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Oxygen Plasma-Treated Dielectric-Channel Interface for BEOL-Compatible IGZO TFTs with High Electrical Stability 具有高电稳定性的BEOL兼容IGZO tft的氧等离子体处理介电通道接口
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-16 DOI: 10.1002/aelm.202500548
Shaocong Lv, Shuaiying Zheng, Xianglong Li, Tan Zhang, Baoqing Zhang, Huayu Feng, Fei Wang, Qian Xin, Yuxiang Li, Jiawei Zhang, Aimin Song

Indium gallium zinc oxide (IGZO) thin film transistors (TFTs) with high stability are highly desired for future memory devices, which demand high stabilities. However, residual precursors inevitably present in the dielectric layers deposited by atomic layer deposition (ALD) introduce hydrogen contamination to the devices, thereby impairing their electrical stabilities. In this work, an effective approach is proposed: performing oxygen plasma treatment on the dielectric-channel interface to suppress hydrogen diffusion, thereby enhancing the electrical stability of IGZO TFTs. X-ray photoelectron spectroscopy (XPS) results confirm the suppression effect of oxygen treatment on hydroxyl groups, while time of flight secondary ion mass spectrometry (TOF-SIMS) revealed a 16.46% reduction in hydrogen content within the treated Al2O3 layer. The devices after treatment exhibited a field-effect mobility (µeff) of 17.4 cm2/V·s, a threshold voltage (VTH) of −0.04 V, and a subthreshold swing (SS) of 84.7 mV/dec, with an optimized oxygen plasma power of 50 W. The positive bias temperature stability of the device is significantly promoted due to reduced hydrogen content. The VTH shift (ΔVTH) is merely 3.5 mV under a bias electric field of 2 MV/cm for 10 000 s. Such treatment provides a promising solution for the integration of IGZO TFTs with Si-based electronics.

具有高稳定性的铟镓锌氧化物(IGZO)薄膜晶体管(TFTs)是未来存储器器件中非常需要的高稳定性器件。然而,通过原子层沉积(ALD)沉积的介电层中不可避免地存在残余前驱体,这会给器件带来氢污染,从而损害其电稳定性。在这项工作中,提出了一种有效的方法:在介质-通道界面上进行氧等离子体处理来抑制氢扩散,从而提高IGZO TFTs的电稳定性。X射线光电子能谱(XPS)结果证实了氧处理对羟基的抑制作用,而飞行时间二次离子质谱(TOF - SIMS)结果显示,处理后的al2o3层内氢含量降低了16.46%。处理后器件的场效应迁移率(µeff)为17.4 cm 2 /V·s,阈值电压(V TH)为- 0.04 V,亚阈值摆幅(SS)为84.7 mV/dec,优化氧等离子体功率为50 W。由于氢含量的降低,器件的正偏置温度稳定性显著提高。在2 mV /cm的偏置电场下,持续10000 s, V - TH位移(ΔV TH)仅为3.5 mV。这种处理为IGZO tft与硅基电子器件的集成提供了一个有前途的解决方案。
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引用次数: 0
Opto-Electronic Tuning of Neuron Emulation in Perovskite Volatile Memristive Transistors 钙钛矿易失性记忆电阻晶体管神经元仿真的光电调谐
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-15 DOI: 10.1002/aelm.202500488
Konstantinos Rogdakis, Georgios Psaltakis, Konstantinos Chatzimanolis, Konstantinos Blazakis, Leandros Spachis, Emmanuel Kymakis

The emulation of neuronal activity requires complex circuits that integrate multiple passive and active components, leading to a high circuit footprint. It is therefore apparent that developing a single device that can be used to emulate both synaptic and neuronal activity would allow less complexity and a much lower circuit footprint having significant impact on practical applications of neuromorphic systems. Herein, mixed halide perovskite-based transistors are demonstrated to exhibit volatile memristive behavior that responds to both light and electric fields, opening the path for optoelectronic control of neuron-like functions. Specifically, it is shown that by applying a low compliance current (ICC) during drain current–voltage (ID–VD) measurements, volatile memristive switching behavior is reported. A set of volatile ID–VD curves is presented under various gate biases, indicating a gate-enabled shift of the low-resistance state set voltage to higher values. The volatile nature of the device operated at low ICC allowed the demonstration of gate-tunable neuronal functions, including amplitude- and frequency-modulated spike firing. Furthermore, linear potentiation protocols and Leaky Integrate-and-Fire behavior is reported, while light pulses are shown to induce both photonic potentiation and graded optical neurons, opening the path for emulating neuron functions tunable by both light and electric fields.

