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1996 Proceedings 46th Electronic Components and Technology Conference最新文献

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Investigation of stress singularity fields and stress intensity factors for interfacial delamination (an application of thermosetting polyimide for a tapeless lead-on-chip (LOC) package) 界面分层的应力奇异场及应力强度因子研究(热固性聚酰亚胺在无胶带片上铅封装中的应用)
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517421
M. Amagai
The reliability of semiconductor devices and packages used in microelectronics is compromised by interfacial delamination and homogenous cracking that is initiated at the edge of the interface between dissimilar materials during processing and stress tests. These failures have certain characteristics in that they begin at the stress singularity point. The knowledge of interfacial fracture mechanics is very important to the design for reliability of these devices and packages. In this paper, a model of stress singularity is proposed and applications of the model for the characterization of interfaces are subsequently presented. Examples are integrated circuit (IC) device interfaces and plastic package interfaces. These interfaces were mainly characterized with the order of stress singularity. Furthermore, this study demonstrates applications of the stress intensity factors for the stress singularity fields. The stress intensity factors were obtained from a r-/spl theta/ coordinate system, the order of stress singularity, the Dunders' parameters, and the extrapolation as a function of distance. The relationship between the stress intensity factors and the interfacial fracture toughness strength as a function of mode mixity was also investigated for delamination at the edge of the interface. The proposed numerical scheme was verified by the experiments on the lead-on-chip (LOC) package delamination in a soldering process.
在加工和应力测试过程中,不同材料之间的界面边缘会产生界面分层和均匀裂纹,从而影响微电子中使用的半导体器件和封装的可靠性。这些破坏具有从应力奇点开始的特点。界面断裂力学知识对这些器件和封装的可靠性设计是非常重要的。本文提出了应力奇异性模型,并介绍了该模型在界面表征中的应用。例如集成电路(IC)器件接口和塑料封装接口。这些界面主要以应力奇异顺序为特征。此外,本文还研究了应力强度因子在应力奇异场中的应用。应力强度因子由r-/spl θ /坐标系、应力奇点阶数、Dunders参数以及作为距离函数的外推得到。研究了界面边缘分层时应力强度因子与界面断裂韧性强度随模式混合度的关系。通过对片上铅(lead-on-chip, LOC)封装在焊接过程中的分层实验验证了所提出的数值方案。
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引用次数: 2
Thermal and viscoelastic characterization of transfer-molded epoxy encapsulant during simulated post-mold cure 模拟模后固化过程中转移模压环氧密封剂的热和粘弹性特性
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.550809
S. Chew
This paper describes the characterization of epoxy mold compound by subjecting transfer-molded encapsulants to a temperature programme simulating post-mold cure using thermomechanical analysis and dynamic mechanical analysis. The real-time change in dimension and viscoelastic properties of the epoxy encapsulant during an experimental post-mold cure process is measured. Results show evidence of residual cure shrinkage and flexural storage modulus growth occuring during experimental post-mold cure; sharp initially but stabilize subsequently. A minimum post-mold cure duration is recommended in order to ensure optimum dimensional and mechanical stability of the epoxy encapsulant.
本文描述了通过使用热力学分析和动态力学分析模拟模后固化的温度程序对传递模压密封剂进行环氧模复合材料的表征。在实验模后固化过程中,测量了环氧密封剂的尺寸和粘弹性的实时变化。结果表明,在实验模后固化过程中,残余固化收缩和弯曲储存模量增加;一开始剧烈,但随后稳定下来。建议最小模后固化时间,以确保环氧密封剂的最佳尺寸和机械稳定性。
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引用次数: 8
Recipe synthesis for PECVD SiO/sub 2/ films using neural networks and genetic algorithms 基于神经网络和遗传算法的PECVD SiO/ sub2 /薄膜配方合成
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.550508
Seung-Soo Han, G. May
Silicon dioxide films deposited by plasma-enhanced chemical vapor deposition PECVD) are useful as interlayer dielectrics for metal-insulator structures such as multichip modules. Due to the complex nature of particle dynamics within a plasma, it is difficult to determine the exact nature of the relationship between PECVD process conditions and their effects on critical output parameters. In this study, neural network process models are used in conjunction with genetic algorithms to determine the necessary process recipes to achieve novel film qualities. To characterize the PECVD process, SiO/sub 2/ films deposited in a plasma-Therm 700 series PECVD system under varying conditions are analyzed using a central composite experimental design. Parameters varied include substrate temperature, pressure, RF power, silane flow and nitrous oxide flow. Data from this experiment is used to train back-propagation neural networks to model deposition rate, refractive index, permittivity, film stress, wet etch rate, uniformity, silanol concentration, and water concentration. A recipe synthesis procedure is then performed using genetic algorithms, Powell's algorithm, the simplex method, and hybrid combinations thereof to generate the necessary deposition conditions to obtain novel film qualities, including zero residual stress, 0% non-uniformity, 0% impurities, and low permittivity. Recipes predicted by these techniques are verified by experiment, and the performance of each synthesis method is compared.
