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Effect of Graphene Oxide Incorporation on the Strength of Denture Repair Resin 石墨烯氧化物对义齿修复树脂强度的影响
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-06-04 DOI: 10.1149/2162-8777/ad5402
Fulya Basmacı, Esra Nur Avukat, C. Akay, Filiz Aykent
To evaluate the effect of incorporating graphene oxide nanoparticles (GO NPs) and graphene sheets on the flexural strength of an auto-polymerized (AP) acrylic resin-repaired denture. 60 heat-activated (HA) resin specimens were fabricated and randomly divided into 6 groups (n = 10). The specimens in Group I were kept intact. 50 specimens were cut into two parts with a 45-degree bevel. Group II specimens were repaired with AP resin and Group III specimens were repaired with HA resin. In the repair of Group IV, Group V, and Group VI specimens, 1%, 2% GO NPs, and graphene sheets were added to AP resin, respectively. A 3-point bending test with a universal test device measured the flexural strength. Statistical analyses of the results were performed with the Kruskal Wallis H-test. (α=0.05) The flexural strength of Group I (130.05±20.20 MPa) was the highest among all groups. The flexural strength of Group IV (67.49±12.70 MPa) was significantly higher than Group V (50.87±15.02 MPa) and Group VI (44.77±10.70 MPa). The lowest strength value was obtained in Group VI. Adding 1% GO NPs to AP acrylic resins increases flexural strength. However, the increase in nanoparticle concentration and the addition of graphene sheets negatively affect strength.
评估加入氧化石墨烯纳米颗粒(GO NPs)和石墨烯薄片对自动聚合(AP)丙烯酸树脂修复义齿抗弯强度的影响。制作了 60 个热激活(HA)树脂试样,并随机分为 6 组(n = 10)。第一组的试样保持原样。50 个试样以 45 度斜角切割成两部分。第二组试样用 AP 树脂修复,第三组试样用 HA 树脂修复。在修复第四组、第五组和第六组试样时,分别在 AP 树脂中添加了 1%、2% 的 GO NPs 和石墨烯片。使用通用测试装置进行的三点弯曲测试测量了弯曲强度。采用 Kruskal Wallis H 检验对结果进行统计分析。(α=0.05)第一组的抗弯强度(130.05±20.20 兆帕)是所有组中最高的。第四组的抗弯强度(67.49±12.70 兆帕)明显高于第五组(50.87±15.02 兆帕)和第六组(44.77±10.70 兆帕)。第六组的强度值最低。在 AP 丙烯酸树脂中添加 1%的 GO 纳米粒子可提高抗折强度。然而,纳米粒子浓度的增加和石墨烯片的添加会对强度产生负面影响。
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引用次数: 0
Review—Computational Studies of Graphene Reinforced Nanocomposites: Techniques, Parameters, and Future Perspectives 回顾--石墨烯增强纳米复合材料的计算研究:技术、参数和未来展望
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-06-03 DOI: 10.1149/2162-8777/ad537a
Mamta Dahiya, Virat Khanna, Niraj Gupta
In recent years, there has been notable exploration and investigation of graphene nanocomposites (GNCs) through experimental, numerical, and computational methods. GNCs have gained attention due to their remarkable mechanical and thermal properties, particularly when Gr has been utilized as the reinforcing material. Gr, a two-dimensional material, possesses exceptional properties, including greater elastic modulus, thermal conductivity, and electrical conductivity. As a result, GNCs have emerged as promising materials for various applications in aerospace and automobiles. Computational techniques, including finite element method (FEM), molecular dynamics, and Monte Carlo analysis have been utilized to analyse different aspects of GNC. Among these, FEM stands out for designing and evaluating the mechanical properties of GNC, enabling researchers to simulate and analyse the characteristics of GNC structures under diverse loading conditions, optimizing their design and predicting mechanical performance. This review emphasizes the significance of Gr in various matrices, discusses the present cutting-edge status of FEM methodologies for Gr reinforcement, and highlights its advantages and purposes. Furthermore, it explores the governing parameters affecting the mechanical properties of GNC and briefly presents the different mechanical properties of NC. We also outline future research directions and potential applications of GNC for advancing future generations of materials.