神经元活动的模拟需要复杂的电路,集成多个无源和有源组件,导致高电路占用空间。因此,很明显,开发一种可以用来模拟突触和神经元活动的单一设备将允许更少的复杂性和更低的电路足迹,对神经形态系统的实际应用产生重大影响。本文中,基于混合卤化物钙钛矿的晶体管表现出对光和电场均有响应的易失性忆阻行为,为神经元样功能的光电控制开辟了道路。具体来说,通过在漏极电流-电压(I D -V D)测量期间施加低顺应电流(I CC),报告了挥发性记忆开关行为。在不同的栅极偏置下,一组易失的I - D -V - D曲线显示了栅极使能的低电阻状态设置电压向更高值的移动。该装置在低icc下工作的挥发性特性允许演示门可调神经元功能,包括振幅和频率调制的尖峰放电。此外,线性增强协议和漏积分-和-火行为被报道,而光脉冲被证明可以诱导光子增强和渐变光学神经元,为模拟光和电场可调的神经元功能开辟了道路。
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引用次数: 0
Flicker Noise in Graphene Flake Networks as an Indicator of Their Suitability as Humidity Sensors 石墨烯薄片网络中闪烁噪声作为湿度传感器适用性的指标
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-15 DOI: 10.1002/aelm.202500522
Jorge Eduardo Adatti Estévez, Hassan Kamel, Annika Weber, David Tumpold, Alexander Zöpfl, Ulrich Krumbein, Max Christian Lemme

Graphene flake dispersions can form conductive thin films via well-established, scalable deposition methods, such as spin-coating. These conductive graphene flake networks constitute sensing layers suitable for chemiresistive CMOS-compatible humidity sensors. Electrical noise is a parameter that affects sensor performance, and minimizing it requires thorough knowledge of the noise and its sources specific to the application. In this work, we present a phenomenological study of noise in resistive graphene sensors made from different graphene flake dispersions. We measured noise as a function of the graphene flake type, thickness of the graphene flake network, and sensor area. We conducted noise and sensitivity measurements to select the most suitable flake type for humidity sensing. We studied the influence of the temperature on the sensitivity and noise, and evaluated the humidity-dependent noise. Finally, a sensor operating mode is defined which enables humidity sensing well beyond the 1 % detection limit and with minimized resistance drift.

