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Lab-on-Chip for Everyone: Introducing an Electronic-Photonic Platform for Multiparametric Biosensing Using Standard CMOS Processes 人人共享的片上实验室:介绍一种使用标准CMOS工艺进行多参数生物传感的电子光子平台
Pub Date : 2021-10-07 DOI: 10.1109/OJSSCS.2021.3118336
Christos Adamopoulos;Panagiotis Zarkos;Sidney Buchbinder;Pavan Bhargava;Ali Niknejad;Mekhail Anwar;Vladimir Stojanović
The recent pandemic has shown that accurate and on-demand information on various infections requires highly versatile, Point-of-Care (PoC) platforms providing diagnostic and prognostic multiparametric information, personalized to each patient. Despite the significant progress made over the last years in various biosensing technologies, existing solutions fail to meet the power and area requirements needed for highly scalable and portable next-generation PoC devices. This work presents a solution based on a first of its kind fully integrated electronic-photonic platform in a zero-change high volume CMOS-SOI process, tailored towards molecular and ultrasound sensing applications. Leveraging co-integration of $10mu text{m}$ micro-ring resonators (MRRs) with on-chip electronics, we address the current needs of scalability, power and area by providing nanophotonic sensing and readout processing on a monolithic electronic-photonic system-on-chip (EPSoC). This work unlocks the door towards complete and self-contained Lab-on-Chip (LoC) systems, capable of providing multiparametric biosensing information.
最近的疫情表明,关于各种感染的准确和按需信息需要高度通用的护理点(PoC)平台,为每位患者提供个性化的诊断和预后多参数信息。尽管过去几年在各种生物传感技术方面取得了重大进展,但现有的解决方案无法满足高度可扩展和便携式下一代PoC设备所需的功率和面积要求。这项工作提出了一种基于零变化大体积CMOS-SOI工艺中第一个完全集成的电子光子平台的解决方案,该解决方案针对分子和超声传感应用而定制。利用$10mutext{m}$微环谐振器(MRR)与片上电子器件的共同集成,我们通过在单片电子片上光子系统(EPSoC)上提供纳米光子传感和读出处理来满足当前对可扩展性、功率和面积的需求。这项工作打开了通往完整和独立的芯片实验室(LoC)系统的大门,该系统能够提供多参数生物传感信息。
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引用次数: 6
Low Power Clock Generator Design With CMOS Signaling 低功耗CMOS信号时钟发生器的设计
Pub Date : 2021-10-07 DOI: 10.1109/OJSSCS.2021.3118339
Yongping Fan;Ian A. Young
The requirements for computing with higher energy efficiency in the datacenter and for longer battery life in laptop computers, cell phones, and other IoT devices while increasing performance with higher frequency and more cores, drive the needs for more clock generators with increased performance (frequency and jitter) and lower power budgets. The traditional current mode low swing clock generators were used widely in industry about 10 years ago. Although it had the advantage of higher supply noise rejection due to the differential nature of the architectures, however, it had the disadvantages of high-power consumption, large layout area, and not friendly to process scaling. Contrary to current mode low swing design, clock generator architectures with CMOS large swing signaling, which have advantages of low power consumption, small area, and based on circuits friendly to process scaling, have been widely adopted for clocking generation in the industry since 2009. In this paper, phase locked loops, delay locked loops, phase interpolators, high resolution digital to time converter and clock distribution techniques with CMOS large swing signaling will be discussed and reviewed.
数据中心对更高能效的计算以及笔记本电脑、手机和其他物联网设备对更长电池寿命的要求,同时通过更高的频率和更多的内核来提高性能,这推动了对更多性能(频率和抖动)更高、功率预算更低的时钟发生器的需求。传统的电流模式低摆幅时钟发生器在10年前就在工业上得到了广泛的应用。尽管由于体系结构的差异性,它具有较高的电源噪声抑制率的优点,但它也存在功耗大、布局面积大、不利于工艺扩展等缺点。与当前模式的低摆幅设计相反,自2009年以来,具有CMOS大摆幅信号的时钟发生器架构已被业界广泛采用,该架构具有低功耗、小面积和基于易于工艺扩展的电路的优点。本文将讨论和评述CMOS大摆幅信号的锁相环、延迟锁相环、相位插值器、高分辨率数时转换器和时钟分配技术。
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引用次数: 2
Design Methodologies for Low-Jitter CMOS Clock Distribution 低抖动CMOS时钟分布的设计方法
Pub Date : 2021-10-05 DOI: 10.1109/OJSSCS.2021.3117930
Xunjun Mo;Jiaqi Wu;Nijwm Wary;Tony Chan Carusone
Clock jitter negatively affects the performance of sampling circuits such as high-speed wireline transceivers and data converters. With CMOS buffers being increasingly used for the distribution of precise clocks in advanced technologies, it is important to understand their limitations and explore design tradeoffs. This tutorial provides quantitative analyses of the main sources of jitter in CMOS clock distribution: power supply induced jitter, jitter generation, and jitter amplification. Minimizing the number of buffers along the clock distribution network while still maintaining fast rise-fall times and ensuring proper settling of all clock waveforms will minimize the impact of all jitter sources. Following these guidelines can simultaneously reduce power supply noise sensitivity and power consumption of the clock distribution circuits. These conclusions are backed up by simulation and measurement results of two 16-nm FinFET clock distribution networks.
