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Au-free V/Al/Pt Contacts on n-Al0.85Ga0.15N:Si Surfaces of Far-UVC LEDs 远紫外 LED 的 n-Al0.85Ga0.15N:Si 表面上的无金 V/Al/Pt 触点
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-18 DOI: 10.1149/2162-8777/ad78ff
Hyun Kyong Cho, Ina Ostermay, Tim Kolbe, Jens Rass and Sven Einfeldt
The feasibility of replacing the V/Al/Ni/Au contact on n-Al0.85Ga0.15N:Si commonly used in far-UVC LEDs with a Au-free V/Al/Pt contact has been investigated. It is shown that the V and Pt layer thicknesses play an important role for achieving a low contact resistivity and a smooth contact surface at a low annealing temperature. The specific contact resistivity of V(10 nm)/Al(120 nm)/Pt(40 nm) annealed at 700 °C for 5 min is comparable with that of V(15 nm)/Al(120 nm)/Ni(20 nm)/Au(30 nm) annealed at 850 °C for 30 s. Furthermore, the root mean square roughness of the optimized V/Al/Pt contacts was 8.3 nm as compared to 30 nm for V/Al/Ni/Au.
研究了用无金 V/Al/Pt 触点取代远紫外 LED 中常用的 n-Al0.85Ga0.15N:Si 上的 V/Al/Ni/Au 触点的可行性。结果表明,V 层和 Pt 层的厚度对于在低退火温度下实现低接触电阻率和光滑接触表面起着重要作用。在 700 °C 下退火 5 分钟的 V(10 nm)/Al(120 nm)/Pt(40 nm) 接触电阻率与在 850 °C 下退火 30 秒的 V(15 nm)/Al(120 nm)/Ni(20 nm)/Au(30 nm) 接触电阻率相当。
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引用次数: 0
Structural Characteristics and Dielectric Properties of Deposited Silver Nanoparticles with Polypyrrole on PET Films for Dielectric Devices 在 PET 薄膜上沉积银纳米粒子与聚吡咯的结构特征和介电性能,用于介电器件
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-17 DOI: 10.1149/2162-8777/ad78fe
A. Atta, Nuha Al-Harbi, E. Abdeltwab, Reem Altuijri, M. M. Abdelhamied and M. A. M. Uosif
Herein, (PPy-Ag)/PET composites, consisting of silver nanoparticles (AgNPs) and polypyrrole (PPy) coated on PET, were fabricated by the polymerization process and then the films were characterized by SEM and XRD techniques. The addition of PPy-Ag on the dielectric properties of PET were determined. The XRD proved the successful synthesis of the (PPy-Ag)/PET samples. The SEM results demonstrate the effect of Ag modified the characteristics of the composite, which confirmed the interaction of (PPy-Ag)/PET. The dielectric properties of the films in frequency of 50 Hz to 5.6 MHz were measured. The density energy was enhanced from 9.1 × 10−5 for PET to 5480 × 10−5 J m−3 for (PPy-Ag)/PET. Moreover, the relaxation time decreased from 1.7 × 10−5 for PET to 2.8 × 109 sec for (PPy-Ag)/PET. The obtained data confirm the incorporation of PPy-Ag by PET. This research has led to the development of novel physico-chemical properties in flexible polymeric nanocomposite films, which could be used in high-performance energy storage devices.