石墨烯片分散体可以通过成熟的、可扩展的沉积方法(如自旋镀膜)形成导电薄膜。这些导电石墨烯片网络构成了适合于化学电阻CMOS兼容湿度传感器的传感层。电噪声是影响传感器性能的一个参数,最小化它需要对噪声及其特定应用的来源有透彻的了解。在这项工作中,我们对由不同石墨烯薄片分散体制成的电阻式石墨烯传感器中的噪声进行了现象学研究。我们测量了噪声作为石墨烯薄片类型、石墨烯薄片网络厚度和传感器面积的函数。我们进行了噪声和灵敏度测量,以选择最适合湿度传感的薄片类型。我们研究了温度对灵敏度和噪声的影响,并评估了湿度依赖性噪声。最后,定义了一种传感器工作模式,使湿度传感远远超过1%的检测极限,并具有最小的电阻漂移。
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引用次数: 0
Ethical and Frugal Approaches to Animal Experimentation in Bioelectronics and Neural Engineering—An Invertebrate Renaissance? 生物电子学和神经工程中动物实验的伦理和节俭方法——无脊椎动物的复兴?
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-13 DOI: 10.1002/aelm.202500450
Eric Daniel Głowacki
The accelerating development of bioelectronic neural interfaces has brought increased attention to ethical considerations surrounding in vivo experimentation, particularly in mammalian models. This commentary advocates for a more frugal, statistically grounded, and ethically mindful approach to animal research in bioelectronics and neural engineering. Emphasizing the principle of the Three Rs—Replace, Reduce, Refine—it argues that many early‐phase device validations do not require mammalian models and can benefit from a revival of invertebrate systems. Historically foundational to the field of electrophysiology, invertebrates offer cost‐effective, ethically advantageous platforms for prototyping and training. These models allow researchers to rigorously test novel materials and device concepts in vivo before transitioning to mammalian studies, improving both experimental design and animal welfare. This article discusses several example model systems and considers the associated advantages and disadvantages of each model. Reframing experimental priorities and reviewing practices around animal use can lead to more scientifically justified and resource‐conscious bioelectronics research.
生物电子神经接口的加速发展引起了人们对体内实验,特别是哺乳动物模型中伦理问题的关注。这篇评论提倡在生物电子学和神经工程中采用一种更节俭、更有统计学基础、更有道德意识的方法来进行动物研究。强调三个r的原则——替换(replace)、减少(Reduce)、改进(refine)——它认为,许多早期设备验证不需要哺乳动物模型,可以从无脊椎动物系统的复兴中受益。无脊椎动物是电生理学领域的历史基础,为原型设计和培训提供了具有成本效益和伦理优势的平台。这些模型允许研究人员在过渡到哺乳动物研究之前在体内严格测试新材料和设备概念,从而改善实验设计和动物福利。本文讨论了几个示例模型系统,并考虑了每个模型的相关优点和缺点。重新制定实验重点和审查动物使用的实践可以使生物电子学研究更加科学合理和具有资源意识。
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引用次数: 0
Persistent Homology Analysis of Graphene Surface Morphology Toward Carrier Mobility Evaluation 石墨烯表面形貌对载流子迁移率评价的持续同源性分析
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-13 DOI: 10.1002/aelm.202500448
Yuki Okigawa, Takatoshi Yamada

A comprehensive prediction of the electrical properties of graphene, independent of field-effect transistor (FET) fabrication, could accelerate the development of graphene wafers and electronic materials. Such a capability may also enable the implementation of in-line inspection techniques during production. In this study, as a preliminary step toward predicting electrical properties solely from images, the relationship between carrier mobility and graphene surface roughness using atomic force microscopy (AFM) is investigated. Although no correlation is observed between carrier mobility and conventional roughness metrics such as arithmetic mean roughness (Sa) and maximum height (Sz), persistent homology analysis—a mathematical framework that captures topological connectivity—revealed distinctly different persistence diagrams for samples with nearly identical Sa values but differing carrier mobilities. It is found that graphene structures conforming to pronounced substrate undulations, rather than convex features such as wrinkles or bubbles, led to decreased carrier mobility. This study serves as a foundational investigation, demonstrating the potential to predict the electrical properties of graphene using only surface morphology images, made possible through the application of persistent homology analysis.

