首页 > 最新文献

ECS Journal of Solid State Science and Technology最新文献

英文 中文
Influence of Ultrasonication Treatment on Mechanical, Optical, and Physiochemical Properties of Polyvinyl-alcohol/cornstarch Biocomposite Thin Films 超声处理对聚乙烯醇/玉米淀粉生物复合薄膜机械、光学和理化特性的影响
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-14 DOI: 10.1149/2162-8777/ad458e
Abdul Rauf Jamali, Asif Ahmed Shaikh and Ali Dad Chandio
Over the past few decades, Polyvinyl-alcohol (PVOH)/cornstarch (CS)-based composite thin films have garnered significant interest due to their enhanced properties. Synthesis of such films relies heavily on depolymerization reactions within the solution of the PVOH/CS blends. Understanding how depolymerization affects the crystal structure and properties of these films is crucial for further improvement. This study aims to evaluate the depolymerization effects of crosslinked PVOH incorporated with CS as filler materials (with an 80:20 mass ratio) using ultrasonication at various time intervals while maintaining a constant frequency of 25 KHz. The prepared solution is then cast into thin films using blade coating. Comparative analyses were then conducted between samples subjected to ultrasonication (treated) and without ultrasonication (untreated) to assess their properties based on structural physical, mechanical, optical, and aspects of biodegradability . The investigation revealed significant changes in crystal structure and lattice strains following ultrasonication of the PVOH/CS solution when compared to untreated PVOH/CS samples. Importantly, longer ultrasonication times correlated with increased tensile strength. Additionally, the treated samples led to improvements in thin film transparency and a notable decrease in absorbance. These changes were attributed to the mechanical depolymerization induced by ultrasonication, aligning the thin films with the necessary properties for food packaging applications.
在过去几十年中,聚乙烯醇(PVOH)/玉米淀粉(CS)基复合薄膜因其增强的性能而备受关注。此类薄膜的合成在很大程度上依赖于 PVOH/CS 混合物溶液中的解聚反应。了解解聚如何影响这些薄膜的晶体结构和性能对于进一步改进至关重要。本研究旨在评估以 CS 作为填充材料(质量比为 80:20)的交联 PVOH 的解聚效果,采用不同时间间隔的超声处理,同时保持 25 KHz 的恒定频率。然后使用刀片涂层将制备好的溶液浇铸成薄膜。然后对经过超声处理(处理过的)和未经过超声处理(未处理过的)的样品进行比较分析,以评估它们在结构物理、机械、光学和生物降解性等方面的特性。调查显示,与未处理的 PVOH/CS 样品相比,超声处理 PVOH/CS 溶液后晶体结构和晶格应变发生了显著变化。重要的是,超声处理时间越长,拉伸强度越高。此外,经过处理的样品还提高了薄膜的透明度,并显著降低了吸光度。这些变化都归因于超声诱导的机械解聚,使薄膜具备了食品包装应用所需的性能。
{"title":"Influence of Ultrasonication Treatment on Mechanical, Optical, and Physiochemical Properties of Polyvinyl-alcohol/cornstarch Biocomposite Thin Films","authors":"Abdul Rauf Jamali, Asif Ahmed Shaikh and Ali Dad Chandio","doi":"10.1149/2162-8777/ad458e","DOIUrl":"https://doi.org/10.1149/2162-8777/ad458e","url":null,"abstract":"Over the past few decades, Polyvinyl-alcohol (PVOH)/cornstarch (CS)-based composite thin films have garnered significant interest due to their enhanced properties. Synthesis of such films relies heavily on depolymerization reactions within the solution of the PVOH/CS blends. Understanding how depolymerization affects the crystal structure and properties of these films is crucial for further improvement. This study aims to evaluate the depolymerization effects of crosslinked PVOH incorporated with CS as filler materials (with an 80:20 mass ratio) using ultrasonication at various time intervals while maintaining a constant frequency of 25 KHz. The prepared solution is then cast into thin films using blade coating. Comparative analyses were then conducted between samples subjected to ultrasonication (treated) and without ultrasonication (untreated) to assess their properties based on structural physical, mechanical, optical, and aspects of biodegradability . The investigation revealed significant changes in crystal structure and lattice strains following ultrasonication of the PVOH/CS solution when compared to untreated PVOH/CS samples. Importantly, longer ultrasonication times correlated with increased tensile strength. Additionally, the treated samples led to improvements in thin film transparency and a notable decrease in absorbance. These changes were attributed to the mechanical depolymerization induced by ultrasonication, aligning the thin films with the necessary properties for food packaging applications.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"1 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941362","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist 化学放大干显影聚(醛)光刻胶
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-14 DOI: 10.1149/2162-8777/ad47d0
Jose Lopez Ninantay, Anthony Engler, Jared Schwartz and Paul A. Kohl
The catalytic decomposition of poly(phthalaldehyde) with a photoacid generator can be used as dry-develop photoresist, where the exposed film depolymerizes into small molecules to allow the development of features via controlled vaporization. Higher temperatures enabled shorter dry-development times, but also promoted faster photoacid diffusion that compromised pattern fidelity. Trihexylamine was used as a base quencher to counteract acid diffusion in a phthalaldehyde-propanal co-polymer photoresist. The propanal co-monomer in the polymer improves the vaporization rate because it has a higher vapor pressure than phthalaldehyde. Addition of the base quencher was found to improve the contrast, pattern fidelity, and ease-of-handling of the dry-develop resist in a direct-write UV lithography tool. The dry-development of 4 μm features was achieved with no appreciable residue. For large area features, a spatially variable exposure method was used to direct the residue away from the exposed area. The gradient exposure method was used to produce 100 μm features. Plasma etching after dry-development was also used to achieve residue-free dry-developed patterns. These results show the benefits of incorporating base additives into a dry-develop depolymerizable resist system and highlight the need for addressing residue formation.