本文通过聚合工艺制备了银纳米粒子(AgNPs)和聚吡咯(PPy)涂覆在 PET 上的(PPy-Ag)/PET 复合材料,然后利用 SEM 和 XRD 技术对薄膜进行了表征。测定了 PPy-Ag 的添加对 PET 介电性能的影响。XRD 证明了 (PPy-Ag)/PET 样品的成功合成。扫描电镜结果表明,Ag 改变了复合材料的特性,证实了 (PPy-Ag)/PET 的相互作用。测量了薄膜在 50 Hz 至 5.6 MHz 频率范围内的介电性能。密度能从 PET 的 9.1 × 10-5 提高到 (PPy-Ag)/PET 的 5480 × 10-5 J m-3。此外,弛豫时间从 PET 的 1.7 × 10-5 下降到 (PPy-Ag)/PET 的 2.8 × 109 秒。所获得的数据证实了 PET 与 PPy-Ag 的结合。这项研究开发出了具有新型物理化学特性的柔性聚合物纳米复合薄膜,可用于高性能储能设备。
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引用次数: 0
Low Contact Resistance via Quantum Well Structure in Amorphous InMoO Thin Film Transistors 通过非晶氧化铟钼薄膜晶体管中的量子阱结构实现低接触电阻
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-17 DOI: 10.1149/2162-8777/ad7901
Jie Luo, Gangping Yan, Zhiyu Song, Yanyu Yang, Yunjiao Bao, Shangbo Yang, Chuqiao Niu, Guoliang Tian, Baodong Han, Hongbo Sun, Guilei Wang, Gaobo Xu, Huaxiang Yin, Chao Zhao and Jun Luo
The amorphous oxide semiconductor (AOS) thin film transistor (TFT) shows promise for use in advanced integrated circuits, such as 2T0C dynamic random-access memory, due to its excellent electronic performance and ability to be fabricated at low temperatures. Nevertheless, the high contact resistance between the metal and AOS restricts the applicability of AOS-TFT. This study demonstrates the achievement of a reduced contact resistance in InMoO (IMO) transistors by using a MoOx interlayer during fabrication. Increasing the oxygen concentration alters the band structure of MoOx and creates a graded Mo-MoOx-IMO structure with a pronounced quantum well at the interlayer between the metal and channel. Consequently, the quantum well’s ability to attract electrons and shape the band edge suppresses the Fermi-level pinning effect, ultimately leading to the establishment of an ohmic contact. The optimized MoOx interlayer showed a significant improvement in contact resistance (∼400%) through the adjustment of oxygen content during annealing procedures. This finding suggests that it is an attractive approach to provide excellent source/drain contacts in future ultra-scaled amorphous oxide semiconductor thin-films.
无定形氧化物半导体(AOS)薄膜晶体管(TFT)因其优异的电子性能和低温制造能力,有望应用于先进的集成电路,如 2T0C 动态随机存取存储器。然而,金属与 AOS 之间的高接触电阻限制了 AOS-TFT 的应用。本研究证明,在制造过程中使用氧化钼中间层可以降低 InMoO(IMO)晶体管的接触电阻。增加氧浓度会改变氧化钼的带状结构,并在金属和沟道之间的夹层形成具有明显量子阱的分级氧化钼-氧化钼-IMO 结构。因此,量子阱吸引电子和形成带边的能力抑制了费米级钉扎效应,最终导致欧姆接触的建立。通过在退火过程中调整氧含量,优化的氧化钼中间膜显示出接触电阻的显著改善(∼400%)。这一发现表明,在未来的超标量非晶氧化物半导体薄膜中,这是一种提供出色源极/漏极接触的极具吸引力的方法。
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引用次数: 0
Modification of Structural, Optical, and Electrical Properties of PVA/PVP Blend Filled by Nanostructured Titanium Dioxide for Optoelectronic Applications 用纳米结构二氧化钛填充 PVA/PVP 混合物,改变其结构、光学和电学特性,以实现光电应用
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-17 DOI: 10.1149/2162-8777/ad7902
Asma Alkabsh
The PVA/PVP/TiO2 films were prepared using different TiO2 concentrations by solvent casting technique. An analysis was conducted to investigate the influence of TiO2 on the characteristics of PVA/PVP blends. The FTIR, UV/visible spectroscopy, and electrical bridge circuits were used to characterize the prepared nanocomposite films. The structural changes of the nanocomposite relative to pure PVA/PVP are indicated by FTIR spectra. The optical studies demonstrate that by increasing the TiO2 concentration inside PVA/PVP blends, the band gaps reduce from 5.40 eV for PVA/PVP to 4.20 eV for PVA/PVP/TiO2 (10 wt%), also the refractive indices the nanocomposites increase from 1.2020 for PVA/PVP blend into 2.5380 for PVA/PVP/TiO2 (10 wt%). Also, the transmittance decreased from 97.6% for PVA/PVP blend to approximately 55.4% at the largest concentration of TiO2. Additionally, studies were conducted on the parameters, as well, ac conductivity (σac). The outcomes of dielectric parameters of the prepared films are enhanced by the doping of TiO2 with different concentrations and dielectric relaxation is observed. The hopping mechanism of PVA/PVP/TiO2 films is supported by the ac conductivity. It is found that adding 10 wt% TiO2 inside PVA/PVP matrix at 5 MHz increases the conductivity of the pure PVA/PVP blend by 4.46 times. Highlights The impact of TiO2 nanoparticles on the PVA/PVP blend has been investigated. Optical and electrical properties have been significantly induced by TiO2 embedded on PVA/PVP. The optical parameters affirm that the TiO2 affect the optical response of PVA/PVP blend. The electrical parameters show amendments in AC electrical conductivity. The use of TiO2 in PVA/PVP is improving the optical and electrical properties of nanocomposites.