全面预测石墨烯的电学特性,而不依赖于场效应晶体管(FET)的制造,可以加速石墨烯晶圆和电子材料的发展。这种能力也可以在生产过程中实现在线检测技术。在这项研究中,作为仅从图像预测电性能的初步步骤,使用原子力显微镜(AFM)研究了载流子迁移率与石墨烯表面粗糙度之间的关系。尽管在载流子迁移率和传统粗糙度指标(如算术平均粗糙度(sa)和最大高度(sz))之间没有观察到相关性,但持续同源性分析(捕获拓扑连通性的数学框架)揭示了具有几乎相同的S a值但不同载流子迁移率的样品的明显不同的持久性图。研究发现,石墨烯结构符合明显的衬底波动,而不是褶皱或气泡等凸特征,导致载流子迁移率降低。本研究作为一项基础研究,展示了仅使用表面形貌图像来预测石墨烯电学特性的潜力,这可以通过持续同源分析的应用来实现。
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引用次数: 0
High-Speed Flexible Schottky Diodes Based on Carbon Nanotubes 基于碳纳米管的高速柔性肖特基二极管
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-13 DOI: 10.1002/aelm.202500736
Yan Li, Haoyu Zhang, Xinyi Zheng, Weifeng Wu, Xiaowei He, Li Ding, Sheng Wang
The rapid advancements in fifth and sixth-generation (5 and 6G) mobile communication networks, along with the growing demands of the Internet of Things (IoT), necessitate the development of high-speed diodes on flexible substrates. However, most of the flexible diodes with low operating frequencies are limited by relatively low material mobility, large resistance, and capacitance. In this work, we present a flexible Schottky diode (FSBD) based on high-purity semiconducting carbon nanotube (CNT) network films, offering an innovative solution to the long-standing challenge of achieving large-area, cost-effective, high-performance radio frequency (RF) diodes on flexible substrates. Using polyimide (PI) as the substrate and a low-temperature-compatible fabrication process, the CNT-based flexible Schottky diodes (CNT-FSBDs) exhibit a remarkable responsivity of 6 A/W, an intrinsic cut-off frequency of 153 GHz, and an extrinsic cut-off frequency exceeding 10 GHz at zero bias. Furthermore, the diodes achieve efficient response at low input RF power levels (−25 dBm), owing to the low resistance, zero-bias operation, and high responsivity. These features underpin the FSBDs performance in flexible, high-efficiency rectification applications. Additionally, the CNT-FSBDs exhibit excellent uniformity and stability, making them ideal for scalable manufacturing in wearable devices, large-area sensing systems, wireless energy harvesting, and next-generation communication technologies.
随着第五代和第六代(5和6G)移动通信网络的快速发展,以及物联网(IoT)日益增长的需求,有必要在柔性衬底上开发高速二极管。然而,大多数具有低工作频率的柔性二极管受到相对较低的材料迁移率,大电阻和电容的限制。在这项工作中,我们提出了一种基于高纯度半导体碳纳米管(CNT)网络薄膜的柔性肖特基二极管(FSBD),为在柔性衬底上实现大面积,经济高效,高性能射频(RF)二极管的长期挑战提供了创新的解决方案。采用聚酰亚胺(PI)作为衬底和低温兼容的制造工艺,基于碳纳米管的柔性肖特基二极管(cnt - fsbd)在零偏置下具有6 a /W的显著响应率,153ghz的固有截止频率和超过10ghz的外在截止频率。此外,由于低电阻、零偏置工作和高响应性,二极管在低输入射频功率水平(- 25 dBm)下实现高效响应。这些特性支撑了fsbd在灵活、高效整流应用中的性能。此外,cnt - fsbd具有出色的均匀性和稳定性,使其成为可穿戴设备、大面积传感系统、无线能量收集和下一代通信技术中可扩展制造的理想选择。
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引用次数: 0
Variations in Local Oscillatory Dynamics in Strained LSMO Thin Films, Observed in Non Equilibrium Transport Studies, for Brain Networks 脑网络非平衡输运研究中观察到的应变LSMO薄膜局部振荡动力学的变化
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-12 DOI: 10.1002/aelm.202500676
Hitesh Chhabra, Isidro Fernandez Garcia, Azminul Jaman, Tamalika Banerjee

Strong correlation effects in transition metal oxides and their sensitivity to external stimuli in driving phase transitions have been widely explored. However, the richness of the metastable and coexisting quantum states beyond the phase transition temperature is less explored. We employ a highly strained manganite film on a twinned substrate of LaAlO3${rm LaAlO}_{3}$ and show that the cumulative effect of such structural disorder leads to temperature-driven subtleties in the orbital hybridization of the coexisting ground states. This drives the film to electrical instabilities and the associated non linear transport leads to oscillatory dynamics, mimicking neurons with frequencies that are within the range of frequencies associated with brain waves. Our findings open up possibilities for on-demand tailoring of such devices for applications in brain-computer interfacing.