近年来,人们通过实验、数值和计算方法对石墨烯纳米复合材料(GNCs)进行了显著的探索和研究。GNC 因其卓越的机械和热性能而备受关注,尤其是在使用 Gr 作为增强材料时。Gr 是一种二维材料,具有优异的特性,包括更高的弹性模量、导热性和导电性。因此,GNC 已成为航空航天和汽车领域各种应用的理想材料。包括有限元法(FEM)、分子动力学和蒙特卡罗分析在内的计算技术已被用于分析 GNC 的各个方面。其中,有限元法尤其适用于设计和评估 GNC 的机械性能,使研究人员能够模拟和分析 GNC 结构在不同加载条件下的特性,优化其设计并预测其机械性能。本综述强调了 Gr 在各种基体中的重要性,讨论了用于 Gr 加固的 FEM 方法的前沿现状,并强调了其优势和目的。此外,还探讨了影响 GNC 力学性能的相关参数,并简要介绍了 NC 的不同力学性能。我们还概述了 GNC 的未来研究方向和潜在应用,以促进未来材料的发展。
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引用次数: 0
Topological Edge State Ring Resonator for Mid-Infrared(MI) Refractive Indices Biosensor for detection of Brain Tumors 用于中红外(MI)折射率生物传感器的拓扑边缘态环形谐振器,可用于检测脑肿瘤
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-06-03 DOI: 10.1149/2162-8777/ad537b
Satyaraj D, A. Mubarakali, Natraj N A, Gopinath S
The unique properties of light underlie the perspectives of quantum photonic technologies, optical interconnects, and a wide range of new sensors.Some of the most dangerous and deadly diseases are tumors, cancers, and brain lesions, which are expensive to detect and treat. Therefore, a low-cost and accurate method to diagnose them can prevent and treat the progress of this disease. In this work, we used the precise topological valley photonic crystal (TVPC) method for detection. TVPC is an important method for transmitting and controlling light in the optical device. The valley-spin locking in the topology state provides robust transfer and low propagation loss at the desired path.In order to design, by finding the edge band within the first bulk band gap of 146.4THz-155.9THz, the model and design of the topological ring resonator (TRS)were realized. We proposed a topological biosensorbyusing the hexagonal lattice air holes in the silicon slab with a compact size of 22.95µm×10µm. the quality factor and sensitivity at best value are2.905×104and9021nm/RIU respectively. This design can be implemented on the Complementary Metal-Oxide-Semiconductor (CMOS) technology as a high-sensitivity optical device.
光的独特性质是量子光子技术、光互连和各种新型传感器前景的基础。一些最危险、最致命的疾病是肿瘤、癌症和脑部病变,其检测和治疗费用昂贵。因此,一种低成本、精确的诊断方法可以预防和治疗这些疾病。在这项工作中,我们采用了精确的拓扑谷光子晶体(TVPC)方法进行检测。TVPC 是光学设备中传输和控制光的一种重要方法。拓扑状态下的谷旋锁定可在所需路径上提供稳健的传输和较低的传播损耗。为了进行设计,我们在146.4THz-155.9THz的第一块带隙内找到了边缘带,从而实现了拓扑环谐振器(TRS)的模型和设计。我们提出了一种拓扑生物传感器,利用硅片中的六角形晶格气孔,尺寸仅为 22.95µm×10µm ,其品质因数和灵敏度最佳值分别为 2.905×104 和 9021nm/RIU。这种设计可以在互补金属氧化物半导体(CMOS)技术上实现,成为一种高灵敏度光学器件。
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引用次数: 0
Analysis of AgNPs@AuNPs/GO’s Impact on Water-Based Drilling Muds and Comparison with Graphane, GO, AuNPs/GO’s Effects: Labs Research AgNPs@AuNPs/GO对水基钻井泥浆的影响分析及与石墨烷、GO、AuNPs/GO影响的比较:实验室研究
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-30 DOI: 10.1149/2162-8777/ad4f14
Abdullah Özkan and Semih Tıknas