通过等离子体增强化学气相沉积(PECVD)沉积的二氧化硅薄膜可用于多芯片模块等金属绝缘体结构的层间介电体。由于等离子体内粒子动力学的复杂性,很难确定PECVD工艺条件及其对关键输出参数的影响之间关系的确切性质。在这项研究中,神经网络过程模型与遗传算法相结合,以确定必要的工艺配方,以实现新的薄膜质量。为了表征PECVD过程,采用中心复合实验设计分析了不同条件下等离子体- therm 700系列PECVD系统中沉积的SiO/ sub2 /薄膜。参数变化包括衬底温度、压力、射频功率、硅烷流量和氧化亚氮流量。该实验的数据用于训练反向传播神经网络来模拟沉积速率、折射率、介电常数、薄膜应力、湿蚀速率、均匀性、硅烷醇浓度和水浓度。然后使用遗传算法、鲍威尔算法、单纯形法及其混合组合进行配方合成过程,以产生必要的沉积条件,以获得新的薄膜质量,包括零残余应力、0%不均匀性、0%杂质和低介电常数。通过实验验证了这些技术预测的配方,并对各种合成方法的性能进行了比较。
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引用次数: 8
The packaging of large spot-size optoelectronic devices 大点尺寸光电器件的封装
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517453
J. Collins, I. Lealman, P.J. Fiddyment, A. Thurlow, C. Ford, D. Rogers, C.A. Jones
Lasers have been passively aligned to cleaved singlemode optical fibres on a silicon bench with coupling efficiencies of over 50%. This is the highest known reported result. Using the relaxed tolerances obtained from large spotsize lasers a very simple high performance laser package has also be produced. The combination of semiconductor device developments, silicon micromachining and novel packaging techniques has realised complicated optoelectronic modules which will give the technical performance and economic requirements needed for future optical telecommunication networks.
在硅台上,激光被动对准劈裂单模光纤,耦合效率超过50%。这是已知的最高报告结果。利用从大光斑尺寸激光器获得的放宽公差,还生产了一种非常简单的高性能激光封装。半导体器件的发展、硅微加工和新型封装技术的结合已经实现了复杂的光电模块,这将为未来的光通信网络提供所需的技术性能和经济要求。
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引用次数: 6
The evaluation of fast-flow, fast-cure underfills for flip chip on organic substrates 有机基板上倒装芯片的快流、快固化底填料的评价
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517441
K. Wun, G. Margaritis
Seven underfill formulations have been evaluated for fast-flow fast-cure and low-clearance flow application for flip chip assembly. The effects of different ingredients are discussed. At least one formulation is found to have superior flow rate under a 30-micron die than any known commercial underfill available so far.
