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2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)最新文献

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Power QFN down bond lift and delamination study 功率QFN下键提升和分层研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028424
Hanmin Zhang, M. Hu, Sonder Wang, Schmadlak Ilko, B. Yin, Q. He, D. Ye
The PQFN device revealed down bond lift and delamination issues. Based on AES (Auger Electron Spectroscopy), XPS (X-ray Photoelectron Spectroscopy) and FTIR (Fourier Transform Infrared Spectroscopy) analysis it was possible to verify that a down bond contamination caused the failure. Cross sections of down bond wire for the failed unit showed a broken heel on the down bond. Furthermore, cracking between molding compound and lead frame was found. It was proven that the delamination caused the down bond lift and the broken heel. FEA (Finite Element Analysis) revealed that the delamination can lead to shear stress increase at the down bond heel.
PQFN装置揭示了下键提升和分层问题。基于AES(俄歇电子能谱)、XPS (x射线光电子能谱)和FTIR(傅里叶变换红外光谱)分析,可以验证是下键污染导致了故障。故障单元的下键线的横截面显示下键上有一个断裂的后跟。此外,还发现了模塑料与引线框架之间的开裂现象。结果表明,脱层是导致下粘结层升高和足跟断裂的主要原因。有限元分析表明,分层会导致下粘结跟处剪应力增大。
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引用次数: 3
Microbumping technology for hybrid IR detectors, 10μm pitch and beyond 用于混合红外探测器的微碰撞技术,10μm间距及以上
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028336
B. Majeed, P. Soussan, P. Le Boterf, P. Bouillon
In order to assess the feasibility of a more mass-manufacturable process, IMEC has developed microbump technologies down to 10μm pitch. The micro bumps are based on Cu/Ni/Sn semi additive plating and built at wafer level using a process fully compatible with standard packaging infrastructures. Different test materials with 15, 10 and even 5μm pitch Sn microbumps were processed for a total amount of 640 × 512 (VGA), 1024 × 768 (XGA) and 3072 × 3072 pixels respectively. The microbumped Si chips were assembled with glass chips, InGaAs and HgCdTe compounds and subjected to thermocycling reliability evaluation.
为了评估更大规模生产工艺的可行性,IMEC开发了小至10μm间距的微凸点技术。微凸点是基于Cu/Ni/Sn半添加剂电镀,并使用与标准封装基础设施完全兼容的工艺在晶圆级构建的。不同的测试材料分别处理了15、10甚至5μm间距的Sn微凸点,总像素分别为640 × 512 (VGA)、1024 × 768 (XGA)和3072 × 3072像素。将微碰撞硅芯片与玻璃芯片、InGaAs和HgCdTe化合物组装,并进行热循环可靠性评估。
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引用次数: 2
BGA packaging using insulated wire for die area reduction BGA封装采用绝缘线减少模具面积
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028271
Shailesh Kumar, Vikas Garg, C. Verma, Rishi Bhooshan, Poh Zi-Song, L. C. Tan
In conventional wire bonded packages, design rules require that individual bond wires not touch each other. Also, handling of bonded units may cause wire disturbance leading to wire short. Insulated wire bonding techniques eliminate this requirement by coating a non conductive layer over the bond wires as shown in Fig.1 and thus, electrical isolation is maintained even after wires physically touch each other [1-2]. The focus of this paper is to leverage the insulated wire-bonding technology for die design implementation efficiency in terms of improving electrical parameters and die size reduction. Two specific implementation are discussed in this paper. One is to implement off-chip decoupling capacitor and use it to replace on-die capacitors required for signal integrity and save precious silicon area. Second implementation is about realizing mesh type power grid to improve the IR drop and simultaneously get rid of multiple Power/Ground pads and thus, save silicon area.
