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2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)最新文献

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Wafer level underfill study for high density ultra-fine pitch Cu-Cu bonding for 3D IC stacking 三维集成电路堆叠中高密度超细间距Cu-Cu键合的晶圆级下填研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028388
Ling Xie, S. Wickramanayaka, Booyang Jung, J. Li, Lim Jung-kai, Daniel Ismael
A wafer level under-fill (WLUF) process for ultra-fine Cu-Cu bonding is developed. Under-fill is applied as pre-applied under-fill then planarized the surface. The methodology used for surface planarization (bit grinding) and surface treatment (H2 plasma) are fond to be important in the surface preparation and activation. Underfill material needs to have sufficient hardness and adhesion to the wafer to survive during bit grinding process. Again, it must not get cured during plasma treatments before bonding is carried out. DOE is carried out with four different WLUF materials and one capillary under-fill material. Tests were carried out with a test vehicle having 5 um diameter and 10 um pitch. Results showed only one material could pass through all those requirements.
提出了一种晶圆级欠填充(WLUF)超细Cu-Cu键合工艺。下填充作为预应用的下填充,然后将表面平面化。用于表面磨平(钻头磨削)和表面处理(H2等离子体)的方法在表面制备和活化中很重要。下填料需要有足够的硬度和对晶圆的附着力,才能在钻头研磨过程中存活下来。同样,在进行粘合之前,它不能在等离子体处理期间被固化。用四种不同的WLUF材料和一种毛细管下填充材料进行了DOE试验。试验是用直径5微米、节距10微米的试验车辆进行的。结果表明,只有一种材料可以满足所有这些要求。
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引用次数: 13
High temperature die attach material on ENEPIG surface for high temperature (250DegC/500hour) and temperature cycle (−65 to +150DegC) applications 高温模具附着材料在ENEPIG表面高温(250℃/500小时)和温度循环(−65至+150℃)应用
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028376
L. Wai, Seit Wen Wei, Hwang How Yuan, Daniel Rhee Minwoo
There are five types of die attach materials with high melting point (>250°C) are evaluated in this study, these materials are high lead (Pb95.5Sn2Ag2.5) solder paste, Gold Tin (Au80Sn20) solder paste, pressure-less Silver (Ag) sintered paste, pressure type silver (P-Ag) sintered paste and Gold Germanium (Au88Ge12) perform solder. The reliability tests included high temperature storage (HTS) at 250°C/500hours with N2 purge and temperature cycling for 500cycles at -65°C to 150°C. Majorities of the test vehicles have good shear mode (Silicon die crack) after reliability tests. Only mix modes failure on the pressure-less Ag sintered die attach materials is observed at HTS 250°C, after 500hours with shear strength of 17.9Mpa. It is crucial to understand the conditions of the interfaces between these high temperature die attach materials to the devices and substrate after reliability tests. The cross sections samples are further studied on the interface between the die attach material and substrate (ENEPIG surface) with SEM and EDX analysis. It is interesting to found out that the pressure type Ag sintered has denser bulk materials compare to pressure type Ag sintered materials, and this provides an excellent heat transfer and low electrical resistance at the interface. After HTS for 500hours, the Sn rich phase of AuSn solder has the tendency to form at the ENEPIG site. High lead solder form a layer of Ni/Pb/Sn at the ENEPIG surface and where AuGe solder form a layer of Ni/Ge at the interface to ENEPIG substrate. A details study on the materials interface to the die and ENEPIG substrate surface are carried out; and out of these high temperature die attach materials, which will be more preferable in term of process ability and price is discussed.