过渡金属氧化物的强相关效应及其对外部刺激的敏感性在驱动相变过程中得到了广泛的研究。然而,超越相变温度的亚稳态和共存量子态的丰富度却很少被探索。我们在双晶衬底上采用了高应变的锰酸盐薄膜,并证明了这种结构无序的累积效应导致共存基态轨道杂化的温度驱动的微妙性。这使得薄膜具有电不稳定性,相关的非线性传输导致振荡动力学,以与脑电波相关的频率范围内的频率模仿神经元。我们的发现为按需定制此类设备在脑机接口中的应用开辟了可能性。
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引用次数: 0
Ultra-Fast, Low-Resistance Nano Gap Electromechanical Switch for Power Gating Applications 用于电源门控应用的超快速,低电阻纳米间隙机电开关
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-12 DOI: 10.1002/aelm.202500668
Tae-Soo Kim, So-Young Lee, Yu-Hyun Shim, Sung-Ho Kim, Yong-Bok Lee, Jun-Bo Yoon

The growing demand for artificial intelligence and high-performance computing accelerates concerns over leakage power in highly integrated semiconductor systems. Power gating can reduce the leakage power by disconnecting idle logic blocks from the power supply through a sleep transistor. However, conventional metal-oxide-semiconductor field-effect transistor-based sleep transistors exhibit significant leakage currents and area overhead. As promising alternatives for power gating devices, microelectromechanical systems (MEMS) switches have gained significant attention due to their near-zero off-state leakage current. Nevertheless, their practical use in power gating has been limited by a fundamental trade-off between low on-resistance and fast switching time. This study demonstrates that extreme minimization of the air gap is the key to simultaneously reducing on-resistance and switching time. By introducing a 20 nm nano air gap and high-stiffness structural design, we realize—for the first time—a MEMS switch that combines ultra-low on-resistance (0.95 Ω) with ultra-fast switching time (30 ns), while maintaining off-state leakage below 100 fA. All fabrication processes remain within the back-end-of-line thermal budget, enabling monolithic 3D integration with minimal area overhead. These results establish nano gap MEMS switches as strong candidates for power gating in next generation low-power semiconductor systems.

对人工智能和高性能计算日益增长的需求加速了对高集成半导体系统泄漏功率的关注。功率门控可以通过休眠晶体管将空闲逻辑块与电源断开,从而减少泄漏功率。然而,传统的基于金属氧化物半导体场效应晶体管的睡眠晶体管表现出显著的漏电流和面积开销。微机电系统(MEMS)开关作为功率门控器件的有前途的替代品,由于其接近于零的断开状态泄漏电流而受到了极大的关注。然而,它们在功率门控中的实际应用受到低导通电阻和快速开关时间之间的基本权衡的限制。该研究表明,气隙的极小化是同时减少导通电阻和开关时间的关键。通过引入20nm的纳米气隙和高刚度结构设计,我们首次实现了将超低导通电阻(0.95 Ω)和超快开关时间(30 ns)结合在一起的MEMS开关,同时将关断漏保持在100 fA以下。所有制造过程都保持在生产线后端的热预算范围内,以最小的面积开销实现单片3D集成。这些结果确立了纳米间隙MEMS开关作为下一代低功耗半导体系统中功率门控的强有力候选者。
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引用次数: 0
Interactions Enhance Ramp Reversal Memory in Locally Phase Separated Materials 相互作用增强局部相分离材料的斜坡反转记忆
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-12 DOI: 10.1002/aelm.202500489
Y. Sun, M. Alzate Banguero, P. Salev, Ivan K. Schuller, L. Aigouy, A. Zimmers, E. W. Carlson

The ramp-reversal memory (RRM) effect in metal–insulator transition metal oxides (TMOs), a non-volatile resistance change induced by repeated temperature cycling, has attracted considerable interest in neuromorphic computing and non-volatile memory devices. Our previous defect motion model successfully explained RRM in vanadium dioxide (VO2${rm VO}_2$), capturing observed critical temperature shifts and memory accumulation throughout the sample. However, this approach lacked interactions between metallic and insulating domains. Here, we extend our model by combining a correlated Random Field Ising Model with defect diffusion-segregation, enabling accurate hysteresis modeling while predicting the relationship between RRM and domain interactions. Our simulations demonstrate that the maximum RRM occurs when the turnaround temperature approaches the inflection point. This peak in RRM vs. turnaround temperature is consistent with prior transport measurements, as well as our own optical measurements reported here. Significantly, we find that increasing nearest-neighbor interactions enhances the maximum memory effect, thus providing a clear mechanism for optimizing RRM performance. Since our model employs minimal assumptions, we predict that RRM should be a widespread phenomenon in materials exhibiting patterned phase coexistence of electronic domains. This work not only advances fundamental understanding of memory behavior in TMOs but also establishes a much-needed theoretical framework for optimizing device applications.