在传统的线键合封装中,设计规则要求单个键合线不能相互接触。此外,处理粘合单元可能会引起导线扰动,导致导线短路。如图1所示,绝缘导线键合技术通过在键合导线上涂覆一层不导电层,消除了这一要求,因此,即使在导线相互物理接触后,也能保持电隔离[1-2]。本文的重点是利用绝缘线键合技术在提高电气参数和减少模具尺寸方面的模具设计实施效率。本文讨论了两种具体实现方法。一种是实现片外去耦电容,用它来代替保证信号完整性所需的片上电容,节省宝贵的硅面积。第二种实现是实现网格型电网,改善IR下降,同时摆脱多个电源/接地垫,从而节省硅面积。
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引用次数: 0
A 24 GHz microstrip grid array antenna excited by coaxial-fed slot 一种同轴馈电槽激励的24ghz微带网格阵列天线
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028251
Zihao Chen, Yue Ping Zhang
A microstrip grid array antenna excited by coaxial-fed slot on Rogers 5880 substrate is reported. The antenna has a volume of 70 × 70 × 1.041mm. The coaxial-fed slot is 0.2-mm offset from the middle of the ground plane to obtain symmetrical patterns and a cavity is added below the slot to increase the front-to-back ratio. Simulation results in HFSS indicates that the antenna has a 10-dB impedance bandwidth of 1.12 GHz from 23.76 GHz to 24.88 GHz and a 3 dB gain bandwidth of 1.68 GHz from 23.52 GHz to 25.2 GHz with the maximal peak realized gain of 20.57 dBi at 24.72 GHz. This work demonstrates that compared with capacitive slot, coaxial to slot transition is a more effective method to excite microstrip grid array antenna.
报道了一种在Rogers 5880基板上采用同轴馈电槽激励的微带网格阵列天线。天线体积为70 × 70 × 1.041mm。同轴馈电槽距地平面中间偏移0.2 mm以获得对称图案,并在槽下方增加空腔以增加前后比。HFSS仿真结果表明,该天线在23.76 GHz ~ 24.88 GHz范围内的10 dB阻抗带宽为1.12 GHz,在23.52 GHz ~ 25.2 GHz范围内的3 dB增益带宽为1.68 GHz,在24.72 GHz处实现的最大峰值增益为20.57 dBi。研究表明,与电容槽相比,同轴向槽过渡是一种更有效的激励微带网格阵列天线的方法。
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引用次数: 1
Comparative analysis of novel thermal interface containing nano additives 新型含纳米添加剂热界面的对比分析
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028330
P. Matkowski, Tomasz Fałt, A. Moscicki
Nowadays a passive cooling based on efficient reliable thermal interfaces begins to play a dominant role in modern consumer electronics. The devices become smaller, thinner and more powerful while semiconductors become the source of higher flux heat density. In order to reduce thermal resistance between a semiconductor junction and a heat spreader, semiconductor structures remain unpackaged i.e. flip-chip structures. In the case of such solution semiconductor dies have a direct contact with a heat spreader (i.e. surface of metal radiators). In order to decrease thermal resistance of the contact some Thermal Interface Material (TIM) is usually applied. A TIM should form a low thermal resistance contact and ensure a long term stable interconnection in respect of its thermo-mechanical properties. Within the frame of the study three novel sintered nano silver pastes and one commercially available thermally conductive adhesive were compared and evaluated as potential TIMs. Formed thermal interfaces between power transistors and copper substrates were assessed in respect of their structure (X-Ray computed tomography) and heat dissipation performance (IR thermography).
如今,基于高效可靠热界面的被动冷却开始在现代消费电子产品中发挥主导作用。器件变得更小、更薄、更强大,而半导体成为更高通量热密度的来源。为了减少半导体结和散热器之间的热阻,半导体结构保持未封装,即倒装芯片结构。在这种溶液的情况下,半导体模具与散热器(即金属散热器的表面)直接接触。为了减小接触面的热阻,通常采用热界面材料(TIM)。TIM应形成低热阻接触,并确保其热机械性能长期稳定的互连。在研究的框架内,比较和评估了三种新型烧结纳米银浆料和一种市售导热胶粘剂作为潜在的TIMs。对功率晶体管和铜衬底之间形成的热界面的结构(x射线计算机断层扫描)和散热性能(红外热成像)进行了评估。
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引用次数: 3
Comprehensive study on reliability of chip-package interaction using Cu pillar joint onto low k chip 低k芯片上铜柱连接芯片-封装相互作用可靠性的综合研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028363
F. Che, Jong-Kai Lin, K. Y. Au, Xiaowu Zhang
Cu pillar technology can cater for high I/O, fine pitch and further miniaturization requirements compared to wire bonding and conventional flip chip technologies. However, chip-package interaction (CPI) for low-k chip is a critical challenge for Cu pillar technology under assembly process and temperature loading due to stiffer Cu pillar structure compared to conventional C4 bump. Thermo-compression bonding (TCB) process was developed and used for fine pitch Cu pillar assembly on Cu/low-k chip to reduce the package warpage and low-k stress. In this study, a novel TCB process modeling methodology using a 2D axisymmetry model with global-local technique was established by considering process condition step by step. The simulation results show that TCB process results in much lower package warpage and low-k stress compared to reflow process. Based on the developed TCB modeling method, the comprehensive parametric studies were conducted to optimize TCB process condition and Cu pillar design for CPI reliability improvement, including Cu pillar structure design, package geometry, and packaging materials selection. The final package and assembly solution was successfully achieved based on suggestions and recommendations provided by numerical simulation results.