We investigateed the effect of AgNPs@AuNPs/GO on the rheological and filtration properties of sodium-bentonite water based drilling muds (Na-bentonite WBDM) and compared the possible effects of graphene, graphene oxide (GO), and graphene oxide functionalized with gold nanoparticles (AuNPs/GO) on Na-bentonite WBDM. Graphene, AuNPs, AgNPs, GO, AuNPs/GO, and AgNPs@AuNPs/GO were initially synthesized, and subsequently subjected to scanning electron microscopy, tranmission electron microscopy, energy-dispersive X-ray analysis, reflection absoprtion infrared spectroscopy, and X-ray photoelectron spectroscopy characterization. At a rate of 0.0005% to 0.01% (w/v), synthesized and described nanoparticles were added to Na-bentonite WBDM. Rheological and filtration loss analyses of the nanomaterial-containing Na-bentonite WBDM were then performed following American Petroleum Institute Standards. According to the study’s findings, adding graphene and AgNPs/GO to drilling mud at varying rates did not have any influence on PV values when compared to spud mud; however, adding GO and AgNPs@AuNPs/GO had a positive effect of 67% and 33%. Furthermore, the addition of graphene, GO, AuNPs/GO, and AgNPs@AuNPs/GO increased the AV values by 17.6%, 44%, 18.75%, 26%, YP values; by 44.4%, 44%, 30%, 22%, 10 s values; by 55.5%, 33%, 30%, 66.6%, 10 min values; by 30.7%, 43%, 42%, 46%, filtration loss values; by 10%, 9.52%, 8.4%, 3.84%. Highlights AuNPs, AgNPs, Graphene and GO were synthesized seperatally, then GO were functionalized with AuNPs croslinked AgNPs. Nanomaterials were characterized by SEM, TEM, EDX, RAIRS and XPS. AgNPs@AuNPs/GO, which were tested for the first time in water based drilling mud.
我们研究了 AgNPs@AuNPs/GO 对钠膨润土水基钻井泥浆(Na-bentonite WBDM)流变和过滤性能的影响,并比较了石墨烯、氧化石墨烯(GO)和氧化石墨烯与金纳米粒子(AuNPs/GO)对钠膨润土水基钻井泥浆可能产生的影响。首先合成了石墨烯、AuNPs、AgNPs、GO、AuNPs/GO 和 AgNPs@AuNPs/GO,然后进行了扫描电子显微镜、透射电子显微镜、能量色散 X 射线分析、反射吸收红外光谱和 X 射线光电子能谱表征。以 0.0005%至 0.01%(重量/体积)的比例,将合成和描述的纳米粒子添加到 Na-bentonite WBDM 中。然后按照美国石油学会标准对含有纳米材料的 Na-bentonite WBDM 进行流变学和过滤损失分析。研究结果表明,在不同添加量的钻井泥浆中添加石墨烯和 AgNPs/GO 与喷射泥浆相比,对 PV 值没有任何影响;但是,添加 GO 和 AgNPs@AuNPs/GO 有 67% 和 33% 的积极影响。此外,添加石墨烯、GO、AuNPs/GO 和 AgNPs@AuNPs/GO 后,AV 值分别增加了 17.6%、44%、18.75%、26%;YP 值分别增加了 44.4%、44%、30%、22%;10 秒值分别增加了 55.5%、33%、30%、66.6%;10 分钟值分别增加了 30.7%、43%、42%、46%;滤失率分别增加了 10%、9.52%、8.4%、3.84%。亮点分别合成了 AuNPs、AgNPs、石墨烯和 GO,然后用 AuNPs 串联 AgNPs 对 GO 进行功能化。纳米材料的表征方法包括 SEM、TEM、EDX、RAIRS 和 XPS。首次在水基钻井泥浆中测试了 AgNPs@AuNPs/GO。
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引用次数: 0
ZnSb2O4 Thin Films Synthesized by Nebulizer Spray Pyrolysis: Structural, Optical, and Optoelectrical Properties 雾化喷射热解法合成的 ZnSb2O4 薄膜:结构、光学和光电特性
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-26 DOI: 10.1149/2162-8777/ad4c97
Abdullah Alsulami
Zinc antimony oxide (ZnSb2O4) thin films were prepared by inexpensive nebulizer spray pyrolysis. X-ray diffraction analysis showed that the ZnSb2O4 thin films have a tetragonal structure. The analysis of structural indices indicate that the grain size of the ZnSb2O4 films was enhanced by expanding the thickness of the ZnSb2O4 layers, and the dislocation density was decreased. Further, the optical reflectance, R, and transmittance, T, of the ZnSb2O4 sheets, were