时钟抖动会对采样电路(如高速有线收发器和数据转换器)的性能产生负面影响。随着CMOS缓冲器在先进技术中越来越多地用于精确时钟的分配,了解其局限性并探索设计权衡是很重要的。本教程提供了CMOS时钟分布中抖动的主要来源的定量分析:电源引起的抖动、抖动生成和抖动放大。最大限度地减少沿时钟分布网络的缓冲器数量,同时仍然保持快速上升-下降时间,并确保所有时钟波形的正确设置,将最大限度地减小所有抖动源的影响。遵循这些准则可以同时降低电源噪声敏感性和时钟分配电路的功耗。这些结论得到了两个16nm FinFET时钟分布网络的仿真和测量结果的支持。
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引用次数: 1
Range-Finding SPAD Array With Smart Laser-Spot Tracking and TDC Sharing for Background Suppression 具有智能激光光斑跟踪和TDC共享的SPAD阵列测距背景抑制
Pub Date : 2021-10-01 DOI: 10.1109/OJSSCS.2021.3116920
Vincenzo Sesta;Klaus Pasquinelli;Renato Federico;Franco Zappa;Federica Villa
We present the design and experimental characterization of a CMOS sensor based on Single-Photon Avalanche Diodes for direct Time-Of-Flight single-point distance ranging, under high background illumination for short-range applications. The sensing area has a rectangular shape ( $40,,mathbf {mathrm {times }},,10$ SPADs) to deal with the backscattered light spot displacement across the detector, dependent on target distance, due to the non-confocal optical setup. Since only few SPADs are illuminated by the laser spot, we implemented a smart laser-spot tracking within the active area, so to define the specific Region-Of-Interest (ROI) with only SPADs hit by signal photons and a smart sharing of the timing electronics, so to significantly improve Signal-to-Noise Ratio (SNR) of TOF measurements and to reduce overall chip area and power consumption. The timing electronics consists of 80 Time-to-Digital Converter (TDC) shared among the 400 SPADs with a self-reconfigurable routing, which dynamically connects the SPADs within the ROI to the available TDCs. The latter have 78 ps resolution and 20 ns Full-Scale Range (FSR), i.e., up to 2 m maximum distance range. An on-chip histogram builder block accumulates TDC conversions so to provide the final TOF histogram. We achieve a precision better than 2.3 mm at 1 m distance and 80% target reflectivity, with 3 klux halogen lamp background illumination and 2 kHz measurement rate. The sensor rejects 10 klux of background light, still with a precision better than 20 mm at 2 m.