与线键合和传统倒装芯片技术相比,铜柱技术可以满足高I/O、细间距和进一步小型化的要求。然而,与传统的C4碰撞相比,低钾芯片的芯片封装相互作用(CPI)是铜柱技术在装配过程和温度载荷下面临的一个关键挑战。开发了热压缩键合(TCB)工艺,并将其应用于Cu/低k芯片上的细间距铜柱组装,以减少封装翘曲和低k应力。本文通过逐步考虑工艺条件,建立了一种基于全局-局部技术的二维轴对称模型的TCB工艺建模方法。仿真结果表明,与回流工艺相比,TCB工艺具有更小的封装翘曲和低k应力。基于所建立的TCB建模方法,对优化TCB工艺条件和Cu柱设计进行了全面的参数化研究,包括Cu柱结构设计、封装几何设计、封装材料选择等,以提高CPI可靠性。根据数值模拟结果提出的建议和建议,成功地获得了最终的封装和装配方案。
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引用次数: 7
Chip package interaction induced ILD integrity issues in fine pitch flip chip packages 在小间距倒装晶片封装中,晶片封装相互作用导致ILD完整性问题
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028362
Vikas Gupta, Shawn M. O'connor, C. Pilch
Thermal compression bonding is being widely used for fine pitch copper pillar assembly as it provides high die placement accuracy and bonding suitable for mass production. In the current work, chip package interaction induced ILD integrity failures under thermo-compression assembly induced stresses were investigated. A step by step EFA (Electrical Failure Analysis) plus PFA (Physical Failure Analysis) methodology was developed to isolate the failing location and confirm the fail mode. The key steps include initially dataloging the fails and running the data through ATPG (Automatic Test Pattern Generation) tools to localize the failing nets. The PFA was then focused on the ILD sections in the vicinity of the Cu pillar interconnect (as the pillar is the primary load transference link between the die and substrate). Specific fail modes were then identified using a combination of Scanning Optical Microscopy (SOM), Scanning Acoustic Microscopy (SAM), layer by layer de-processing and Focused Ion Beam (FIB) cross-sections. The paper summarizes the key findings, failure modes from the study - it was found that the assembly process could result in damage initiation in the ILD which results in functional failures during subsequent reliability testing. The scale of induced damage makes it nearly impossible to detect using either traditional eFA, PFA or a combination of the two. Additionally, key assembly and design parameters, to resolve the fails are also discussed.
热压缩键合技术具有较高的模位精度和适合批量生产的键合性能,被广泛应用于小间距铜柱组件中。在目前的工作中,研究了芯片封装相互作用在热压组装诱导应力下引起的ILD完整性失效。开发了一种循序渐进的EFA(电气故障分析)和PFA(物理故障分析)方法来隔离故障位置并确定故障模式。关键步骤包括最初对故障进行数据记录,并通过ATPG(自动测试模式生成)工具运行数据以定位故障网络。然后,PFA集中在铜柱互连附近的ILD部分(因为铜柱是模具和基板之间的主要负载传递链接)。然后使用扫描光学显微镜(SOM),扫描声学显微镜(SAM),逐层去处理和聚焦离子束(FIB)截面的组合来确定特定的失效模式。本文总结了研究的主要发现,失效模式-发现装配过程可能导致ILD的初始损坏,从而导致后续可靠性测试中的功能失效。诱发损伤的规模使得使用传统的eFA、PFA或两者的结合几乎不可能检测到。此外,还讨论了解决故障的关键装配和设计参数。
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引用次数: 0
Breakthrough development of ultimate ultra-fine pitch process with gold wire & copper wire in QFN packages QFN封装中金线和铜线超细间距工艺的突破性发展
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028254
C. E. Tan, J. Liong, Jeramie Dimatira, Lee Wee Kok, Jason Tan, Lie Handra Wijaya, James Song, Teshima Satoshi, K. H. Kwong
In order to obtain breakthrough competitive edge in semiconductors industry that requires cost effective miniaturization, the wire bonding process needs to be renewed to highest possible level. The combination of extremely small pitch size with both gold (Au) and copper (Cu) wire in QFN packages provided the best opportunity of success. However, development of such process is also extremely challenging, it requires significant improvement in all aspects of wire bonding process. Base on the detailed analysis, the wire bonding pitch size of 20 um should become the target of ultimate ultra-fine pitch (UUFP) process. The bonding with Au & Cu wire provides both options of quality and cost, and QFN were selected as vehicle package which represents the most popular package platform. The major challenges of UUFP process include development of smallest wire size, capillary design, machine capability and process window optimization. From multiple engineering studies, it was determined that the smallest wire size is 0.4 mil (10 um) for Au and 0.5 mil (12.5 um) for Cu. These wires were developed through research of dopant contents, process flow modification enhancement (additional die sets) and parameters optimization. In parallel, capillary