采用溶剂浇铸技术,使用不同浓度的 TiO2 制备了 PVA/PVP/TiO2 薄膜。分析研究了 TiO2 对 PVA/PVP 混合物特性的影响。傅立叶变换红外光谱、紫外/可见光谱和电桥电路用于表征制备的纳米复合薄膜。傅立叶变换红外光谱显示了纳米复合材料相对于纯 PVA/PVP 的结构变化。光学研究表明,随着 PVA/PVP 共混物中 TiO2 浓度的增加,带隙从 PVA/PVP 的 5.40 eV 减小到 PVA/PVP/TiO2 (10 wt%)的 4.20 eV,纳米复合材料的折射率也从 PVA/PVP 共混物的 1.2020 增加到 PVA/PVP/TiO2 (10 wt%)的 2.5380。此外,透射率从 PVA/PVP 混合物的 97.6% 降至 TiO2 浓度最大时的约 55.4%。此外,还对参数以及交流电导率(σac)进行了研究。不同浓度的 TiO2 掺杂会增强所制备薄膜的介电参数,并观察到介电弛豫。PVA/PVP/TiO2 薄膜的跳变机制得到了交流电导率的支持。研究发现,在 5 MHz 频率下,在 PVA/PVP 基体中添加 10 wt% 的 TiO2 可使纯 PVA/PVP 混合物的电导率提高 4.46 倍。亮点 研究了 TiO2 纳米粒子对 PVA/PVP 混合物的影响。在 PVA/PVP 上嵌入 TiO2 后,其光学和电学特性得到了显著改善。光学参数表明,TiO2 影响了 PVA/PVP 混合物的光学响应。电学参数显示交流导电性有所改善。在 PVA/PVP 中使用 TiO2 改善了纳米复合材料的光学和电学性能。
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引用次数: 0
Comparative Analysis of 50 MeV Li3+ and 100 MeV O7+ Ion Beam Induced Electrical Modifications in Silicon Photodetectors 硅光电探测器中 50 MeV Li3+ 和 100 MeV O7+ 离子束诱导的电学改性对比分析
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-16 DOI: 10.1149/2162-8777/ad7759
Vinay Kumar Mariswamy, Krishnaveni Sannathammegowda, Santosh Kumar and Ashish Kumar
This article investigates the impact of 100 MeV O7+ and 50 MeV Li3+ ions on Silicon Photodetectors, focusing on their electrical characteristics with similar Sn/Se ratios. Elevated ion fluences led to a significant rise in the ideality factor “n”, indicating the presence of Generation-Recombination (G-R) current due to introduced defects, especially those with deep energy levels in the forbidden gap acting as G-R centers. While Ideality factor (n) values decreased for oxygen ions at maximum fluence, they increased for lithium ions, reflecting consistent patterns in series resistance (Rs) and reverse leakage current (IR), attributed to ion-induced defects. Oxygen ions showed a monotonic variation in Rs, whereas lithium ions exhibited a slight reduction at maximum fluence, possibly due to defect annihilation. Despite differing Se values, 50 MeV Li3+ ions demonstrated improved device characteristics, suggesting potential defect annihilation. The ratio of Sn to Se indicated comparable damage contributions from nuclear and electronic energy. Additionally, TRIM computations revealed non-uniform damage distributions, with ions penetrating deep into the substrate, away from the n+/p junction.