针对倒装芯片组装中快速流动、快速固化和低间隙流动的应用,对七种底填料配方进行了评估。讨论了不同成分的作用。至少有一种配方被发现具有优越的流速下30微米模具比任何已知的商业下填土可用到目前为止。
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引用次数: 25
Advanced molding technique for optical transceivers 先进的光收发器成型技术
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.550876
S. Robinson, F. Anigbo, G. Shevchuk
With the growing use of fiber optics in Local Area Networks (LANs), efforts to cost reduce the optical components has intensified. In general, optoelectronic components for Fiber Distributed Data Interface (FDDI) and Fiber Channel LANs have been LED-based Optical Data Links (ODLs). Due to the bi-directional nature of most links, the trend has been towards the integration of simplex optical transmitters and receivers into Optical Transceivers. Further cost reductions through the use of automated assembly processes such as two step overmolding have also been reported recently. In this paper, we propose a molding technique designed to further cost reduce optoelectronic devices. The technique involves the use of a one-step overmolding process to encapsulate the electronics and injection molded connector receptacle. The injection molded receptacle is designed to provide support and alignment for the Optical Sub-Assemblies (OSAs) prior to overmolding. With the electronics on its substrate (Leadframe/HIC), the optics on the receptacle, and the link between the optics and the electronics complete (wirebonded), the substrate and the receptacle are overmolded in one step. This technique eliminates the need for the first mold process inherent in the two stage overmolding technique. The one step method also removes the need for precision mold features required for optical port alignment and subsequent final assembly (necessary in the two step method). This method, however, combines five active components into one integrated unit-requiring the use of "Known Good Die" to ensure a trouble free device.
随着光纤在局域网(LANs)中的应用越来越广泛,降低光学元件成本的努力也越来越多。一般来说,光纤分布式数据接口(FDDI)和光纤通道局域网的光电元件都是基于led的光数据链路(odl)。由于大多数链路的双向性质,趋势是将单工光发射器和接收器集成到光收发器中。通过使用自动化装配工艺,如两步覆盖成型,进一步降低成本最近也有报道。在本文中,我们提出了一种成型技术,旨在进一步降低光电器件的成本。该技术涉及使用一步覆盖成型工艺封装电子和注塑连接器插座。注塑容器设计用于在过度成型之前为光学子组件(osa)提供支持和校准。随着基板上的电子元件(引线框架/HIC),插座上的光学元件,以及光学元件和电子元件之间的连接完成(线键),基板和插座在一个步骤中被覆盖成型。这种技术消除了两阶段复模技术中固有的第一个模具过程的需要。一步法还消除了光学端口对准和随后的最终组装所需的精密模具特征的需要(在两步法中是必要的)。然而,这种方法将五个有效组件组合成一个集成单元,需要使用“已知的好模具”来确保设备无故障。
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引用次数: 0
A straddle mount connector system attach process 一种跨座式安装连接器系统附加过程
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517431
R. Schluter, K.J. Pearsall, R. W. Burns
Over the past few years card connectors have progressed significantly from the 0.100" pitch gold tabs of the first PC's. New developments in card technology are driving higher connector pin count and denser, more unique connector packaging. Since more and more circuits must go from card to card, the card edge connectors have migrated to surface mount and are now straddling the card in order to achieve this higher number of required interconnections. A straddle mount connector system is evaluated in an electronic card assembly test facility for both material and process impacts. Emphasis is placed on the connector and associated process materials used. The contact integrity after successful solder attach has been evaluated. While in-depth details of the attach and subsequent repair process have been reported previously, the critical process parameters will be highlighted in this paper.
在过去的几年里,卡连接器已经从第一代PC的0.100英寸的黄金标签取得了重大进展。卡技术的新发展正在推动更高的连接器引脚数和更密集、更独特的连接器封装。由于越来越多的电路必须从一张卡到另一张卡,卡边缘连接器已经迁移到表面安装,现在跨越卡以实现所需的更高数量的互连。在电子卡组装测试设施中评估了跨座式连接器系统的材料和工艺影响。重点放在连接器和使用的相关工艺材料上。对焊料成功附着后的触点完整性进行了评估。虽然之前已经报道了连接和后续修复过程的深入细节,但本文将重点介绍关键工艺参数。
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引用次数: 0
Effects of mold compound properties on lead-on-chip (LOC) package reliability during IR reflow IR回流过程中模具复合性能对片上铅封装可靠性的影响
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517374
Ji-Chen Yang, L. Weng, Goh Jing Sua, Yew Chee Kiang
This paper reports the investigation into Lead-On-Chip (LOG) package cracking resistance, the effects of mold compound properties, and the package cracking predication. The vehicle for such investigation was a DRAM LOC package and four mold compounds under two IR reflow processes (220/spl deg/C and 260/spl deg/C). As the reliability of the LOC package is strongly dependent on the mechanical properties of the mold compound, great efforts were put into its characterizations. The mold compound characterization was conducted using an Instron Universal Tester with a temperature chamber which regulated the testing temperature from -60 to 260/spl deg/C. These characterizations included temperature dependence, loading speed effects, moisture effects, creep behaviour, etc. The linear elastic fracture mechanics method was used to predict package cracking resistance. This included obtaining mold compound fracture toughness through 3-point bending test at the IR reflow temperatures, finite element analysis to obtain package stress intensity factors at these conditions, and correlate with the package reliability test results.