dimensions and tolerances were revised several times to accommodate these extremely small wire sizes. Most of the major capillary dimensions were designed up to the physical material limitations. In the early design stage, there were several incidents of capillary tip breakage due to its thin wall was not able to withstand too much bonding stress. The final optimum capillary design could achieve reasonable good results with new tighten tolerances and further enhancement could even achieve stable and robust production performance. With the readiness of direct and indirect material, subsequent study was conducted on machine capability. Most of the parameters resolution needs to be improved in order to enable most precise setting within the tight operating range. The required task was working out optimum process window through comprehensive study, involving multiple DOE (Design of Experiment) and RSM (Response Surface Method). In the process optimization, the critical challenges are not only limited to making smaller bonded ball. All the previous discovered issues with Au wire, Cu wire and QFN bonding would be amplified. Some of those issues include Cu wire displacement/damage, Cu wire lifted bond, Cu wire 2nd bond challenges, QFN leadframe resonance issue [1], Au wire inter-metallic issue, etc. All these challenges have main effect and interaction effect, making the screening and optimization efforts becoming very complicated. Only with comprehensive optimization, a robust and good process window could be obtained. The optimum UUFP process promised to offer the most miniature package together with the most effective cost, as the ultimately competitive solution to obtain largest market share.
为了在要求低成本微型化的半导体行业获得突破性的竞争优势,需要将线键合工艺更新到最高水平。在QFN封装中,极小的间距尺寸与金(Au)和铜(Cu)线的结合为成功提供了最佳机会。然而,这种工艺的发展也极具挑战性,它需要在焊线工艺的各个方面进行重大改进。在详细分析的基础上,20um的线键合间距尺寸应成为最终超细间距(UUFP)工艺的目标。采用Au和Cu线结合的方式,提供了质量和成本的双重选择,QFN被选为汽车封装,代表了最流行的封装平台。UUFP工艺的主要挑战包括最小线材尺寸的开发、毛细管设计、机器性能和工艺窗口优化。通过多次工程研究,确定了Au的最小线径为0.4 mil (10 um), Cu的最小线径为0.5 mil (12.5 um)。这些焊丝是通过研究掺杂物含量、工艺流程改进(增加模具)和参数优化开发的。同时,毛细管尺寸和公差被修改了几次,以适应这些极小的电线尺寸。大多数主要的毛细管尺寸都是根据物理材料的限制而设计的。在设计初期,由于其薄壁不能承受太大的粘接应力,出现了几次毛细尖端断裂事件。最终的毛细管优化设计可以在新的拧紧公差下获得合理的良好效果,进一步优化可以实现稳定、稳健的生产性能。随着直接材料和间接材料的准备,对机器性能进行了后续研究。为了在较窄的工作范围内实现最精确的设置,大多数参数的分辨率需要提高。所需要的任务是通过多个试验设计(DOE)和响应面法(RSM)的综合研究,找出最优的工艺窗口。在工艺优化中,关键的挑战不仅限于制造更小的粘结球。所有先前发现的Au线、Cu线和QFN键合的问题都将被放大。其中一些问题包括铜线位移/损坏、铜线抬升键合、铜线二次键合挑战、QFN引线框共振问题[1]、金线金属间问题等。这些挑战既有主效应,也有交互效应,使得筛选和优化工作变得非常复杂。只有进行综合优化,才能获得鲁棒性好的过程窗口。最佳ufp工艺承诺以最有效的成本提供最小型化的封装,作为获得最大市场份额的最终竞争解决方案。
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引用次数: 1
Sequential stress combinations in product level reliability testing of industrial electronics 工业电子产品级可靠性试验中的顺序应力组合
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028377
J. Pippola, T. Marttila, L. Frisk
The reliability requirements for industrial electronics are high and in many cases electronics devices are used in harsh and varying conditions. To study the reliability of electronics in laboratory conditions accelerated life test methods are typically used. However, usually only one or two stresses are used in these studies even though electronics may encounter several sequential and simultaneous stresses during their lifetime. To achieve more accurate results or greater acceleration from the accelerated tests combinational testing methods are a good alternative to tests using only one stress. However, the knowledge about how different stresses affect each other is still highly unknown and this needs to be studied more. In this study the sequential combination effects of high temperature, high temperature high humidity, and temperature shock were studied using five different test sets. The studies showed that exposure to humid high temperature conditions had a greater effect on failure times in a temperature shock test than did dry elevated temperature. Moreover, the use of a temperature shock test prior to the high temperature high humidity test was found to accelerate certain failure modes. Consequently, such combinatory testing may be used as a highly accelerated test method for high reliability devices.
