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Back-end-of-line compatible Hf0.5Zr0.5O2 ferroelectric devices enabled by microwave annealing 微波退火后端兼容的Hf0.5Zr0.5O2铁电器件
Pub Date : 2024-12-20 DOI: 10.1016/j.chip.2024.100120
Yinchi Liu , Hao Zhang , Jining Yang , Dmitriy Anatolyevich Golosov , Xiaohan Wu , Chenjie Gu , Shijin Ding , Wenjun Liu
In this work, we demonstrate an extremely low annealing processing at 300 °C for the crystallization of Hf0.5Zr0.5O2 (HZO) films with the adoption of microwave annealing (MWA). Compared to conventional annealing methods, an enhanced double remnant polarization (2Pr) of 55.4 μC/cm2, a higher maximum dielectric constant, and nearly wakeup-free were realized by modulating the power of the microwave. It is believed that the increasing loss factor of zirconia with rising temperature allows more energy to be extracted from the microwave and transferred to the ferroelectric HZO molecules, which facilitates the crystallization at low temperature. Furthermore, an amorphous indium gallium zinc oxide ferroelectric field-effect transistor treated with microwave annealing was fabricated, and a competitive memory window of 1.5 V was substantially achieved. These findings offer insights into the integration of HfO2 ferroelectric materials in non-volatile memory devices compatible with back-end-of-line (BEOL) in the future.
在这项工作中,我们展示了在300°C下采用微波退火(MWA)对Hf0.5Zr0.5O2 (HZO)薄膜进行结晶的极低退火处理。与传统的退火方法相比,通过调制微波功率,实现了55.4 μC/cm2的双残余极化(2Pr)增强,最大介电常数提高,几乎无唤醒。认为随着温度的升高,氧化锆的损耗因子增大,可以从微波中提取更多的能量并转移到铁电HZO分子中,有利于低温结晶。在此基础上,制备了微波退火处理的非晶铟镓锌氧化铁电场效应晶体管,获得了1.5 V的竞争性记忆窗口。这些发现为HfO2铁电材料在未来与后端线(BEOL)兼容的非易失性存储器件中的集成提供了见解。
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引用次数: 0
Comprehensive trade-off strategy for SiC MOSFETs using buried-MOS configuration 采用埋入mos结构的SiC mosfet综合权衡策略
Pub Date : 2024-12-07 DOI: 10.1016/j.chip.2024.100119
Junhong Feng , Li Zheng , Xinhong Cheng , Lingyan Shen , Xuetong Zhou , Wenyu Lu , Jiayu Zeng
While silicon carbide (SiC) metal-oxide-semiconductor field-effect transistors (MOSFETs) have entered commercial markets, they still rely on specialized device structural approaches tailored to meet specific application demands. The intricate and interdependent relationships among diverse physical parameters of SiC MOSFETs have not been fully elucidated to address the trade-offs that influence each other. This study aims to clarify these complex relationships and propose a well-balanced trade-off strategy. The proposed buried-MOS configuration ensures a harmonious balance among lower Ron,sp, reduced CGD, and milder EOX without compromising breakdown voltage (BV), thereby optimizing the interconnected physical parameters of SiC devices and significantly enhancing their high-voltage, high-frequency performance and reliability. The experimental results quantitatively demonstrate the advantages of the buried-MOS structure: high-frequency figure of merit high-frequency figure of merit (HF-FOM) (RDS,on × CGD) by 2.5×, HF-FOM (RDS,on × QGD) by 2.2× and Baliga figure of merit (BFOM = 4BV2/Ron,sp) by 1.7× compared with the conventional BOX-MOS. Importantly, this approach embodies both theoretical significance and practical applicability, which is compatible with the existing large-scale manufacturing processes and requires no additional steps.
