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2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)最新文献

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Study on electrical characteristics for active die embedding substrate 主动埋模衬底电学特性研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028286
Hyunho Kim
This paper presents study on electrical characteristics of active die embedded substrate that is embedded active devices inside substrate. Active die embedding substrate samples are fabricated using embedding process that consists of lamination process, laser drilling at the electrode Cu pads of active device, electroless Cu plating formation process such as photolithography, electrolytic Cu plating, and etching. Interconnection reliability between external pad of substrate and pad of embedding active devices is evaluated by cross-section and in-circuit test of active die embedding substrate using temperature cycle (T/C) test (-55/+125°C, 1000cycle).
本文研究了在衬底内嵌入有源器件的有源芯片嵌入式衬底的电学特性。采用层压工艺、激光在有源器件电极铜垫上打孔、光刻、电解镀铜、蚀刻等化学镀铜形成工艺制备有源埋模衬底样品。采用温度循环(T/C)测试(-55/+125℃,1000循环),通过主动模嵌入衬底的截面和在线测试,评估衬底外部衬垫与嵌入有源器件衬垫之间的互连可靠性。
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引用次数: 1
Wafer level underfill study for high density ultra-fine pitch Cu-Cu bonding for 3D IC stacking 三维集成电路堆叠中高密度超细间距Cu-Cu键合的晶圆级下填研究
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028388
Ling Xie, S. Wickramanayaka, Booyang Jung, J. Li, Lim Jung-kai, Daniel Ismael
A wafer level under-fill (WLUF) process for ultra-fine Cu-Cu bonding is developed. Under-fill is applied as pre-applied under-fill then planarized the surface. The methodology used for surface planarization (bit grinding) and surface treatment (H2 plasma) are fond to be important in the surface preparation and activation. Underfill material needs to have sufficient hardness and adhesion to the wafer to survive during bit grinding process. Again, it must not get cured during plasma treatments before bonding is carried out. DOE is carried out with four different WLUF materials and one capillary under-fill material. Tests were carried out with a test vehicle having 5 um diameter and 10 um pitch. Results showed only one material could pass through all those requirements.
提出了一种晶圆级欠填充(WLUF)超细Cu-Cu键合工艺。下填充作为预应用的下填充,然后将表面平面化。用于表面磨平(钻头磨削)和表面处理(H2等离子体)的方法在表面制备和活化中很重要。下填料需要有足够的硬度和对晶圆的附着力,才能在钻头研磨过程中存活下来。同样,在进行粘合之前,它不能在等离子体处理期间被固化。用四种不同的WLUF材料和一种毛细管下填充材料进行了DOE试验。试验是用直径5微米、节距10微米的试验车辆进行的。结果表明,只有一种材料可以满足所有这些要求。
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引用次数: 13
W2W permanent stacking for 3D system integration 用于3D系统集成的W2W永久堆叠
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028287
Lan Peng, Soon-Wook Kim, Mike Soules, M. Gabriel, M. Zoberbier, E. Sleeckx, H. Struyf, Andy Miller, E. Beyne
In this paper, we present advances in 300mm wafer-to-wafer (W2W) oxide-oxide bonding for high density 3D interconnect application. A CMOS compatible low temperature oxide-oxide bonding method has been developed which yields consistent void-free bonding. In addition, sub-micron W2W alignment accuracy has been demonstrated with standalone test materials using an integrated permanent bonding platform.