金属-绝缘体过渡金属氧化物(TMOs)中的斜坡反转记忆(RRM)效应是由反复温度循环引起的一种非易失性电阻变化,引起了神经形态计算和非易失性存储器件的极大兴趣。我们之前的缺陷运动模型成功地解释了二氧化钒()中的RRM,捕获了整个样品中观察到的临界温度变化和记忆积累。然而,这种方法缺乏金属和绝缘畴之间的相互作用。在这里,我们扩展了我们的模型,将一个相关的随机场Ising模型与缺陷扩散-分离相结合,在预测RRM和域相互作用之间的关系的同时,实现了精确的滞后建模。我们的模拟表明,最大RRM发生在周转温度接近拐点时。RRM与周转温度的峰值与先前的运输测量结果以及我们在这里报告的光学测量结果一致。值得注意的是,我们发现增加最近邻相互作用可以增强最大记忆效应,从而为优化RRM性能提供了明确的机制。由于我们的模型采用了最小的假设,我们预测RRM应该是电子畴中具有图案相共存的材料中的普遍现象。这项工作不仅推进了对TMOs中记忆行为的基本理解,而且为优化器件应用建立了一个急需的理论框架。
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引用次数: 0
Effects of Proton Radiation on Tin Oxide: Implications for Space Electronics 质子辐射对氧化锡的影响:对空间电子学的启示
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-12 DOI: 10.1002/aelm.202500557
Huiseung Kim, Jeongtae Kim, Suhyeon Park, Dawon Lee, Jiseop Byeon, Jeongin Seo, Dong-Seok Kim, Roy Byung Kyu Chung

This study examines the effects of 5 MeV proton irradiation, applied at fluences of 1 × 1011, 1 × 1012, 1 × 1013, and 1 × 1014 cm−2, on 20 nm thick SnO2-x thin films and field-effect transistors (FETs) with Sn-doped In2O3 (ITO) electrodes. In the SnO2-x films, both carrier concentration and mobility increased steadily with rising fluences. The irradiated ITO layers displayed higher carrier concentrations but reduced mobilities compared with their pristine counterparts. Higher conductivity of the constituent films resulted in a negative shift in threshold voltage (Vth) and an enhanced drain current (IDS) in the SnO2-x FETs. The greater the fluence, the more pronounced these changes became. Regardless of the fluence, the on/off ratios of the FETs remained stable at ∼106, indicating minimal structural damage. Moreover, the irradiation-induced changes are not temporary. When the irradiated devices are stored in air for a month or annealed at 200 °C in air for 2 h, both IDS and Vth became more stabilized. Collectively, these results demonstrate that SnO2-x FETs offer radiation tolerance and electrical stability, making them strong candidates for radiation-hardened electronics in space environments.

本研究考察了5 MeV质子辐照,在1 × 10 11、1 × 10 12、1 × 10 13和1 × 10 14 cm−2的影响下,对20 nm厚的sno2‐x薄膜和掺锡In 2o3 (ITO)电极的场效应晶体管(fet)的影响。在sno2‐x薄膜中,载流子浓度和迁移率随影响的增加而稳步增加。辐照后的ITO层表现出较高的载流子浓度,但迁移率降低。组成膜的高导电性导致sno2‐x fet中阈值电压(V th)的负位移和漏极电流(I DS)的增强。影响力越大,这些变化就越明显。无论影响如何,fet的通/关比保持稳定在~ 10.6,表明结构损伤最小。此外,辐照引起的变化不是暂时的。辐照后的器件在空气中贮存1个月或在空气中200℃退火2小时,I DS和V th都变得更加稳定。总的来说,这些结果表明sno2‐x fet具有辐射耐受性和电稳定性,使其成为空间环境中辐射硬化电子器件的有力候选者。
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引用次数: 0
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