used to investigate the optical characteristics of these layers. The optical investigations of the ZnSb2O4 films refer to an improvement in the refractive index values, Urbach energy, and absorption coefficient by boosting the thickness. Moreover, the energy gap analysis of these films shows that their energy gap decreased from 3.75 to 3.47 eV as the thickness increased. The investigation of optoelectrical characteristics involves improving the optical conductivity, electrical conductivity, optical carrier concentration, and optical mobility of the ZnSb2O4 films by growing the thickness. The nonlinear optical indices of the ZnSb2O4 layers were deduced, and it was noted that the boost in the nonlinear optical indices of these films occurred by raising the thickness. Furthermore, the ZnSb2O4 films displayed n-type semiconducting properties by the hot probe equipment.
利用廉价的雾化器喷雾热解法制备了锌锑氧化物(ZnSb2O4)薄膜。X 射线衍射分析表明,ZnSb2O4 薄膜具有四方结构。结构指数分析表明,通过扩大 ZnSb2O4 层的厚度,ZnSb2O4 薄膜的晶粒尺寸增大,位错密度降低。此外,还利用 ZnSb2O4 薄膜的光学反射率 R 和透射率 T 来研究这些层的光学特性。对 ZnSb2O4 薄膜的光学研究表明,通过增加厚度,折射率值、乌尔巴赫能量和吸收系数都得到了改善。此外,这些薄膜的能隙分析表明,随着厚度的增加,它们的能隙从 3.75 eV 下降到 3.47 eV。对光电特性的研究包括通过增加厚度提高 ZnSb2O4 薄膜的光导率、电导率、光载流子浓度和光迁移率。研究人员推导了 ZnSb2O4 膜层的非线性光学指数,发现这些薄膜的非线性光学指数随着厚度的增加而提高。此外,通过热探针设备,ZnSb2O4 薄膜显示出 n 型半导体特性。
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引用次数: 0
Advancing Frontiers: A High-Impact Study on the Synthesis, Characterization, and Superior Device Performance of AlCr2O4/MXene Nanocomposites 推进前沿:关于 AlCr2O4/MXene 纳米复合材料的合成、表征和卓越器件性能的重要研究
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-24 DOI: 10.1149/2162-8777/ad4ff1
M. Rani, Aqeel Ahmad Shah, K. Tariq, Akram Ibrahim, Mika Sillanpaa, Mohamad Ouladsmane, Naseem Akhtar
Here we present the fabrication of a multilayer resistive memory device (ReRAM) utilizing AlCr2O4/MXene nanocomposite. Comprehensive investigations into the structural and morphological properties of the nanostructures were conducted using various characterization techniques. The fabricated device was tested by measuring I-V characteristics at different current applications which encompasses all previous results. The band gap value for the nanocomposite was reduced to 2.42 eV while that for AlCr2O4 was measured at 3.25 eV via photoluminescence spectrum. Average particle size of the AlCr2O4/MXene nanocomposite was determined to be 25 nm through powder X-ray diffraction analysis. Crystallographic analysis revealed that all crystal peaks conform to the R-3c (167) space group, indicative of a standard hexagonal crystal structure. Energy-dispersive X-ray readings provided further confirmation that all required elements are present in the sample, affirming successful synthesis of the nanocomposite. Notably, the nanocomposite demonstrated exceptional performance as an electrode material in ReRAM, as evidenced by its current-voltage characteristics, making the AlCr2O4/MXene nanocomposite suitable for a wide range of next-generation device applications.