本研究评估了5种高熔点(>250℃)的模具贴附材料,这些材料分别是高铅(Pb95.5Sn2Ag2.5)锡膏、金锡(Au80Sn20)锡膏、无压银(Ag)烧结膏、压型银(P-Ag)烧结膏和金锗(Au88Ge12)执行焊料。可靠性测试包括250°C/500小时的高温储存(HTS), N2吹扫和在-65°C至150°C的温度循环500次。绝大多数试验车辆经过可靠性试验均具有良好的剪切模态(硅模裂纹)。在250℃高温高温下,500h剪切强度为17.9Mpa,无压银烧结模贴材料仅观察到混合模式破坏。在可靠性测试后,了解这些高温封装材料与器件和衬底之间的接口条件至关重要。利用SEM和EDX分析进一步研究了模具附着材料与衬底界面(ENEPIG表面)的截面样品。有趣的是,与压力型Ag烧结材料相比,压力型Ag烧结材料具有更致密的块状材料,这提供了良好的传热和界面处的低电阻。高温加热500h后,AuSn焊料的富锡相有在ENEPIG部位形成的趋势。高铅焊料在ENEPIG表面形成Ni/Pb/Sn层,而AuGe焊料在ENEPIG衬底界面形成Ni/Ge层。对材料与模具的界面和ENEPIG基板表面进行了详细的研究;并从工艺性能和价格两方面对高温模具贴接材料进行了优选。
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引用次数: 1
Experimental study of water absorption of electronic components and internal local temperature and humidity into electronic enclosure 电子元件的吸水率与电子外壳内部局部温度和湿度的实验研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028356
Hélène Conseil, M. Jellesen, R. Ambat
Corrosion reliability of electronic products is a key factor for electronics industry, and today there is a large demand for performance reliability in large spans of temperature and humidity during day and night shifts. Corrosion failures are still seen due to the effects of temperature, humidity and corrosion accelerating species in the atmosphere, and moreover the surface region of printed circuit board assemblies is often contaminated by various contaminating species. In order to evaluate the level of humidity at which failures such as electrochemical migration start to appear on printed circuit board assemblies, a study of combined electric field, hygroscopic contamination and humidity on inter-digitated test comb patterns contaminated with sodium chloride and further exposed to increasing humidity has been performed. Results showed a significant increase in leakage current when only 70-75 % RH was reached, corresponding to the deliquescence relative humidity level of NaCl. The overall effect of climate (humidity and temperature) has been studied on the internal climate of typical electronic enclosures. The varied parameters included material used for casing, s ize of opening, differential humidity, and temperature effects simulating day/night, and the use of desiccants.
电子产品的腐蚀可靠性是影响电子工业发展的关键因素,在白班和夜班大范围的温度和湿度下,对电子产品的腐蚀可靠性有很大的要求。由于大气中的温度、湿度和腐蚀加速物质的影响,仍然可以看到腐蚀失效,而且印刷电路板组件的表面区域经常受到各种污染物质的污染。为了评估在湿度水平下印刷电路板组件上开始出现电化学迁移等故障,对被氯化钠污染并进一步暴露于增加湿度的数字化测试梳型进行了联合电场、吸湿性污染和湿度的研究。结果表明,当相对湿度达到70- 75%时,泄漏电流显著增加,对应于NaCl的潮解相对湿度水平。本文研究了气候(湿度和温度)对典型电子机箱内部气候的总体影响。不同的参数包括用于套管的材料,开口的大小,不同的湿度,模拟白天/夜晚的温度效应,以及干燥剂的使用。
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引用次数: 19
A fast passive-heating setup to investigate die-attach delamination in packaged devices 一种快速被动加热装置,用于研究封装器件中的贴装分层
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028310
Tiphaine Pélisset, M. Bernardoni, M. Nelhiebel, T. Antretter
Packaged devices reliability is a topic of primary importance in product development and, in particular, die-attach reliability investigations must be integrated into the development cycle. In order to assess die-attach robustness, temperature cycle tests are performed to evaluate its thermal fatigue. The most common way for thermal cycling is the use of climatic chambers as specified in the JEDEC standard Temperature Cycling (JESD22-A104). Temperature cycling to pass qualification typically lasts between one and three months. In this work, we demonstrate and validate an alternative passive cycling concept which is roughly 10 times faster. The Devices Under Tests (DUTs) are periodically analyzed via Scanning Acoustic Microscopy (SAM) in order to determine the amount of delamination induced by the thermal cycling. A model based on Finite Elements (FE) has been developed to understand the crack propagation in the die-attach, based on a linear-elastic fracture mechanics (LEFM) approach.