本文研究了 100 MeV O7+ 和 50 MeV Li3+ 离子对硅光电探测器的影响,重点是其具有类似锡/硒比的电气特性。离子通量的升高导致表观因子 "n "显著上升,表明由于引入的缺陷,特别是那些在禁带间隙中具有深能级的缺陷作为 G-R 中心,导致了生成-重组(G-R)电流的存在。氧离子的理想因子 (n) 值在最大通量时降低,而锂离子的理想因子 (n) 值则升高,反映了离子诱导缺陷导致的串联电阻 (Rs) 和反向泄漏电流 (IR) 的一致模式。氧离子的 Rs 呈单调变化,而锂离子则在最大通量时略有降低,这可能是由于缺陷湮灭造成的。尽管 Se 值不同,但 50 MeV Li3+ 离子显示出更好的器件特性,这表明可能存在缺陷湮灭。锡与硒的比率表明,来自核能和电子能的损伤贡献相当。此外,TRIM 计算显示了非均匀的损伤分布,离子深入基底,远离 n+/p 结。
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引用次数: 0
Radiation Shielding Analysis of Multi-Component Glasses: Effects of Varying BaO, PbO2 and Gd2O3 Concentrations 多组分玻璃的辐射屏蔽分析:不同 BaO、PbO2 和 Gd2O3 浓度的影响
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-15 DOI: 10.1149/2162-8777/ad775b
Maryam Al Huwayz, Aljawhara H. Almuqrin, F. F. Alharbi, M. I. Sayyed and B. Albarzan
This work investigates the impact of BaO, PbO2, and Gd2O3 on newly developed borate glasses’ radiation shielding characteristics. The transmission factor (TF) of the glasses is almost zero at the low energy of 0.0395 MeV, which indicates favorable low-energy photon shielding. The maximum TF is reported at 1.46 MeV for the free Gd2O3 glass sample, ranging from 0.89 (0.5 cm thickness) to 0.73 (1.5 cm thickness). Moreover, with more BaO, PbO2, and Gd2O3 content added to the glasses, the TF decreases, indicating an enhancement in the efficiency of the glasses’ radiation protection with the introduction of BaO, PbO2, and Gd2O3. There is a 4.309 to 5.068 g cm−3 increase in the glasses’ density, and, as a result, the mean free path decreases, suggesting improved performance for radiation protection with the adding of more BaO, PbO2, and Gd2O3 contents to the glasses. At 0.122 MeV, the free Gd2O3 glass’s half value layer value is 0.098 cm, while the tenth value layer is 0.325 cm.
这项研究探讨了 BaO、PbO2 和 Gd2O3 对新开发的硼酸盐玻璃辐射屏蔽特性的影响。在 0.0395 MeV 的低能量下,玻璃的透射系数(TF)几乎为零,这表明玻璃具有良好的低能量光子屏蔽性能。游离 Gd2O3 玻璃样品在 1.46 MeV 时的透射系数最大,从 0.89(0.5 厘米厚)到 0.73(1.5 厘米厚)不等。此外,随着玻璃中加入更多的 BaO、PbO2 和 Gd2O3,TF 值会降低,这表明随着 BaO、PbO2 和 Gd2O3 的加入,玻璃的辐射防护效率会提高。玻璃的密度增加了 4.309 至 5.068 g cm-3,平均自由路径也随之减小,这表明随着玻璃中 BaO、PbO2 和 Gd2O3 含量的增加,玻璃的辐射防护性能也有所提高。在 0.122 MeV 时,游离 Gd2O3 玻璃的半值层值为 0.098 厘米,而十值层值为 0.325 厘米。
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引用次数: 0
Chitosan/Microcrystalline Cellulose Overlaid rGO/Fe3O4 Films: Broadband Dielectric Spectroscopy Investigations 壳聚糖/微晶纤维素叠层 rGO/Fe3O4 薄膜:宽带介电光谱研究
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-12 DOI: 10.1149/2162-8777/ad775c
Sawsan Dacrory, Samir Kamel, Naglaa Nasralla and Gamal Turky
Hybrid and straightforward inorganic/organic composites that can be used simultaneously for energy storage are reported. Films from chitosan (Cs) with microcrystalline cellulose (MCC) implanted with reduced graphene oxide (rGO) and/or magnetic Fe3O4 nanoparticles were fabricated. The reinforcement of the Cs/MCC films with rGO and /or Fe3O4 was studied through Fourier transform infrared spectroscopy, X-ray diffraction, thermogravimetric analysis, and scanning electron microscopy with energy dispersive electron spectroscopy. In addition, their magnetic, conductivity, dielectric constant, and dielectric loss behaviors were studied. The magnetic investigations of the two films loaded with Fe3O4 have supper paramagnetic behavior. The saturation magnetization was decreased with the presence of rGO. At lower frequencies, the contribution of charge transport and interfacial polarization causes a sudden and nearly linear increase in permittivity with decreasing frequency. Unfortunately, no indication of electrode polarization was found, which reduces the ability of the prepared composition to store electrical energy. The electric modulus representation was employed to determine the relaxation time of the interfacial polarization quantitatively and numerically. No indication of electrode polarization was found.