虽然碳化硅(SiC)金属氧化物半导体场效应晶体管(mosfet)已经进入商业市场,但它们仍然依赖于专门的器件结构方法来满足特定的应用需求。SiC mosfet的各种物理参数之间复杂和相互依赖的关系尚未完全阐明,以解决相互影响的权衡。本研究旨在澄清这些复杂的关系,并提出一个平衡的权衡策略。所提出的埋入式mos结构在不影响击穿电压(BV)的情况下,确保了较低的Ron、sp、较低的CGD和较温和的EOX之间的和谐平衡,从而优化了SiC器件的互连物理参数,显著提高了其高压、高频性能和可靠性。实验结果定量地证明了埋入式mos结构的优点:与传统的BOX-MOS相比,高频优点图(HF-FOM) (RDS,on × CGD)提高2.5倍,高频优点图(HF-FOM,on × QGD)提高2.2倍,Baliga优点图(bom = 4BV2/Ron,sp)提高1.7倍。重要的是,该方法既具有理论意义,又具有实际适用性,与现有的大规模制造工艺相兼容,不需要额外的步骤。
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引用次数: 0
On-chip integrated plasmon-induced high-performance self-powered Pt/GaN ultraviolet photodetector 片上集成等离子体诱导的高性能自供电Pt/GaN紫外光电探测器
Pub Date : 2024-12-04 DOI: 10.1016/j.chip.2024.100118
Tong Xu , Shulin Sha , Kai Tang , Xuefeng Fan , Jinguo Liu , Caixia Kan , Gangyi Zhu , Feifei Qin , Daning Shi , Mingming Jiang
The advantages of on-chip integrated photodetectors, such as miniaturization, high integration, and reliability, make them an indispensable and important part of electronic devices and systems. Herein, we experimentally exhibited a monolithically integrated ultraviolet photodetector utilizing GaN microcylinder epitaxial structure on Si wafer, with its photoresponse properties plasmonically boosted using Pt nanoparticles via specific sizes. When illuminated upon ultraviolet light at 0 V bias, the Pt/GaN device exhibits significant photovoltaic performances, including a peak responsivity of 200.1 mA W−1, external quantum efficiency of 65%, and other figures-of-merit. Finite element analysis and energy band theory confirm that the excellent photodetection properties of the Pt/GaN device are related to the strong plasmon absorption and the increase of hot electrons injected into the GaN conduction band, which considerably improves its photoresponse performance and robustness in application. To realize the multipurpose capability of the devices, we validated the application of Pt/GaN as turbidity sensing and achieved a resolution of up to 100 NTU. Moreover, the prepared devices can be used as optical data receivers for optical communication. These findings provide references for on-chip detectors to improve the overall system performance and promote the realization of more complex applications.
片上集成光电探测器具有小型化、高集成度、高可靠性等优点,是电子器件和系统中不可缺少的重要组成部分。在此,我们通过实验展示了一种单片集成的紫外探测器,该探测器利用硅晶片上的GaN微柱外延结构,通过特定尺寸的Pt纳米颗粒等离子体提高了其光响应性能。当偏置为0 V的紫外光照射时,Pt/GaN器件表现出显著的光伏性能,包括200.1 mA W−1的峰值响应度,65%的外量子效率和其他性能指标。有限元分析和能带理论证实,Pt/GaN器件优异的光探测性能与强等离子体吸收和注入GaN导带的热电子的增加有关,这大大提高了其光响应性能和应用中的鲁棒性。为了实现器件的多用途能力,我们验证了Pt/GaN作为浊度传感的应用,并实现了高达100 NTU的分辨率。此外,所制备的器件还可以用作光通信的光数据接收器。这些发现为片上检测器提高系统整体性能和促进更复杂应用的实现提供了参考。
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引用次数: 0
On-chip warped three-dimensional InGaN/GaN quantum well diode with transceiver coexistence characters 具有收发器共存特性的片上弯曲三维InGaN/GaN量子阱二极管
Pub Date : 2024-12-01 DOI: 10.1016/j.chip.2024.100115
Feifei Qin , Xueyao Lu , Xiaoxuan Wang , Chunxiang Guo , Jiaqi Wu , Xuefeng Fan , Mingming Jiang , Peng Wan , Junfeng Lu , Yongjin Wang , Gangyi Zhu