工业电子产品的可靠性要求很高,在许多情况下,电子设备在恶劣和变化的条件下使用。为了在实验室条件下研究电子产品的可靠性,通常使用加速寿命试验方法。然而,在这些研究中通常只使用一个或两个应力,即使电子设备在其使用寿命中可能会遇到几个顺序和同时的应力。为了从加速测试中获得更准确的结果或更大的加速度,组合测试方法是仅使用一个应力的测试的一个很好的替代方法。然而,关于不同的压力如何相互影响的知识仍然是高度未知的,这需要更多的研究。本文采用5套不同的试验装置,研究了高温、高温、高湿和温度冲击的顺序组合效应。研究表明,在温度冲击试验中,暴露在潮湿的高温条件下比暴露在干燥的高温条件下对故障时间的影响更大。此外,在高温高湿试验之前使用温度冲击试验被发现会加速某些失效模式。因此,这种组合试验可作为高可靠性器件的一种高加速试验方法。
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引用次数: 1
Thermo-compression bonding assembly process and reliability studies of Cu pillar bump on Cu/Low-K Chip Cu/Low-K芯片上铜柱凸点热压键合组装工艺及可靠性研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028369
K. Y. Au, F. Che, J. Aw, Jong-Kai Lin, B. Boehme, F. Kuechenmeister
The cracking of the brittle ultra low-k dielectrics on advanced node silicon devices is a great concern for assembly processes. It is attributed mainly to various combinations of the Chip-Package-Interaction (CPI) effect. This challenge is further amplified by the adoption of Cu pillars to replace conventional solder bump flip chip interconnects as device bump pitch shrinks and the demand for higher I/O counts per area soars. The high modulus Cu pillar transfers more thermo-mechanical stress to the low k layer and increases the risk of dielectric cracks. The adoption of Cu pillars as interconnects is inevitable because Cu pillars offer better electrical performance than solder, and better a capability of forming finer pitch joints than the solder bump reflow process [1, 2]. It is therefore important to understand the CPI challenges of Cu pillar on low k chip and device to overcome them. This paper reports our studies on the process development challenges when employing TCB-NCP processes on large size (18×18mm) low k chips which were processed by using GLOBALFOUNDRIES' 28nm technology node. Discussions include methods to minimize bond forces for large bonding areas and key underfill (NCP) BOM property selections to mitigate large die size and high bump counts induced by cold joints and low k stress are explored. Thermo-mechanical modeling and simulation to compare TCB-NCP vs. conventional C4 reflow + capillary underfill process on low k layer stress to assist in package BOM selection is also studied and reported.
在先进节点硅器件上,脆性超低k介电体的开裂是组装过程中非常关注的问题。这主要归因于Chip-Package-Interaction (CPI)效应的各种组合。随着器件凸点间距的缩小和对每面积更高I/O计数的需求的飙升,采用铜柱取代传统的凸点倒装芯片互连进一步放大了这一挑战。高模量铜柱向低k层传递了更多的热机械应力,增加了介电裂纹的风险。采用铜柱作为互连是不可避免的,因为铜柱具有比焊料更好的电气性能,并且比焊料凹凸回流工艺更能形成更细间距的接头[1,2]。因此,了解铜柱在低钾芯片上的CPI挑战并克服它们是很重要的。本文报告了我们在使用GLOBALFOUNDRIES的28nm技术节点加工的大尺寸(18×18mm)低k芯片上采用TCB-NCP工艺时所面临的工艺开发挑战。讨论包括最小化大键合区域的键合力和关键下填(NCP) BOM属性选择的方法,以减轻大的模具尺寸和由冷接头和低k应力引起的高碰撞计数。在低k层应力下,比较TCB-NCP与传统C4回流+毛细管下填充工艺的热力学建模和仿真,以帮助包装BOM选择也进行了研究和报道。
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引用次数: 12
期刊
2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)
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