封装器件的可靠性是产品开发中最重要的一个主题,特别是封装器件的可靠性研究必须集成到开发周期中。为了评估模接的稳健性,进行了温度循环试验来评估其热疲劳。热循环最常用的方法是使用JEDEC标准温度循环(JESD22-A104)中规定的气候室。通过温度循环通常需要一到三个月的时间。在这项工作中,我们演示并验证了一种替代的被动循环概念,其速度大约快10倍。通过扫描声学显微镜(SAM)对被测器件(DUTs)进行周期性分析,以确定热循环引起的分层量。基于线弹性断裂力学(LEFM)方法,建立了一种基于有限元(FE)的模型来理解模具接头中的裂纹扩展。
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引用次数: 0
Vertical interconnections using through encapsulant via (TEV) and through silicon via (TSV) for high-frequency system-in-package integration 垂直互连使用通过封装孔(TEV)和通过硅孔(TSV),用于高频系统级封装集成
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028413
M. Wojnowski, K. Pressel, Gottfried Beer, A. Heinig, Michael Dittrich, J. Wolf
In this paper we investigate two vertical interconnect options for high-frequency system-in-package (SiP) integration: through encapsulant via (TEV) applied to the embedded wafer level ball grid array (eWLB) technology and through silicon via (TSV). We compare both solutions in terms of size and electrical performance. We use analytic expressions and electromagnetic simulations for our analysis and present measurement results of selected structures for verification. The results show that the choice of TEV and TSV depends on application and cost window.
在本文中,我们研究了高频系统级封装(SiP)集成的两种垂直互连选项:应用于嵌入式晶圆级球栅阵列(eWLB)技术的封装通孔(TEV)和硅通孔(TSV)。我们在尺寸和电气性能方面比较了两种解决方案。我们使用解析表达式和电磁模拟来进行分析,并给出了选定结构的测量结果进行验证。结果表明,TEV和TSV的选择取决于应用和成本窗口。
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引用次数: 7
Effect of temperature on tensile properties of high-melting point Bi system solder 温度对高熔点铋系焊料拉伸性能的影响
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028316
Haidong Zhang, I. Shohji, M. Shimoda, H. Watanabe
Tensile properties of three Bi-bearing lead-free solder were investigated and compared with that of Pb-rich Pb-2.5Ag-2.5Sn (mass%) solder. Tensile strength decreases with increasing temperature in all solder investigated. Although tensile strength of Bi-bearing solder is lower than that of Pb-2.5Ag-2.5Sn at 25°C, tensile strength of Bi-1.0Ag-0.3Sn-0.03Ge (mass%) and Bi-2.5Ag (mass%) are analogous to and higher than that of Pb-2.5Ag-2.5Sn respectively at a temperature of 125°C or more. 0.2% proof stress of Bi-2.5Ag increases with increasing temperature. Although the proof stress of Bi-2.5Ag is the lowest at 25°C, it was the highest at 125°C and 175°C among solder investigated. Elongation of Bi-bearing lead-free solder improves with increasing temperature. In particular, the improvement of elongation of Bi is significant and it improves up to approximately 60 % at a temperature of 125°C or more.