本文报道了可同时用于储能的无机/有机混合复合材料。研究人员制作了由壳聚糖(Cs)和植入还原氧化石墨烯(rGO)和/或磁性 Fe3O4 纳米颗粒的微晶纤维素(MCC)薄膜。通过傅立叶变换红外光谱、X 射线衍射、热重分析和扫描电子显微镜与能量色散电子显微镜研究了 rGO 和/或 Fe3O4 对 Cs/MCC 薄膜的增强作用。此外,还研究了它们的磁性、导电性、介电常数和介电损耗行为。在磁性研究中,两种负载了 Fe3O4 的薄膜都具有顺磁性。饱和磁化随着 rGO 的存在而降低。在较低频率下,电荷传输和界面极化会导致介电常数随着频率的降低而突然近似线性地增加。遗憾的是,没有发现电极极化的迹象,这降低了所制备成分存储电能的能力。我们采用电模量表示法来定量和数值确定界面极化的弛豫时间。没有发现电极极化的迹象。
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引用次数: 0
Structural and Magnetic Properties of Nano Manganite La0.6Sr0.4MnO3 Obtained by Mechanochemical Synthesis Influenced by Preparation Conditions 机械化学合成法获得的纳米锰矿 La0.6Sr0.4MnO3 的结构和磁性受制备条件的影响
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-12 DOI: 10.1149/2162-8777/ad775a
Peter N. G. Ibrahim, Ahmed E. Hannora and Farid F. Hanna
Single phase La0.6Sr0.4MnO3 nanoparticles with perovskite structure ( symmetry) were successfully prepared by ball milling (mechanochemical synthesis) for 1 and 10 h followed by annealing treatment at temperature 900 or 1100 °C. It was found that, the lattice parameters increase with the increase of milling time or annealing temperature. The increase of the annealing temperature results in the increase of crystallite size and the particle size. The obtained samples were found to be ferromagnetic at room temperature. The sample obtained by one hour of milling and 900 °C annealing showed high value of saturation magnetization (about 56 emu g−1) and small value of coercivity (about 31 Oe) at room temperature, while the other samples show reduced value of magnetization and higher value of coercivity. The obtained magnetic results are discussed in light of the core/shell model of nanoparticles. The effect of the presence of oxygen vacancies on the lattice parameters and magnetic properties of the obtained samples is also discussed. Highlights Single phase perovskite La0.6Sr0.4MnO3 was obtained by mechanochemical synthesis. The influence of milling time and annealing temperature on the structural and magnetic properties was studied. The lattice parameters increase with the increase of milling time or annealing temperature The crystallite size and the particle size increase with the increase of annealing temperature. All samples showed ferromagnetic behavior at room temperature. Most of the samples show reduced value of magnetization. The magnetic results were discussed by the core/shell model of nanoparticles. The formation of oxygen vacancies can affect the magnetic results.
通过球磨(机械化学合成)1 小时和 10 小时,然后在 900 或 1100 °C 温度下进行退火处理,成功制备了具有包晶结构(对称性)的单相 La0.6Sr0.4MnO3 纳米粒子。研究发现,晶格参数随研磨时间或退火温度的增加而增加。退火温度升高会导致晶体尺寸和颗粒尺寸增大。所获得的样品在室温下具有铁磁性。经过一小时研磨和 900 °C 退火处理的样品在室温下显示出较高的饱和磁化值(约 56 emu g-1)和较小的矫顽力值(约 31 Oe),而其他样品则显示出较低的磁化值和较高的矫顽力值。我们根据纳米粒子的核/壳模型对所获得的磁性结果进行了讨论。此外,还讨论了氧空位的存在对所获样品晶格参数和磁性能的影响。亮点 通过机械化学合成获得了单相包晶 La0.6Sr0.4MnO3。研究了研磨时间和退火温度对结构和磁性能的影响。晶格参数随研磨时间或退火温度的增加而增加。所有样品在室温下都表现出铁磁性。大多数样品的磁化值都有所降低。磁性结果通过纳米粒子的核/壳模型进行了讨论。氧空位的形成会影响磁性结果。
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引用次数: 0
Review—Research Progress of Novel Fluorescent Probes with the Structure of Xanthene as Parent Nucleus 综述-以呫吨结构为母核的新型荧光探针的研究进展
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-09 DOI: 10.1149/2162-8777/ad71ef
Chunlong Sun, Wen Du, Wang Li, Bin Dong, Baogui Wang, Yanjun Lin, Wenwen Huang, Fangliang Xia and Jun Pan
Xanthene dyes are a type of fluorescent dye with a π conjugated system and a unique ring-opening mechanism. Fluorescent probes with xanthene dyes as fluorescent groups have the advantages of high molar extinction coefficient, high fluorescence quantum yield, good stability, and good water solubility, making them suitable for medical imaging and biological imaging diagnosis. Therefore, this article reviews the research progress of xanthene fluorescent probes in recent years in terms of pH value, reactive oxygen species, metal ions, anions, enzymes, thiol derivatives, etc, summarizes their design ideas, detection performance, and applications, and points out the development trend of xanthene fluorescent probes, providing a reference for the subsequent development and utilization of xanthene fluorescent probes.