在本文中,我们介绍了用于高密度3D互连应用的300mm晶圆对晶圆(W2W)氧化物键合的进展。开发了一种与CMOS兼容的低温氧化键合方法,该方法可产生一致的无空洞键合。此外,亚微米级的W2W对准精度已经通过使用集成的永久键合平台的独立测试材料进行了验证。
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引用次数: 14
Thermal analyses of package-on-package (PoP) structure for tablet application 片剂中封装(PoP)结构的热分析
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028280
Miaowen Chen, Leo Huang, George Pan, N. Kao, D. Jiang
With the need for more functionality, smaller form factor and high-speed data transfer rate, the application processor of tablet PC need more power to serve the electrical function requirements. Therefore, the high thermal performance of package design to ensure tablet CPU operating under safe temperature environment becomes a primary challenge for heat management. The package-on-package (PoP) stacking assembly is constructed by individual fabricated and tested packages from the same or different supplier provided in a stacking structure through solder joints. It can reduce the placement and routing areas on board and reach limits in logic-to-memory bandwidth, becomes more and more popular in tablet devices. In this paper, we investigate the thermal characteristic of PoP package in tablet system, especially on the thermal interactions between top and bottom packages. Since tablet application is running, it is usually found that bottom package has higher die junction temperature with higher power and impacts top memory package to exceed safe operating temperature. The system level thermal model of PoP structure was set up by using computational fluid dynamics (CFD) modeling technique and considered with different package and die size, TIM (thermal interface material), compound and under-fill material effects in order to find out optimal BOM and dimension guidelines. The PoP structure consists of bottom Flip-Chip Chip Scale Package (FCCSP) and top Thin Fine pitch Ball Grid Array package (TFBGA) stacking through solder joints schematically. While top TFBGA package is mounted on bottom FCCSP package, controlling component warpage is also a very important issue. The excessive warpage could induce failure on stacking process. The bottom FCCSP package warpage characteristics are further to analysis for structure and material properties effects. Furthermore, employing suitable BOM and dimension leads FCCSP package assembly to achieve warpage less than 4 mil from reflow temperature to room temperature. For DOE simulation, we assume some input power of top and bottom packages to evaluate the die junction temperature variation and find PoP package with external metal heat sink can perform the best thermal performance, which has about 22.6 % temperature improvement in tablet system.
随着平板电脑对更多功能、更小尺寸和高速数据传输速率的需求,平板电脑的应用处理器需要更大的功率来满足电子功能的要求。因此,确保平板电脑CPU在安全的温度环境下工作的高散热性能的封装设计成为热管理的首要挑战。封装对封装(PoP)堆叠组件由来自同一或不同供应商的单独制造和测试的封装组成,通过焊点提供堆叠结构。它可以减少板上的放置和路由面积,并达到逻辑到内存带宽的限制,在平板设备中越来越受欢迎。本文研究了片剂体系中PoP封装的热特性,重点研究了上下封装之间的热相互作用。在平板电脑应用运行过程中,经常会发现底部封装的晶片结温和功耗较高,从而影响顶部内存封装超过安全工作温度。采用计算流体力学(CFD)建模技术,建立了PoP结构的系统级热模型,考虑了不同封装和模具尺寸、热界面材料、复合材料和填充材料的影响,找出了最优的BOM和尺寸准则。PoP结构由底部倒装芯片芯片规模封装(FCCSP)和顶部细间距球栅阵列封装(TFBGA)通过焊点堆叠构成。当顶部TFBGA封装安装在底部FCCSP封装上时,控制元件翘曲也是一个非常重要的问题。翘曲过大会导致堆垛过程失效。底部FCCSP封装翘曲特性进一步分析为结构和材料性能的影响。此外,采用合适的BOM和尺寸使FCCSP封装组装实现从回流温度到室温的翘曲小于4 mil。在DOE仿真中,我们假设了顶部和底部封装的一定输入功率来评估芯片结温变化,发现带有外部金属散热器的PoP封装的热性能最好,在片剂系统中温度提高了约22.6%。
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引用次数: 4
High temperature die attach material on ENEPIG surface for high temperature (250DegC/500hour) and temperature cycle (−65 to +150DegC) applications 高温模具附着材料在ENEPIG表面高温(250℃/500小时)和温度循环(−65至+150℃)应用
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028376
L. Wai, Seit Wen Wei, Hwang How Yuan, Daniel Rhee Minwoo
There are five types of die attach materials with high melting point (>250°C) are evaluated in this study, these materials are high lead (Pb95.5Sn2Ag2.5) solder paste, Gold Tin (Au80Sn20) solder paste, pressure-less Silver (Ag) sintered paste, pressure type silver (P-Ag) sintered paste and Gold Germanium (Au88Ge12) perform solder. The reliability tests included high temperature storage (HTS) at 250°C/500hours with N2 purge and temperature cycling for 500cycles at -65°C to 150°C. Majorities of the test vehicles have good shear mode (Silicon die crack) after reliability tests. Only mix modes failure on the pressure-less Ag sintered die attach materials is observed at HTS 250°C, after 500hours with shear strength of 17.9Mpa. It is crucial to understand the conditions of the interfaces between these high temperature die attach materials to the devices and substrate after reliability tests. The cross sections samples are further studied on the interface between the die attach material and substrate (ENEPIG surface) with SEM and EDX analysis. It is interesting to found out that the pressure type Ag sintered has denser bulk materials compare to pressure type Ag sintered materials, and this provides an excellent heat transfer and low electrical resistance at the interface. After HTS for 500hours, the Sn rich phase of AuSn solder has the tendency to form at the ENEPIG site. High lead solder form a layer of Ni/Pb/Sn at the ENEPIG surface and where AuGe solder form a layer of Ni/Ge at the interface to ENEPIG substrate. A details study on the materials interface to the die and ENEPIG substrate surface are carried out; and out of these high temperature die attach materials, which will be more preferable in term of process ability and price is discussed.