使用光酸发生器催化分解聚(邻苯二甲酸)可用作干显影光刻胶,在这种情况下,曝光的薄膜会解聚成小分子,以便通过受控气化显影特征。较高的温度可以缩短干显影时间,但也会加快光酸的扩散速度,从而影响图案的保真度。三己胺被用作碱淬火剂,以抵消邻苯二甲醛-丙醛共聚物光刻胶中的酸扩散。聚合物中的丙醛共聚单体可提高蒸发率,因为它的蒸气压比邻苯二甲醛高。在直写紫外光刻工具中,加入碱淬灭剂可改善干显影光刻胶的对比度、图案保真度和易操作性。干显影 4 μm 的特征时没有明显的残留物。对于大面积特征,采用了空间可变曝光法,将残留物引离曝光区域。梯度曝光法用于产生 100 μm 的特征。干显影后的等离子蚀刻也用于实现无残留的干显影图案。这些结果表明了在干显影可解聚光刻胶系统中加入基底添加剂的好处,并强调了解决残留物形成问题的必要性。
{"title":"Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist","authors":"Jose Lopez Ninantay, Anthony Engler, Jared Schwartz and Paul A. Kohl","doi":"10.1149/2162-8777/ad47d0","DOIUrl":"https://doi.org/10.1149/2162-8777/ad47d0","url":null,"abstract":"The catalytic decomposition of poly(phthalaldehyde) with a photoacid generator can be used as dry-develop photoresist, where the exposed film depolymerizes into small molecules to allow the development of features via controlled vaporization. Higher temperatures enabled shorter dry-development times, but also promoted faster photoacid diffusion that compromised pattern fidelity. Trihexylamine was used as a base quencher to counteract acid diffusion in a phthalaldehyde-propanal co-polymer photoresist. The propanal co-monomer in the polymer improves the vaporization rate because it has a higher vapor pressure than phthalaldehyde. Addition of the base quencher was found to improve the contrast, pattern fidelity, and ease-of-handling of the dry-develop resist in a direct-write UV lithography tool. The dry-development of 4 μm features was achieved with no appreciable residue. For large area features, a spatially variable exposure method was used to direct the residue away from the exposed area. The gradient exposure method was used to produce 100 μm features. Plasma etching after dry-development was also used to achieve residue-free dry-developed patterns. These results show the benefits of incorporating base additives into a dry-develop depolymerizable resist system and highlight the need for addressing residue formation.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"67 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Proposal of Magnetic-Force-Assisted Polishing Method 关于磁力辅助抛光方法的建议
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-12 DOI: 10.1149/2162-8777/ad4676
Tatsuyuki Wada, Michio Uneda, Yuko Yamamoto, Tadakazu Miyashita and Ken-ichi Ishikawa
To reduce the size of the polisher, especially the polishing head, a novel method for applying the polishing load using magnetic force is proposed. As the fabrication of next-generation power device substrates advances, such as diamond, ultra-precise planarization via chemical mechanical polishing (CMP) becomes crucial for transforming these substrates into functional devices. Achieving CMP necessitates the application of an optimal polishing load to the substrate. Deadweight and air pressure methods are the traditional mechanisms for delivering this load. However, they tend to increase the size and complexity of the polishing head mechanism, hindering its miniaturization. This study proposes leveraging the magnetic force for the application of polishing load. Such an approach not only promises the miniaturization of the polishing head but also paves the way for smaller polishers. We constructed a prototype polisher with a straightforward mechanism and conducted several tests. The removal rate measurements from these tests, when compared with those of the traditional deadweight method in prior research, validated our approach. Additionally, by adjusting the magnet spacing (which adjusts magnetic force) and the rotational speed, we found that the removal rate adheres to Preston’s law even when employing the magnetic force for polishing.
为了减小抛光机(尤其是抛光头)的尺寸,提出了一种利用磁力施加抛光负载的新方法。随着金刚石等下一代功率器件基片制造技术的发展,通过化学机械抛光(CMP)实现超精密平面化成为将这些基片转化为功能器件的关键。要实现 CMP,必须对基底施加最佳的抛光负载。自重法和气压法是提供这种负载的传统机制。然而,它们往往会增加抛光头机构的尺寸和复杂性,阻碍其微型化。本研究建议利用磁力来施加抛光负载。这种方法不仅有望实现抛光头的微型化,还能为更小的抛光机铺平道路。我们建造了一个具有简单机制的抛光机原型,并进行了多项测试。与之前研究中的传统自重法相比,这些测试的去除率测量结果验证了我们的方法。此外,通过调整磁铁间距(可调整磁力)和转速,我们发现即使使用磁力进行抛光,去除率也符合普雷斯顿定律。
{"title":"Proposal of Magnetic-Force-Assisted Polishing Method","authors":"Tatsuyuki Wada, Michio Uneda, Yuko Yamamoto, Tadakazu Miyashita and Ken-ichi Ishikawa","doi":"10.1149/2162-8777/ad4676","DOIUrl":"https://doi.org/10.1149/2162-8777/ad4676","url":null,"abstract":"To reduce the size of the polisher, especially the polishing head, a novel method for applying the polishing load using magnetic force is proposed. As the fabrication of next-generation power device substrates advances, such as diamond, ultra-precise planarization via chemical mechanical polishing (CMP) becomes crucial for transforming these substrates into functional devices. Achieving CMP necessitates the application of an optimal polishing load to the substrate. Deadweight and air pressure methods are the traditional mechanisms for delivering this load. However, they tend to increase the size and complexity of the polishing head mechanism, hindering its miniaturization. This study proposes leveraging the magnetic force for the application of polishing load. Such an approach not only promises the miniaturization of the polishing head but also paves the way for smaller polishers. We constructed a prototype polisher with a straightforward mechanism and conducted several tests. The removal rate measurements from these tests, when compared with those of the traditional deadweight method in prior research, validated our approach. Additionally, by adjusting the magnet spacing (which adjusts magnetic force) and the rotational speed, we found that the removal rate adheres to Preston’s law even when employing the magnetic force for polishing.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"27 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stability, Thermophysical, Optical and Photothermal Properties of ZnO Nanofluids with Added Anionic/Cationic Mixed Surfactants 添加了阴离子/阳离子混合表面活性剂的氧化锌纳米流体的稳定性、热物理、光学和光热特性