我们介绍了一种基于单光子雪崩二极管的CMOS传感器的设计和实验特性,该传感器用于在高背景照明下进行短程应用的直接飞行时间单点距离测距。传感区域具有矩形形状($40,,mathbf{mathrm{times}},,10$SPAD),用于处理由于非共焦光学设置而产生的取决于目标距离的探测器上的反向散射光斑位移。由于只有很少的SPAD被激光光斑照射,我们在有源区域内实现了智能激光光斑跟踪,从而定义了只有SPAD被信号光子照射的特定感兴趣区域(ROI),并智能共享了定时电子设备,从而显著提高了TOF测量的信噪比(SNR),并降低了芯片的整体面积和功耗。定时电子设备由80个时间数字转换器(TDC)组成,该转换器在400个SPAD之间共享,具有可重新配置的路由,该路由将ROI内的SPAD动态连接到可用的TDC。后者具有78ps的分辨率和20ns的全标度范围(FSR),即最大距离范围高达2m。片上直方图构建器块累积TDC转换,从而提供最终的TOF直方图。在3klux卤素灯背景照明和2kHz测量速率的情况下,我们在1m距离处实现了优于2.3mm的精度和80%的目标反射率。该传感器可抑制10klux的背景光,在2米处的精度仍优于20毫米。
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引用次数: 6
Visible and Near-IR Nano-Optical Components and Systems in CMOS CMOS中的可见光和近红外纳米光学元件和系统
Pub Date : 2021-09-30 DOI: 10.1109/OJSSCS.2021.3116563
Kaushik Sengupta;Lingyu Hong;Chengjie Zhu;Xuyang Lu
Integration of complex optical systems operating in the visible and near-IR range (VIS/NIR), realized in a CMOS fabrication process in an absolutely ‘no change’ approach, can have a transformative impact in enabling a new class of miniaturized, low-cost, smart optical sensors and imagers for emerging applications. While ‘silicon photonics’ has demonstrated the path towards such advancements in the IR range, the field of VIS/NIR integrated optics has seen less progress. Therefore, while currently ultra high-density and higher performance image sensors are commonplace in CMOS, all passive optical components (such as lenses, filters, gratings, collimators) that typically constitute a high-performance sensing or imaging system, are non-integrated, bulky and expensive, severely limiting their application domains. Here, we present an approach to utilize the embedded copper-based metal interconnect layers in modern CMOS processes with sub-wavelength feature sizes to realize multi-functional nano-optical structures and components. Based on our prior works, we illustrate this electronic-photonic co-design approach exploiting metal/light interactions and integrated electronics in the 400nm-900 nm wavelengths with three design examples. Realized in 65-nm CMOS, these demonstrate for the first time: fully integrated multiplexed fluorescence based biosensors with integrated filters, optical spectrometer, and CMOS optical physically unclonable function (PUF). These examples cover a range of optical processing elements in silicon, from deep sub-wavelength nano-optics to diffractive structures. We will demonstrate that when co-designed with embedded photo-detection and signal processing circuitry, this approach can lead to a new class of millimeter-scale, intelligent optical sensors for a wide range of emerging applications in healthcare, diagnostics, smart sensing, food, air quality, environment monitoring and others.
在可见光和近红外(VIS/NIR)范围内工作的复杂光学系统的集成,在CMOS制造过程中以绝对“不变”的方法实现,可以产生变革性的影响,为新兴应用提供一类小型化、低成本的智能光学传感器和成像器。虽然“硅光子学”已经证明了在红外范围内取得此类进步的途径,但VIS/NIR集成光学领域的进展较少。因此,尽管目前超高密度和更高性能的图像传感器在CMOS中很常见,但通常构成高性能传感或成像系统的所有无源光学组件(如透镜、滤波器、光栅、准直器)都是非集成的、体积庞大且昂贵的,严重限制了它们的应用领域。在这里,我们提出了一种在具有亚波长特征尺寸的现代CMOS工艺中利用嵌入的铜基金属互连层来实现多功能纳米光学结构和组件的方法。基于我们之前的工作,我们用三个设计示例说明了这种利用金属/光相互作用和400nm-900nm波长的集成电子器件的电子-光子协同设计方法。在65nm CMOS中实现,首次展示了:具有集成滤波器、光谱仪和CMOS光学物理不可克隆功能(PUF)的完全集成多路复用荧光生物传感器。这些例子涵盖了硅中的一系列光学处理元件,从深亚波长纳米光学到衍射结构。我们将证明,当与嵌入式光电检测和信号处理电路共同设计时,这种方法可以产生一类新的毫米级智能光学传感器,用于医疗保健、诊断、智能传感、食品、空气质量、环境监测等领域的广泛新兴应用。
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引用次数: 2
Low-Noise Readout Circuit for an Automotive MEMS Accelerometer 汽车MEMS加速度计的低噪声读出电路
Pub Date : 2021-09-28 DOI: 10.1109/OJSSCS.2021.3116125
Alice Lanniel;Tobias Boeser;Thomas Alpert;Maurits Ortmanns
This paper presents a charge-balanced readout circuit for MEMS capacitive accelerometers. The focus of this work is a design with a low-noise and low area consumption while ensuring the essential linearity and electromagnetic compatibility (EMC) for automotive applications. The readout circuit is composed of a charge-balanced single-ended input C/V stage followed by a second order sigma-delta modulator. The C/V stage uses a Gm stage combined with an integrator to reduce its noise contribution. The measurement results of the readout circuit show a noise floor of 62 $mu g/{sqrt {mathrm{ Hz}}}$ and a temperature dependent offset smaller than ±0.6 mg after compensation. The measured dynamic range of the complete interface, including readout circuit and sensor, is 95.5 dB. The measured EMC is below 2 mg. The accelerometer readout circuit has been designed in a 130nm technology. Its power and area consumption is 1.4 mW and 0.26mm2.