本研究评估了5种高熔点(>250℃)的模具贴附材料,这些材料分别是高铅(Pb95.5Sn2Ag2.5)锡膏、金锡(Au80Sn20)锡膏、无压银(Ag)烧结膏、压型银(P-Ag)烧结膏和金锗(Au88Ge12)执行焊料。可靠性测试包括250°C/500小时的高温储存(HTS), N2吹扫和在-65°C至150°C的温度循环500次。绝大多数试验车辆经过可靠性试验均具有良好的剪切模态(硅模裂纹)。在250℃高温高温下,500h剪切强度为17.9Mpa,无压银烧结模贴材料仅观察到混合模式破坏。在可靠性测试后,了解这些高温封装材料与器件和衬底之间的接口条件至关重要。利用SEM和EDX分析进一步研究了模具附着材料与衬底界面(ENEPIG表面)的截面样品。有趣的是,与压力型Ag烧结材料相比,压力型Ag烧结材料具有更致密的块状材料,这提供了良好的传热和界面处的低电阻。高温加热500h后,AuSn焊料的富锡相有在ENEPIG部位形成的趋势。高铅焊料在ENEPIG表面形成Ni/Pb/Sn层,而AuGe焊料在ENEPIG衬底界面形成Ni/Ge层。对材料与模具的界面和ENEPIG基板表面进行了详细的研究;并从工艺性能和价格两方面对高温模具贴接材料进行了优选。
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引用次数: 1
Effect of temperature on tensile properties of high-melting point Bi system solder 温度对高熔点铋系焊料拉伸性能的影响
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028316
Haidong Zhang, I. Shohji, M. Shimoda, H. Watanabe
Tensile properties of three Bi-bearing lead-free solder were investigated and compared with that of Pb-rich Pb-2.5Ag-2.5Sn (mass%) solder. Tensile strength decreases with increasing temperature in all solder investigated. Although tensile strength of Bi-bearing solder is lower than that of Pb-2.5Ag-2.5Sn at 25°C, tensile strength of Bi-1.0Ag-0.3Sn-0.03Ge (mass%) and Bi-2.5Ag (mass%) are analogous to and higher than that of Pb-2.5Ag-2.5Sn respectively at a temperature of 125°C or more. 0.2% proof stress of Bi-2.5Ag increases with increasing temperature. Although the proof stress of Bi-2.5Ag is the lowest at 25°C, it was the highest at 125°C and 175°C among solder investigated. Elongation of Bi-bearing lead-free solder improves with increasing temperature. In particular, the improvement of elongation of Bi is significant and it improves up to approximately 60 % at a temperature of 125°C or more.