在此,我们介绍了利用 AlCr2O4/MXene 纳米复合材料制造多层电阻式存储器件(ReRAM)的情况。我们利用各种表征技术对纳米结构的结构和形态特性进行了全面研究。通过测量不同电流应用下的 I-V 特性,对制造出的器件进行了测试,测试结果涵盖了之前的所有结果。纳米复合材料的带隙值降低到了 2.42 eV,而通过光致发光光谱测量,AlCr2O4 的带隙值为 3.25 eV。通过粉末 X 射线衍射分析,确定 AlCr2O4/MXene 纳米复合材料的平均粒径为 25 纳米。晶体学分析表明,所有晶体峰都符合 R-3c (167) 空间群,表明其为标准六方晶体结构。能量色散 X 射线读数进一步证实了样品中含有所有必需元素,从而肯定了纳米复合材料的成功合成。值得注意的是,该纳米复合材料作为 ReRAM 的电极材料表现出了卓越的性能,其电流-电压特性证明了这一点,从而使 AlCr2O4/MXene 纳米复合材料适用于广泛的下一代设备应用。
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引用次数: 0
Synthesis, Structural Investigations, and Dielectric Properties of Irradiated Flexible Polymeric Composite Films 辐照柔性聚合物复合薄膜的合成、结构研究和介电性能
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-23 DOI: 10.1149/2162-8777/ad4f71
M. M. Youssef, Reem Taugary, A ATTA, Mohammed Ezzeldian
In this research, the casting solution manufacturing approach was used to mix polyvinyl alcohol (PVA) and copper oxide (CuO) to create the composite (PVA/CuO). X-ray diffraction analysis and Fourier transform infrared spectroscopy were applied to record the successful fabrications of the composites. Next, argon ion beams at fluencies of 2.5x1017, 5x1017, and 7.5x1017 ions.cm-2 were used to irradiate the composites. In frequencies of 50 Hz to 6 MHz, the dielectric characteristics of PVA/CuO were modified by the ion irradiation. The dielectric constant was enhanced from 39 for unmodified PVA/CuO to 356 for the irradiated composite by 7.5x1017 ions.cm-2, and the conductivity changed from 0.05x10-6 S/cm to 2.9x10-6 S/cm. However, the potential barrier decreased from 0.24 eV for PVA/CuO to 0.21, 0.16, and 0.15 eV, respectively, for 2.5x1017, 5x1017, and 7.5x1017 ions.cm-2, and the relaxation time decreased from 9.36x10-8 sec for PVA/CuO, to 6.58x10-8 sec for 7.5x1017 ions.cm-2. The results indicate that the irradiated PVA/CuO nanocomposite can be used in a number of devices such as capacitors and batteries.