本文提出了一种用于MEMS电容式加速度计的电荷平衡读出电路。这项工作的重点是一种低噪声、低面积消耗的设计,同时确保汽车应用的基本线性和电磁兼容性(EMC)。读出电路由电荷平衡单端输入C/V级和二阶∑-Δ调制器组成。C/V级使用与积分器相结合的Gm级来减少其噪声贡献。读出电路的测量结果显示,本底噪声为62$μg/{sqrt{mathrm{Hz}}$,补偿后的温度相关偏移小于±0.6 mg。包括读出电路和传感器在内的整个接口的测量动态范围为95.5 dB。测得的EMC低于2 mg。加速度计读出电路采用130nm技术设计。其功率和面积消耗分别为1.4mW和0.26mm2。
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引用次数: 6
Integrated Transceivers for Emerging Medical Ultrasound Imaging Devices: A Review 新兴医疗超声成像设备的集成收发器:综述
Pub Date : 2021-09-24 DOI: 10.1109/OJSSCS.2021.3115398
Chao Chen;Michiel A. P. Pertijs
As medical ultrasound imaging moves from conventional cart-based scanners to new form factors such as imaging catheters, hand-held point-of-care scanners and ultrasound patches, there is an increasing need for integrated transceivers that can be closely integrated with the transducer to provide channel-count reduction, improved signal quality and even full digitization. This paper reviews compact and power-efficient circuit solutions for such transceivers. It starts with a brief overview of ultrasound transducer technologies and the operating principles of the ultrasound transmit-receive signal path. For transmission, high-voltage pulsers are reviewed, from compact unipolar pulsers to multi-level pulsers that provide amplitude control and improved power efficiency. The review of receive circuits starts with low-noise amplifiers as the power- and performance-limiting building block. Solutions for time-gain compensation are discussed, which are essential to reduce signal dynamic range by compensating for the decaying echo-signal amplitude associated with propagation attenuation. Finally, the option of direct digitization of the echo signal at the transducer is discussed. The paper ends with a reflection on future opportunities and challenges in the area of integrated circuits for ultrasound applications.
随着医学超声成像从传统的基于推车的扫描仪转向新的外形因素,如成像导管、手持式护理点扫描仪和超声贴片,对集成收发器的需求越来越大,该收发器可以与换能器紧密集成,以减少通道数,提高信号质量,甚至完全数字化。本文综述了这种收发器的紧凑型和节能电路解决方案。它首先简要概述了超声换能器技术和超声发射-接收信号路径的工作原理。对于传输,回顾了高压脉冲发生器,从紧凑的单极脉冲发生器到提供振幅控制和提高功率效率的多级脉冲发生器。接收电路的审查从低噪声放大器作为功率和性能限制的构建块开始。讨论了时间增益补偿的解决方案,这对于通过补偿与传播衰减相关的衰减回波信号幅度来减小信号动态范围至关重要。最后,讨论了在换能器处对回波信号进行直接数字化的选项。本文最后对超声应用集成电路领域的未来机遇和挑战进行了反思。
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引用次数: 9
Ultra-Low Power 32kHz Crystal Oscillators: Fundamentals and Design Techniques 超低功率32kHz晶体振荡器的基本原理与设计技术
Pub Date : 2021-09-21 DOI: 10.1109/OJSSCS.2021.3113889
Li Xu;David Blaauw;Dennis Sylvester
One of the challenges to the proliferation of Internet of Things is ultra-low power circuit design. Wireless nodes common in IoT applications use sleep timers to synchronize with each other and enable heavy duty cycling of power-hungry communication blocks to reduce average power. 32kHz crystal oscillators remain the most popular choice for sleep timers thanks to their frequency stability, simplicity, and low cost. Because sleep timers must be always on, their power consumption must be low compared to the average power of wireless nodes. Meantime, 32kHz crystal oscillators must operate reliably under process, voltage, and temperature variations and exhibit good long-term stability, which make circuit design challenging considering their ultra-low power operation. This paper reviews the state-of-the-art in ultra-low power 32kHz crystal oscillators. Fundamentals of crystal oscillators are introduced and analyzed from the perspective of power and frequency stability. Based on these fundamentals and analyses, existing design techniques of 32kHz crystal oscillators are discussed, highlighting the evolution of architectures in ultra-low power 32kHz crystal oscillators. Finally, research directions related to 32kHz crystal oscillators are introduced.