研究了三种含铋无铅焊料的拉伸性能,并与富铅Pb-2.5Ag-2.5Sn(质量%)焊料进行了比较。在所研究的所有焊料中,抗拉强度随温度升高而降低。虽然含bi钎料在25℃时的抗拉强度低于Pb-2.5Ag-2.5Sn,但在125℃及以上温度下,Bi-1.0Ag-0.3Sn-0.03Ge(质量%)和Bi-2.5Ag(质量%)的抗拉强度与Pb-2.5Ag-2.5Sn相似或高于Pb-2.5Ag-2.5Sn。Bi-2.5Ag的0.2%耐应力随温度升高而增大。虽然Bi-2.5Ag在25℃时的抗应力最低,但在125℃和175℃时的抗应力最高。含铋无铅焊料的延伸率随温度升高而提高。特别是,在125°C或更高的温度下,Bi的伸长率提高显著,提高了约60%。
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引用次数: 1
Plasma technology optimization for a robust flip chip package 等离子体技术优化稳健的倒装芯片封装
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028367
J. B. Bautista, Ma Jean Krisca N. Blas, Erma G. Gardose, Antonio R. Taloban, Vikas Gupta
As we move forward to newer silicon technologies requiring finer FC interconnect pitch and packaging solutions with tighter process margins, it is becoming imperative to maximize the benefits of plasma by implementing it prior to UF process. Firstly, key plasma machine parameters were identified, namely plasma processing time, radio frequency (RF) power, gas flow rate and base pressure. Contact angle measurements, UF flow variations and substrate discolorations were used as the output parameters to identify the plasma process window. As part of this study, design of experiments was conducted to identify the critical plasma process parameters for different die sizes. Furthermore, the effect of plasma machine configuration (one with direct vertical plasma mode and the other with horizontal plasma movement for enhanced cavity penetration) was also investigated. The results show that plasma machine configuration play a critical role in uniform spatial contact angle in UF cavity. This paper documents all the evaluations, simulation studies and verification runs done to optimize the plasma process to establish a stable plasma and underfill process, delivering robust FC packages.
随着我们向新的硅技术迈进,需要更精细的FC互连间距和封装解决方案以及更紧凑的工艺裕度,在UF工艺之前实现等离子体的最大效益变得势在必行。首先,确定了等离子体机的关键参数,即等离子体处理时间、射频功率、气体流量和基压。使用接触角测量、UF流量变化和衬底变色作为输出参数来识别等离子体过程窗口。作为本研究的一部分,进行了实验设计,以确定不同模具尺寸的关键等离子体工艺参数。此外,还研究了等离子体机配置(一个直接垂直等离子体模式和另一个水平等离子体运动模式)对增强腔穿透的影响。结果表明,等离子体机的结构对UF腔内空间接触角的均匀性起着关键作用。本文记录了为优化等离子体过程而进行的所有评估、模拟研究和验证运行,以建立稳定的等离子体和下填过程,提供健壮的FC包。
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引用次数: 0
Tensile properties of low-melting point Sn-Bi-Sb solder 低熔点Sn-Bi-Sb焊料的拉伸性能
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028319
Yuto Kubota, I. Shohji, T. Tsuchida, Kiyotomo Nakamura
Tensile properties of Sn-57.5Bi-0.5Sb (mass%) lead-free solder were investigated with miniature size specimens and the results were compared to those of Sn-58Bi (mass%) and Sn-3.0Ag-0.5Cu (mass%). At 25°C, tensile properties of Sn-57.5Bi-0.5Sb are similar to those of Sn-58Bi. At high temperatures, tensile strength and 0.1% proof stress of Sn-57.5Bi-0.5Sb becomes to be lower than those of Sn-58Bi and Sn-3.0Ag-0.5Cu. On the other hand, elongation of Sn-57.5Bi-0.5Sb is somewhat superior to that of Sn-58Bi and much higher than that of Sn-3.0Ag-0.5Cu at high temperatures. Characteristic change of them can be explained by the refinement of micro structure due to the addition of a small amount of Sb to Sn-Bi solder.