研究了三种含铋无铅焊料的拉伸性能,并与富铅Pb-2.5Ag-2.5Sn(质量%)焊料进行了比较。在所研究的所有焊料中,抗拉强度随温度升高而降低。虽然含bi钎料在25℃时的抗拉强度低于Pb-2.5Ag-2.5Sn,但在125℃及以上温度下,Bi-1.0Ag-0.3Sn-0.03Ge(质量%)和Bi-2.5Ag(质量%)的抗拉强度与Pb-2.5Ag-2.5Sn相似或高于Pb-2.5Ag-2.5Sn。Bi-2.5Ag的0.2%耐应力随温度升高而增大。虽然Bi-2.5Ag在25℃时的抗应力最低,但在125℃和175℃时的抗应力最高。含铋无铅焊料的延伸率随温度升高而提高。特别是,在125°C或更高的温度下,Bi的伸长率提高显著,提高了约60%。
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引用次数: 1
Plasma technology optimization for a robust flip chip package 等离子体技术优化稳健的倒装芯片封装
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028367
J. B. Bautista, Ma Jean Krisca N. Blas, Erma G. Gardose, Antonio R. Taloban, Vikas Gupta
As we move forward to newer silicon technologies requiring finer FC interconnect pitch and packaging solutions with tighter process margins, it is becoming imperative to maximize the benefits of plasma by implementing it prior to UF process. Firstly, key plasma machine parameters were identified, namely plasma processing time, radio frequency (RF) power, gas flow rate and base pressure. Contact angle measurements, UF flow variations and substrate discolorations were used as the output parameters to identify the plasma process window. As part of this study, design of experiments was conducted to identify the critical plasma process parameters for different die sizes. Furthermore, the effect of plasma machine configuration (one with direct vertical plasma mode and the other with horizontal plasma movement for enhanced cavity penetration) was also investigated. The results show that plasma machine configuration play a critical role in uniform spatial contact angle in UF cavity. This paper documents all the evaluations, simulation studies and verification runs done to optimize the plasma process to establish a stable plasma and underfill process, delivering robust FC packages.
随着我们向新的硅技术迈进,需要更精细的FC互连间距和封装解决方案以及更紧凑的工艺裕度,在UF工艺之前实现等离子体的最大效益变得势在必行。首先,确定了等离子体机的关键参数,即等离子体处理时间、射频功率、气体流量和基压。使用接触角测量、UF流量变化和衬底变色作为输出参数来识别等离子体过程窗口。作为本研究的一部分,进行了实验设计,以确定不同模具尺寸的关键等离子体工艺参数。此外,还研究了等离子体机配置(一个直接垂直等离子体模式和另一个水平等离子体运动模式)对增强腔穿透的影响。结果表明,等离子体机的结构对UF腔内空间接触角的均匀性起着关键作用。本文记录了为优化等离子体过程而进行的所有评估、模拟研究和验证运行,以建立稳定的等离子体和下填过程,提供健壮的FC包。
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引用次数: 0
Sequential stress combinations in product level reliability testing of industrial electronics 工业电子产品级可靠性试验中的顺序应力组合
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028377
J. Pippola, T. Marttila, L. Frisk
The reliability requirements for industrial electronics are high and in many cases electronics devices are used in harsh and varying conditions. To study the reliability of electronics in laboratory conditions accelerated life test methods are typically used. However, usually only one or two stresses are used in these studies even though electronics may encounter several sequential and simultaneous stresses during their lifetime. To achieve more accurate results or greater acceleration from the accelerated tests combinational testing methods are a good alternative to tests using only one stress. However, the knowledge about how different stresses affect each other is still highly unknown and this needs to be studied more. In this study the sequential combination effects of high temperature, high temperature high humidity, and temperature shock were studied using five different test sets. The studies showed that exposure to humid high temperature conditions had a greater effect on failure times in a temperature shock test than did dry elevated temperature. Moreover, the use of a temperature shock test prior to the high temperature high humidity test was found to accelerate certain failure modes. Consequently, such combinatory testing may be used as a highly accelerated test method for high reliability devices.
工业电子产品的可靠性要求很高,在许多情况下,电子设备在恶劣和变化的条件下使用。为了在实验室条件下研究电子产品的可靠性,通常使用加速寿命试验方法。然而,在这些研究中通常只使用一个或两个应力,即使电子设备在其使用寿命中可能会遇到几个顺序和同时的应力。为了从加速测试中获得更准确的结果或更大的加速度,组合测试方法是仅使用一个应力的测试的一个很好的替代方法。然而,关于不同的压力如何相互影响的知识仍然是高度未知的,这需要更多的研究。本文采用5套不同的试验装置,研究了高温、高温、高湿和温度冲击的顺序组合效应。研究表明,在温度冲击试验中,暴露在潮湿的高温条件下比暴露在干燥的高温条件下对故障时间的影响更大。此外,在高温高湿试验之前使用温度冲击试验被发现会加速某些失效模式。因此,这种组合试验可作为高可靠性器件的一种高加速试验方法。
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引用次数: 1
50-Gb/s silicon Mach-Zehnder interferometer-based optical modulator with only 1.3 Vpp driving voltages 50gb /s的基于Mach-Zehnder干涉仪的硅光调制器,驱动电压只有1.3 Vpp
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028387
X. Tu, T. Liow, Junfeng Song, Xianshu Luo, L. Jia, Q. Fang, Mingbin Yu, G. Lo
High-performance silicon optical modulator is demonstrated with up to 50-Gb/s data rate upon 1.3-Vpp. The measured extinction ratios of the optical eye-diagrams are respectively 5.97-dB, 5.13-dB and 4.44-dB at 28-Gb/s, 40-Gb/s and 50-Gb/s data rate.