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-12 DOI: 10.1149/2162-8777/ad458f
XuSheng Zhang, Bin Yang, Yue Shi, XiaoHui Yu and XiuQin Ma
Metal oxide nanofluid is a new type of heat transfer medium with good thermal performance, which can be used to improve the heat collection and photothermal conversion performance of the collector. The development of new nanofluids with excellent stability, thermophysical and photothermal properties is very important for solar thermal utilization. In this paper, the ZnO nanofluids with SDS/CTAB mixed surfactants were prepared by two-step method. Their stability, thermophysical, optical and photothermal properties were studied based on experimental data. Then, the optimum concentration and preparation conditions of the proposed ZnO nanofluids adding SDS/CTAB with good photothermal performance were obtained. The results showed that the ZnO nanofluids with the addition of SDS/CTAB hybrid surfactant has good dispersion stability and its thermal conductivity can reach 0.772 W/(m·K). The transmittance was as low as 19.0.10% and the extinction coefficient was as high as 7.25 cm−1. In addition, the addition of the SDS/CTAB hybrid surfactant caused the ZnO nanofluids to exhibit better photothermal conversion efficiency up to 87%, which was superior to that of the control group with the addition of other surfactants. Therefore, ZnO nanofluids with the addition of SDS/CTAB have great potential as DASC working fluids. Highlights ZnO nanofluids with SDS/CTAB mixed surfactants were prepared. The thermal properties, stability, optical properties and photothermal properties of the prepared ZnO nanofluids were analyzed. The results show that the prepared nanofluids have great potential as the working medium of DASC.
金属氧化物纳米流体是一种热性能良好的新型传热介质,可用于提高集热器的集热和光热转换性能。开发具有优异稳定性、热物理性能和光热性能的新型纳米流体对太阳能热利用非常重要。本文采用两步法制备了含有 SDS/CTAB 混合表面活性剂的 ZnO 纳米流体。根据实验数据对其稳定性、热物理性能、光学性能和光热性能进行了研究。然后,得到了添加 SDS/CTAB 的 ZnO 纳米流体的最佳浓度和制备条件,该流体具有良好的光热性能。结果表明,添加了 SDS/CTAB 混合表面活性剂的 ZnO 纳米流体具有良好的分散稳定性,其导热系数可达 0.772 W/(m-K)。透射率低至 19.0.10%,消光系数高达 7.25 cm-1。此外,添加 SDS/CTAB 混合表面活性剂可使 ZnO 纳米流体表现出更好的光热转换效率,最高可达 87%,优于添加其他表面活性剂的对照组。因此,添加了 SDS/CTAB 的 ZnO 纳米流体作为 DASC 工作流体具有很大的潜力。本文制备了添加 SDS/CTAB 混合表面活性剂的 ZnO 纳米流体。分析了所制备的氧化锌纳米流体的热性能、稳定性、光学性能和光热性能。结果表明所制备的纳米流体作为 DASC 的工作介质具有很大的潜力。
{"title":"Stability, Thermophysical, Optical and Photothermal Properties of ZnO Nanofluids with Added Anionic/Cationic Mixed Surfactants","authors":"XuSheng Zhang, Bin Yang, Yue Shi, XiaoHui Yu and XiuQin Ma","doi":"10.1149/2162-8777/ad458f","DOIUrl":"https://doi.org/10.1149/2162-8777/ad458f","url":null,"abstract":"Metal oxide nanofluid is a new type of heat transfer medium with good thermal performance, which can be used to improve the heat collection and photothermal conversion performance of the collector. The development of new nanofluids with excellent stability, thermophysical and photothermal properties is very important for solar thermal utilization. In this paper, the ZnO nanofluids with SDS/CTAB mixed surfactants were prepared by two-step method. Their stability, thermophysical, optical and photothermal properties were studied based on experimental data. Then, the optimum concentration and preparation conditions of the proposed ZnO nanofluids adding SDS/CTAB with good photothermal performance were obtained. The results showed that the ZnO nanofluids with the addition of SDS/CTAB hybrid surfactant has good dispersion stability and its thermal conductivity can reach 0.772 W/(m·K). The transmittance was as low as 19.0.10% and the extinction coefficient was as high as 7.25 cm−1. In addition, the addition of the SDS/CTAB hybrid surfactant caused the ZnO nanofluids to exhibit better photothermal conversion efficiency up to 87%, which was superior to that of the control group with the addition of other surfactants. Therefore, ZnO nanofluids with the addition of SDS/CTAB have great potential as DASC working fluids. Highlights ZnO nanofluids with SDS/CTAB mixed surfactants were prepared. The thermal properties, stability, optical properties and photothermal properties of the prepared ZnO nanofluids were analyzed. The results show that the prepared nanofluids have great potential as the working medium of DASC.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"246 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of Novel pH Regulators on Copper film Chemical Mechanical Polishing for Ruthenium-Based Copper Interconnect under Weak Alkalinity Conditions 新型 pH 值调节剂对弱碱性条件下用于钌基铜互连器件的铜膜化学机械抛光的影响
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-12 DOI: 10.1149/2162-8777/ad4679
Changxin Dong, Xinhuan Niu, Jianghao Liu, Ni Zhan, Yida Zou, Chao He, Xinjie Li, Fu Luo, Yunhui Shi and Jiabao Cheng