采用微型试样研究了Sn-57.5Bi-0.5Sb(质量%)无铅钎料的拉伸性能,并与Sn-58Bi(质量%)和Sn-3.0Ag-0.5Cu(质量%)钎料的拉伸性能进行了比较。在25℃时,Sn-57.5Bi-0.5Sb的拉伸性能与Sn-58Bi相似。高温下,Sn-57.5Bi-0.5Sb的抗拉强度和0.1%抗应力低于Sn-58Bi和Sn-3.0Ag-0.5Cu。另一方面,Sn-57.5Bi-0.5Sb在高温下的伸长率略优于Sn-58Bi,远高于Sn-3.0Ag-0.5Cu。在锡铋焊料中加入少量的Sb,使锡铋焊料的显微组织发生了细化。
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引用次数: 4
Concurrent system level test (CSLT) methodology for complex system-on-chip 复杂片上系统的并发系统级测试(CSLT)方法
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028421
Dilip Kumar Reddy Tipparthi, Karthik Krishna Kumar
Technological advancements in semi-conductor manufacturing industries have helped packing billions of transistors on a single piece of silicon chip also known as system-on-chip (SoC). The SoCs have evolved to a stage where more discrete functions are being integrated to form a complex SoC chip. With these increasing functionalities, there is a growing need for an additional test platform besides ATE, which can ensure end user experience level testing. System level test (SLT) is one such test platform that ensures end user experience testing (e.g., non-deterministic) by executing multiple test cases on different operating systems under varying test conditions in a sequential manner. With increased functionality, there is a need for additional test coverage at SLT, leading to more test time due to the fact that SLT is being done in a sequential manner, hence impacting the overall test cost. This paper discusses the importance of SLT and introduces the idea of concurrent system level test (CSLT) (i.e., a way to identify mutually exclusive test cases and execute them in parallel). CSLT methodology helps in reducing the test time without compromising on test quality. Experimental results have shown 20 to 25% reduction in test time with this method.
半导体制造业的技术进步已经帮助将数十亿个晶体管封装在一块硅芯片上,也被称为片上系统(SoC)。SoC已经发展到一个阶段,更多的离散功能被集成到一个复杂的SoC芯片。随着这些功能的增加,除了ATE之外,还需要一个额外的测试平台,以确保最终用户体验级别的测试。系统级测试(SLT)就是这样一个测试平台,它通过在不同的测试条件下以顺序的方式在不同的操作系统上执行多个测试用例来确保最终用户体验测试(例如,非确定性)。随着功能的增加,需要在SLT上进行额外的测试覆盖,由于SLT是以顺序的方式完成的,这导致了更多的测试时间,从而影响了总体测试成本。本文讨论了SLT的重要性,并介绍了并发系统级测试(CSLT)的思想(即一种识别互斥测试用例并并行执行它们的方法)。CSLT方法有助于在不影响测试质量的情况下减少测试时间。实验结果表明,该方法可使测试时间缩短20 ~ 25%。
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引用次数: 7
Characterization of copper conductive ink for low temperature sintering processing on flexible polymer substrate 柔性聚合物基板低温烧结用铜导电油墨的表征
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028308
Jaewon Kim, Byunghoon Lee, J. Y. Lek, R. I. Made, B. Salam, C. Gan
Printed interconnects on flexible substrates using copper nanoparticles ink is attractive because of its lower material cost, lower electrical resistivity and higher electromigration resistance as compared to gold or silver-based ink. However, Cu nanoparticles oxidize easily during the sintering process, which has an adverse effect on its quality and reliability. Thus, it requires process modifications such as sintering in an inert environment to reduce the oxidation effects. In this paper, the properties of nano-sized Cu particles ink-jet printed conductive films that were sintered in N2 environment are investigated. The sheet resistance and microstructure of the Cu films were monitored as a function of temperature.
与金或银基油墨相比,使用铜纳米颗粒油墨在柔性基材上印刷互连具有吸引力,因为它具有较低的材料成本,较低的电阻率和较高的电迁移阻力。然而,铜纳米颗粒在烧结过程中容易氧化,影响了其质量和可靠性。因此,它需要工艺修改,如在惰性环境中烧结,以减少氧化作用。本文研究了在N2环境下烧结纳米铜颗粒喷墨印刷导电薄膜的性能。监测了Cu薄膜的薄膜电阻和微观结构随温度的变化。
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引用次数: 8
期刊
2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)
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