物联网普及面临的挑战之一是超低功耗电路设计。物联网应用中常见的无线节点使用睡眠定时器相互同步,并实现耗电通信块的重载循环,以降低平均功率。32kHz晶体振荡器由于其频率稳定性、简单性和低成本,仍然是睡眠定时器最受欢迎的选择。由于睡眠定时器必须始终开启,因此与无线节点的平均功率相比,它们的功耗必须较低。同时,32kHz晶体振荡器必须在工艺、电压和温度变化下可靠工作,并表现出良好的长期稳定性,考虑到其超低功率工作,这使得电路设计具有挑战性。本文综述了超低功率32kHz晶体振荡器的最新进展。从功率和频率稳定性的角度介绍和分析了晶体振荡器的基本原理。基于这些基本原理和分析,讨论了32kHz晶体振荡器的现有设计技术,重点介绍了超低功率32kHz晶体振荡结构的演变。最后介绍了32kHz晶体振荡器的研究方向。
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引用次数: 1
A Compact Chopper Stabilized Δ-ΔΣ Neural Readout IC With Input Impedance Boosting 一种具有输入阻抗提升的小型斩波稳定Δ-Δ∑神经读出IC
Pub Date : 2021-09-21 DOI: 10.1109/OJSSCS.2021.3113887
Shiwei Wang;Marco Ballini;Xiaolin Yang;Chutham Sawigun;Jan-Willem Weijers;Dwaipayan Biswas;Nick Van Helleputte;Carolina Mora Lopez
This paper presents a scalable neural recording analog front-end architecture enabling simultaneous acquisition of action potentials, local field potentials, electrode DC offsets and stimulation artifacts without saturation. By combining a DC-coupled $Delta $ - $Delta Sigma $ architecture with new bootstrapping and chopping schemes, the proposed readout IC achieves an area of 0.0077 mm2 per channel, an input-referred noise of 5.53 ± 0.36 $mu text{V}_{mathrm{ rms}}$ in the action potential band and 2.88 ± 0.18 $mu text{V}_{mathrm{ rms}}$ in the local field potential band, a dynamic range of 77 dB, an electrode-DC-offset tolerance of ±70 mV and an input impedance of 663 $text{M}Omega $ . To validate this neural readout architecture, we fabricated a 16-channel proof of-concept IC and validated it in an in vitro setting, demonstrating the capability to record extracellular signals even when using small, high-impedance electrodes. Because of the small area achieved, this architecture can be used to implement ultra-high-density neural probes for large-scale electrophysiology.
本文提出了一种可扩展的神经记录模拟前端架构,能够在不饱和的情况下同时采集动作电位、局部场电位、电极直流偏移和刺激伪像。通过将DC耦合的$Delta$-$Delta Sigma$架构与新的自举和斩波方案相结合,所提出的读出IC实现了每个通道0.0077 mm2的面积,5.53±0.36$mutext的输入参考噪声{V}_{mathrm{rms}}$和2.88±0.18$mutext{V}_{mathrm{rms}}$在局部场电位带中,动态范围为77 dB,电极直流偏移公差为±70 mV,输入阻抗为663$text{M}Omega$。为了验证这种神经读出结构,我们制作了一个16通道的概念验证IC,并在体外环境中进行了验证,证明了即使使用小型高阻抗电极也能记录细胞外信号。由于实现的面积较小,该架构可用于实现大规模电生理学的超高密度神经探针。
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引用次数: 9
Editorial Welcome to the IEEE Open Journal of the Solid-State Circuits Society (OJ-SSCS) 社论欢迎来到IEEE固态电路学会开放期刊(OJ-SCS)
Pub Date : 2021-09-21 DOI: 10.1109/OJSSCS.2021.3108267
Firooz Aflatouni;Lucien Breems;Edoardo Charbon;Qinwen Fan;Hossein Hashemi;Antonio Liscidini;Woogeun Rhee;Stefan Rusu;Jae-Sun Seo;Jerald Yoo;Kathy Wilcox;Eugenio Cantatore
Dear Readers, The editorial board is pleased to welcome you to the IEEE Open Journal of the Solid-State Circuits Society (OJ-SSCS). Our first papers will soon be available online via the IEEEXplore® platform.
尊敬的读者,编委会很高兴欢迎您加入《固态电路学会IEEE开放期刊》(OJ-SCS)。我们的第一篇论文将很快通过IEEEXplore®平台在线发布。
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引用次数: 0
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IEEE Open Journal of the Solid-State Circuits Society
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