For Ruthenium (Ru)-based copper (Cu) interconnects Cu film chemical mechanical polishing (CMP), it is crucial to select appropriate pH regulators in the slurry to ensure the chemical reactions and maintain the stability of the polishing chemical environment. In this study, the effects of inorganic pH regulator KOH, organic pH regulator diethanolamine (DEA), and 2-amino-2-methyl-1-propanol (AMP) on CMP and slurry properties of Cu film were compared. It was found when using AMP as a pH regulator, the Cu/Ru removal rate selectivity (RRS) can reach 598:1, the surface roughness of Cu film decreased to 0.76 nm, and the slurry can remain stable for at least 7 d. The performance order of the three pH regulators is AMP>KOH>DEA. Meanwhile, through experimental results and test analysis, it has been confirmed that AMP can also play a multifunctional role as a complexing agent, dispersant, and surfactant. Therefore, AMP can replace KOH as a new pH regulator in weak alkaline slurries. This result plays an important role in guiding the selection of organic pH regulators in the optimization of Cu film CMP slurry. Highlights For Ruthenium-based copper interconnects copper film chemical mechanical polishing, it is crucial to select appropriate pH regulators in the slurry to ensure the chemical reactions and maintain the stability of the polishing chemical environment. In this paper, diethanolamine and 2-amino-2-methyl-1-propanol were selected as organic pH regulators for the properties of eco-friendly, stable, rapid reaction performance and the effects on copper film chemical mechanical polishing. 2-amino-2-methyl-1-propanol can also play a multifunctional role as a complexing agent, dispersant, and surfactant. When using AMP as a pH regulator, the copper/Ruthenium removal rate selectivity can reach 598:1, the surface roughness of copper film decreased to 0.76 nm, and the slurry can keep stability for at least 7 d. The application of multifunctional organic alkali in copper film chemical mechanical polishing will get more and more attention.
对于钌(Ru)基铜(Cu)互连器件 Cu 薄膜化学机械抛光(CMP)而言,在浆料中选择适当的 pH 值调节剂以确保化学反应并保持抛光化学环境的稳定性至关重要。本研究比较了无机 pH 调节剂 KOH、有机 pH 调节剂二乙醇胺(DEA)和 2-氨基-2-甲基-1-丙醇(AMP)对铜膜 CMP 和研磨液性能的影响。结果发现,使用 AMP 作为 pH 值调节剂时,Cu/Ru 去除率选择性(RRS)可达到 598:1,Cu 膜表面粗糙度降至 0.76 nm,浆料至少可保持稳定 7 d。同时,通过实验结果和测试分析证实,AMP 还能发挥络合剂、分散剂和表面活性剂的多功能作用。因此,在弱碱性泥浆中,AMP 可以替代 KOH 成为一种新的 pH 值调节剂。这一结果对优化铜膜 CMP 泥浆中有机 pH 调节剂的选择具有重要的指导作用。亮点 对于钌基铜互连铜膜化学机械抛光而言,在研磨液中选择合适的 pH 值调节剂对于保证化学反应的顺利进行和维持抛光化学环境的稳定至关重要。本文选择二乙醇胺和 2-氨基-2-甲基-1-丙醇作为有机 pH 值调节剂,以考察其环保、稳定、快速反应性能以及对铜膜化学机械抛光的影响。2- 氨基-2-甲基-1-丙醇还可以作为络合剂、分散剂和表面活性剂发挥多功能作用。当使用 AMP 作为 pH 调节剂时,铜/钌去除率选择性可达 598:1,铜膜表面粗糙度降至 0.76 nm,浆料至少可保持稳定 7 d。
{"title":"Effect of Novel pH Regulators on Copper film Chemical Mechanical Polishing for Ruthenium-Based Copper Interconnect under Weak Alkalinity Conditions","authors":"Changxin Dong, Xinhuan Niu, Jianghao Liu, Ni Zhan, Yida Zou, Chao He, Xinjie Li, Fu Luo, Yunhui Shi and Jiabao Cheng","doi":"10.1149/2162-8777/ad4679","DOIUrl":"https://doi.org/10.1149/2162-8777/ad4679","url":null,"abstract":"For Ruthenium (Ru)-based copper (Cu) interconnects Cu film chemical mechanical polishing (CMP), it is crucial to select appropriate pH regulators in the slurry to ensure the chemical reactions and maintain the stability of the polishing chemical environment. In this study, the effects of inorganic pH regulator KOH, organic pH regulator diethanolamine (DEA), and 2-amino-2-methyl-1-propanol (AMP) on CMP and slurry properties of Cu film were compared. It was found when using AMP as a pH regulator, the Cu/Ru removal rate selectivity (RRS) can reach 598:1, the surface roughness of Cu film decreased to 0.76 nm, and the slurry can remain stable for at least 7 d. The performance order of the three pH regulators is AMP>KOH>DEA. Meanwhile, through experimental results and test analysis, it has been confirmed that AMP can also play a multifunctional role as a complexing agent, dispersant, and surfactant. Therefore, AMP can replace KOH as a new pH regulator in weak alkaline slurries. This result plays an important role in guiding the selection of organic pH regulators in the optimization of Cu film CMP slurry. Highlights For Ruthenium-based copper interconnects copper film chemical mechanical polishing, it is crucial to select appropriate pH regulators in the slurry to ensure the chemical reactions and maintain the stability of the polishing chemical environment. In this paper, diethanolamine and 2-amino-2-methyl-1-propanol were selected as organic pH regulators for the properties of eco-friendly, stable, rapid reaction performance and the effects on copper film chemical mechanical polishing. 2-amino-2-methyl-1-propanol can also play a multifunctional role as a complexing agent, dispersant, and surfactant. When using AMP as a pH regulator, the copper/Ruthenium removal rate selectivity can reach 598:1, the surface roughness of copper film decreased to 0.76 nm, and the slurry can keep stability for at least 7 d. The application of multifunctional organic alkali in copper film chemical mechanical polishing will get more and more attention.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"43 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Molecular Dynamics Simulations on Epoxy Resin Composite via Grafting Acryloyl-chloride to Inhibit Electron Transport and Improve Thermal-mechanical Properties 通过接枝丙烯酰氯抑制电子传输并改善热机械性能的环氧树脂复合材料的分子动力学模拟
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-12 DOI: 10.1149/2162-8777/ad458b
Shuang Cui Li, Guan Yu Liu, Juan Wang, Zhi Hai Liu and Lei Wang