Featured with light emission and detection coexistence phenomenon, nitride-based multiple-quantum-well (MQW) diodes integrated chip has been proven to be an attractive structure for application prospects in various fields such as lighting, sensing, optical communication, and other fields. However, most of the recent reports are based on planar structures. Three-dimensional (3D) structures are endowed with extra advantages in direction, polarization, and absorption modulation and may pioneer a new way to make the same thing over and over again with interesting properties. In this paper, we designed and fabricated a single-cantilever InGaN/GaN MQW diode with warped 3D microstructure via standard microfabrication technology. Experimental results indicate that the strain architecture of the multi-layer materials is the key principle for the self-warped device. The planar structure will bear greater compressive stress while the warped beam part has less stress, which results in differences in the optical and electrical performance. The strain-induced band bending highly influences the emission and detection properties, while the warped structure will introduce direction selectivity to the 3D device. As an emitter, 3D structures exhibit a directional emission with lower turn-on voltage, higher capacitance, increased luminous intensity, higher external quantum efficiency (EQE), high –3 dB bandwidth, and redshifted peak wavelength. Besides, it can serve as an emitter for directional-related optical communication. As a receiver, 3D structures have lower dark-current, higher photocurrent, and red-shifted response spectrum and also show directional dependence. These findings not only deepen the understanding of the working principle of the single-cantilever GaN devices but also provide important references for device performance optimization and new applications in visible light communication (VLC) technology.
氮基多量子阱(MQW)二极管集成芯片具有发光与探测共存的特点,在照明、传感、光通信等领域具有广阔的应用前景。然而,最近的报道大多是基于平面结构。三维(3D)结构在方向,偏振和吸收调制方面具有额外的优势,并且可能开创一种新的方法,可以反复制造具有有趣性质的相同事物。本文采用标准微加工技术,设计并制造了具有翘曲三维微结构的单悬臂InGaN/GaN MQW二极管。实验结果表明,多层材料的应变结构是自翘曲器件的关键原理。平面结构承受较大的压应力,而翘曲梁部分承受较小的应力,导致光学和电学性能的差异。应变诱导的能带弯曲严重影响器件的发射和探测性能,而翘曲的结构将给三维器件带来方向选择性。作为发射体,三维结构具有更低的导通电压、更高的电容、更高的发光强度、更高的外量子效率(EQE)、高-3 dB带宽和峰波长红移的定向发射特性。此外,它还可以作为方向相关光通信的发射器。作为接收器,三维结构具有较低的暗电流、较高的光电流和红移响应谱,并表现出方向依赖性。这些发现不仅加深了对单悬臂GaN器件工作原理的理解,而且为器件性能优化和在可见光通信(VLC)技术中的新应用提供了重要参考。
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引用次数: 0
Chip-scale metaphotonic singularities: topological, dynamical, and practical aspects 晶片规模的变态奇点:拓扑学、动力学与实务方面
Pub Date : 2024-12-01 DOI: 10.1016/j.chip.2024.100109
Tianyue Li , Mengjiao Liu , Jiahao Hou , Xing Yang , Shubo Wang , Shuming Wang , Shining Zhu , Din Ping Tsai , Zhenlin Wang
Research about singularities has been driving scientific advancements across mathematics and physics. Comprehending and harnessing the novel properties of singularities in photonics can facilitate the development of integrated micro-nano devices in diverse platforms. Herein, we provide a comprehensive overview of photonic singularities emerging in structured light fields and metamaterial structures. We classify them into several representative types: real-space singularities, momentum-space singularities, and parameter-space singularities, with discussions of their intriguing topological and dynamical properties. Moreover, we report on the latest applications of photonic singularities in broad areas, ranging from light routing, lasing, sensing, and optical manipulation to imaging and display. This review connects the singularity phenomena in different photonic systems, bridging the abstract concepts with emerging practical applications. It underscores the significance of photonic singularities in both fundamental science and various on-chip applications.
