide (IGZO) thin-film transistors (TFTs) fabricated entirely by thermal atomic layer deposition (TALD) within a low thermal budget (≤300 °C) and without post-deposition annealing. A targeted O3 overdose step integrated into the Ga2O3 sub-cycles of the IGZO TALD super-cycle raises the local oxygen chemical potential and helps suppress inter-sub-cycle redox reactions and vacancy formation. Structural and chemical analyses confirm smooth, fully amorphous Al2O3/IGZO stacks with abrupt interfaces and reduced oxygen-vacancy signatures, while cation states remain stable. Standard TFTs fabricated from these layer stacks exhibit excellent device performance, including near-ideal subthreshold swing (SS) values of 66.4–70 mV/dec, operation windows within 3 V, field-effect mobilities ranging between μFE = 23.6–25.6 cm2/Vs, threshold voltages (VTH) close to 0 V, and negligible hysteresis. Under positive-bias temperature stress, ΔVTH remains small across 25–85 °C, indicating good device reliability. A holistic comparison with prior ALD-based oxide TFTs shows that the combination of low temperature processing, near-ideal SS, and small drift under stress places our devices on the favorable end of performance–stability trade-off. The O3 overdose concept presented here provides a generalizable lever for oxygen vacancy control in the TALD of multi-cation oxides and is naturally compatible with BEOL and monolithic 3D integration.
我们报道了完全由热原子层沉积(TALD)在低热预算(≤300°C)下制造的铟镓锌氧化物(IGZO)薄膜晶体管(TFTs),并且没有沉积后退火。在IGZO - TALD超循环的Ga2O3亚循环中集成有针对性的O3过量步骤,提高了局部氧化学势,有助于抑制亚循环间的氧化还原反应和空位形成。结构和化学分析证实了光滑、完全无定形的Al2O3/IGZO堆叠具有突然的界面和减少的氧空位特征,而阳离子态保持稳定。由这些层叠制成的标准TFTs具有优异的器件性能,包括近理想的亚阈值摆幅(SS)值为66.4-70 mV/dec,操作窗口在3 V内,场效应迁移率在μFE = 23.6-25.6 cm2/Vs之间,阈值电压(VTH)接近0 V,迟滞可以忽略。在正偏置温度应力下,ΔVTH在25-85°C范围内保持较小,表明器件可靠性良好。与先前基于ald的氧化物tft的整体比较表明,低温处理,接近理想的SS和应力下小漂移的组合使我们的器件处于性能稳定性权衡的有利端。本文提出的O3过量概念为多阳离子氧化物的TALD中的氧空位控制提供了一个可推广的杠杆,并且与BEOL和单片3D集成自然兼容。
{"title":"High-performance annealing-free InGaZnOx thin film transistors by thermal ALD","authors":"Hyeong Seok Choi, Dong Hee Han, Hyun Woo Jeong, Jaejoon Kim, Joonyong Kim, Geun Hyeong Park, Yong Hyeon Cho, Se Hyun Kim, Youngin Goh, Wooje Jung, Daewon Ha, Yoon Jang Chung, Min Hyuk Park","doi":"10.1063/5.0299768","DOIUrl":"https://doi.org/10.1063/5.0299768","url":null,"abstract":"We report indium–gallium–zinc oxide (IGZO) thin-film transistors (TFTs) fabricated entirely by thermal atomic layer deposition (TALD) within a low thermal budget (≤300 °C) and without post-deposition annealing. A targeted O3 overdose step integrated into the Ga2O3 sub-cycles of the IGZO TALD super-cycle raises the local oxygen chemical potential and helps suppress inter-sub-cycle redox reactions and vacancy formation. Structural and chemical analyses confirm smooth, fully amorphous Al2O3/IGZO stacks with abrupt interfaces and reduced oxygen-vacancy signatures, while cation states remain stable. Standard TFTs fabricated from these layer stacks exhibit excellent device performance, including near-ideal subthreshold swing (SS) values of 66.4–70 mV/dec, operation windows within 3 V, field-effect mobilities ranging between μFE = 23.6–25.6 cm2/Vs, threshold voltages (VTH) close to 0 V, and negligible hysteresis. Under positive-bias temperature stress, ΔVTH remains small across 25–85 °C, indicating good device reliability. A holistic comparison with prior ALD-based oxide TFTs shows that the combination of low temperature processing, near-ideal SS, and small drift under stress places our devices on the favorable end of performance–stability trade-off. The O3 overdose concept presented here provides a generalizable lever for oxygen vacancy control in the TALD of multi-cation oxides and is naturally compatible with BEOL and monolithic 3D integration.","PeriodicalId":8094,"journal":{"name":"Applied Physics Letters","volume":"71 1","pages":""},"PeriodicalIF":4.0,"publicationDate":"2026-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146072372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Applied Physics Letters
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