Electrical, thermal, and mechanical properties of cross-linked epoxy resin (EP) modified by the chemical grafting of acryloyl chloride (AC) were studied to explore the trapping mechanism of charge transport inhibition. The bound state traps deriving from grafted molecules were analyzed by first-principles calculations combined with electron transmission spectra to study the underlying mechanism of the electrical properties. In contrast to pure EP, the EP-graft-AC (EP-g-AC) represents significantly depressed conductivity due to the electron scattering from polar-groups of the grafted AC molecule. The substantial deep traps are generated in EP-g-AC molecules by the polar group of grafted AC and accordingly decrease charge mobility and raise the charge injection barrier, consequently suppressing space charge accumulation and charge carrier transport. EP-g-AC polymer acquires a significant amelioration in thermal and mechanical properties, as indicated by the higher cohesive energy density, glass transition temperature, and decomposition temperature in consistence with the lower thermal vibrations compared with pure EP polymer, except that the resulting higher fractional free volume is not preferable, which is attributed to the mixing incompatibility of the grafted AC molecules with EP molecular-chains.
研究了通过化学接枝丙烯酰氯(AC)改性的交联环氧树脂(EP)的电学、热学和力学性能,以探索电荷传输抑制的捕获机制。通过第一原理计算结合电子透射光谱分析了接枝分子产生的束缚态陷阱,从而研究了电性能的内在机理。与纯 EP 相比,EP-接枝-AC(EP-g-AC)由于接枝 AC 分子极性基团的电子散射而显著降低了导电性。接枝 AC 的极性基团在 EP-g-AC 分子中产生了大量深陷阱,从而降低了电荷迁移率,提高了电荷注入势垒,抑制了空间电荷积累和电荷载流子传输。与纯 EP 聚合物相比,EP-g-AC 聚合物具有更高的内聚能密度、玻璃化温度和分解温度,热振动也更低,这表明 EP-g-AC 聚合物的热性能和机械性能得到了显著改善。
{"title":"Molecular Dynamics Simulations on Epoxy Resin Composite via Grafting Acryloyl-chloride to Inhibit Electron Transport and Improve Thermal-mechanical Properties","authors":"Shuang Cui Li, Guan Yu Liu, Juan Wang, Zhi Hai Liu and Lei Wang","doi":"10.1149/2162-8777/ad458b","DOIUrl":"https://doi.org/10.1149/2162-8777/ad458b","url":null,"abstract":"Electrical, thermal, and mechanical properties of cross-linked epoxy resin (EP) modified by the chemical grafting of acryloyl chloride (AC) were studied to explore the trapping mechanism of charge transport inhibition. The bound state traps deriving from grafted molecules were analyzed by first-principles calculations combined with electron transmission spectra to study the underlying mechanism of the electrical properties. In contrast to pure EP, the EP-graft-AC (EP-g-AC) represents significantly depressed conductivity due to the electron scattering from polar-groups of the grafted AC molecule. The substantial deep traps are generated in EP-g-AC molecules by the polar group of grafted AC and accordingly decrease charge mobility and raise the charge injection barrier, consequently suppressing space charge accumulation and charge carrier transport. EP-g-AC polymer acquires a significant amelioration in thermal and mechanical properties, as indicated by the higher cohesive energy density, glass transition temperature, and decomposition temperature in consistence with the lower thermal vibrations compared with pure EP polymer, except that the resulting higher fractional free volume is not preferable, which is attributed to the mixing incompatibility of the grafted AC molecules with EP molecular-chains.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"28 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Structural, Microstructural, and Electrical Properties Study of Pb(Sn0.45Ti0.55)O3 Ceramics Pb(Sn0.45Ti0.55)O3 陶瓷的结构、微观结构和电性能研究
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-10 DOI: 10.1149/2162-8777/ad458a
Bhakti Pada Das, Bhabani Sankar Patnaik, Tanmaya Jena, Sailabhama Nayak, Geetanjali Nayak, Krishnamayee Bhoi, Uttam Sahu, Prasanta Kumar Mahapatra, Ram Naresh Prasad Choudhary, Subrata Karmakar, Hari Sankar Mohanty
We undertook a comprehensive investigation of the the structural, dielectric, and electrical characteristics of Pb(Sn0.45Ti0.55)O3 ceramics prepared using the conventional solid-state route. A meticulous preparation protocol, involving solvating various precursors, was followed by extensive characterization employing X-ray diffraction, scanning electron microscopy, and dielectric studies. The synthesized sample features a single-phase tetragonal structure with P4mm symmetry. Using impedance spectroscopy, electrical transport properties of the polycrystalline Pb(Sn0.45Ti0.55)O3(PST) ceramic were studied in detail. Relaxation and conduction mechanisms of the material were inferred using complex impedance, complex electric modulus, and frequency dependent ac conductivity analysis. Impedance spectroscopy results reveal the range of frequencies in which the grain, grain boundary, and electrode effects are dominant. Above certain temperatures, the imaginary component of impedance (Z//) exhibits some resonant type peaks at different frequencies indicating relaxor nature of the sample. The activation energy obtained for both the relaxation and conduction process indicates the role of doubly-ionized oxygen vacancy in the conduction mechanism of the sample. The dielectric relaxation occurring at low frequency and high temperatures is related to the space charges associated with the ionized oxygen vacancies being trapped at the grain boundaries. The Cole-Cole plots confirm the poly-dispersive nature of dielectric relaxation in the sample.