呫吨染料是一种具有π共轭体系和独特开环机制的荧光染料。以香蒽染料为荧光基团的荧光探针具有摩尔消光系数高、荧光量子产率高、稳定性好、水溶性好等优点,适用于医学成像和生物成像诊断。因此,本文综述了近年来氧杂蒽荧光探针在pH值、活性氧、金属离子、阴离子、酶、硫醇衍生物等方面的研究进展,总结了其设计思路、检测性能和应用领域,指出了氧杂蒽荧光探针的发展趋势,为后续氧杂蒽荧光探针的开发利用提供参考。
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引用次数: 0
Towards ZnO-Based Near-Infra-Red Radiation Detectors: Performance Improvement via Si Nanoclusters Embedment 基于氧化锌的近红外辐射探测器:通过嵌入硅纳米团簇提高性能
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-05 DOI: 10.1149/2162-8777/ad7403
Victor-Tapio Rangel-Kuoppa, Dante Rodrigo Alfaro-Flores, Angel Guillen-Cervantes, Francisco de Moure-Flores, Miguel Ángel Meléndez-Lira
Si nanoparticles embedded in a ZnO matrix were produced by a sequential deposition of ZnO/Si/ZnO layers, by radio frequency sputtering. Sample growth temperatures of 25 °C, 300 °C, and 500 °C were used to deposit ZnO/Si/ZnO layers on soda lime glass and p-type silicon substrates; ZnO layers were deposited by reactive radio-frequency sputtering employing a mixture of Ar/O2, with a ratio of 66/33, as working atmosphere. The type of substrate and the growth temperature affect the first ZnO layer roughness, promoting the formation of silicon nanoparticles, matrix characteristics, and as consequence, spectral response. The roughness of the initial ZnO layer is transferred to the top layer of ZnO, and it can be tailored between 65 and 370 Å, depending on the sample growth temperature. Transmission electron microscopy show that substrate temperature mainly affects the density of silicon nanoparticles rather than their size. ZnO/Si/ZnO films deposited on p-type silicon substrate were processed and photosensors were obtained, showing a selective response in the 950 to 1150 nm wavelength range, making them suitable candidates for near infrared detectors.
通过射频溅射连续沉积氧化锌/二氧化硅/氧化锌层,产生了嵌入氧化锌基体的硅纳米粒子。样品生长温度分别为 25 ℃、300 ℃ 和 500 ℃,用于在钠钙玻璃和 p 型硅衬底上沉积 ZnO/Si/ZnO 层;采用反应射频溅射法沉积 ZnO 层,工作气氛为氩气/氧气混合物(比例为 66/33)。衬底类型和生长温度会影响第一层氧化锌层的粗糙度,促进硅纳米颗粒的形成,影响基质特性,进而影响光谱响应。初始氧化锌层的粗糙度会转移到氧化锌顶层,根据样品生长温度的不同,粗糙度可在 65 至 370 Å 之间定制。透射电子显微镜显示,衬底温度主要影响硅纳米颗粒的密度,而不是它们的尺寸。对沉积在 p 型硅衬底上的 ZnO/Si/ZnO 薄膜进行了处理,并获得了光传感器,在 950 至 1150 纳米波长范围内显示出选择性响应,使其成为近红外探测器的合适候选材料。
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引用次数: 0
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ECS Journal of Solid State Science and Technology
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