本研究采用浇铸溶液制造法将聚乙烯醇(PVA)和氧化铜(CuO)混合制成复合材料(PVA/CuO)。应用 X 射线衍射分析和傅立叶变换红外光谱记录了复合材料的成功制造过程。接着,以 2.5x1017、5x1017 和 7.5x1017 离子.cm-2 的氩离子束对复合材料进行辐照。在 50 Hz 至 6 MHz 频率范围内,离子辐照改变了 PVA/CuO 的介电特性。通过 7.5x1017 离子.cm-2,介电常数从未修改的 PVA/CuO 的 39 提高到辐照复合材料的 356,电导率从 0.05x10-6 S/cm 变为 2.9x10-6 S/cm。然而,PVA/CuO 的势垒从 0.24 eV 分别下降到 2.5x1017、5x1017 和 7.5x1017 离子.cm-2 的 0.21、0.16 和 0.15 eV,弛豫时间从 PVA/CuO 的 9.36x10-8 秒下降到 7.5x1017 离子.cm-2 的 6.58x10-8 秒。结果表明,辐照后的 PVA/CuO 纳米复合材料可用于电容器和电池等多种设备。
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引用次数: 0
Solid Oxide Fuel Cells with 3D Inkjet Printing Modified LSM-YSZ Interface 采用三维喷墨打印改性 LSM-YSZ 接口的固体氧化物燃料电池
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-23 DOI: 10.1149/2162-8777/ad4fbf
C. Jenkins, Jiashen Tian, Yan Dou, Qiong Nian, R. Milcarek
In this study, pillar shaped yttria-stabilized zirconia (YSZ) 3D microstructures with ~60 to 90 m diameter and 12 to 20 m height are fabricated by 3D inkjet printing to improve the topology of the electrolyte/cathode interface. The microstructures increase the surface area of the cell by ~ 2.4% to 4.0% and enhance the connection between the dense YSZ electrolyte and mixed YSZ-lanthanum strontium manganite (LSM) cathode. The morphology and microstructure of the YSZ interface are characterized with scanning electron microscopy. Polarization curves confirm that the power density improves by 47% to 107% at 0.55V, depending on the dimensions of the microstructures, in comparison to a flat interface. The non-linear improvement in power density with the size of microstructures is confirmed by calculating the uncertainty with repeated tests. Based on electrochemical impedance spectroscopy and distribution of relaxation times analysis, the performance improvement is attributed to changes in the oxygen surface exchange kinetics and O2- diffusivity in the cathode.
在这项研究中,通过三维喷墨打印技术制造了直径约为 60 至 90  米、高度为 12 至 20  米的柱状钇稳定氧化锆(YSZ)三维微结构,以改善电解质/阴极界面的拓扑结构。这些微结构使电池的表面积增加了约 2.4% 至 4.0%,并增强了致密 YSZ 电解质与混合 YSZ-镧锶锰矿(LSM)阴极之间的连接。扫描电子显微镜对 YSZ 界面的形态和微观结构进行了表征。极化曲线证实,与平面界面相比,在 0.55V 电压下,功率密度提高了 47% 至 107%,具体取决于微结构的尺寸。通过计算重复测试的不确定性,证实了功率密度随微结构大小的非线性改善。根据电化学阻抗光谱和弛豫时间分布分析,性能的提高归因于阴极中氧表面交换动力学和 O2- 扩散率的变化。
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引用次数: 0
Fabrication, Structural Characterization, Dielectric Analysis and Thermal Properties of Novel Flexible Polymer Composite Films 新型柔性聚合物复合薄膜的制作、结构表征、介电分析和热性能
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-23 DOI: 10.1149/2162-8777/ad4fc0
eslam M. Abdeltwab, A. Atta, H. Al-Yousef, M. M. Abdelhamied
The films were characterized by different methods as FTIR, SEM, XRD and TGA to prove the efficient manufacturing of the composite. The dielectric performance measurements were done at frequency of 20 Hz to 6 MHz for the polymer PET and the composite (PPy-Fe2O3)/PET with varying concentrations of Fe2O3. Moreover, to reveal the characteristics of the fabricated composite, the contact angle, the work of adhesion, surface energy of the composite PET/(PPy-Fe2O3) films were considerably determined. The SEM results support the deposition of PPy-Fe2O3 composite on the PET surface. The water contact angle drops from 78.32 o for PET to 40.11o for PET/6%(PPy-Fe2O3), while the dispersive free energy raised from 23.9 mJ/m2 to 43.7 mJ/m2and the polar free energy rises from 8.9 mJ/m2 to 22.3 mJ/m2. The concentration of Fe2O3 increased the surface features of the samples, according to the obtained results. At frequency of 100 Hz, the dielectric constant enhanced from 18 for PET to 923 for the PET/6%(PPy-Fe2O3), and the dielectric loss improved from 24 to 9231, while the energy density improved fromm 7.9x10-5 J/m3 for PET to 408x10-5 J/m3. The TGA results show marginal modifications in thermal stability after deposition the PPy/Fe2O3 on the PET film.