我们对采用传统固态路线制备的 Pb(Sn0.45Ti0.55)O3 陶瓷的结构、介电和电气特性进行了全面研究。制备过程非常细致,包括溶解各种前驱体,然后利用 X 射线衍射、扫描电子显微镜和介电研究进行了广泛的表征。合成的样品具有 P4mm 对称的单相四方结构。利用阻抗光谱详细研究了多晶 Pb(Sn0.45Ti0.55)O3(PST)陶瓷的电传输特性。利用复阻抗、复电模量和随频率变化的交流电导率分析,推断了材料的弛豫和传导机制。阻抗光谱结果显示了晶粒、晶界和电极效应占主导地位的频率范围。在特定温度以上,阻抗的虚分量(Z//)在不同频率上会出现一些共振峰,表明样品具有弛豫特性。弛豫和传导过程中获得的活化能表明,样品的传导机制中存在双电离氧空位。在低频和高温下发生的介电弛豫与被困在晶界的电离氧空位的空间电荷有关。科尔-科尔图证实了样品介电弛豫的多分散性。
{"title":"Structural, Microstructural, and Electrical Properties Study of Pb(Sn0.45Ti0.55)O3 Ceramics","authors":"Bhakti Pada Das, Bhabani Sankar Patnaik, Tanmaya Jena, Sailabhama Nayak, Geetanjali Nayak, Krishnamayee Bhoi, Uttam Sahu, Prasanta Kumar Mahapatra, Ram Naresh Prasad Choudhary, Subrata Karmakar, Hari Sankar Mohanty","doi":"10.1149/2162-8777/ad458a","DOIUrl":"https://doi.org/10.1149/2162-8777/ad458a","url":null,"abstract":"We undertook a comprehensive investigation of the the structural, dielectric, and electrical characteristics of Pb(Sn<sub>0.45</sub>Ti<sub>0.55</sub>)O<sub>3</sub> ceramics prepared using the conventional solid-state route. A meticulous preparation protocol, involving solvating various precursors, was followed by extensive characterization employing X-ray diffraction, scanning electron microscopy, and dielectric studies. The synthesized sample features a single-phase tetragonal structure with P4mm symmetry. Using impedance spectroscopy, electrical transport properties of the polycrystalline Pb(Sn<sub>0.45</sub>Ti<sub>0.55</sub>)O<sub>3</sub>(PST) ceramic were studied in detail. Relaxation and conduction mechanisms of the material were inferred using complex impedance, complex electric modulus, and frequency dependent ac conductivity analysis. Impedance spectroscopy results reveal the range of frequencies in which the grain, grain boundary, and electrode effects are dominant. Above certain temperatures, the imaginary component of impedance (Z<sup>//</sup>) exhibits some resonant type peaks at different frequencies indicating relaxor nature of the sample. The activation energy obtained for both the relaxation and conduction process indicates the role of doubly-ionized oxygen vacancy in the conduction mechanism of the sample. The dielectric relaxation occurring at low frequency and high temperatures is related to the space charges associated with the ionized oxygen vacancies being trapped at the grain boundaries. The Cole-Cole plots confirm the poly-dispersive nature of dielectric relaxation in the sample.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"22 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and Simulation of Dielectrically Modulated Dual Material Gate-Stack Double-Gate FinFET Biosensor 电介质调制双材料栅极栈双栅极 FinFET 生物传感器的设计与仿真
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-10 DOI: 10.1149/2162-8777/ad458d
Asmita Pattnaik, S. K. Mohapatra, Ananya Dastidar, Om Prakash Acharya, Naglaa AbdelAll, Basma A El-Badry, Ghada A. Khouqeer, Abdullah N. Alodhayb
This study developed and evaluated a dual-material gate stack double-gate FinFET-based biosensor (DM-GS-DG FinFET). The device was dielectrically modulated and investigated for molecules, such as streptavidin, gluten, zein, hen egg-white lysozyme, and acetylene tetrabromide, based on current, threshold voltage, subthreshold swing, and switching sensitivity. The influence of charged and neutral biomolecules within the nanocavity on the electric, analog, and radiofrequency parameters was recorded. This study was conducted relative to different dielectric κ-values of 12 in terms of the percentage sensitivity improvement (SI%). The results reveal that the percentage of sensitivity ION improves effectively, especially for low κ-values, compared with other sensitivity measures. All the sensitivity evaluations indicated that DM-GS-DG-FinFET combined with biomolecules is a viable option for biosensing purposes.