关于奇点的研究一直在推动数学和物理领域的科学进步。理解和利用光子学中奇点的新特性有助于在不同平台上集成微纳器件的发展。本文对结构光场和超材料结构中出现的光子奇点进行了全面的综述。我们将奇异点分为实空间奇异点、动量空间奇异点和参数空间奇异点,并讨论了它们有趣的拓扑和动力学性质。此外,我们报告了光子奇点在广泛领域的最新应用,从光路由,激光,传感,光学操作到成像和显示。本文将不同光子系统中的奇点现象联系起来,将抽象概念与新兴的实际应用联系起来。它强调了光子奇点在基础科学和各种片上应用中的重要性。
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引用次数: 0
III-nitride MQW-based optoelectronic sensors for multifunctional environmental monitoring 基于氮化物mqw的多功能环境监测光电传感器
Pub Date : 2024-12-01 DOI: 10.1016/j.chip.2024.100113
Xumin Gao , Dongmei Wu , Tianlong Xie , Jialei Yuan , Mingyuan Xie , Yongjin Wang , Haitao Zhao , Gangyi Zhu , Zheng Shi
This work presents an integrated multi-quantum well (MQW) optoelectronic sensor leveraging III-nitride materials for multifunctionality on a monolithic chip. The sensor was fabricated using standard microfabrication techniques and adopted the identical InGaN/GaN MQWs, which enables simultaneous emission and detection. The sensor is featured with a double concentric circle structure which supports both on-chip and off-chip detection mechanisms, being capable of detecting environmental parameters like rotational speed, proximity, and sucrose concentration. It exhibits stable photocurrent response to rotational speed up to 8000 rpm, a 3 cm vertical detection range, and a linear response with 3.9 nA/% sensitivity to changes in sucrose concentration, which demonstrates the potential for diverse applications in industrial and biomedical fields.
这项工作提出了一种集成的多量子阱(MQW)光电传感器,利用iii -氮化物材料在单片芯片上实现多功能。该传感器采用标准微加工技术制造,采用相同的InGaN/GaN mqw,可以同时发射和检测。该传感器具有双同心圆结构,支持片内和片外检测机制,能够检测转速、接近度和蔗糖浓度等环境参数。它具有稳定的光电流响应,转速高达8000 rpm,垂直检测范围为3 cm,对蔗糖浓度变化的线性响应灵敏度为3.9 nA/%,这表明它在工业和生物医学领域具有广泛的应用潜力。
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引用次数: 0
Silicon photonic integrated wideband radio frequency self-interference cancellation chip for over-the-air in-band full-duplex communication 用于空中带内全双工通信的硅光子集成宽带射频自干扰消除芯片
Pub Date : 2024-12-01 DOI: 10.1016/j.chip.2024.100114
Xinxin Su , Meng Chao , Xiuyou Han , Han Liang , Wenfu Zhang , Shuanglin Fu , Weiheng Wang , Mingshan Zhao
Compared with the traditional frequency division duplex and time division duplex, the in-band full-duplex (IBFD) technology can double the spectrum utilization efficiency and information transmission rate. However, radio frequency (RF) self-interference remains a key issue to be resolved for the application of IBFD. The photonic RF self-interference cancellation (SIC) scheme is endowed with the advantages of wide bandwidth, high amplitude and time delay tuning precision, and immunity to electromagnetic interference. To meet the requirements of the new generation of mobile terminals and satellite payloads, the photonic RF SIC system is desired to be miniaturized, integrated, and low power consumption. In this study, the integrated photonic RF SIC scheme was proposed and demonstrated on a silicon-based platform. By utilizing the opposite bias points of the on-chip dual Mach-Zehnder modulators, the phase inversion relationship for SIC was realized over a broad frequency band. The time delay structure combining the optically switched waveguide and compact spiral waveguide enables continuous tuning of time over a wide bandwidth. The optical amplitude adjuster provides efficient amplitude control with a large dynamic range. After being packaged with optical, direct current, and RF design, the photonic RF SIC chip exhibits the interference cancellation capabilities across L, S, C, X, Ku, K, and Ka bands. In the S and C bands, a cancellation depth exceeding 20 dB was measured across a bandwidth of 4.8 GHz. An impressive cancellation depth of over 40 dB was achieved within a bandwidth of 80 MHz at a central frequency of 2 GHz. For the application of over-the-air IBFD communication at the newly promulgated center frequency of 6 GHz for 5G communication, the cancellation depth of 21.7 dB was demonstrated in the bandwidth of 100 MHz, and the low-power signals of interest were recovered successfully.