为了证明复合材料的高效制造,我们采用了傅立叶变换红外光谱、扫描电子显微镜、X 射线衍射和热重分析等不同方法对薄膜进行了表征。在 20 Hz 至 6 MHz 的频率下,对聚合物 PET 和不同浓度的 Fe2O3 复合材料(PPy-Fe2O3)/PET 进行了介电性能测量。此外,为了揭示所制备复合材料的特性,还测定了 PET/(PPy-Fe2O3)复合薄膜的接触角、附着功和表面能。扫描电镜结果表明,PPy-Fe2O3 复合材料沉积在 PET 表面。水接触角从 PET 的 78.32 o 下降到 PET/6%(PPy-Fe2O3) 的 40.11 o,分散自由能从 23.9 mJ/m2 上升到 43.7 mJ/m2,极性自由能从 8.9 mJ/m2 上升到 22.3 mJ/m2。根据所得结果,Fe2O3 的浓度增加了样品的表面特征。频率为 100 Hz 时,介电常数从 PET 的 18 提高到 PET/6%(PPy-Fe2O3) 的 923,介电损耗从 24 提高到 9231,能量密度从 PET 的 7.9x10-5 J/m3 提高到 408x10-5 J/m3。TGA 结果表明,在 PET 薄膜上沉积 PPy/Fe2O3 后,热稳定性略有改变。
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引用次数: 0
Effect of Potassium Ferrocyanide on CMP Performance of Ruthenium in H2O2-based Slurries 亚铁氰化钾对 H2O2 泥浆中钌的 CMP 性能的影响
IF 2.2 4区 材料科学 Q2 Materials Science Pub Date : 2024-05-23 DOI: 10.1149/2162-8777/ad4fbe
Renhao Liu, Yi Xu, Yuling Liu, Baimei Tan, Jinbo Ji, Shihao Zhang, Jiadong Zhao
As feature size of integrated circuits develops to 7 nm, ruthenium is considered the preferred material to replace traditional Ta/TaN barrier layers. Ruthenium can be electroplated without the need for copper seed crystal layers. However, the removal of the ruthenium barrier layer during the polishing process must be addressed. Therefore, this article studies the promoting effect of potassium ferrocyanide (K4Fe(CN)6) and hydrogen peroxide (H2O2) containing silicon slurries on the rate of ruthenium chemical mechanical polishing. Experiments have shown that the polishing rate of ruthenium is significantly improved by the combined action of K4Fe(CN)6 and H2O2. The stronger hydroxyl radicals is the main factor in achieving a high Ru polishing rate, which accelerates the dissolution and removal of Ru layers by converting the hard Ru layer into softer RuO2 and RuO3 oxide layers. The dependencies of the chemical properties (such as electrochemical impedance spectroscopy and surface morphology) proved that the CMP mechanism using Fenton reaction principally performs chemical oxidation and etching dominant CMP simultaneously. This study is expected to provide ideas and insights for the development and design of a new alkaline polishing solution for ruthenium, which is beneficial for the wider application of ruthenium in the field of integrated circuits.
随着集成电路的特征尺寸发展到 7 纳米,钌被认为是取代传统钽/钽铌阻挡层的首选材料。钌可以电镀,无需铜籽晶层。然而,必须解决抛光过程中钌阻挡层的去除问题。因此,本文研究了含亚铁氰化钾(K4Fe(CN)6)和过氧化氢(H2O2)的硅浆液对钌化学机械抛光速率的促进作用。实验表明,在 K4Fe(CN)6 和 H2O2 的共同作用下,钌的抛光速率显著提高。较强的羟基自由基是实现高钌抛光率的主要因素,它通过将坚硬的钌层转化为较软的 RuO2 和 RuO3 氧化物层,加速了钌层的溶解和去除。化学特性(如电化学阻抗谱和表面形貌)的相关性证明,使用 Fenton 反应的 CMP 机制主要是同时进行化学氧化和蚀刻主导型 CMP。这项研究有望为开发和设计新的钌碱性抛光液提供思路和启示,有利于钌在集成电路领域的广泛应用。
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引用次数: 0
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