Pub Date : 2024-11-04DOI: 10.1109/LSENS.2024.3490983
Wei Xu;Wenlin Xiao;Ke Xiao
This letter presents the modeling and characterization of a pulse-excited micro thermal flow sensor based on electrochemical impedance sensing. The proposed transient model reveals that the sensor output, measured as the impedance slope under pulse excitation, is almost one order of magnitude stronger at the downstream electrodes, as compared to the upstream pair. Consequently, the micro-electromechanical systems (MEMS) flow sensor is designed with an 8-μm-thick flexible structure and a 1.4 mm distance between the microheater and downstream electrodes. Testing results show that the fabricated impedance-type micro flow sensor achieves a maximum sensitivity of 8.9 (mΩ/s)/(μm/s) for the 1X PBS flow, while consuming less than 15.8 mW of heating power with a fluid flow up to 750 μm/s. Furthermore, the proposed theoretical model closely aligns with experimental results, confirming its potential as a valuable tool for optimizing impedance-type flow sensors that utilize pulse heating strategies to detect extremely low fluid flow in the future.
{"title":"Modeling and Characterizing an Impedance-Type Micro Flow Sensor With Pulse Excitation","authors":"Wei Xu;Wenlin Xiao;Ke Xiao","doi":"10.1109/LSENS.2024.3490983","DOIUrl":"https://doi.org/10.1109/LSENS.2024.3490983","url":null,"abstract":"This letter presents the modeling and characterization of a pulse-excited micro thermal flow sensor based on electrochemical impedance sensing. The proposed transient model reveals that the sensor output, measured as the impedance slope under pulse excitation, is almost one order of magnitude stronger at the downstream electrodes, as compared to the upstream pair. Consequently, the micro-electromechanical systems (MEMS) flow sensor is designed with an 8-μm-thick flexible structure and a 1.4 mm distance between the microheater and downstream electrodes. Testing results show that the fabricated impedance-type micro flow sensor achieves a maximum sensitivity of 8.9 (mΩ/s)/(μm/s) for the 1X PBS flow, while consuming less than 15.8 mW of heating power with a fluid flow up to 750 μm/s. Furthermore, the proposed theoretical model closely aligns with experimental results, confirming its potential as a valuable tool for optimizing impedance-type flow sensors that utilize pulse heating strategies to detect extremely low fluid flow in the future.","PeriodicalId":13014,"journal":{"name":"IEEE Sensors Letters","volume":"8 12","pages":"1-4"},"PeriodicalIF":2.2,"publicationDate":"2024-11-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142672107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-11-04DOI: 10.1109/LSENS.2024.3490837
Saraswati Kulkarni;Ruma Ghosh
Analysis and understanding of the mixture of volatile organic compound (VOC) sensing are crucial for the development of sensors in conditions closer to real-life applications, such as health care, air quality monitoring, industrial safety, etc. In this study, we investigated the response dynamics of CuO-nanomaterial-based resistive sensors to 25–75 ppm of individual, binary, ternary, and quaternary mixtures of five VOCs—acetone, acetonitrile, isopropanol, methanol, and toluene at 300 °C. The CuO exhibited responses equal to the sum of its steady-state responses to individual VOCs for all the possible combinations of binary and ternary mixtures with 25 ppm of the constituent gases. A systematic study based on the recovery cycle was conducted by retracting the VOCs sequentially from the proximity of CuO surface after recording response cycle. Interestingly, the recovery time constant τ rec