与传统的分频双工和时分双工相比,带内全双工(IBFD)技术可以使频谱利用效率和信息传输速率提高一倍。然而,射频自干扰仍然是IBFD应用中需要解决的关键问题。光子射频自干扰抵消(SIC)方案具有带宽宽、振幅和时延调谐精度高、抗电磁干扰等优点。为满足新一代移动终端和卫星有效载荷的要求,光子射频SIC系统向着小型化、集成化、低功耗的方向发展。在本研究中,提出了集成光子射频SIC方案,并在硅基平台上进行了验证。利用片上双马赫-曾德尔调制器的反向偏置点,实现了SIC在宽频段内的相位反转关系。结合光开关波导和紧凑螺旋波导的时间延迟结构可以在宽带宽上连续调谐时间。光学调幅器提供了有效的幅度控制与大的动态范围。在采用光学、直流和射频设计封装后,光子RF SIC芯片在L、S、C、X、Ku、K和Ka波段显示出干扰消除能力。在S和C波段,在4.8 GHz的带宽上测量到超过20 dB的消去深度。在2 GHz的中心频率下,在80 MHz的带宽内实现了超过40 dB的令人印象深刻的消去深度。针对新颁布的5G通信中心频率为6ghz的无线IBFD通信应用,在100mhz带宽下演示了21.7 dB的对消深度,成功恢复了感兴趣的低功率信号。
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引用次数: 0
A versatile optoelectronic device for ultrasensitive negative-positive pressure sensing applications 一种用于超灵敏负压传感应用的多功能光电器件
Pub Date : 2024-12-01 DOI: 10.1016/j.chip.2024.100116
Xiaoshuai An , Sizhe Gui , Yingxin Li , Zhiqin Chu , Kwai Hei Li
A versatile optoelectronic device with ultrasensitive negative-positive pressure sensing capabilities, which is integrated with a wireless monitoring system, was fabricated and demonstrated in the current work. The device comprises a monolithic GaN chip with a polydimethylsiloxane cavity and nanograting, which effectively transduces pressure stimuli into optical changes detected by the GaN chip. The developed device exhibits an ultra-low detection limit for a mass of 0.03 mg, a pressure of 2.94 Pa, and a water depth of 0.3 mm, with a detection range of −100 kPa to 30.5 kPa and high stability. The versatility of the device is demonstrated by its ability to monitor heart pulse, grip strength, and respiration. Its integration with a wireless data transmission system enables real-time monitoring of human activity and heart rate underwater, making it suitable for precise measurements in various practical applications.