本文研究了片上铅(LOG)封装的抗裂性、模具复合性能的影响以及封装的开裂预测。这种研究的载体是一个DRAM LOC封装和四种模具化合物,在两种红外回流过程(220/spl℃和260/spl℃)下。由于LOC封装的可靠性在很大程度上取决于模具复合材料的力学性能,因此对其特性进行了大量的研究。模具复合材料的表征使用Instron通用测试仪进行,该测试仪带有一个温度室,可调节测试温度从-60到260/spl℃。这些特性包括温度依赖性、加载速度效应、水分效应、蠕变行为等。采用线弹性断裂力学方法预测包装的抗裂性。这包括在红外回流温度下通过三点弯曲测试获得模具复合断裂韧性,通过有限元分析获得这些条件下的封装应力强度因子,并与封装可靠性测试结果相关联。
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引用次数: 11
Development of molded fine-pitch ball grid array (FPBGA) using through-hole bonding process 采用通孔键合工艺的成型细间距球栅阵列(FPBGA)的研制
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517465
S. Matsuda, K. Kata, H. Nakajima, E. Hagimoto
A molded fine-pitch ball grid array (FPBGA) structure, consisting of the fabricated chip, carrier tape, molded resin, and solder bumps, has many advantages over conventional structures for chip-scale packages. The assembly process of FPBGA consists of through-hole bonding, lamination, molding, solder bump formation, and outline cutting. The bonding process, which is called through-hole bonding, does not have lead bending or wire or lead crossing and allows a finer chip pad pitch to be used. However, since it is difficult to evaluate the bonding strength of each part, unlike wire bonding or TAB inner lead bonding, we developed several methods for evaluating the through-hole bonding. In the fabrication of molded FPBGA, the back side of the chip is molded by resin, which improves the robustness of the package. In this process, it is important to keep coplanarity of the package surface. We are currently testing the reliability of the molded FPBGA and results are good.
一种模压细间距球栅阵列(FPBGA)结构,由预制芯片、载流子带、模压树脂和焊点组成,与传统的芯片级封装结构相比,具有许多优点。FPBGA的组装过程包括通孔键合、层压、成型、凸点形成和轮廓切割。这种键合过程被称为通孔键合,没有引线弯曲或导线或引线交叉,并且允许使用更细的芯片垫间距。然而,由于很难评估每个部分的结合强度,不像电线粘合或TAB内引线粘合,我们开发了几种方法来评估通孔粘合。在FPBGA模制中,芯片背面采用树脂模制,提高了封装的稳健性。在这个过程中,保持封装表面的共面性是很重要的。我们目前正在测试成型FPBGA的可靠性,结果很好。
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引用次数: 1
Measurement and simulation of simultaneous switching noise in the multi-reference plane package 多参考平面封装中同步开关噪声的测量与仿真
Pub Date : 1996-05-28 DOI: 10.1109/ECTC.1996.517456
S. Rosser, M. K. Kerr, C. S. Chang, J. Fang, Zhaoqing Chen, Yuzhe Chen
A simplified laboratory experiment representing simultaneously switching circuits in a multi-reference plane package is described. Experimental data is compared to theoretical calculations and to simulated data from three modeling techniques of progressive complexity, including lumped element, hybrid lumped element/transmission line, and full wave solutions. The merits and limitations of each technique are presented.
描述了在多参考平面封装中同时开关电路的简化实验室实验。实验数据与理论计算和模拟数据进行了比较,模拟数据来自三种渐进式复杂建模技术,包括集总元、混合集总元/传输线和全波解。介绍了每种技术的优点和局限性。
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引用次数: 13
期刊
1996 Proceedings 46th Electronic Components and Technology Conference
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