本研究开发并评估了基于双材料栅极堆叠双栅极 FinFET 的生物传感器(DM-GS-DG FinFET)。根据电流、阈值电压、阈下摆动和开关灵敏度,对该器件进行了介电调制,并对链霉亲和素、谷蛋白、玉米蛋白、母鸡卵白溶菌酶和四溴乙炔等分子进行了研究。记录了纳米腔内带电和中性生物分子对电学、模拟和射频参数的影响。这项研究以灵敏度提高百分比(SI%)来表示 12 个不同的介电κ值。结果显示,与其他灵敏度测量方法相比,ION 灵敏度百分比得到了有效改善,尤其是在低 κ 值的情况下。所有灵敏度评估结果都表明,DM-GS-DG-FinFET 与生物分子相结合是生物传感的可行选择。
{"title":"Design and Simulation of Dielectrically Modulated Dual Material Gate-Stack Double-Gate FinFET Biosensor","authors":"Asmita Pattnaik, S. K. Mohapatra, Ananya Dastidar, Om Prakash Acharya, Naglaa AbdelAll, Basma A El-Badry, Ghada A. Khouqeer, Abdullah N. Alodhayb","doi":"10.1149/2162-8777/ad458d","DOIUrl":"https://doi.org/10.1149/2162-8777/ad458d","url":null,"abstract":"This study developed and evaluated a dual-material gate stack double-gate FinFET-based biosensor (DM-GS-DG FinFET). The device was dielectrically modulated and investigated for molecules, such as streptavidin, gluten, zein, hen egg-white lysozyme, and acetylene tetrabromide, based on current, threshold voltage, subthreshold swing, and switching sensitivity. The influence of charged and neutral biomolecules within the nanocavity on the electric, analog, and radiofrequency parameters was recorded. This study was conducted relative to different dielectric <italic toggle=\"yes\">κ</italic>-values of 12 in terms of the percentage sensitivity improvement (SI%). The results reveal that the percentage of sensitivity I<sub>ON</sub> improves effectively, especially for low <italic toggle=\"yes\">κ</italic>-values, compared with other sensitivity measures. All the sensitivity evaluations indicated that DM-GS-DG-FinFET combined with biomolecules is a viable option for biosensing purposes.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"200 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941360","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of Cobalt-Doping on the Optical, Magnetic, and Electronic Features of Hexagonal Cadmium Sulfide 掺钴对六方硫化镉光学、磁学和电子特性的影响
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-10 DOI: 10.1149/2162-8777/ad458c
Zein K. Heiba, Ah Abd Ellatief, Mohamed Bakr Mohamed, A. M. El-naggar, Hassan Elshimy, Sameh I. Ahmed, Ismail A.M. Ibrahim
CdS and Cd0.9Co0.1S samples were prepared under an N2 atmosphere. The structural analysis was conducted using X-ray diffraction. The structural and microstructure parameters were determined using Rietveld refinement method. The incorporation of cobalt ions into CdS matrix was confirmed by energy-dispersive spectroscopy and Fourier-transform infrared analysis. CdS sample has a non-magnetic feature while the Co-doped sample exhibited a magnetic behavior. The origin of magnetic property transformation has been investigated, revealing the emergence of ferromagnetic ordering and the conversion to a diluted magnetic semiconductor (DMS) with a calculated magnetic moment of 2.56 μB upon Co doping. We also investigated how this Cobalt-doping-driven transformation affected optical, photoluminescence, and electronic properties. These effects correlated with the emergence of hyper-deep defect states. Electronic properties were calculated using density functional theory (DFT) with the HSE06 hybrid functional approximation. The calculated energy bandgaps for both Co-doped and pure CdS were 2.13 and 2.12 eV, respectively, while experimental measurements from our UV analysis yielded values of 2.26 and 2.15 eV. DFT calculations were employed to explore the magnetic properties, absorption coefficients, refractive indices, real and imaginary dielectric components, and energy loss spectra in both samples.
CdS 和 Cd0.9Co0.1S 样品是在氮气环境下制备的。采用 X 射线衍射法进行了结构分析。采用 Rietveld 精炼法确定了结构和微观结构参数。能量色散光谱和傅立叶变换红外分析证实了钴离子在 CdS 基体中的结合。CdS 样品具有非磁性特征,而掺 Co 的样品则表现出磁性。我们研究了磁性转变的起源,发现了铁磁有序的出现,以及掺入 Co 后向稀释磁性半导体(DMS)的转变,计算得出的磁矩为 2.56 μB。我们还研究了这种钴掺杂驱动的转变如何影响光学、光致发光和电子特性。这些影响与超深缺陷态的出现有关。电子特性是利用密度泛函理论(DFT)和 HSE06 混合函数近似计算得出的。掺 Co 和纯 CdS 的能带隙计算值分别为 2.13 和 2.12 eV,而紫外分析的实验测量值分别为 2.26 和 2.15 eV。我们采用 DFT 计算来研究这两种样品的磁性、吸收系数、折射率、实介电分量和虚介电分量以及能量损失光谱。
{"title":"Impact of Cobalt-Doping on the Optical, Magnetic, and Electronic Features of Hexagonal Cadmium Sulfide","authors":"Zein K. Heiba, Ah Abd Ellatief, Mohamed Bakr Mohamed, A. M. El-naggar, Hassan Elshimy, Sameh I. Ahmed, Ismail A.M. Ibrahim","doi":"10.1149/2162-8777/ad458c","DOIUrl":"https://doi.org/10.1149/2162-8777/ad458c","url":null,"abstract":"CdS and Cd<sub>0.9</sub>Co<sub>0.1</sub>S samples were prepared under an N<sub>2</sub> atmosphere. The structural analysis was conducted using X-ray diffraction. The structural and microstructure parameters were determined using Rietveld refinement method. The incorporation of cobalt ions into CdS matrix was confirmed by energy-dispersive spectroscopy and Fourier-transform infrared analysis. CdS sample has a non-magnetic feature while the Co-doped sample exhibited a magnetic behavior. The origin of magnetic property transformation has been investigated, revealing the emergence of ferromagnetic ordering and the conversion to a diluted magnetic semiconductor (DMS) with a calculated magnetic moment of 2.56 <italic toggle=\"yes\">μ</italic>\u0000<sub>B</sub> upon Co doping. We also investigated how this Cobalt-doping-driven transformation affected optical, photoluminescence, and electronic properties. These effects correlated with the emergence of hyper-deep defect states. Electronic properties were calculated using density functional theory (DFT) with the HSE06 hybrid functional approximation. The calculated energy bandgaps for both Co-doped and pure CdS were 2.13 and 2.12 eV, respectively, while experimental measurements from our UV analysis yielded values of 2.26 and 2.15 eV. DFT calculations were employed to explore the magnetic properties, absorption coefficients, refractive indices, real and imaginary dielectric components, and energy loss spectra in both samples.<inline-formula>\u0000<inline-graphic xlink:href=\"jssad458c-ga.jpg\" xlink:type=\"simple\"></inline-graphic>\u0000</inline-formula>","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"218 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of Asymmetric InAlGaN/GaN Superlattice Barrier Structure on the Optoelectronic Performance of GaN-Based Green Laser Diode 非对称 InAlGaN/GaN 超晶格势垒结构对氮化镓基绿激光二极管光电性能的影响
IF 2.2 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-08 DOI: 10.1149/2162-8777/ad441d
Yue Wei Mu, Hai Liang Dong, Zhi Gang Jia, Wei Jia, Jian Liang, Zhi Yong Wang, Bing She Xu
An asymmetric InAlGaN/GaN superlattice barrier structure without the first quantum barrier layer (FQB) is designed, and its effect on the optoelectronic performance of GaN-based green laser diode (LD) has been investigated based on simulation experiment and analytical results. It is found that, compared with conventional GaN barrier LD, device performance is significantly improved by using FQB-free asymmetric InAlGaN/GaN superlattice barrier structure, including low threshold current, high output power, and high photoelectric conversion efficiency. The threshold current of LD with novel structure is 16.19 mA, which is 22.46% less than GaN barrier LD. Meanwhile, the output power is 110.69 mW at an injection current of 120 mA, which is 16.20% higher compared to conventional LD, and the wall-plug efficiency has an enhancement of 9.5%, reaching 20.27%. FQB-free asymmetric InAlGaN/GaN superlattice barrier layer can reduce optical loss, suppress the polarization effect, and improve the carrier injection efficiency, which is beneficial to improve output power and photoelectric conversion efficiency. The novel epitaxial structure provides theoretical guidance and data support for improving the optoelectronic performance of GaN-based green LD.
设计了一种无第一量子势垒层(FQB)的非对称 InAlGaN/GaN 超晶格势垒结构,并基于仿真实验和分析结果研究了它对 GaN 基绿色激光二极管(LD)光电性能的影响。研究发现,与传统的氮化镓势垒 LD 相比,采用无 FQB 非对称 InAlGaN/GaN 超晶格势垒结构的 LD 器件性能显著提高,包括低阈值电流、高输出功率和高光电转换效率。采用新型结构的 LD 的阈值电流为 16.19 mA,比 GaN 势垒 LD 低 22.46%。同时,在注入电流为 120 mA 时,输出功率为 110.69 mW,比传统 LD 提高了 16.20%,壁插效率提高了 9.5%,达到 20.27%。无 FQB 不对称 InAlGaN/GaN 超晶格势垒层可以降低光损耗,抑制偏振效应,提高载流子注入效率,有利于提高输出功率和光电转换效率。新颖的外延结构为提高氮化镓基绿色 LD 的光电性能提供了理论指导和数据支持。
{"title":"Effect of Asymmetric InAlGaN/GaN Superlattice Barrier Structure on the Optoelectronic Performance of GaN-Based Green Laser Diode","authors":"Yue Wei Mu, Hai Liang Dong, Zhi Gang Jia, Wei Jia, Jian Liang, Zhi Yong Wang, Bing She Xu","doi":"10.1149/2162-8777/ad441d","DOIUrl":"https://doi.org/10.1149/2162-8777/ad441d","url":null,"abstract":"An asymmetric InAlGaN/GaN superlattice barrier structure without the first quantum barrier layer (FQB) is designed, and its effect on the optoelectronic performance of GaN-based green laser diode (LD) has been investigated based on simulation experiment and analytical results. It is found that, compared with conventional GaN barrier LD, device performance is significantly improved by using FQB-free asymmetric InAlGaN/GaN superlattice barrier structure, including low threshold current, high output power, and high photoelectric conversion efficiency. The threshold current of LD with novel structure is 16.19 mA, which is 22.46% less than GaN barrier LD. Meanwhile, the output power is 110.69 mW at an injection current of 120 mA, which is 16.20% higher compared to conventional LD, and the wall-plug efficiency has an enhancement of 9.5%, reaching 20.27%. FQB-free asymmetric InAlGaN/GaN superlattice barrier layer can reduce optical loss, suppress the polarization effect, and improve the carrier injection efficiency, which is beneficial to improve output power and photoelectric conversion efficiency. The novel epitaxial structure provides theoretical guidance and data support for improving the optoelectronic performance of GaN-based green LD.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"29 1","pages":""},"PeriodicalIF":2.2,"publicationDate":"2024-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140941523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
ECS Journal of Solid State Science and Technology
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1