制作并演示了一种具有超灵敏负压传感能力的多功能光电器件,该器件与无线监测系统集成在一起。该器件包括一个带有聚二甲基硅氧烷腔和纳米光栅的单片GaN芯片,该芯片有效地将压力刺激转换为GaN芯片检测到的光学变化。该装置在质量为0.03 mg、压力为2.94 Pa、水深为0.3 mm的条件下具有超低检出限,检测范围为- 100 kPa ~ 30.5 kPa,稳定性高。该设备的多功能性体现在其监测心脏脉搏、握力和呼吸的能力上。它与无线数据传输系统的集成可以实时监测水下的人类活动和心率,使其适用于各种实际应用中的精确测量。
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引用次数: 0
All-optical combinational logical units featuring fifth-order cascade 具有五阶级联的全光组合逻辑单元
Pub Date : 2024-12-01 DOI: 10.1016/j.chip.2024.100112
Haiqi Gao , Yu Shao , Yipeng Chen , Junren Wen , Yuchuan Shao , Yueguang Zhang , Weidong Shen , Chenying Yang
Modern computational technologies are gradually encountering significant limitations, driving a shift toward alternative paradigms such as optical computing. In this study, novel all-optical combinational logic units based on diffractive neural networks (D2NNs) were introduced, which were designed to perform high-order logical operations efficiently and swiftly with the adoption of only two modulation layers. This innovative design exhibits increased processing speed, improved energy efficiency, robust environmental stability, and high error tolerance, making it exceptionally well-suited for a broad spectrum of applications in optical computing and communications. By leveraging the transfer learning, we successfully developed a fifth-order cascaded combinational logic circuit for a practical information transmission system. Furthermore, we revealed a pioneering application of the device in optical time division multiplexing (OTDM), demonstrating its capability to manage high-speed data transfer seamlessly without the need for electronic conversion. Extensive simulations and experimental validations demonstrate the potential of the model as a foundational technology for future optical computing architectures, which paves the way toward more sustainable and efficient optical data processing platforms.
现代计算技术正逐渐遇到重大的限制,推动了向替代范式(如光学计算)的转变。本文介绍了一种基于衍射神经网络(d2nn)的新型全光组合逻辑单元,该单元仅采用两层调制层,可以高效、快速地执行高阶逻辑运算。这种创新的设计表现出更高的处理速度,更高的能源效率,强大的环境稳定性和高容错性,使其非常适合于光计算和通信中的广泛应用。利用迁移学习,我们成功地开发了一种用于实际信息传输系统的五阶级联组合逻辑电路。此外,我们还展示了该器件在光时分多路复用(OTDM)中的开创性应用,展示了其无需电子转换即可无缝管理高速数据传输的能力。广泛的仿真和实验验证证明了该模型作为未来光学计算架构的基础技术的潜力,为更可持续和高效的光学数据处理平台铺平了道路。
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引用次数: 0
16-channel photonic solver for optimization problems on a silicon chip 硅芯片上优化问题的16通道光子求解器
Pub Date : 2024-11-08 DOI: 10.1016/j.chip.2024.100117
Jiayi Ouyang , Shengping Liu , Ziyue Yang , Wei Wang , Xue Feng , Yongzhuo Li , Yidong Huang
A programmable photonic solver for quadratic unconstrained binary optimization (QUBO) problems is demonstrated with a hybrid optoelectronic scheme, which consists of a photonic chip and an electronic driving board. The photonic chip is employed to perform the optical vector-matrix multiplication (OVMM) to calculate the cost function of the QUBO problem, while the electronic processor runs the heuristic algorithm to search for the optimal solution. Due to the parallel and low-latency propagation of lightwaves, the calculation of the cost function can be accelerated. The photonic chip was fabricated on the silicon on insulator (SOI) substrate and integrated 16 high-speed electro-optic modulators, 88 thermo-optic phase shifters, and 16 balanced photodetectors. The computing speed of the photonic chip is 1.66 TFLOP/s. As a proof of principle, two randomly generated 16-dimensional QUBO problems are solved with high successful probabilities. These results present the potential of fast-solving optimization problems with integrated photonic systems.
提出了一种由光子芯片和电子驱动板组成的光电混合方案,用于二次型无约束二元优化问题的可编程光子求解器。利用光子芯片进行光学向量矩阵乘法(OVMM)计算QUBO问题的代价函数,电子处理器运行启发式算法搜索最优解。由于光波的并行传播和低延迟传播,可以加快代价函数的计算速度。该光子芯片由16个高速电光调制器、88个热光移相器和16个平衡光电探测器组成。该光子芯片的计算速度为1.66 TFLOP/s。作为一个原理证明,两个随机生成的16维QUBO问题都有很高的成功概率。这些结果显示了集成光子系统快速解决优化问题的潜力。
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引用次数: 0
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