高性能硅光调制器在1.3-Vpp下具有高达50 gb /s的数据速率。在28-Gb/s、40-Gb/s和50-Gb/s数据速率下,光学眼图的消光比分别为5.97 db、5.13 db和4.44 db。
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引用次数: 3
Tensile properties of low-melting point Sn-Bi-Sb solder 低熔点Sn-Bi-Sb焊料的拉伸性能
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028319
Yuto Kubota, I. Shohji, T. Tsuchida, Kiyotomo Nakamura
Tensile properties of Sn-57.5Bi-0.5Sb (mass%) lead-free solder were investigated with miniature size specimens and the results were compared to those of Sn-58Bi (mass%) and Sn-3.0Ag-0.5Cu (mass%). At 25°C, tensile properties of Sn-57.5Bi-0.5Sb are similar to those of Sn-58Bi. At high temperatures, tensile strength and 0.1% proof stress of Sn-57.5Bi-0.5Sb becomes to be lower than those of Sn-58Bi and Sn-3.0Ag-0.5Cu. On the other hand, elongation of Sn-57.5Bi-0.5Sb is somewhat superior to that of Sn-58Bi and much higher than that of Sn-3.0Ag-0.5Cu at high temperatures. Characteristic change of them can be explained by the refinement of micro structure due to the addition of a small amount of Sb to Sn-Bi solder.
采用微型试样研究了Sn-57.5Bi-0.5Sb(质量%)无铅钎料的拉伸性能,并与Sn-58Bi(质量%)和Sn-3.0Ag-0.5Cu(质量%)钎料的拉伸性能进行了比较。在25℃时,Sn-57.5Bi-0.5Sb的拉伸性能与Sn-58Bi相似。高温下,Sn-57.5Bi-0.5Sb的抗拉强度和0.1%抗应力低于Sn-58Bi和Sn-3.0Ag-0.5Cu。另一方面,Sn-57.5Bi-0.5Sb在高温下的伸长率略优于Sn-58Bi,远高于Sn-3.0Ag-0.5Cu。在锡铋焊料中加入少量的Sb,使锡铋焊料的显微组织发生了细化。
{"title":"Tensile properties of low-melting point Sn-Bi-Sb solder","authors":"Yuto Kubota, I. Shohji, T. Tsuchida, Kiyotomo Nakamura","doi":"10.1109/EPTC.2014.7028319","DOIUrl":"https://doi.org/10.1109/EPTC.2014.7028319","url":null,"abstract":"Tensile properties of Sn-57.5Bi-0.5Sb (mass%) lead-free solder were investigated with miniature size specimens and the results were compared to those of Sn-58Bi (mass%) and Sn-3.0Ag-0.5Cu (mass%). At 25°C, tensile properties of Sn-57.5Bi-0.5Sb are similar to those of Sn-58Bi. At high temperatures, tensile strength and 0.1% proof stress of Sn-57.5Bi-0.5Sb becomes to be lower than those of Sn-58Bi and Sn-3.0Ag-0.5Cu. On the other hand, elongation of Sn-57.5Bi-0.5Sb is somewhat superior to that of Sn-58Bi and much higher than that of Sn-3.0Ag-0.5Cu at high temperatures. Characteristic change of them can be explained by the refinement of micro structure due to the addition of a small amount of Sb to Sn-Bi solder.","PeriodicalId":115713,"journal":{"name":"2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129449655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
期刊
2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)
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